摘要:
To remove the deposit including a high dielectric constant film deposited on an inside of a processing chamber, by using a cleaning gas activated only by heat. The method includes the steps of: loading a substrate or a plurality of substrates into the processing chamber; performing processing to deposit the high dielectric constant film on the substrate by supplying processing gas into the processing chamber; unloading the processed substrate from the inside of the processing chamber; and cleaning the inside of the processing chamber by supplying a halide gas and an oxygen based gas into the processing chamber, and removing the deposit including the high dielectric constant film deposited on the inside of the processing chamber, and in the step of cleaning the inside of the processing chamber, the concentration of the oxygen based gas in the halide gas and the oxygen based gas is set to be less than 7%.
摘要:
A bridge-shaped frame member is disposed on a front side frame in front of a suspension tower so as to extend vertically and stride over a No. 4 mount. Accordingly, there can be provided a vehicle front body structure that can attain a proper energy absorption of the front side frame with its axial compression can be attained at a vehicle crash.
摘要:
A coating resin composition is able to form a coating film having not only high hardness and weatherability but also high toughness, and can be cured both at room temperature and by heating curing, and further which is good at storage stability. The coating resin composition consists essentially of a silica-dispersed oligomer solution of organosilane prepared by partially hydrolyzing a hydrolyzable organosilane represented by a formula R1nSiX4−n, in colloidal silica dispersed in an organic solvent, water or a mixture thereof, and an acrylic resin which is a copolymer of acrylate or methacrylate represented by a formula, CH2═CR2(COOR3), and a curing catalyst. This composition is used by separating the components into two solutions and then mixing thereof as required. A resin-coated article comprises a cured resin layer of the coating resin composition on the surface of a substrate.
摘要翻译:涂料树脂组合物能够形成不仅具有高硬度和耐候性,而且具有高韧性的涂膜,并且可以在室温下固化并通过加热固化,并且进一步具有良好的储存稳定性。涂料树脂组合物包含 基本上由分散在有机溶剂中的胶体二氧化硅,水或其混合物中的部分水解由式R 1 n SiX 4-n表示的可水解的有机硅烷制备的有机硅烷的二氧化硅分散低聚物溶液和作为丙烯酸酯共聚物的丙烯酸树脂 或甲基丙烯酸酯,由式CH 2 = CR 2(COOR 3)表示,和固化催化剂。 通过将组分分离成两种溶液然后根据需要进行混合来使用该组合物。 树脂涂布制品包括在基材表面上的涂覆树脂组合物的固化树脂层。
摘要:
An antifouling silicone emulsion coating-composition comprising following components (A), (B), (C) and (D), an amount of the component (C) incorporated being in the range of 5 to 80% by weight relative to the total solid contents in the composition: (A) partially hydrolyzed organosiloxane with a weight-average molecular weight of 600 to 5,000 (determined using a polystyrene calibration curve), represented by the average formula (I): R2aSiOb(OR1)c(OH)d wherein R1 and R2 represent a monovalent hydrocarbon group; a, b, c and d are numerals satisfying the following relationships: a+2b+c+d=4, 0≦a
摘要翻译:包含以下组分(A),(B),(C)和(D))的防污硅氧烷乳液涂料组合物,组合物(C)的含量相对于总量为5-80重量% 组合物中的固体成分:(A)由平均分子式(I)表示的重均分子量为600〜5000的部分水解的有机硅氧烷(使用聚苯乙烯校准曲线测定):R2aSiOb(OR1)c(OH)d 其中R1和R2表示一价烃基; a,b,c和d是满足以下关系的数字:a + 2b + c + d = 4,0 <= a <3,0
摘要:
A heat-fixing roll is coated with a hardened silicone coating composition containing such materials (1A) and (1B) or (2A) through (2D) as follows:(1A) organosiloxane consisting of a hydrolyzed condensation polymer of 20-200 parts by weight of silicon compound Si(OR.sup.1).sub.4 and colloidal silica, 100 parts by weight of silicon compound R.sub.2 Si(OR.sup.1).sub.3, and 0-60 parts by weight of silicon compound R.sub.2 Si(OR.sup.1).sub.2 (R.sup.1 and R.sup.2 being monovalent hydrocarbon radicals), with the weight average molecular weight controlled to be more than 800 in polystyrene conversion, and(1B) a straight-chain polysiloxanediol HO(R.sup.3.sub.2 SiO).sub.n H (R.sup.3 being a monovalent hydrocarbon radical, and n.gtoreq.3); or(2A) a silica dispersed oligomer solution of organosilane prepared by partially hydrolyzing a hydrolyzable organosilane R.sup.4.sub.m SiX.sub.4-m (R.sup.4 being the same or different substituted or non-substituted monovalent hydrocarbon radicals of carbon number 1-8, m being an integer 0-3, and X being a hydrolyzable group) within colloidal silica dispersed in an organic solvent, water or their mixture, employing water by 0.001-0.5 mol per 1 mol equivalent amount of the hydrolyzable group (X);(2B) the same as (1B);(2C) polyorganosiloxane containing, in molecules, silanol group R.sup.5.sub.a Si(OH).sub.b O.sub.(4-a-b)/2 (R.sup.5 being the same or different substituted or non-substituted monovalent hydrocarbon radicals of carbon number 1-8, and a and b being figures satisfying 0.2.ltoreq.a.ltoreq.2, 0.0001.ltoreq.b.ltoreq.3 and a+b
摘要翻译:热固定辊用如下材料(1A)和(1B)或(2A)至(2D)的硬化硅涂层组合物涂覆:(1A)由20-200份的水解缩聚物组成的有机硅氧烷 硅化合物Si(OR1)4和胶体二氧化硅的重量,硅化合物R2Si(OR1)3 100重量份和硅化合物R2Si(OR1)2(R1和R2是一价烃基)0-60重量份, 重均分子量在聚苯乙烯换算时控制在800以上,(1B)直链聚硅氧烷二醇HO(R32SiO)nH(R3为一价烃基,n≥3)。 或(2A)通过部分水解可水解的有机硅烷R4mSiX4-m制备的二氧化硅分散的有机硅烷的低聚物溶液(R4是碳数为1-8的相同或不同的取代或未取代的一价烃基,m为整数0-3 ,X为水解性基团),分散在有机溶剂中的胶体二氧化硅,水或其混合物,每1当量水解性基团(X)使用0.001-0.5摩尔的水; (2B)与(1B)相同; (2C)分子中含有硅烷醇基R5aSi(OH)bO(4-ab)/ 2(R5为碳数为1-8的相同或不同的取代或未取代的一价烃基)的聚有机硅氧烷,a和b为 满足0.2 = a,0.0001 = b 3>和a + b <4的数字; 和(2D)固化催化剂; 其中涂覆的热定影辊具有优异的耐热性,耐磨性,脱模性和涂层与热定影辊之间的长期粘合。
摘要:
A coating composition, a coated inorganic hardened product having a cured layer formed from the coating composition, and a process for producing the coated hardened product.a coating composition comprising the following components (A) to (C);an organosilane oligomer solution containing silica particles dispersed therein, said solution being obtained by partially hydrolyzing a hydrolyzable organosilane represented by the formulaR.sup.1.sub.n SiX.sub.4-n (I)wherein R.sup.1 which may be the same or different each represents a substituted or unsubstituted monovalent hydrocarbon group having 1 to 8 carbon atoms, n is an integer of from 0 to 3, and X represents a hydrolyzable group, in a colloidal silica dispersed in an organic solvent or water,(B) a polyorganosiloxane having a silanol group in the molecule thereof, represented by the average composition formulaR.sup.2.sub.a Si(OH).sub.b O.sub.(4-a-b)/2 (II)wherein R.sup.2 may be the same or different each represents a substituted or unsubstituted monovalent hydrocarbon group having 1 to 8 carbon atoms, and a and b are numbers satisfying the following equations:0.2.ltoreq.a.ltoreq.20.0001.ltoreq.b.ltoreq.3a+b.ltoreq.4, and(C) a catalyst.
摘要:
A method of forming an electrical contact between interconnection layers located at different layer levels includes the steps of forming a contact hole in an interlayer insulating film, and forming a metallic intermediate layer on an exposed surface portion of a first conductive interconnection layer and the interlayer insulating film. Then, a portion of said metallic intermediate layer exposed through said contact hole and an oxide film formed on said surface portion of the first conductive interconnection layer are eliminated by an etching process. This process is carried out in a vacuum. After that, in the vacuum, a second conductive interconnection layer is formed in said contact hole and formed on said interlayer insulating film so that an electrical contact between said first and second conductive interconnection layers are formed.
摘要:
A titanium nitride barrier layer of 50 to 200 nm in thickness is fabricated between a silicon substrate and an aluminum electrode layer of an IC device by reactive sputtering performed in a mixed gas including oxygen in a proportion of 1 to 5% by volume relative to other gases, comprising an inert gas and a reactive gas, providing the temperature of the silicon substrate at 350.degree. to 550.degree. C. during the reactive sputtering, so that the product has a failure rate, indicating the property of preventing mutual diffusion of silicon and aluminum atoms from occurring, of less than 1% and a resistivity less than 100 .mu..OMEGA..cm.
摘要:
A semiconductor device comprising a metallized layer formed on a silicon substrate, wherein said metallized layer is an aluminum alloy consisting essentially of aluminum, silicon and at least one element selected from the group consisting of titanium, vanadium, chromium, tungsten, and phosphorus the amount of silicon being 1.0% to 3.0% by weight, the amount of said selected element corresponding to the relative service life required of the metallized layer, said required service life being 10 times that of a metallized layer having the same composition as that of the above-mentioned metallized layer except for being free from said element, and the rest being aluminum. For example, the metallized layer may contain at least 0.04% and less than 0.10% by weight of titanium, 1.0% by weight of silicon, and the rest aluminum.
摘要:
In a data processing apparatus, when an instruction for starting validation is provided, or when definition information is updated, data input from a data source is collected, and a process for narrowing down of the collected data is executed. In the data narrowing process, by extracting records and items as process targets according to the definition information that defines the operation of the apparatus, the number of data items used for validation is reduced. Then, the operation is validated using the narrowed data. In the operation validation process, a virtual transfer destination of output of data is provided within the apparatus, and the data is output to the virtual transfer destination, for comparison with the output data, whereby the validation of the operation is performed.