知搜-全球专利检索

  1. 登录
  2. 注册

搜索结果

24 条记录 (耗时 0.02 秒)

    Illumination system for microlithography
    1.
    发明授权
    Illumination system for microlithography 有权
    微光刻照明系统

    公开(公告)号：US08873023B2

    公开(公告)日：2014-10-28

    申请号：US13186068

    申请日：2011-07-19

    申请人： Axel Scholz ,  Frank Schlesener ,  Nils Haverkamp ,  Vladimir Davydenko ,  Michael Gerhard ,  Gerhard-Wilhelm Ziegler ,  Mirco Kern ,  Thomas Bischoff ,  Thomas Stammler ,  Stephan Kellner ,  Manfred Maul ,  Daniel Walldorf ,  Igor Hurevich ,  Markus Deguenther

    发明人： Axel Scholz ,  Frank Schlesener ,  Nils Haverkamp ,  Vladimir Davydenko ,  Michael Gerhard ,  Gerhard-Wilhelm Ziegler ,  Mirco Kern ,  Thomas Bischoff ,  Thomas Stammler ,  Stephan Kellner ,  Manfred Maul ,  Daniel Walldorf ,  Igor Hurevich ,  Markus Deguenther

    IPC分类号： G03B27/54 ,  G03B27/42 ,  G03F7/20

    CPC分类号： G03F7/70191 ,  G02B3/0043 ,  G03F7/70058 ,  G03F7/70075 ,  G03F7/70083

    摘要： An illumination system for microlithography serves to illuminate an illumination field with illumination light of a primary light source. A first raster arrangement has bundle-forming first raster elements which are arranged in a first plane of the illumination system or adjacent to the plane. The first raster arrangement serves to generate a raster arrangement of secondary light sources. A transmission optics serves for superimposed transmission of the illumination light of the secondary light sources into the illumination field. The transmission optics has a second raster arrangement with bundle-forming second raster elements. In each case one of the raster elements of the first raster arrangement is allocated to one of the raster elements of the second raster arrangement for guiding a partial bundle of an entire bundle of illumination light. The first raster arrangement for example has at least two types (I, II, III) of the first raster elements which have different bundle-influencing effects. The raster elements of the two raster arrangements are arranged relative to one another in such a way that to each raster element type (I to III) is allocated at least one individual distance (ΔI, ΔII, ΔIII) between the first raster element of this type (I to III) and the allocated second raster element of the second raster arrangement. As a result, an illumination system is obtained which allows particular illumination parameters to be influenced in such a way that undesirable influences on other illumination parameters are avoided to the greatest extent possible.

    摘要翻译： 用于微光刻的照明系统用于利用一次光源的照明光照射照明场。 第一光栅布置具有束形成的第一光栅元件，其布置在照明系统的第一平面中或与该平面相邻。 第一光栅布置用于产生二次光源的光栅布置。 传输光学器件用于将次级光源的照明光的叠加传输到照明场中。 传输光学器件具有第二光栅装置，其具有束形成第二光栅元件。 在每种情况下，第一光栅装置的一个光栅元件被分配给第二光栅布置的光栅元件之一，用于引导整束照明光的部分束。 例如，第一光栅布置具有至少两种具有不同束影响效果的第一光栅元件（I，II，III）。 两个光栅装置的光栅元件相对于彼此布置成使得每个光栅元素类型（I至III）被分配至少一个单独距离（＆Dgr; I，＆Dgr; II，＆Dgr; III） 这种类型的第一光栅元素（I至III）和第二光栅布置的分配的第二光栅元素。 结果，获得允许特定照明参数受到影响的照明系统，使得最大程度地避免对其他照明参数的不期望的影响。

    TEXTILE PART, COMPOSITE MATERIAL ELEMENT WITH TEXTILE PART, AND PRODUCTION METHOD FOR THE SAME
    3.
    发明申请
    TEXTILE PART, COMPOSITE MATERIAL ELEMENT WITH TEXTILE PART, AND PRODUCTION METHOD FOR THE SAME 审中-公开
    纺织部件，纺织部件的复合材料元件及其制造方法

    公开(公告)号：US20150167208A1

    公开(公告)日：2015-06-18

    申请号：US14400477

    申请日：2013-04-18

    申请人： Thomas Bischoff

    发明人： Thomas Bischoff

    IPC分类号： D03D13/00 ,  D03D15/00 ,  B29C45/00 ,  D03D19/00

    CPC分类号： D03D13/006 ,  B29B11/16 ,  B29C45/0005 ,  B29C70/22 ,  B29C70/46 ,  D03D15/00 ,  D03D15/0027 ,  D03D15/0094 ,  D03D19/00 ,  D10B2505/02 ,  Y10T442/20 ,  Y10T442/3179

    摘要： A textile part is configured for producing a composite-material element (11) or a composite-material body (12). The textile part (10) has a reinforcing system (15) including reinforcing warp threads (16) and reinforcing weft threads (17), and a binding system (25) with binding warp threads (27) and binding weft threads (26). The reinforcing system (15) has at least one first portion (20), into which the reinforcing threads (16, 17) are interwoven with one another directly for binding to facilitate withstanding high mechanical. The reinforcing system (15) also has at least one second portion (21), in which the reinforcing threads (16, 17) form binding-free crossover locations (22) preferably laid on one another in a drawn-out state to constitute a laid structure surrounded by the binding threads (26, 27). The laid structure of the reinforcing system (15), ensures particularly good draping and deformation capability at this location of the composite material.

    摘要翻译： 织物部件构造成用于制造复合材料元件（11）或复合材料体（12）。 纺织品部分（10）具有包括加强经纱（16）和加强纬纱（17）的加强系统（15）和具有装订经线（27）和装订纬纱（26）的捆扎系统（25）。 加强系统（15）具有至少一个第一部分（20），加强螺纹（16,17）彼此直接交织在一起，用于结合以便于耐受高机械性能。 加强系统（15）还具有至少一个第二部分（21），其中加强螺纹（16,17）形成无捆绑交叉位置（22），优选地在拉出状态下彼此铺设以形成 被结合线（26,27）包围的铺设结构。 加固系统（15）的铺设结构确保了复合材料在该位置的特别好的悬垂和变形能力。

    Fabric for use in composite materials and method for producing said fabric and a composite material body
    6.
    发明授权
    Fabric for use in composite materials and method for producing said fabric and a composite material body 有权

    公开(公告)号：US10161067B2

    公开(公告)日：2018-12-25

    申请号：US14381166

    申请日：2012-03-01

    申请人： Thomas Bischoff ,  Melike Afsar

    发明人： Thomas Bischoff ,  Melike Afsar

    IPC分类号： D03D13/00 ,  D03D1/00 ,  D04H3/04 ,  D03D15/00 ,  D03D19/00 ,  D04H3/002 ,  D03D25/00 ,  D06C7/00

    摘要： A fabric (10) for use in composite materials having a reinforcing system (11) made of reinforcing warp threads (13) and reinforcing weft threads (14), which are placed on top of one other in two different reinforcing layers (16), (17). A binding system (12) of binding warp threads (20) and binding weft threads (21) is formed from a binding yarn (30) with a lower yarn count than the reinforcing yarn (15). The reinforcing system (11) is enclosed between the binding warp threads (20) on the one side and the binding weft threads (21) on the other side, and thus, held in place at binding points (22). At each binding point (22), a binding warp thread (20) is guided and held between a stationary warp thread (25) and a regular warp thread (24) of a warp thread pair (23) of binding warp threads (20). Between two adjacent binding points of a warp thread pair (23), the stationary warp thread (25) and the regular warp thread (24) have intersecting points (26).

    FABRIC FOR USE IN COMPOSITE MATERIALS AND METHOD FOR PRODUCING SAID FABRIC AND A COMPOSITE MATERIAL BODY
    7.
    发明申请
    FABRIC FOR USE IN COMPOSITE MATERIALS AND METHOD FOR PRODUCING SAID FABRIC AND A COMPOSITE MATERIAL BODY 审中-公开
    用于复合材料的织物和用于生产织物和复合材料体的方法

    公开(公告)号：US20150126089A1

    公开(公告)日：2015-05-07

    申请号：US14381166

    申请日：2012-03-01

    申请人： Thomas Bischoff ,  Melike Afsar

    发明人： Thomas Bischoff ,  Melike Afsar

    IPC分类号： D03D1/00 ,  D03D25/00 ,  D06C7/00 ,  D03D13/00

    CPC分类号： D03D1/00 ,  D03D13/00 ,  D03D13/006 ,  D03D15/0088 ,  D03D15/0094 ,  D03D19/00 ,  D03D25/005 ,  D04H3/002 ,  D04H3/04 ,  D06C7/00 ,  D10B2403/02411 ,  D10B2403/02412 ,  D10B2505/02 ,  Y10T442/3179

    摘要： A fabric (10) for use in composite materials having a reinforcing system (11) made of reinforcing warp threads (13) and reinforcing weft threads (14), which are placed on top of one other in two different reinforcing layers (16), (17). A binding system (12) of binding warp threads (20) and binding weft threads (21) is formed from a binding yarn (30) with a lower yarn count than the reinforcing yarn (15). The reinforcing system (11) is enclosed between the binding warp threads (20) on the one side and the binding weft threads (21) on the other side, and thus, held in place at binding points (22). At each binding point (22), a binding warp thread (20) is guided and held between a stationary warp thread (25) and a regular warp thread (24) of a warp thread pair (23) of binding warp threads (20). Between two adjacent binding points of a warp thread pair (23), the stationary warp thread (25) and the regular warp thread (24) have intersecting points (26).

    摘要翻译： 一种用于复合材料的织物（10），其具有由加强经纱（13）和加强纬纱（14）制成的加强系统（11），所述加强系统（11）在两个不同的加强层（16）中放置在彼此之上， （17）。 通过具有比加强纱线（15）更低的纱线数量的捆扎纱线（30）形成装订经线（20）和装订纬纱（21）的装订系统（12）。 加强系统（11）被封闭在一侧的装订经线（20）和另一侧上的装订纬纱（21）之间，从而在绑定点（22）处保持就位。 在每个装订点（22）处，装订经线（20）被引导并保持在固定经线（25）和装订经线（20）的经线对（23）的规则经线（24）之间， 。 在经线对（23）的两个相邻的装订点之间，固定经线（25）和规则经线（24）具有相交点（26）。

    ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY
    8.
    发明申请
    ILLUMINATION SYSTEM FOR MICROLITHOGRAPHY 有权
    微观照明系统

    公开(公告)号：US20120019796A1

    公开(公告)日：2012-01-26

    申请号：US13186068

    申请日：2011-07-19

    申请人： Axel Scholz ,  Frank Schlesener ,  Nils Haverkamp ,  Vladimir Davydenko ,  Michael Gerhard ,  Gerhard-Wilhelm Ziegler ,  Mirco Kern ,  Thomas Bischoff ,  Thomas Stammler ,  Stephan Kellner ,  Manfred Maul ,  Daniel Walldorf ,  Igor Hurevich ,  Markus Deguenther

    发明人： Axel Scholz ,  Frank Schlesener ,  Nils Haverkamp ,  Vladimir Davydenko ,  Michael Gerhard ,  Gerhard-Wilhelm Ziegler ,  Mirco Kern ,  Thomas Bischoff ,  Thomas Stammler ,  Stephan Kellner ,  Manfred Maul ,  Daniel Walldorf ,  Igor Hurevich ,  Markus Deguenther

    IPC分类号： G03B27/54

    CPC分类号： G03F7/70191 ,  G02B3/0043 ,  G03F7/70058 ,  G03F7/70075 ,  G03F7/70083

    摘要： An illumination system for microlithography serves to illuminate an illumination field with illumination light of a primary light source. A first raster arrangement has bundle-forming first raster elements which are arranged in a first plane of the illumination system or adjacent to the plane. The first raster arrangement serves to generate a raster arrangement of secondary light sources. A transmission optics serves for superimposed transmission of the illumination light of the secondary light sources into the illumination field. The transmission optics has a second raster arrangement with bundle-forming second raster elements. In each case one of the raster elements of the first raster arrangement is allocated to one of the raster elements of the second raster arrangement for guiding a partial bundle of an entire bundle of illumination light. The first raster arrangement for example has at least two types (I, II, III) of the first raster elements which have different bundle-influencing effects. The raster elements of the two raster arrangements are arranged relative to one another in such a way that to each raster element type (I to III) is allocated at least one individual distance (ΔI, ΔII, ΔIII) between the first raster element of this type (I to III) and the allocated second raster element of the second raster arrangement. As a result, an illumination system is obtained which allows particular illumination parameters to be influenced in such a way that undesirable influences on other illumination parameters are avoided to the greatest extent possible.

    摘要翻译： 用于微光刻的照明系统用于利用一次光源的照明光照射照明场。 第一光栅布置具有束形成的第一光栅元件，其布置在照明系统的第一平面中或与该平面相邻。 第一光栅布置用于产生二次光源的光栅布置。 传输光学器件用于将次级光源的照明光的叠加传输到照明场中。 传输光学器件具有第二光栅装置，其具有束形成第二光栅元件。 在每种情况下，第一光栅装置的一个光栅元件被分配给第二光栅布置的光栅元件之一，用于引导整束照明光的部分束。 例如，第一光栅布置具有至少两种具有不同束影响效果的第一光栅元件（I，II，III）。 两个光栅装置的光栅元件相对于彼此布置成使得每个光栅元素类型（I至III）被分配至少一个单独距离（＆Dgr; I，＆Dgr; II，＆Dgr; III） 这种类型的第一光栅元素（I至III）和第二光栅布置的分配的第二光栅元素。 结果，获得允许特定照明参数受到影响的照明系统，使得最大程度地避免对其他照明参数的不期望的影响。

    OPTICAL ELEMENT MODULE
    10.
    发明申请
    OPTICAL ELEMENT MODULE 审中-公开
    光学元件模块

    公开(公告)号：US20110063590A1

    公开(公告)日：2011-03-17

    申请号：US12951777

    申请日：2010-11-22

    申请人： Thomas Bischoff ,  Hagen Federau ,  Willi Heintel ,  Bernd Wuesthoff ,  Jochen Wieland

    发明人： Thomas Bischoff ,  Hagen Federau ,  Willi Heintel ,  Bernd Wuesthoff ,  Jochen Wieland

    IPC分类号： G03B27/52 ,  G03B27/32

    CPC分类号： G03F7/70891 ,  G02B7/008 ,  G02B7/028 ,  G02B7/181 ,  G03F7/70825

    摘要： An optical element module comprising a plurality of module components is provided. The module components comprise an optical element, an optical element holder and a contact element. The optical element has a first coefficient of thermal expansion. The optical element holder holds the optical element via the first contact element and has a second coefficient of thermal expansion, the second coefficient of thermal expansion being different from the first coefficient of thermal expansion. At least one of the module components is adapted to provide at least a reduction of forces introduced into the optical element upon a thermally induced position change in the relative position between the optical element and the optical element holder, the position change resulting from a temperature situation variation in a temperature situation of the plurality of module components.

    摘要翻译： 提供了包括多个模块部件的光学元件模块。 模块组件包括光学元件，光学元件保持器和接触元件。 光学元件具有第一热膨胀系数。 光学元件保持器经由第一接触元件保持光学元件，并具有第二热膨胀系数，第二热膨胀系数不同于第一热膨胀系数。 模块部件中的至少一个适于在光学元件和光学元件保持器之间的相对位置的热感应位置变化时提供至少引入到光学元件中的力的减小，温度情况导致的位置变化 多个模块部件的温度变化的变化。