Abstract:
A compact, easy-to-handle turbo vacuum pump includes a housing having an inlet port and an outlet port; a cylindrical rotor disposed in the housing and having a stepped peripheral surface and a plurality of blades secured to protruding corners of the steps; and a pumping mechanism portion in which a pumping stage is formed by a stator which faces the blades of the rotor across a narrow gap, and in which peripheral pump flow paths are provided in step-like recessions inside the stator. The turbo vacuum pump further includes a rotating shaft which is connected to the rotor and is rotatably supported by a radial gas bearing and a thrust gas bearing; and a motor portion for operating the rotor. Gas sucked in through the inlet port can be discharged into the atmosphere through the outlet port.
Abstract:
A device for changing and attaching or mounting an angle of stationary vanes of an axial-flow fluid machine by rotating the stationary vanes through a circumferential movement of an intermediate cylinder. The device includes at least one arm secured to one end of the intermediate cylinder and engaging at a second end in a groove formed in a block member which is attached to an end of an actuator and is movable in a tangential direction of the intermediate cylinder. A guide arrangement is provided for guiding a movement of the block member and at least a portion of the actuator so as to ensure a smooth operation of the actuator by freeing the same from any influence of undesireable forces such as lateral pressure caused by a thermal expansion of the intermediate cylinder.
Abstract:
A shoe press apparatus of a paper machine for pressing wet paper through a nip includes a counter roll, and a shoe module disposed adjacent to the counter roll. The shoe module includes a cylindrical blanket, and a press mechanism disposed inside the cylindrical blanket, extending in a width direction of the cylindrical blanket and individually pressing a plurality of pressed portions formed on the cylindrical blanket along a traveling direction of the wet paper, toward an outer-surface of the counter roll so that the wet paper is pressed in the nip between the cylindrical blanket and the counter roll so that a pressure can be applied efficiently in response to a density required for paper solely by the shoe press apparatus.
Abstract:
A turbo vacuum pump has a rotor and magnetic bearings. The magnetic bearings are held in a housing having a suction port and an exhaust port, and support the rotor rotatably. A peripheral flow pump stage and screw pump stage are formed in the rotor, so that the pressure at the exhaust port can be at or near atmospheric pressure level. Before starting the turbo vacuum pump, the magnetic bearings are operated to displace a rotor position and to scrape off the reaction products which have deposited inside the pump. In addition, before starting the turbo vacuum pump, a stator of the pump is heated up to decrease a binding force of the reaction products. Therefore, the pump can be restarted, even if the rotor has locked by the solidification of deposited reaction products formed during stopping of the pump.
Abstract:
A dry turbo vacuum pump has a multistage circumferential impeller supported on a shaft, and a stator which cooperates with it to form a multistage peripheral flow pump. A centrifugal pump arranged at an inlet side of the peripheral flow pump is also mounted on the same shaft, so that gas sucked from the inlet is discharged to the atmosphere from the peripheral flow pump. The multistage peripheral flow pump and at least one stage of the centrifugal pump are integrated.
Abstract:
A degradation judgment circuit for a secondary battery used in a main apparatus includes a state data acquisition portion, an estimation portion, and a judgment portion. The state data acquisition portion acquires state data that shows the state of the secondary battery during a period from when the secondary battery is connected to the main apparatus to when the degradation of the secondary battery is judged. The estimation portion estimates (a) an internal resistance value at the time of judging degradation of the secondary battery or (b) a change in internal resistance value at the time of judging degradation of the secondary battery with respect to an initial internal resistance value at the time of connecting the secondary battery to the main apparatus, based on the state data. The judgment portion judges the degradation of the secondary battery based on the result of the estimation by the estimation portion.
Abstract:
A turbo vacuum pump has a housing provided with a suction port and a discharge port, an evacuation pump disposed in the housing for compressing a gas sucked through the suction port and discharging the compressed gas through the discharge port, and a motor for driving the evacuation pump, the motor and the evacuation pump having a common rotor. The rotor is supported at its both axial ends by bearings. A spiral grooved dynamic seal is disposed in the vicinity of the suction port and at the opposite side of the suction port to the evacuation pump. The diameter of the spiral grooved dynamic seal, at the smallest, is greater than the outside diameter of the final stage impeller of the evacuation pump.
Abstract:
This invention concerns a production method and a processing apparatus for semiconductor devices, as well as an evacuating apparatus used for the processing apparatus. According to this invention, since the evacuation system of pressure-reduction processing apparatus for conducting various wafer processings during production steps of semi-conductor devices is constituted only with oil-free vacuum pump, deleterious oil contaminations or carbonation products of oils produced from oils upon heating are not present in the pressure-reducing processing chamber as compared with conventional pressure-reducing processing apparatus using a vacuum oil pump as an evacuation pump and the production method of semiconductor devices using such apparatus. Accordingly, highly clean evacuated condition can be attained and, in addition, semiconductor devices at high reliability and with no degradation in the electric characteristics can be obtained by using the pressure-reducing processing apparatus having such a highly clean processing chamber.
Abstract:
A vacuum pump including a centrifugal compressor stage on the side of a suction opening and a circumferential flow compressor on the side of an exhaust opening. The centrifugal compressor pump works as a Siegbahn pump at a steady state, and works as a centrifugal compressor under a transient condition at the initial stage of the pump operation, thus obtaining a high pumping speed under the transient condition.