公开(公告)号：US09063356B2

公开(公告)日：2015-06-23

申请号：US12507826

申请日：2009-07-23

申请人： Takeshi Arai ,  Nobuaki Nakasu ,  Tadao Edamura ,  Noriyuki Oroku

发明人： Takeshi Arai ,  Nobuaki Nakasu ,  Tadao Edamura ,  Noriyuki Oroku

IPC分类号： C23C16/44 ,  C23C16/00 ,  C23C16/52 ,  G02F1/13

CPC分类号： G02F1/1309

摘要： An object of the present invention is to provide a method for repairing a display device according to which a wide variety of regions can be repaired in various ways using various materials, as well as an apparatus for the same. The present invention provides a repairing apparatus for repairing a pattern defect on a surface of a substrate in a display device where an electronic circuit pattern having the above described pattern defect is formed, characterized by having a plasma irradiation means for repairing the above described pattern defect through local irradiation of a region including the above described pattern defect with plasma.

摘要翻译： 本发明的目的是提供一种维修显示装置的方法，根据该方法可以使用各种材料以各种方式修复各种各样的区域，以及用于其的装置。 本发明提供一种在具有上述图案缺陷的电子电路图案形成的显示装置中修复基板表面上的图形缺陷的修理装置，其特征在于具有用于修复上述图案缺陷的等离子体照射装置 通过用等离子体局部照射包括上述图案缺陷的区域。

公开(公告)号：US08860338B2

公开(公告)日：2014-10-14

申请号：US13158009

申请日：2011-06-10

申请人： Tsutomu Shimazaki ,  Akira Suzuki ,  Takeshi Arai

发明人： Tsutomu Shimazaki ,  Akira Suzuki ,  Takeshi Arai

IPC分类号： H02K41/00 ,  H02P1/00 ,  H02P3/00 ,  H02P25/02

CPC分类号： H02P25/028 ,  H02P25/034

摘要： A motor drive circuit includes: a digital filter configured to attenuate amplitude in a frequency band including a resonance frequency of an actuator in a target current signal, the target current signal being a digital signal indicative of a target value of a drive current, the drive current being supplied to a voice coil motor configured to drive the actuator; a digital-analog converter configured to convert an output signal of the digital filter into an analog signal, and output the converted analog signal as a current control signal; and a drive circuit configured to supply the drive current to the voice coil motor according to the current control signal.

摘要翻译： 电动机驱动电路包括：数字滤波器，其被配置为衰减包括目标电流信号中的致动器的谐振频率的频带中的振幅，所述目标电流信号是表示驱动电流的目标值的数字信号，所述驱动器 电流被提供给构造成驱动致动器的音圈电动机; 数模转换器，被配置为将数字滤波器的输出信号转换为模拟信号，并将转换的模拟信号作为电流控制信号输出; 以及驱动电路，被配置为根据当前控制信号将音频电流提供给音圈电机。

公开(公告)号：US08350483B2

公开(公告)日：2013-01-08

申请号：US12639704

申请日：2009-12-16

申请人： Takeshi Arai

发明人： Takeshi Arai

IPC分类号： G09G3/10 ,  G09G5/00

CPC分类号： G09G3/342 ,  G09G2320/064 ,  G09G2320/0646

摘要： A light-emitting element driving circuit includes a PWM signal output circuit configured to output a plurality of PWM signals each having one logic level whose duty ratio corresponds to gradation data and each corresponding to each of a plurality of light-emitting elements, on the basis of the gradation data indicating brightness of each of the plurality of light-emitting elements. A driving signal output circuit is configured to change the duty ratio of each of the plurality of inputted PWM signals to output the plurality of changed PWM signals as a plurality of driving signals, on the basis of instruction data for changing the brightness of the plurality of light-emitting elements. A driving circuit is configured to drive the plurality of light-emitting elements on the basis of a duty ratio of each of the plurality of driving signals.

摘要翻译： 发光元件驱动电路包括：PWM信号输出电路，被配置为输出多个PWM信号，每个PWM信号的占空比对应于灰度数据，并且各自对应于多个发光元件中的每一个， 指示多个发光元件中的每一个的亮度的灰度数据。 驱动信号输出电路被配置为基于用于改变多个输入的PWM信号的亮度的指令数据，改变多个输入的PWM信号中的每一个的占空比，以输出多个改变的PWM信号作为多个驱动信号 发光元件。 驱动电路被配置为基于多个驱动信号中的每一个的占空比来驱动多个发光元件。

公开(公告)号：US08216920B2

公开(公告)日：2012-07-10

申请号：US12866946

申请日：2009-02-27

申请人： Takeshi Arai

发明人： Takeshi Arai

IPC分类号： H01L21/20

CPC分类号： H01L21/02532 ,  C30B25/20 ,  C30B29/06 ,  H01L21/02381 ,  H01L21/02658 ,  H01L21/68735

摘要： Provided is a method for manufacturing a silicon epitaxial wafer by growing an epitaxial layer by placing a silicon substrate on a susceptor. The method includes at least a step of forming a silicon oxide film entirely on the rear surface of the silicon substrate; a step of removing the silicon oxide film formed at least on an edge section of the silicon substrate; and a step of placing the silicon substrate on the susceptor with the silicon oxide film in between. An epitaxial layer is grown on the silicon substrate, while holding the silicon substrate by the susceptor with the silicon oxide film in between. Thus, the silicon epitaxial wafer by which generation of particles can be reduced in a device manufacturing process and a method for manufacturing such silicon epitaxial wafer are provided.

摘要翻译： 提供一种通过将硅衬底放置在基座上来生长外延层来制造硅外延晶片的方法。 该方法至少包括在硅衬底的后表面上整体形成氧化硅膜的步骤; 去除形成在硅衬底的至少边缘部分上的氧化硅膜的步骤; 以及将硅衬底放置在基座上的步骤，其间具有氧化硅膜。 在硅衬底上生长外延层，同时通过感受器保持硅衬底之间的氧化硅膜。 因此，提供了在器件制造工艺中可以减少颗粒的产生的硅外延晶片和制造这种硅外延晶片的方法。

公开(公告)号：US20110304285A1

公开(公告)日：2011-12-15

申请号：US13158009

申请日：2011-06-10

申请人： Tsutomu Shimazaki ,  Akira Suzuki ,  Takeshi Arai

发明人： Tsutomu Shimazaki ,  Akira Suzuki ,  Takeshi Arai

IPC分类号： H02P7/285

CPC分类号： H02P25/028 ,  H02P25/034

摘要： A motor drive circuit includes: a digital filter configured to attenuate amplitude in a frequency band including a resonance frequency of an actuator in a target current signal, the target current signal being a digital signal indicative of a target value of a drive current, the drive current being supplied to a voice coil motor configured to drive the actuator; a digital-analog converter configured to convert an output signal of the digital filter into an analog signal, and output the converted analog signal as a current control signal; and a drive circuit configured to supply the drive current to the voice coil motor according to the current control signal.

摘要翻译： 电动机驱动电路包括：数字滤波器，其被配置为衰减包括目标电流信号中的致动器的谐振频率的频带中的振幅，所述目标电流信号是指示驱动电流的目标值的数字信号，所述驱动器 电流被提供给构造成驱动致动器的音圈电动机; 数模转换器，被配置为将数字滤波器的输出信号转换为模拟信号，并将转换的模拟信号作为电流控制信号输出; 以及驱动电路，被配置为根据当前控制信号将音频电流提供给音圈电机。

公开(公告)号：US07894029B2

公开(公告)日：2011-02-22

申请号：US11103491

申请日：2005-04-12

申请人： Takeshi Arai ,  Yasuhiro Yoshitake ,  Shigeru Matsuyama

发明人： Takeshi Arai ,  Yasuhiro Yoshitake ,  Shigeru Matsuyama

IPC分类号： G02F1/1337

CPC分类号： G02F1/133788 ,  G02B27/28

摘要： Work is irradiated with polarized light generated by configuring in such a manner as to have a polarizer using a grating that separates polarized light from non-polarized light, a lamp and a condenser mirror that allow light to fall on the polarizer, a collimator lens that converts the incoming light into parallel beams, an integrator lens that uniformizes intensity distribution of light radiated from the polarizer, and a diffusion lens with functions to enlarge or contract the irradiated range to the work size, and by forming protrusions and recesses of the shape, material, and size that fit to the desired wavelength on a substrate such as quartz, etc. that transmit ultraviolet light, and by providing the light-polarizing performance by appropriately providing an incident angle. By carrying out this processing, the alignment film in the liquid crystal display element can be photo-aligned at high accuracy and uniformly.

摘要翻译： 用通过配置的偏振光照射产生的偏振光，使得具有使偏振光与非偏振光分离的光栅的偏振器，允许光落在偏振器上的灯和聚光镜，准直透镜 将入射光转换为平行光束，使从偏振器辐射的光的强度分布均匀的积分透镜和具有将照射范围扩大或收缩至工作尺寸的功能的漫射透镜，并且通过形成形状的突起和凹部， 材料和尺寸，其适合于透射紫外光的基板（例如石英等）上的期望波长，并且通过适当地提供入射角提供光偏振性能。 通过进行这种处理，液晶显示元件中的取向膜可以高精度和均匀地光取向。

公开(公告)号：US20100141690A1

公开(公告)日：2010-06-10

申请号：US12633460

申请日：2009-12-08

申请人： Takeshi Arai

发明人： Takeshi Arai

IPC分类号： G09G5/10 ,  G06F3/038 ,  G09G3/00

CPC分类号： G09G3/3216 ,  G09G3/3283 ,  G09G2310/0275 ,  G09G2320/0233 ,  G09G2320/0285 ,  G09G2330/028

摘要： A light-emitting element driving circuit comprising: an index data storage unit configured to store n-bit index data for each of a plurality of light-emitting elements included in a display device, the n-bit index data specifying a storage location of gradation data indicating brightness of a light-emitting element in the plurality of light-emitting elements: a gradation data storage unit configured to store the gradation data with m bits larger than n bits, corresponding to the index data; and a driving circuit configured to drive the light-emitting element on the basis of the gradation data corresponding to the index data so that the light-emitting element emits light at brightness according to the gradation data.

摘要翻译： 一种发光元件驱动电路，包括：索引数据存储单元，被配置为存储包括在显示装置中的多个发光元件中的每一个的n位索引数据，所述n比特索引数据指定渐变的存储位置 数据，其指示所述多个发光元件中的发光元件的亮度;灰度数据存储单元，被配置为存储对应于所述索引数据的m比特大于n比特的灰度数据; 以及驱动电路，其被配置为基于与所述索引数据对应的灰度数据来驱动所述发光元件，使得所述发光元件根据所述灰度数据以亮度发光。

公开(公告)号：US07270708B2

公开(公告)日：2007-09-18

申请号：US10493144

申请日：2002-11-27

申请人： Tomosuke Yoshida ,  Takeshi Arai ,  Kenji Akiyama ,  Hiroki Ose

发明人： Tomosuke Yoshida ,  Takeshi Arai ,  Kenji Akiyama ,  Hiroki Ose

IPC分类号： C30B25/12

CPC分类号： C30B25/12 ,  C23C16/4405 ,  C23C16/4583

摘要： A susceptor (10) supporting a semiconductor substrate (W) in a vapor phase growth, wherein a pocket (11) is formed on an upper surface of the susceptor to arrange the semiconductor substrate (W) inside thereof. The pocket (11) has a two-stage structure having an upper stage pocket (11a) for supporting an outer peripheral edge portion of the semiconductor substrate (W) and a lower stage pocket (11b) formed on a lower stage of a center side from the upper stage pocket (11a). A hole (12) penetrated to a rear surface of the susceptor and opened in the vapor phase growth is formed in the lower stage pocket (11b).

摘要翻译： 一种在气相生长中支撑半导体衬底（W）的感受体（10），其中，在所述基座的上表面上形成有凹穴（11），以将半导体衬底（W）布置在其内部。 袋（11）具有两级结构，其具有用于支撑半导体衬底（W）的外周边缘部分的上级槽口（11a）和形成在半导体衬底（W）的下级上的下级槽口 中心侧的上侧袋（11a）。 贯穿底座后表面的孔（12）形成在下层袋（11b）中。

公开(公告)号：US07166480B2

公开(公告)日：2007-01-23

申请号：US10376274

申请日：2003-03-03

申请人： Daisuke Shiraishi ,  Akira Kagoshima ,  Hideyuki Yamamoto ,  Takeshi Arai ,  Hiroyuki Nakano

发明人： Daisuke Shiraishi ,  Akira Kagoshima ,  Hideyuki Yamamoto ,  Takeshi Arai ,  Hiroyuki Nakano

IPC分类号： H01L21/00

CPC分类号： H01L21/67253 ,  H01J37/32431 ,  H01J2237/0225

摘要： A particle control device and a particle control method are capable of controlling the occurrences of particles in a vacuum reactor. The particle control device is used in a vacuum processing apparatus having a vacuum reactor, a gas delivery unit for supplying processing gases to the vacuum reactor, and a sample table for supporting a sample in the vacuum reactor, wherein the apparatus subjects the sample to vacuum processing. The particle control device detects particles floating inside the vacuum reactor; generates apparatus condition data indicating a condition of the vacuum processing apparatus; and determines a component which is high in a particle occurrence probability based on detected particle data and apparatus condition data, thereby enabling display of the component selected as the particle source.

摘要翻译： 粒子控制装置和粒子控制方法能够控制真空反应器中颗粒的发生。 粒子控制装置用于具有真空反应器，用于向真空反应器供应处理气体的气体输送单元的真空处理装置和用于在真空反应器中支撑样品的样品台，其中该装置使样品真空 处理。 颗粒控制装置检测浮在真空反应器内的颗粒; 生成表示真空处理装置的状态的装置条件数据; 并且基于检测到的粒子数据和装置条件数据确定粒子发生概率高的分量，从而能够显示选择为粒子源的分量。

公开(公告)号：US20060065645A1

公开(公告)日：2006-03-30

申请号：US11143981

申请日：2005-06-03

申请人： Nobuaki Nakasu ,  Kaoru Yamada ,  Yuichiro Tanaka ,  Takeshi Arai ,  Hideyuki Honoki ,  Kazushi Yoshimura ,  Tetsuya Kawamura ,  Masanori Okawa

发明人： Nobuaki Nakasu ,  Kaoru Yamada ,  Yuichiro Tanaka ,  Takeshi Arai ,  Hideyuki Honoki ,  Kazushi Yoshimura ,  Tetsuya Kawamura ,  Masanori Okawa

IPC分类号： B23K26/36 ,  B23K26/03 ,  B23K26/06

CPC分类号： B23K26/34 ,  B23K26/32 ,  B23K2101/34 ,  B23K2101/36 ,  B23K2103/08 ,  B23K2103/50 ,  G02F1/1309 ,  H01L27/124 ,  H01L27/1259

摘要： A region surrounded by two gate wiring and two drain wiring includes pixels and when there is a defect of short-circuit in adjacent pixel electrodes, the short-circuited portion is removed by irradiating a laser via a mask having a transmission pattern, which corresponds to a pattern of the gate wiring, drain wiring and pixel electrodes in the short-circuited portion. The above short-circuited portion is identified and removed in comparison to a normal pattern, by use of information from an inspection apparatus, and the pattern defect formed on the substrate is automatically repaired. By applying the above method to a manufacturing process of display apparatus, in particular, to a resist pattern forming process, a display apparatus having a highly qualified display property may be achieved.

摘要翻译： 由两个栅极布线和两个漏极布线包围的区域包括像素，并且当相邻像素电极中存在短路的缺陷时，通过经由具有透射图案的掩模照射激光来去除短路部分，该掩模对应于 在短路部分中的栅极布线，漏极布线和像素电极的图案。 通过使用来自检查装置的信息，与正常图案相比，识别和去除上述短路部分，并自动修复在基板上形成的图案缺陷。 通过将上述方法应用于显示装置的制造工艺，特别是涉及抗蚀剂图案形成处理，可以实现具有高度合格的显示特性的显示装置。