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    DRY CLEANING METHOD FOR RECOVERING ETCH PROCESS CONDITION
    1.
    发明申请
    DRY CLEANING METHOD FOR RECOVERING ETCH PROCESS CONDITION 审中-公开
    用于回收蚀刻工艺条件的干燥清洗方法

    公开(公告)号：US20130084707A1

    公开(公告)日：2013-04-04

    申请号：US13249748

    申请日：2011-09-30

    申请人： Mitsuru HASHIMOTO ,  Akiteru KO ,  Aline WULLUR

    发明人： Mitsuru HASHIMOTO ,  Akiteru KO ,  Aline WULLUR

    IPC分类号： H01L21/308

    CPC分类号： H01L21/31116 ,  H01J37/32724 ,  H01J37/32862 ,  H01L21/32137

    摘要： A method of patterning a substrate is described. The method includes establishing a reference etch process condition for a plasma processing system. The method further includes transferring a mask pattern formed in a mask layer to one or more layers on a substrate using at least one plasma etching process in the plasma processing system to form a feature pattern in the one or more layers and, following the transferring, performing a multi-step dry cleaning process to substantially recover the reference etch condition. Furthermore, the multi-step dry cleaning process includes performing a first dry cleaning process step using plasma formed from a first dry clean process composition containing an oxygen-containing gas, and performing a second dry cleaning process step using plasma formed from a second dry clean process composition containing a halogen-containing gas.

    摘要翻译： 描述了图案化衬底的方法。 该方法包括建立等离子体处理系统的参考蚀刻工艺条件。 该方法还包括在等离子体处理系统中使用至少一个等离子体蚀刻工艺将掩模层中形成的掩模图案转移到衬底上的一个或多个层上，以在一个或多个层中形成特征图案， 执行多步骤干法处理以基本上恢复参考蚀刻条件。 此外，多级干洗方法包括使用由含有含氧气体的第一干洗处理组合物形成的等离子体进行第一干法处理步骤，以及使用由第二干式清洁剂形成的等离子体进行第二干法处理步骤 含有含卤素气体的工艺组合物。

    FUEL CELL COMPRISING OXYGEN ELECTRODE WITH SURFACE NANOSTRUCTURE
    2.
    发明申请
    FUEL CELL COMPRISING OXYGEN ELECTRODE WITH SURFACE NANOSTRUCTURE 审中-公开
    含有表面纳米结构的氧电极的燃料电池

    公开(公告)号：US20100104915A1

    公开(公告)日：2010-04-29

    申请号：US12652468

    申请日：2010-01-05

    申请人： Daisuke INO ,  Mitsuru Hashimoto ,  Akira Taomoto ,  Nobuyasu Suzuki ,  Yuka Yamada

    发明人： Daisuke INO ,  Mitsuru Hashimoto ,  Akira Taomoto ,  Nobuyasu Suzuki ,  Yuka Yamada

    IPC分类号： H01M8/10

    CPC分类号： H01M4/8657 ,  H01M4/8605 ,  H01M4/92

    摘要： The present invention is aimed to realize, in a fuel cell with an oxygen electrode (a catalytic electrode), both catalytic function and immobilization of the catalyst nanoparticles when the catalyst nanoparticles are very small nanoparticles in the size of 1-3 nm.Oxygen electrode used in the fuel cell according to the present invention is an oxygen electrode comprising a plurality of carbon particles, a carbon thin-film, and surface nanostructure, wherein the carbon particles are bonded to one another with the carbon thin-film 2, the surface nanostructure is formed on the surface of the carbon thin-film, the surface nanostructure comprises catalyst nanoparticles made of platinum (Pt) and carbon nanoparticles, diameter of each of the carbon particles is 30 nm or more and 100 nm or less, diameter of the catalyst nanoparticle is 1.7 nm or more and 3.1 nm or less, and diameter of the carbon nanoparticle is 1.0 nm or more and 11.2 nm or less. According to this combination of these elements, the catalyst nanoparticles are confined within three-dimensional structure to be formed by the carbon nanoparticles and are immobilized without losing space which allows any reactant to be accessed to the surface of the catalyst nanoparticles.

    摘要翻译： 本发明旨在在具有氧电极（催化电极）的燃料电池中实现催化剂纳米颗粒在1-3nm尺寸的非常小的纳米颗粒时催化剂纳米颗粒的催化功能和固定。 根据本发明的燃料电池中使用的氧电极是包含多个碳颗粒，碳薄膜和表面纳米结构的氧电极，其中碳颗粒通过碳薄膜2彼此接合， 在碳薄膜的表面上形成表面纳米结构，表面纳米结构包括由铂（Pt）和碳纳米颗粒制成的催化剂纳米颗粒，每个碳颗粒的直径为30nm以上至100nm以下，直径 的催化剂纳米粒子的粒径为1.7nm以上且3.1nm以下，碳纳米粒子的直径为1.0nm以上且11.2nm以下。 根据这些元素的这种组合，催化剂纳米颗粒被限制在由碳纳米颗粒形成的三维结构内，并且被固定化而不会损失允许任何反应物进入催化剂纳米颗粒表面的空间。

    Electron emission material, method of manufacturing the same, and electron emission element including the same
    5.
    发明申请
    Electron emission material, method of manufacturing the same, and electron emission element including the same 有权
    电子发射材料及其制造方法以及包含该发光材料的电子发射元件

    公开(公告)号：US20050184635A1

    公开(公告)日：2005-08-25

    申请号：US11102852

    申请日：2005-04-11

    申请人： Akira Taomoto ,  Masahiro Deguchi ,  Mitsuru Hashimoto ,  Toyokazu Ozaki ,  Motoshi Shibata

    发明人： Akira Taomoto ,  Masahiro Deguchi ,  Mitsuru Hashimoto ,  Toyokazu Ozaki ,  Motoshi Shibata

    IPC分类号： B01J20/20 ,  C01B3/00 ,  C01B31/02 ,  C09K5/08 ,  H01J1/14 ,  H01J1/304 ,  H01J9/02

    CPC分类号： H01J1/304 ,  H01J9/025 ,  H01J2201/30446 ,  Y02E60/324

    摘要： The present invention provides an electron emission material that is excellent in electron emission characteristics, a method of manufacturing the same, as well as an electron emission element. The method is a method of manufacturing an electron emission material including a carbon material obtained by baking a polymer film. In the method, a polyamic acid solution is prepared in which at least one metallic compound selected from a metal oxide and a metal carbonate is dispersed; the polyamic acid solution thus prepared is formed into a film and then is imidized to form a polyimide film including the metallic compound; and then the polyimide film thus formed is baked to form the carbon material. The electron emission material is formed so that it includes a carbon material, a protrusion having a concavity in its surface is formed at the surface of the carbon material, and the protrusion includes a metallic element.

    摘要翻译： 本发明提供电子发射特性优异的电子发射材料，其制造方法以及电子发射元件。 该方法是制造包含通过烘焙聚合物膜获得的碳材料的电子发射材料的方法。 在该方法中，制备分散至少一种选自金属氧化物和金属碳酸盐的金属化合物的聚酰胺酸溶液; 将如此制备的聚酰胺酸溶液形成膜，然后被酰亚胺化以形成包含金属化合物的聚酰亚胺膜; 然后将由此形成的聚酰亚胺膜烘烤以形成碳材料。 电子发射材料形成为包括碳材料，在碳材料的表面上形成有表面凹陷的突起，突起包括金属元素。

    Charge transporting materials and electrophotographic photoconductors using the same
    7.
    发明授权
    Charge transporting materials and electrophotographic photoconductors using the same 失效
    使用该电荷输送材料和电子照相感光体

    公开(公告)号：US5462826A

    公开(公告)日：1995-10-31

    申请号：US197854

    申请日：1994-02-17

    申请人： Tomoyuki Shimada ,  Masaomi Sasaki ,  Mitsuru Hashimoto ,  Tamotsu Aruga

    发明人： Tomoyuki Shimada ,  Masaomi Sasaki ,  Mitsuru Hashimoto ,  Tamotsu Aruga

    IPC分类号： C07C211/55 ,  C07C211/56 ,  C07C217/30 ,  C07C217/80 ,  C07C217/92 ,  C07D307/66 ,  C07D333/36 ,  G03G5/06 ,  G03G5/04

    CPC分类号： C07C211/54 ,  C07C211/55 ,  C07C211/56 ,  C07C217/30 ,  C07C217/80 ,  C07C217/84 ,  C07C217/92 ,  C07D307/66 ,  C07D333/36 ,  G03G5/0614 ,  G03G5/0618

    摘要： Charge transporting materials having general formula (I): ##STR1## wherein R.sup.1 represents hydrogen; an unsubstituted or substituted alkyl group; an alkoxyl group having 1 to 4 carbon atoms; a thioalkoxyl group having 1 to 4 carbon atoms; an aryloxy group; an aralkyl group; a nitro group; an unsubstituted or substituted aryl group; a halogen; an amino group; an unsubstituted or substituted dialkylamino group; R.sup.2 represents hydrogen; an unsubstituted or substituted alkyl group; an alkoxyl group having 1 to 4 carbon atoms; or a halogen; R.sup.3 represents hydrogen; an alkyl group having 1 to 4 carbon atoms; an alkoxyl group having 1 to 4 carbon atoms; a halogen; a dialkylamino group; an amino group; a thioalkoxyl group having 1 to 4 carbon atoms; an aryloxy group; a methylenedioxy group; an aralkyl group; or an unsubstituted or substituted aryl group; R.sup.4 represents hydrogen; an alkoxyl group; or a halogen; Ar represents an unsubstituted or substituted monocyclic hydrocarbon group, non-condensed polycyclic hydrocarbon group or heterocyclic group; k is an integer of 0 to 5, l is an integer of 0 to 4, and (p+m) is 0 to 5, provided that when Ar is an unsubstituted phenyl group, R.sup.1, R.sup.2, R.sup.3, and R.sup.4 cannot be hydrogen at the same time.

    摘要翻译： 具有通式（I）的电荷输送材料：其中R1表示氢; 未取代或取代的烷基; 具有1至4个碳原子的烷氧基; 具有1至4个碳原子的硫代烷氧基; 芳氧基; 芳烷基; 硝基; 未取代或取代的芳基; 卤素 一个氨基; 未取代或取代的二烷基氨基; R2表示氢; 未取代或取代的烷基; 具有1至4个碳原子的烷氧基; 或卤素; R3表示氢; 具有1至4个碳原子的烷基; 具有1至4个碳原子的烷氧基; 卤素 二烷基氨基; 氨基; 具有1至4个碳原子的硫代烷氧基; 芳氧基; 亚甲二氧基; 芳烷基; 或未取代或取代的芳基; R4代表氢; 烷氧基; 或卤素; Ar表示未取代或取代的单环烃基，非稠合多环烃基或杂环基; k为0〜5的整数，l为0〜4的整数，（p + m）为0〜5，条件是当Ar为未取代的苯基时，R1，R2，R3，R4不能为氢 与此同时。

    Electroluminescent device
    9.
    发明授权
    Electroluminescent device 失效
    电致发光器件

    公开(公告)号：US5118986A

    公开(公告)日：1992-06-02

    申请号：US541533

    申请日：1990-06-21

    申请人： Teruyuki Ohnuma ,  Fumio Kawamura ,  Masafumi Ohta ,  Yohta Sakon ,  Toshihiko Takahashi ,  Mitsuru Hashimoto

    发明人： Teruyuki Ohnuma ,  Fumio Kawamura ,  Masafumi Ohta ,  Yohta Sakon ,  Toshihiko Takahashi ,  Mitsuru Hashimoto

    IPC分类号： G03G5/02 ,  H05B33/14

    CPC分类号： G03G5/02 ,  H05B33/14

    摘要： An electroluminescent device having:an anode and a cathode; andat least two organic compound layers sandwiched between said two electrodes,at least one of said organic compound layers being a hole transporting layer containing a compound represented by the following general formula (I) ##STR1## wherein R.sup.1 represents hydrogen atom, a lower alkyl group, a lower alkoxy groups, a halogen or a nitro group, A represents ##STR2## (wherein R.sup.2 represents a lower alkyl group, a substituted or non-substituted aryl group or an aralkyl group, and R.sup.3 represents a lower alkyl group.)

    摘要翻译： 一种电致发光器件，具有：阳极和阴极; 和夹在所述两个电极之间的至少两个有机化合物层，所述有机化合物层中的至少一个是含有由以下通式（I）表示的化合物的空穴传输层：其中R1表示氢原子，低级烷基 基团，低级烷氧基，卤素或硝基，A表示低级烷基，取代或未取代的芳基或芳烷基，R 3表示 表示低级烷基。

    1,14-bis(4-nitrophenyl)-1,3,5,7,9,11,13-tetradecaheptaene and preparation method thereof
    10.
    发明授权
    1,14-bis(4-nitrophenyl)-1,3,5,7,9,11,13-tetradecaheptaene and preparation method thereof 失效
    1,14-双（4-硝基苯基）-1,3,5,7,9,11,13-十四碳庚烯及其制备方法

    公开(公告)号：US5072061A

    公开(公告)日：1991-12-10

    申请号：US532745

    申请日：1990-06-04

    申请人： Masaomi Sasaki ,  Tomoyuki Shimada ,  Mitsuru Hashimoto

    发明人： Masaomi Sasaki ,  Tomoyuki Shimada ,  Mitsuru Hashimoto

    IPC分类号： G03G5/06 ,  C07C201/12 ,  C07C205/06

    CPC分类号： C07C201/12

    摘要： 1,14-bis(4-nitrophenyl)-1,3,5,7,9,11,13-tetradecaheptaene having the following formula (I): ##STR1## and a method of preparing the above-mentioned 1,14-bis(4-nitrophenyl)-1,3,5,7,9,11,13-tetradecaheptaene having formula (I) by allowing a phosphonium salt having formula (II) to react with 5-(4-nitrophenyl)-2,4-pentadiene-1-al having formula (III) in the presence of a basic catalyst:R.sub.3 P.sup..sym. H.sub.2 C--CH.dbd.CH--CH.sub.2 P.sup..sym. R.sub.3.2X.sup..crclbar. (II)wherein R represents a phenyl group or an alkyl group having 1 to 6 carbon atoms; and X represents a halogen, ##STR2##

    摘要翻译： 具有下式（I）的1,14-双（4-硝基苯基）-1,3,5,7,9,11,13-十四碳庚烯：（I）和制备上述1 具有式（I）的14-双（4-硝基苯基）-1,3,5,7,9,11,13-十四碳庚烯通过使具有式（II）的鏻盐与5-（4-硝基苯基） 在碱性催化剂存在下，具有式（III）的-2,4-戊二烯-1-a1：R3P（+）H2C-CH = CH-CH2P（+）R3.2X（ - ）（Ⅱ）其中R表示 苯基或具有1至6个碳原子的烷基; （III）表示卤素，