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1.
公开(公告)号:US20130160552A1
公开(公告)日:2013-06-27
申请号:US13819355
申请日:2011-06-01
Applicant: Toshihiko Nakata , Tetsuya Matsui , Takehiro Tachizaki , Kazushi Yoshimura , Masahiro Watanabe
Inventor: Toshihiko Nakata , Tetsuya Matsui , Takehiro Tachizaki , Kazushi Yoshimura , Masahiro Watanabe
CPC classification number: G01N29/221 , G01N29/04 , G01N29/043 , G01N29/0654 , G01N29/2418
Abstract: It is intended to provide an internal defect inspection method and an apparatus for implementing the method by which an ultrasonic wave is excited in a sample without contact with the sample and accordingly without damaging the sample, and an ultrasonic wave from any internal defect of the sample is detected without being affected by the sample surface, in a non-contact state and with high sensitivity.By the internal defect inspection method, an ultrasonic wave is emitted from an ultrasonic wave transmitter toward a sample, an ultrasonic wave reflected by the sample is detected as an interference signal with an imaging type common-path interferometer, an ultrasonic wave signal is obtained from the interference signal, and any defect within the sample is detected from the ultrasonic wave signal.
Abstract translation: 旨在提供一种内部缺陷检查方法和实现这样一种方法的装置,其中超声波在样品中被激发而不与样品接触,因此不损伤样品,并且来自样品的任何内部缺陷的超声波 被检测而不受样品表面的影响,处于非接触状态并具有高灵敏度。 通过内部缺陷检查方法,从超声波发射器向样品发射超声波,将由样本反射的超声波作为干涉信号与成像式共轨干涉仪进行检测,从超声波信号 从超声波信号中检测出干扰信号和样本内的任何缺陷。
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公开(公告)号:US20110126819A1
公开(公告)日:2011-06-02
申请号:US12999518
申请日:2009-07-24
Applicant: Kazushi Yoshimura , Kazushi Furukawa , Masahiro Nishijima , Hiromi Suenaga
Inventor: Kazushi Yoshimura , Kazushi Furukawa , Masahiro Nishijima , Hiromi Suenaga
IPC: F24C15/00
CPC classification number: F24C15/322 , F24C15/16
Abstract: The cooker is equipped with a heating chamber (2) that has an open part (2d) in the front surface and that holds the material to be cooked, an opening/closing door (3) that has a see-through window (4) and that opens and closes the open part, a suction intake opening (2a) that is open in one of the side walls that faces the heating chamber (2), an air discharge outlet (2b) that is open in the other side wall of the heating chamber (2), and a circulation duct (20) that has first and second side surface parts (20a, 20b) that are provided outside of the two side walls of the heating chamber (2) and that connect the suction intake opening (2a) provided at the first side surface part (20a) and the air discharge outlet (2b) provided at the second side surface part (20b), and a circulation fan (21) that is provided inside the circulation duct (20) and that draws in gas inside the heating chamber (2) through the suction intake opening (2a) and blows it out through the air discharge outlet (2b).
Abstract translation: 炊具配备有在前表面具有开口部分(2d)并且保持待烹饪材料的加热室(2),具有透视窗(4)的开/关门(3) 并且打开和关闭所述打开部分,在与所述加热室(2)相对的一个侧壁中开口的吸入口(2a),在所述加热室(2)的另一侧壁中敞开的排气口(2b) 加热室(2)和循环管道(20),其具有设置在加热室(2)的两个侧壁外侧的第一和第二侧面部分(20a,20b),并将吸入口 (2a)和设置在第二侧面部(20b)的排气口(2b),以及设置在循环管道(20)的内部的循环风扇(21),以及 其通过吸入口(2a)吸入加热室(2)内的气体,并通过排气出口(2b)吹出, 。
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3.
公开(公告)号:US07417444B2
公开(公告)日:2008-08-26
申请号:US11269617
申请日:2005-11-09
Applicant: Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
Inventor: Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
IPC: G01R31/305 , H01J37/28
CPC classification number: G01R31/305 , G01R31/307 , H01J37/28 , H01J2237/2817
Abstract: A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined charged state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.
Abstract translation: 一种电路图案检查方法及其装置,其中待检查样品的待检查部分的整个部分被制成处于预定的充电状态,被检查的部分用图像形成高分辨率照射, 在扫描电子束时,在从电子束照射的时刻起经过规定的时间后,在照射电子束的部分检测到二次带电粒子,根据这样检测的次级 通过使用如此形成的图像来检查带电粒子信号,并检查待检查的部分。
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公开(公告)号:US20070089410A1
公开(公告)日:2007-04-26
申请号:US10561273
申请日:2004-06-29
Applicant: Kazushi Yoshimura , Kenji Takai , Yoshiyuki Kitamura , Shinji Yamagami , Jin Sakamoto , Hiroshi Yasumura
Inventor: Kazushi Yoshimura , Kenji Takai , Yoshiyuki Kitamura , Shinji Yamagami , Jin Sakamoto , Hiroshi Yasumura
CPC classification number: F02G1/043 , F02G2270/95 , F02G2280/10
Abstract: In a Stirling engine, a hollow cylinder-like pressure vessel covers a cylinder, a piston, and a linear motor. The pressure vessel is divided into a ring-like portion and a dome-like portion at a position closer to the displacer installation side than a piston support-side end of the linear motor. At the divided portion, an outward-facing flange-shaped portion is formed for each of the ring-like portion and the dome-like portion. For temporary sealing of the pressure vessel, both flange-shaped portions are joined together and tightened by tightening rings and bolts. A performance check is performed in this state, and then outer peripheral portions of the flange-shaped portions are welded together for final sealing.
Abstract translation: 在斯特林发动机中,中空圆柱状压力容器覆盖气缸,活塞和线性电动机。 压力容器在比线性电动机的活塞支撑侧端更靠近置换器安装侧的位置处分成环状部分和圆顶状部分。 在分割部分,为环形部分和圆顶状部分形成面向外的凸缘部分。 为了临时密封压力容器,两个法兰形部分接合在一起并通过拧紧环和螺栓来紧固。 在该状态下执行性能检查,然后将凸缘状部分的外周部分焊接在一起以进行最终密封。
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5.
公开(公告)号:US07026830B2
公开(公告)日:2006-04-11
申请号:US10379555
申请日:2003-03-06
Applicant: Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
Inventor: Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
IPC: G01R31/305 , G01R31/28
CPC classification number: G01R31/305 , G01R31/307 , H01J37/28 , H01J2237/2817
Abstract: To make possible the in-line inspection of a pattern of an insulating material.A patterned wafer 40 formed with a pattern by a resist film is placed on a specimen table 21 of a patterned wafer inspection apparatus 1 in opposed relation to a SEM 3. An electron beam 10 of a large current is emitted from an electron gun 11 and the pattern of the patterned wafer is scanned only once at a high scanning rate. The secondary electrons generated by this scanning from the patterned wafer are detected by a secondary electron detector 16 thereby to acquire an electron beam image. Using this electron beam image, the comparative inspection is conducted on the patterned wafer through an arithmetic operation unit 32 and a defect determining unit 33. Since an electron beam image of high contrast can be obtained by scanning an electron beam only once, a patterned wafer inspection method using a SEM can be implemented in the IC fabrication method.
Abstract translation: 使绝缘材料的图案能够在线检查。 通过抗蚀剂膜形成图案的图案化晶片40与SEM 3相对地放置在图案化晶片检查装置1的样本台21上。 从电子枪11发射大电流的电子束10,以高扫描速度扫描图案化晶片的图案一次。 通过二次电子检测器16检测来自图案化晶片的该扫描产生的二次电子,从而获得电子束图像。 使用该电子束图像,通过算术运算单元32和缺陷判定单元33对图案化晶片进行比较检查。由于可以通过仅扫描电子束一次来获得高对比度的电子束图像,因此图案化晶片 使用SEM的检查方法可以在IC制造方法中实现。
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6.
公开(公告)号:US20060043982A1
公开(公告)日:2006-03-02
申请号:US11269617
申请日:2005-11-09
Applicant: Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
Inventor: Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
IPC: G01R31/305
CPC classification number: G01R31/305 , G01R31/307 , H01J37/28 , H01J2237/2817
Abstract: A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined charged state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.
Abstract translation: 一种电路图案检查方法及其装置,其中待检查样品的待检查部分的整个部分被制成处于预定的充电状态,被检查的部分用图像形成高分辨率照射, 在扫描电子束时,在从电子束照射的时刻起经过规定的时间后,在照射电子束的部分检测到二次带电粒子,根据这样检测的次级 通过使用如此形成的图像来检查带电粒子信号,并检查待检查的部分。
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7.
公开(公告)号:US06559663B2
公开(公告)日:2003-05-06
申请号:US09983703
申请日:2001-10-25
Applicant: Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
Inventor: Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
IPC: G01R31305
CPC classification number: G01R31/305 , G01R31/307 , H01J37/28 , H01J2237/2817
Abstract: A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined charged state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with: the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.
Abstract translation: 一种电路图案检查方法及其装置,其中待检查样品的待检查部分的整个部分被制成处于预定的充电状态,被检查的部分用图像形成高分辨率照射, 在扫描电子束的同时,在从照射电子束的时刻起经过规定时间后,照射电子束的部位检测到二次带电粒子,根据这样检测出形成图像 通过使用如此形成的图像来检查次级带电粒子信号和待检查的部分。
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8.
公开(公告)号:US06329826B1
公开(公告)日:2001-12-11
申请号:US09525341
申请日:2000-03-14
Applicant: Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
Inventor: Hiroyuki Shinada , Mari Nozoe , Haruo Yoda , Kimiaki Ando , Katsuhiro Kuroda , Yutaka Kaneko , Maki Tanaka , Shunji Maeda , Hitoshi Kubota , Aritoshi Sugimoto , Katsuya Sugiyama , Atsuko Takafuji , Yusuke Yajima , Hiroshi Tooyama , Tadao Ino , Takashi Hiroi , Kazushi Yoshimura , Yasutsugu Usami
IPC: G01R31305
CPC classification number: G01R31/305 , G01R31/307 , H01J37/28 , H01J2237/2817
Abstract: A circuit pattern inspection method and an apparatus therefor, in which the whole of a portion to be inspected of a sample to be inspected is made to be in a predetermined charged state, the portion to be inspected is irradiated with an image-forming high-density electron beam while scanning the electron beam, secondary charged particles are detected at a portion irradiated with the electron beam after a predetermined period of time from an instance when the electron beam is irradiated, an image is formed on the basis of the thus detected secondary charged particle signal, and the portion to be inspected is inspected by using the thus formed image.
Abstract translation: 一种电路图案检查方法及其装置,其中待检查样品的待检查部分的整个部分被制成处于预定的充电状态,被检查的部分用图像形成高分辨率照射, 在扫描电子束时,在从电子束照射的时刻起经过规定的时间后,在照射电子束的部分检测到二次带电粒子,根据这样检测的次级 通过使用如此形成的图像来检查带电粒子信号,并检查待检查的部分。
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9.
公开(公告)号:US09134279B2
公开(公告)日:2015-09-15
申请号:US13819355
申请日:2011-06-01
Applicant: Toshihiko Nakata , Tetsuya Matsui , Takehiro Tachizaki , Kazushi Yoshimura , Masahiro Watanabe
Inventor: Toshihiko Nakata , Tetsuya Matsui , Takehiro Tachizaki , Kazushi Yoshimura , Masahiro Watanabe
CPC classification number: G01N29/221 , G01N29/04 , G01N29/043 , G01N29/0654 , G01N29/2418
Abstract: An internal defect inspection method where an ultrasonic wave is emitted from an ultrasonic wave transmitter toward a sample, the ultrasonic wave reflected by the sample is detected by an imaging type common-path interferometer as an interference signal, an ultrasonic wave signal is obtained from the interference signal, and any defect within the sample is detected from the ultrasonic wave signal. An internal defect inspection apparatus including an ultrasonic wave transmitter, an imaging type common-path interferometer and an ultrasonic wave signal detecting device is also provided.
Abstract translation: 从超声波发射器向样品发射超声波的内部缺陷检查方法,由成像型共通干涉仪作为干扰信号检测由样品反射的超声波,从超声波信号获得超声波信号 干扰信号,并从超声波信号中检测出样本内的任何缺陷。 还提供了包括超声波发射器,成像型共轨干涉仪和超声波信号检测装置的内部缺陷检查装置。
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公开(公告)号:US07775041B2
公开(公告)日:2010-08-17
申请号:US11794839
申请日:2006-01-17
Applicant: Yoshiyuki Kitamura , Kazushi Yoshimura , Kenji Takai , Shinji Yamagami , Jin Sakamoto
Inventor: Yoshiyuki Kitamura , Kazushi Yoshimura , Kenji Takai , Shinji Yamagami , Jin Sakamoto
CPC classification number: F02G1/0435 , F02G2270/40 , F02G2270/55 , F02G2280/10 , F25B2309/001
Abstract: A Stirling engine, wherein the inner yoke of a linear motor is installed on the outer peripheral surface of a cylinder. To keep a proper pressure balance between a compression space on one end side of a displacer and a back pressure space on the outer peripheral side of the cylinder, a first flow passage is formed in the piston starting at the compression space side end face toward the outer peripheral surface and a second flow passage allowing the first flow passage to communicate with the back pressure space is formed in the cylinder. The second flow passage is composed of a through hole that penetrates the wall of the cylinder in a radial direction and a communication passage formed between the outer peripheral surface of the cylinder and the inner peripheral surface of the inner yoke to allow the through hole to communicate with the back pressure space.
Abstract translation: 一种斯特林发动机,其中线性电动机的内轭安装在气缸的外周表面上。 为了在置换器的一端侧的压缩空间与气缸的外周侧的背压空间之间保持适当的压力平衡,在活塞的起始于压缩空间侧的端面朝向 在圆筒中形成外周面和允许第一流路与背压空间连通的第二流路。 第二流路由径向贯通圆筒壁的通孔和形成在圆筒的外周面与内轭的内周面之间的连通通道构成,以允许通孔连通 与背压空间。
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