公开(公告)号：US12009726B2

公开(公告)日：2024-06-11

申请号：US17612087

申请日：2019-05-24

Applicant: SHIMADZU CORPORATION

Inventor： Takahiro Mori ,  Tsunehiro Inoue ,  Tomoo Ota ,  Masatsugu Takemoto ,  Yu Fu

IPC: H02K7/09 ,  F04D19/04 ,  F04D25/06 ,  F16C32/04 ,  H02K21/20

CPC classification number: H02K7/09 ,  F04D19/04 ,  F04D25/06 ,  F16C32/0474 ,  H02K21/20

Abstract: A vacuum pump (100) includes a rotor (22b), a rotor blade (13), and a magnetic-bearing-integrated stator (22a) including a coil. The rotor includes a pair of spacer members (29), a support member (27), a permanent magnet (26), and a protective ring (28), and in an axial direction of a rotary shaft (11), the support member has a mechanical strength higher than that of the protective ring.

公开(公告)号：US20230400030A1

公开(公告)日：2023-12-14

申请号：US18249269

申请日：2021-06-23

Applicant: PFEIFFER VACUUM

Inventor： Pierre-Emmanuel CAVAREC ,  Romain CRIADO ,  François ROGER ,  Eric DULAC

IPC: F04D19/04 ,  F04D29/32

CPC classification number: F04D19/04 ,  F04D29/321 ,  F04D29/584

Abstract: A turbomolecular vacuum pump drives gases to be pumped from a suction orifice to a discharge orifice. In the turbomolecular vacuum pump, the surface of the internal bowl of the rotor arranged facing the shell of the stator capable of being cooled exhibits a higher emissivity than the outer surface of the rotor in fluidic communication with the pumped gases and/or the surface of the shell of the stator capable of being cooled arranged facing the internal bowl of the rotor exhibits a higher emissivity than the outer surface of the rotor in fluidic communication with the pumped gases.

公开(公告)号：US11766651B1

公开(公告)日：2023-09-26

申请号：US16840637

申请日：2020-04-06

Applicant: National Technology & Engineering Solutions of Sandia, LLC

Inventor： Charles A. Walker ,  Peter D. D. Schwindt ,  Grant Biedermann ,  Dennis J. De Smet ,  Jongmin Lee

IPC: B01J3/00 ,  B01J3/03 ,  C03C3/12 ,  F04D19/04 ,  F16J12/00 ,  G02B1/11

CPC classification number: B01J3/006 ,  B01J3/004 ,  B01J3/03 ,  C03C3/125 ,  F04D19/04 ,  F16J12/00 ,  G02B1/11

Abstract: A sealed, passively pumped, polycrystalline ceramic vacuum chamber and method for fabricating the chamber are disclosed. The body of the vacuum chamber is made from a polycrystalline ceramic, for example, alumina. The vacuum chamber includes one or more windows made from a transparent ceramic, for example, sapphire, to accommodate optical access, while remaining amorphous-glass free to minimize or eliminate helium permeation. The vacuum chamber components are joined via laser welding or furnace brazing and the completed chamber is bakeable at temperatures up to 400° C. The vacuum chamber can operate at high or ultra-high vacuum pressures for an extended period through the use of one or more getter-based pumps. The vacuum chamber may include one or more atomic sources depending upon the application.

公开(公告)号：US20190195234A1

公开(公告)日：2019-06-27

申请号：US16329582

申请日：2017-08-14

Applicant: Edwards Limited

Inventor： Paul Milner

IPC: F04D29/08 ,  F04D19/04 ,  F04D29/64

CPC classification number: F04D29/083 ,  F04D19/04 ,  F04D19/042 ,  F04D29/64 ,  F04D29/644

Abstract: A pump casing assembly has a first body part, a second body part and a seal disposed between the first and second body parts. The first body part has a first face that defines a recess to receive the seal and the second body part has a first face disposed opposite the first face of the first body part and defining a first sealing surface engaged by the seal and a projection extending beyond the first sealing surface into the recess.

公开(公告)号：US20190107110A1

公开(公告)日：2019-04-11

申请号：US16132389

申请日：2018-09-15

Applicant: SHIMADZU CORPORATION

Inventor： Junichiro KOZAKI ,  Masaya NAKAMURA

IPC: F04D15/00

CPC classification number: F04D15/0022 ,  F04D3/005 ,  F04D17/168 ,  F04D19/04 ,  F04D27/001

Abstract: A gas estimation device for estimating a flow rate and a gas type of gas to be vacuum-pumped by a vacuum pumping device including a vacuum pump and an automatic pressure control valve connected to a suction port of the vacuum pump, comprises: a correlation data storage section configured to store first correlation data containing correlation data regarding an opening degree control gain value of the automatic pressure control valve and correlation data regarding an effective exhaust velocity of the vacuum pumping device and second correlation data indicating a correlation among a flow rate, a gas type, and a motor current value in the vacuum pump; and a first estimation section configured to estimate the flow rate and the gas type of the gas to be vacuum-pumped by the vacuum pumping device based on at least the first correlation data and the second correlation data.

公开(公告)号：US09822799B2

公开(公告)日：2017-11-21

申请号：US14481989

申请日：2014-09-10

Applicant: Pfeiffer Vacuum GmbH

Inventor： Armin Conrad

IPC: H02K7/09 ,  F04D13/06 ,  F04D29/05 ,  F04D19/04 ,  F04D29/64 ,  F04D27/02 ,  F04D29/66 ,  H01J37/32 ,  F04D29/54 ,  F04B37/08 ,  F04B37/14 ,  F04D29/058

CPC classification number: F04D29/644 ,  F04B37/08 ,  F04B37/14 ,  F04D19/04 ,  F04D19/042 ,  F04D25/06 ,  F04D27/0292 ,  F04D29/058 ,  F04D29/542 ,  F04D29/661 ,  F04D29/665 ,  F16C2360/45 ,  H01J37/32834

Abstract: An arrangement includes a vacuum pump having a rotor, and a drive unit for driving the rotor and having at least one magnetic interference field-generating component and at least one compensation coil for compensating the magnetic interference field generated by the at least one component.

公开(公告)号：US20170282270A1

公开(公告)日：2017-10-05

申请号：US15507906

申请日：2015-08-28

Applicant: Senju Metal Industry Co., Ltd.

Inventor： Tomotake Kagaya

IPC: B23K1/008 ,  H05K3/34 ,  H01L23/00 ,  F04C18/02

CPC classification number: B23K1/008 ,  B23K2101/42 ,  F04B37/14 ,  F04B49/065 ,  F04B2205/09 ,  F04C18/0207 ,  F04C18/12 ,  F04C25/02 ,  F04C28/08 ,  F04C2240/403 ,  F04D17/168 ,  F04D19/04 ,  F04D27/0261 ,  H01L24/75 ,  H01L2224/75102 ,  H01L2224/75283 ,  H01L2224/759 ,  H05K3/34 ,  H05K2203/085 ,  H05K2203/163

Abstract: The invention enables quick evacuation of a chamber to a specified target degree of vacuum while increasing selectivity of evacuation conditions. A vacuum-processing device contains a chamber 40 that enables a workpiece to be soldered in a vacuum environment, an operating part 20 that sets a condition for evacuating the chamber 40, a pump 23 that evacuates the chamber 40, and a control portion 61 that calculates the amount of decrease in the degree of vacuum when evacuating the chamber 40 using a predetermined pump output, sets the calculated value as a reference value and switches an evacuation property from the evacuation property including a lower pump output to the evacuation property including a higher pump output when the calculated amount of decrease in degree of vacuum in real time has become smaller than the reference value.

公开(公告)号：US20170204860A1

公开(公告)日：2017-07-20

申请号：US15328306

申请日：2015-07-06

Applicant: Edwards Japan Limited

Inventor： Katsumi Nishimura ,  Katsunori Takahashi

IPC: F04C29/04 ,  H01L21/67 ,  F28D7/00 ,  F28D7/16 ,  F04C18/12 ,  F04C29/12

CPC classification number: F04C29/04 ,  F04B37/16 ,  F04C18/126 ,  F04C25/02 ,  F04C29/12 ,  F04C2210/225 ,  F04D19/04 ,  F28D7/0008 ,  F28D7/1653 ,  H01L21/205 ,  H01L21/3065 ,  H01L21/67017

Abstract: An object of the present invention is to provide a dry pump and an exhaust gas treatment method which can improve an effect of inhibiting a reaction product from adhering to the inside of a gas outlet port of the dry pump, a gas exhaust pipe, or the like and can also improve an energy saving effect. To attain the object, the present invention includes the gas exhaust pipe disposed to be connected to the gas outlet port of the dry pump and to a gas inlet port of a detoxification device, and a heat exchanger which heats a diluent gas introduced therein using a heat generated from the dry pump and introduces the heated diluent gas into the gas exhaust pipe to heat a used gas to a temperature of not less than a predetermined value.

公开(公告)号：US09534609B2

公开(公告)日：2017-01-03

申请号：US13380761

申请日：2010-06-24

Applicant: Nicolas Becourt ,  Florent Martin ,  Cecile Pariset ,  Sylvie Galichet ,  Nicolas Meger

Inventor： Nicolas Becourt ,  Florent Martin ,  Cecile Pariset ,  Sylvie Galichet ,  Nicolas Meger

IPC: F04B51/00 ,  F04D19/04 ,  F04D27/00 ,  G01H1/00 ,  G01H1/14 ,  G05B23/02

CPC classification number: F04D19/04 ,  F04B51/00 ,  F04C2220/10 ,  F04C2270/07 ,  F04C2270/12 ,  F04C2270/80 ,  F04D27/001 ,  F05D2260/607 ,  G01H1/003 ,  G01H1/14 ,  G05B23/0245 ,  G05B23/0283

Abstract: The invention pertains to a method for predicting a failure in the rotation of the rotor of a vacuum pump, comprising the following steps: sequences of events related to the change over time of the vacuum pump functional signals are recorded (101), a match is sought between at least one sequence of events and at least one pre-established association rule precursory pattern of a vacuum pump behavior model within the recorded sequences of events, said pre-established association rule's precursory patterns involving a failure in the rotor rotation (102), and a time prediction window is deduced during which a failure in the rotor rotation will occur in a vacuum pump (103). The invention also pertains to a pumping device comprising: a vacuum pump (7) comprising at least one rotor and one pump body, said rotor having the potential to be driven rotationally within said pump body by a motor of said pump (7), a functional signal sensor (9) of said pump (7), and a means of predicting (10) a time prediction window during which a failure in the rotor rotation will occur in the vacuum pump (7), said means for prediction (10) calculating the predictive time window based on measurements provided by said functional signal sensor (9).

Abstract translation: 本发明涉及一种用于预测真空泵转子故障的方法，包括以下步骤：记录与真空泵功能信号随时间变化相关的事件序列（101），匹配是 在所记录的事件序列中，在所述预先确定的关联规则的涉及转子旋转故障（102）的前兆模式之间寻求至少一个事件序列和至少一个预先建立的真空泵行为模型的关联规则前兆模式， ，并且推导出在真空泵（103）中将发生转子旋转故障的时间预测窗口。 本发明还涉及一种泵送装置，其包括：真空泵（7），其包括至少一个转子和一个泵体，所述转子具有通过所述泵（7）的马达在所述泵体内旋转驱动的潜力， 所述泵（7）的功能信号传感器（9）和预测（10）在真空泵（7）内将发生转子转动故障的时间预测窗口的装置，所述预测装置（10） 基于由所述功能信号传感器（9）提供的测量值来计算预测时间窗口。

公开(公告)号：US09506475B2

公开(公告)日：2016-11-29

申请号：US14370506

申请日：2012-12-21

Applicant: SHIMADZU CORPORATION

Inventor： Junichiro Kozaki ,  Yoshihiro Nagano

IPC: F04D19/04 ,  F04D29/058 ,  H02K7/09 ,  F16C32/04 ,  F04D13/06

CPC classification number: F04D29/058 ,  F04D13/06 ,  F04D19/04 ,  F04D19/042 ,  F04D19/048 ,  F16C32/0448 ,  F16C32/0489 ,  F16C2360/45 ,  H02K7/09

Abstract: An electromagnet has a core with a pair of magnetic poles, a primary coil wound around the core, and a series circuit of a first auxiliary coil wound around the first magnetic pole of the core, a second auxiliary coil wound around the second magnetic pole of the core, and capacitors, and is connected in parallel to the primary coil and the series circuit. The first and the second magnetic poles are each divided into a plurality of split magnetic poles. The first auxiliary coil is composed of a plurality of split auxiliary coils wound around the respective pole in the plurality of split magnetic poles of the first magnetic pole so that the mutual inductance with the primary coil becomes zero. The second auxiliary coil is composed of a plurality of split auxiliary coils wound around the respective pole in a plurality of split magnetic poles of the second magnetic pole so that the mutual inductance with the primary coil becomes zero.

Abstract translation: 电磁体具有芯体，具有一对磁极，缠绕在磁芯上的初级线圈和缠绕在磁芯的第一磁极上的第一辅助线圈的串联电路，绕第二磁极缠绕的第二辅助线圈 核心和电容器，并联并联到初级线圈和串联电路。 第一和第二磁极分别分成多个分开的磁极。 第一辅助线圈由在第一磁极的多个分割磁极中的各极上缠绕的多个分割辅助线圈组成，使得与初级线圈的互感为零。 第二辅助线圈由在第二磁极的多个分割磁极中缠绕在各极上的多个分割辅助线圈构成，使得与初级线圈的互感为零。