Pattern inspection apparatus and method
    1.
    发明授权
    Pattern inspection apparatus and method 有权
    图案检验装置及方法

    公开(公告)号:US08285031B2

    公开(公告)日:2012-10-09

    申请号:US13152227

    申请日:2011-06-02

    IPC分类号: G06K9/00 G06K9/48 G06K9/62

    摘要: A pattern inspection apparatus is used for inspecting a fine pattern, such as a semiconductor integrated circuit (LSI), a liquid crystal panel, and a photomask (reticle) for the semiconductor or the liquid crystal panel, which are fabricated based on data for fabricating the fine pattern such as design data. The pattern inspection apparatus includes a reference pattern generation device configured to generate a reference pattern represented by one or more lines, comprising one of a line segment and a curve, from the data, an image generation device configured to generate the image of the pattern to-be-inspected, a detecting device configured to detect an edge of the image of the pattern to-be-inspected, and an inspection device configured to inspect the pattern to-be-inspected by comparing the edge of the image of the pattern to-be-inspected with the one or more lines of the reference pattern.

    摘要翻译: 图案检查装置用于检查用于半导体或液晶面板的半导体集成电路(LSI),液晶面板和光掩模(掩模版)等精细图案,其基于用于制造的数据制造 精细图案如设计数据。 图案检查装置包括:参考图案生成装置,被配置为从数据生成包括线段和曲线中的一个或多个线的代表的参考图案,被配置为生成图案的图像的图像生成装置 被检查的检测装置,被配置为检测所述待检查图案的边缘的检测装置;以及检查装置,被配置为通过将所述图案的图像的边缘与所述图案的边缘进行比较来检查所述图案, 用参考图案的一行或多行进行检查。

    Pattern inspection apparatus and method
    2.
    发明授权
    Pattern inspection apparatus and method 有权
    图案检验装置及方法

    公开(公告)号:US08045785B2

    公开(公告)日:2011-10-25

    申请号:US12852314

    申请日:2010-08-06

    IPC分类号: G06K9/00 G06K9/48 G06K9/62

    摘要: A fine pattern, such as a semiconductor integrated circuit (LSI), a liquid crystal panel, and a photomask (reticle) for the semiconductor or the liquid crystal panel, which are fabricated based on data for fabricating the fine pattern such as design data is inspected by a pattern inspection apparatus. The pattern inspection apparatus for inspecting a pattern to-be-inspected uses an image of the pattern to-be-inspected and data for fabricating the pattern to-be-inspected. The pattern inspection apparatus includes a reference pattern generation device configured to generate a reference pattern represented by one or more lines from the data, an image generation device configured to generate the image of the pattern to-be-inspected, a detecting device configured to detect an edge of the image of the pattern to-be-inspected, and an inspection device configured to inspect the pattern to-be-inspected by comparing edges of the image of the pattern to-be-inspected with the one or more lines of the reference pattern.

    摘要翻译: 基于用于制造诸如设计数据的精细图案的数据制造的诸如用于半导体或液晶面板的半导体集成电路(LSI),液晶面板和光掩模(掩模版))的精细图案是 由图案检查装置检查。 用于检查待检查图案的图案检查装置使用要检查的图案的图像和用于制造待检查图案的数据。 图案检查装置包括参考图案生成装置,被配置为从数据生成由一行或多行表示的参考图案,被配置为生成待检查图案的图像的图像生成装置,被配置为检测 要检查的图案的边缘;以及检查装置,其被配置为通过将待检查的图案的图像的边缘与所述待检查的图案的边缘进行比较来检查待检查的图案, 参考模式。

    Method for producing liquid crystal display cell and sealing agent for liquid crystal display cell
    3.
    发明授权
    Method for producing liquid crystal display cell and sealing agent for liquid crystal display cell 有权
    液晶显示元件制造方法及液晶显示元件用密封剂

    公开(公告)号:US07903230B2

    公开(公告)日:2011-03-08

    申请号:US11730702

    申请日:2007-04-03

    申请人: Tadashi Kitamura

    发明人: Tadashi Kitamura

    摘要: A method for producing a liquid crystal display cell comprising processes of applying a sealing agent on a sealing portion of at least one liquid crystal display cell substrate, dropping liquid crystal on the substrate, and bonding substrates to each other under vacuum, wherein the sealing agent comprising a material to be cured and a curing agent is applied to the sealing portion without mixing the material to be cured and the curing agent, and then the substrates are bonded to each other under vacuum at room temperature to cure the sealing agent, is disclosed. A sealing agent for a liquid crystal display cell wherein the above material to be cured comprise a radically polymerizable resin and an organic peroxide, and the above curing agent comprises a radically polymerizable resin and a decomposition accelerator, is also disclosed.

    摘要翻译: 一种制造液晶显示单元的方法,包括在至少一个液晶显示单元基板的密封部分上施加密封剂,在基板上滴下液晶以及在真空下彼此接合基板的方法,其中密封剂 包括待固化的材料,并且将固化剂施加到密封部分上而不混合待固化的材料和固化剂,然后在室温下在真空下将基底彼此粘合以固化密封剂 。 一种用于液晶显示器的密封剂,其中上述待固化的材料包括自由基聚合树脂和有机过氧化物,并且上述固化剂包括可自由基聚合的树脂和分解促进剂。

    Pattern inspection apparatus, pattern inspection method, and recording medium
    4.
    发明授权
    Pattern inspection apparatus, pattern inspection method, and recording medium 有权
    图案检查装置,图案检查方法和记录介质

    公开(公告)号:US07660455B2

    公开(公告)日:2010-02-09

    申请号:US11044159

    申请日:2005-01-28

    IPC分类号: G06K9/00 G06K9/48 G06K9/62

    摘要: First, a pattern inspection apparatus detects the first edge from an image of a pattern to-be-inspected. Next, the pattern inspection apparatus conducts matching of the image of the pattern to-be-inspected and the first reference pattern by comparing the first edge and an edge of the first reference pattern. Since, as a result of the matching, a shift quantity S1 can be obtained, and then the first reference pattern is shifted by this shift quantity S1. Subsequently the pattern to-be-inspected is inspected by comparing the first edge and the edge of the first reference pattern so shifted. In this first inspection, pattern deformation quantities are obtained and defects are detected. A shift quantity S2 can be obtained as one of the pattern deformation quantities. Next, in order to detect the second edge from the pattern image to-be-inspected, the corresponding second reference pattern is shifted by a shift quantity S1+S2. Using the second reference pattern so shifted, a profile is obtained on the pattern image to-be-inspected and the second edge is detected. Then, by comparing the second edge and the edge of the second reference pattern so shifted, the pattern to-be-inspected is inspected. Also in this second inspection, the pattern deformation quantities are obtained and defects are detected. A shift quantity S3 can be obtained as one of the pattern deformation quantities.

    摘要翻译: 首先,图案检查装置从要检查的图案的图像检测第一边缘。 接下来,图案检查装置通过比较第一参考图案的第一边缘和边缘来进行被检查图案的图像与第一参考图案的匹配。 由于作为匹配的结果,可以获得移位量S1,然后第一基准图案偏移该移位量S1。 随后,通过比较如此偏移的第一参考图案的第一边缘和边缘来检查待检查的图案。 在该第一检查中,获得图案变形量并检测缺陷。 作为图案变形量之一,可以获得偏移量S2。 接下来,为了从要检查的图案图像检测第二边缘,相应的第二参考图案偏移了移位量S1 + S2。 使用这样偏移的第二参考图案,在待检查的图案图像上获得轮廓并检测第二边缘。 然后,通过比较如此移动的第二参考图案的第二边缘和边缘,检查待检查的图案。 此外,在该第二检查中,获得图案变形量并检测缺陷。 可以获得作为图案变形量之一的偏移量S3。

    Pattern inspection apparatus and method
    5.
    发明申请
    Pattern inspection apparatus and method 有权
    图案检验装置及方法

    公开(公告)号:US20080130982A1

    公开(公告)日:2008-06-05

    申请号:US11987766

    申请日:2007-12-04

    IPC分类号: G06K9/00

    摘要: A pattern inspection apparatus is used for inspecting a fine pattern, such as a semiconductor integrated circuit (LSI), a liquid crystal panel, and a photomask (reticle) for the semiconductor or the liquid crystal panel, which are fabricated based on data for fabricating the fine pattern such as design data. The pattern inspection apparatus includes a reference pattern generation device configured to generate a reference pattern represented by one or more lines, comprising one of a line segment and a curve, from the data, an image generation device configured to generate the image of the pattern to-be-inspected, a detecting device configured to detect an edge of the image of the pattern to-be-inspected, and an inspection device configured to inspect the pattern to-be-inspected by comparing the edge of the image of the pattern to-be-inspected with the one or more lines of the reference pattern.

    摘要翻译: 图案检查装置用于检查用于半导体或液晶面板的半导体集成电路(LSI),液晶面板和光掩模(掩模版)等精细图案,其基于用于制造的数据制造 精细图案如设计数据。 图案检查装置包括:参考图案生成装置,被配置为从数据生成包括线段和曲线中的一个或多个线的代表的参考图案,被配置为生成图案的图像的图像生成装置 被检查的检测装置,被配置为检测所述待检查图案的边缘的检测装置;以及检查装置,被配置为通过将所述图案的图像的边缘与所述图案的边缘进行比较来检查所述图案, 用参考图案的一行或多行进行检查。

    Sealing composition for liquid crystal displays and process for production of liquid crystal display panels
    6.
    发明申请
    Sealing composition for liquid crystal displays and process for production of liquid crystal display panels 有权
    用于液晶显示器的密封组合物和制造液晶显示面板的方法

    公开(公告)号:US20060009579A1

    公开(公告)日:2006-01-12

    申请号:US10528196

    申请日:2003-09-19

    IPC分类号: C08G59/00 B32B37/00

    摘要: A liquid crystal sealing agent composition that is a one-component light and heat-curable resin composition containing: (1) a solid epoxy resin having a ring and ball method softening temperature of 40° C. or above; (2) an acrylate monomer and/or a methacrylate monomer, or an oligomer thereof; (3) a thermoplastic polymer having a ring and ball method softening temperature of 50 to 120° C., the thermoplastic polymer being obtained by copolymerizing an acrylate monomer and/or a methacrylate monomer with a monomer copolymerizable therewith; (4) a light-activated radical polymerization initiator; and (5) a latent epoxy curing agent. The light and heat curable liquid crystal sealing agent composition is employable in one drop fill, is excellent in properties of a cured product particularly after first-stage light curing, achieves stable cell gap after cell gap formation, permits prevention of contamination of the liquid crystal in second-stage heat curing, is excellent in curing properties in shaded area, and shows superior bonding reliability.

    摘要翻译: 一种液晶密封剂组合物,其是单组分的光热可固化树脂组合物,其包含:(1)环球法软化温度为40℃以上的固体环氧树脂; (2)丙烯酸酯单体和/或甲基丙烯酸酯单体或其低聚物; (3)具有环球法软化温度为50〜120℃的热塑性聚合物,所述热塑性聚合物通过使丙烯酸酯单体和/或甲基丙烯酸酯单体与可共聚合的单体共聚而得到; (4)光活化自由基聚合引发剂; 和(5)潜在环氧固化剂。 光热固化型液晶密封剂组合物可以在一个滴液填充中使用,特别是在第一阶段光固化之后,固化产物的性能优异,在电池间隙形成之后实现稳定的电池间隙,可以防止液晶的污染 在第二阶段热固化中,阴影区域的固化性优异,粘接可靠性优异。

    Sealant material for plastic liquid crystal display cells including two-component epoxy resin composition
    7.
    发明申请
    Sealant material for plastic liquid crystal display cells including two-component epoxy resin composition 有权
    用于塑料液晶显示单元的密封材料包括双组分环氧树脂组合物

    公开(公告)号:US20050249891A1

    公开(公告)日:2005-11-10

    申请号:US11137401

    申请日:2005-05-26

    摘要: A two-component sealant composition for a plastic liquid crystal display cell of the invention contains the following components (1) to (6): (1) a liquid epoxy resin having from 1.7 to 6 in weight average of epoxy groups in one molecule and an ionic conductivity of an aqueous solution obtained by extraction separation by contact mixing with 10 times by weight of pure water at from 40 to 80° C. of 2 mS/m or less, (2) a curing agent containing one or a mixture of two or more selected from a tetrafunctional mercapto compound, a modified polymercapto derivative, a micro-encapsulated imidazole compound, or a methyl methacrylate adduct of an alicyclic diamine, having an ionic conductivity of an aqueous solution obtained by extraction separation by contact mixing with 10 times by weight of pure water at from 40 to 80° C. of 0.6 mS/m or less, (3) a curing accelerator,(4) an inorganic filler,(5) a silane coupling agent, and (6) rubbery polymer fine particles having a softening temperature of 0° C. or less and an average particle diameter of primary particles of from 0.01 to 5 μm.

    摘要翻译: 本发明的塑料液晶显示元件用双组分密封剂组合物含有下列成分(1)〜(6):(1)在1分子中具有1.7〜6重量%的环氧基的液体环氧树脂, 通过与40重量%的20重量%的纯水接触混合,通过萃取分离获得的水溶液的离子电导率为2mS / m以下,(2)含有一种或其混合物的固化剂 选自四官能巯基化合物,改性聚合物巯基衍生物,微囊化咪唑化合物或脂环族二胺的甲基丙烯酸甲酯加合物中的两种或更多种,其具有通过接触混合提取分离获得的水溶液的离子电导率为10倍 40℃〜80℃的纯水为0.6mS / m以下,(3)固化促进剂,(4)无机填料,(5)硅烷偶联剂,(6)橡胶状聚合物微粒 具有软化温度的颗粒 0℃以下,一次粒子的平均粒径为0.01〜5μm。

    Pattern inspection apparatus, pattern inspection method, and recording medium
    8.
    发明申请
    Pattern inspection apparatus, pattern inspection method, and recording medium 有权
    图案检查装置,图案检查方法和记录介质

    公开(公告)号:US20050226494A1

    公开(公告)日:2005-10-13

    申请号:US11044159

    申请日:2005-01-28

    摘要: First, a pattern inspection apparatus detects the first edge from an image of a pattern to-be-inspected. Next, the pattern inspection apparatus conducts matching of the image of the pattern to-be-inspected and the first reference pattern by comparing the first edge and an edge of the first reference pattern. Since, as a result of the matching, a shift quantity S1 can be obtained, and then the first reference pattern is shifted by this shift quantity S1. Subsequently the pattern to-be-inspected is inspected by comparing the first edge and the edge of the first reference pattern so shifted. In this first inspection, pattern deformation quantities are obtained and defects are detected. A shift quantity S2 can be obtained as one of the pattern deformation quantities. Next, in order to detect the second edge from the pattern image to-be-inspected, the corresponding second reference pattern is shifted by a shift quantity S1+S2. Using the second reference pattern so shifted, a profile is obtained on the pattern image to-be-inspected and the second edge is detected. Then, by comparing the second edge and the edge of the second reference pattern so shifted, the pattern to-be-inspected is inspected. Also in this second inspection, the pattern deformation quantities are obtained and defects are detected. A shift quantity S3 can be obtained as one of the pattern deformation quantities.

    摘要翻译: 首先,图案检查装置从要检查的图案的图像检测第一边缘。 接下来,图案检查装置通过比较第一参考图案的第一边缘和边缘来进行被检查图案的图像与第一参考图案的匹配。 由于作为匹配的结果,可以获得偏移量S 1> 1,然后第一参考图案移位该移位量S 1> 1。 随后,通过比较如此偏移的第一参考图案的第一边缘和边缘来检查待检查的图案。 在该第一检查中,获得图案变形量并检测缺陷。 作为图案变形量之一,可以获得移位量S SUB2< 2>。 接下来,为了从要被检查的图案图像中检测第二边缘,相应的第二参考图案偏移了移位量S 1 + S 2 2。 使用这样偏移的第二参考图案,在待检查的图案图像上获得轮廓并检测第二边缘。 然后,通过比较如此移动的第二参考图案的第二边缘和边缘,检查待检查的图案。 此外,在该第二检查中,获得图案变形量并检测缺陷。 作为图案变形量之一,可以获得偏移量S 3 3。

    Process for producing cured products
    10.
    发明授权
    Process for producing cured products 失效
    生产固化产品的方法

    公开(公告)号:US4122143A

    公开(公告)日:1978-10-24

    申请号:US689658

    申请日:1976-05-24

    摘要: Process for producing conductive cured products are disclosed. In one embodiment a copper compound is reacted with a reducing substance capable of reducing said copper compound to metallic copper, in the presence of a metallic copper powder on a substrate, thereby reducing the copper compound to metallic copper and forming a conductive connected unit of said metallic copper powder, and the connected unit is then subjected to cure molding with a resinous curable component to integrate the constituent elements into the conductive cured product. In a second embodiment, the ligand portion of a copper compound of a ligand capable of reducing copper in a compound state is reacted with the copper moiety present in said copper compound in the presence of a metallic copper powder on a substrate. The copper moiety is reduced and precipitated to form a conductive connected unit of a metallic copper powder and the connected unit is then subjected to cure molding with a resinous curable component.

    摘要翻译: 公开了用于生产导电固化产物的方法。 在一个实施方案中,在金属铜粉末存在下将铜化合物与能够将所述铜化合物还原为金属铜的还原物质反应,从而将铜化合物还原成金属铜并形成所述铜化合物的导电连接单元 金属铜粉末,然后将连接的单元用树脂固化组分进行固化模塑,以将组成元素整合到导电固化产物中。 在第二实施方式中,能够在化合物状态下还原铜的配体的铜化合物的配位体部分与存在于所述铜化合物中的铜部分在金属铜粉末的存在下反应。 铜部分被还原和沉淀以形成金属铜粉末的导电连接单元,然后将连接的单元用树脂固化组分进行固化模塑。