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    ACRYLATE DERIVATIVES, ALCOHOL DERIVATIVES, AND METHOD FOR PRODUCING THEM
    1.
    发明申请
    ACRYLATE DERIVATIVES, ALCOHOL DERIVATIVES, AND METHOD FOR PRODUCING THEM 有权
    丙烯酸衍生物，醇衍生物及其生产方法

    公开(公告)号：US20120071667A1

    公开(公告)日：2012-03-22

    申请号：US12884677

    申请日：2010-09-17

    Applicant: Kazuya SHIMIZU ,  Masayoshi YAMANAKA ,  Tatsuhiko HAYASHIBARA ,  Hideharu IWASAKI

    Inventor： Kazuya SHIMIZU ,  Masayoshi YAMANAKA ,  Tatsuhiko HAYASHIBARA ,  Hideharu IWASAKI

    IPC: C07D209/94 ,  C07D301/03

    CPC classification number: C07D209/02 ,  C07D491/18

    Abstract: Provided are an acrylate derivative useful as a raw material of a polymer compound for resist compositions capable of giving resist patterns which are excellent in lithographic performance and have a good shape, an intermediate thereof (alcohol derivative) and production processes for them. To be specific, it is an acrylate derivative represented by a formula shown below: (wherein R1 represents a hydrogen atom, methyl or trifluoromethyl; R2, R3, R5, R7, R8, R9 and R10 each represent independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a cycloalkyl group having 3 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms; R4 and R6 each represent independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a cycloalkyl group having 3 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms, or both of R4 and R6 are combined to represent an alkylene group having 1 to 3 carbon atoms, —O— or —S—; and R11 represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 10 carbon atoms).

    Abstract translation: 提供可用作抗蚀剂组合物的聚合物化合物的原料的丙烯酸酯衍生物，其能够提供平版印刷性能优异且形状良好的抗蚀剂图案，其中间体（醇衍生物）及其制备方法。 具体来说，它是由下式表示的丙烯酸酯衍生物：其中R1表示氢原子，甲基或三氟甲基; R2，R3，R5，R7，R8，R9和R10各自独立地表示氢原子，烷基 具有1至6个碳原子的基团，具有3至6个碳原子的环烷基或具有1至6个碳原子的烷氧基; R 4和R 6各自独立地表示氢原子，具有1至6个碳原子的烷基，环烷基 具有3至6个碳原子的烷基或具有1至6个碳原子的烷氧基，或者R 4和R 6都被结合以表示具有1至3个碳原子的亚烷基，-O-或-S-; R 11表示 氢原子，碳原子数1〜6的烷基或碳原子数3〜10的环状烃基）。

    Acrylate derivatives, alcohol derivatives, and method for producing them
    7.
    发明授权
    Acrylate derivatives, alcohol derivatives, and method for producing them 有权
    丙烯酸酯衍生物，醇衍生物及其制备方法

    公开(公告)号：US08188299B2

    公开(公告)日：2012-05-29

    申请号：US12884677

    申请日：2010-09-17

    Applicant: Kazuya Shimizu ,  Masayoshi Yamanaka ,  Tatsuhiko Hayashibara ,  Hideharu Iwasaki

    Inventor： Kazuya Shimizu ,  Masayoshi Yamanaka ,  Tatsuhiko Hayashibara ,  Hideharu Iwasaki

    IPC: C07D209/56

    CPC classification number: C07D209/02 ,  C07D491/18

    Abstract: Provided are an acrylate derivative useful as a raw material of a polymer compound for resist compositions capable of giving resist patterns which are excellent in lithographic performance and have a good shape, an intermediate thereof (alcohol derivative) and production processes for them. To be specific, it is an acrylate derivative represented by a formula shown below: (wherein R1 represents a hydrogen atom, methyl or trifluoromethyl; R2, R3, R5, R7, R8, R9 and R10 each represent independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a cycloalkyl group having 3 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms; R4 and R6 each represent independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a cycloalkyl group having 3 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms, or both of R4 and R6 are combined to represent an alkylene group having 1 to 3 carbon atoms, —O— or —S—; and R11 represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 10 carbon atoms).

    Abstract translation: 提供可用作抗蚀剂组合物的聚合物化合物的原料的丙烯酸酯衍生物，其能够提供平版印刷性能优异且形状良好的抗蚀剂图案，其中间体（醇衍生物）及其制备方法。 具体来说，它是由下式表示的丙烯酸酯衍生物：其中R1表示氢原子，甲基或三氟甲基; R2，R3，R5，R7，R8，R9和R10各自独立地表示氢原子，烷基 具有1至6个碳原子的基团，具有3至6个碳原子的环烷基或具有1至6个碳原子的烷氧基; R 4和R 6各自独立地表示氢原子，具有1至6个碳原子的烷基，环烷基 具有3至6个碳原子的烷基或具有1至6个碳原子的烷氧基，或者R 4和R 6都被结合以表示具有1至3个碳原子的亚烷基，-O-或-S-; R 11表示 氢原子，碳原子数1〜6的烷基或碳原子数3〜10的环状烃基）。

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