Abstract:
A vacuum pump (100) includes a rotor (22b), a rotor blade (13), and a magnetic-bearing-integrated stator (22a) including a coil. The rotor includes a pair of spacer members (29), a support member (27), a permanent magnet (26), and a protective ring (28), and in an axial direction of a rotary shaft (11), the support member has a mechanical strength higher than that of the protective ring.
Abstract:
A turbomolecular vacuum pump drives gases to be pumped from a suction orifice to a discharge orifice. In the turbomolecular vacuum pump, the surface of the internal bowl of the rotor arranged facing the shell of the stator capable of being cooled exhibits a higher emissivity than the outer surface of the rotor in fluidic communication with the pumped gases and/or the surface of the shell of the stator capable of being cooled arranged facing the internal bowl of the rotor exhibits a higher emissivity than the outer surface of the rotor in fluidic communication with the pumped gases.
Abstract:
A sealed, passively pumped, polycrystalline ceramic vacuum chamber and method for fabricating the chamber are disclosed. The body of the vacuum chamber is made from a polycrystalline ceramic, for example, alumina. The vacuum chamber includes one or more windows made from a transparent ceramic, for example, sapphire, to accommodate optical access, while remaining amorphous-glass free to minimize or eliminate helium permeation. The vacuum chamber components are joined via laser welding or furnace brazing and the completed chamber is bakeable at temperatures up to 400° C. The vacuum chamber can operate at high or ultra-high vacuum pressures for an extended period through the use of one or more getter-based pumps. The vacuum chamber may include one or more atomic sources depending upon the application.
Abstract:
A pump casing assembly has a first body part, a second body part and a seal disposed between the first and second body parts. The first body part has a first face that defines a recess to receive the seal and the second body part has a first face disposed opposite the first face of the first body part and defining a first sealing surface engaged by the seal and a projection extending beyond the first sealing surface into the recess.
Abstract:
A gas estimation device for estimating a flow rate and a gas type of gas to be vacuum-pumped by a vacuum pumping device including a vacuum pump and an automatic pressure control valve connected to a suction port of the vacuum pump, comprises: a correlation data storage section configured to store first correlation data containing correlation data regarding an opening degree control gain value of the automatic pressure control valve and correlation data regarding an effective exhaust velocity of the vacuum pumping device and second correlation data indicating a correlation among a flow rate, a gas type, and a motor current value in the vacuum pump; and a first estimation section configured to estimate the flow rate and the gas type of the gas to be vacuum-pumped by the vacuum pumping device based on at least the first correlation data and the second correlation data.
Abstract:
An arrangement includes a vacuum pump having a rotor, and a drive unit for driving the rotor and having at least one magnetic interference field-generating component and at least one compensation coil for compensating the magnetic interference field generated by the at least one component.
Abstract:
The invention enables quick evacuation of a chamber to a specified target degree of vacuum while increasing selectivity of evacuation conditions. A vacuum-processing device contains a chamber 40 that enables a workpiece to be soldered in a vacuum environment, an operating part 20 that sets a condition for evacuating the chamber 40, a pump 23 that evacuates the chamber 40, and a control portion 61 that calculates the amount of decrease in the degree of vacuum when evacuating the chamber 40 using a predetermined pump output, sets the calculated value as a reference value and switches an evacuation property from the evacuation property including a lower pump output to the evacuation property including a higher pump output when the calculated amount of decrease in degree of vacuum in real time has become smaller than the reference value.
Abstract:
An object of the present invention is to provide a dry pump and an exhaust gas treatment method which can improve an effect of inhibiting a reaction product from adhering to the inside of a gas outlet port of the dry pump, a gas exhaust pipe, or the like and can also improve an energy saving effect. To attain the object, the present invention includes the gas exhaust pipe disposed to be connected to the gas outlet port of the dry pump and to a gas inlet port of a detoxification device, and a heat exchanger which heats a diluent gas introduced therein using a heat generated from the dry pump and introduces the heated diluent gas into the gas exhaust pipe to heat a used gas to a temperature of not less than a predetermined value.
Abstract:
The invention pertains to a method for predicting a failure in the rotation of the rotor of a vacuum pump, comprising the following steps: sequences of events related to the change over time of the vacuum pump functional signals are recorded (101), a match is sought between at least one sequence of events and at least one pre-established association rule precursory pattern of a vacuum pump behavior model within the recorded sequences of events, said pre-established association rule's precursory patterns involving a failure in the rotor rotation (102), and a time prediction window is deduced during which a failure in the rotor rotation will occur in a vacuum pump (103). The invention also pertains to a pumping device comprising: a vacuum pump (7) comprising at least one rotor and one pump body, said rotor having the potential to be driven rotationally within said pump body by a motor of said pump (7), a functional signal sensor (9) of said pump (7), and a means of predicting (10) a time prediction window during which a failure in the rotor rotation will occur in the vacuum pump (7), said means for prediction (10) calculating the predictive time window based on measurements provided by said functional signal sensor (9).
Abstract:
An electromagnet has a core with a pair of magnetic poles, a primary coil wound around the core, and a series circuit of a first auxiliary coil wound around the first magnetic pole of the core, a second auxiliary coil wound around the second magnetic pole of the core, and capacitors, and is connected in parallel to the primary coil and the series circuit. The first and the second magnetic poles are each divided into a plurality of split magnetic poles. The first auxiliary coil is composed of a plurality of split auxiliary coils wound around the respective pole in the plurality of split magnetic poles of the first magnetic pole so that the mutual inductance with the primary coil becomes zero. The second auxiliary coil is composed of a plurality of split auxiliary coils wound around the respective pole in a plurality of split magnetic poles of the second magnetic pole so that the mutual inductance with the primary coil becomes zero.