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公开(公告)号：US06518548B2
公开(公告)日：2003-02-11
申请号：US10084378
申请日：2002-02-28
申请人： Masakazu Sugaya , Fumio Murai , Yutaka Kaneko , Masafumi Kanetomo , Shigeki Hirasawa , Tomoji Watanabe , Tatuharu Yamamoto , Katsuhiro Kuroda
发明人： Masakazu Sugaya , Fumio Murai , Yutaka Kaneko , Masafumi Kanetomo , Shigeki Hirasawa , Tomoji Watanabe , Tatuharu Yamamoto , Katsuhiro Kuroda
IPC分类号： H05B368
CPC分类号： H01L21/67103 , H01L21/67248
摘要： So as to provide a substrate temperature control system capable of unifying the temperature of the substrate and capable of shortening the temperature elevation time (temperature lowering time), the substrate temperature control system is equipped with a temperature control plate (heating or cooling plate) having a plurality of projections on the surface and serving to set the temperature of the substrate, and a chuck mechanism to fix the substrate in contact to a plurality of the projections by chucking the substrate toward the direction of the temperature control plate.
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公开(公告)号：US5242539A
公开(公告)日：1993-09-07
申请号：US859336
申请日：1992-03-27
申请人： Takao Kumihashi , Kazunori Tsujimoto , Shinichi Tachi , Masafumi Kanetomo , Junichi Kobayashi , Tatehito Usui , Nobuyuki Mise
发明人： Takao Kumihashi , Kazunori Tsujimoto , Shinichi Tachi , Masafumi Kanetomo , Junichi Kobayashi , Tatehito Usui , Nobuyuki Mise
IPC分类号： H01L21/302 , H01J37/32 , H01L21/02 , H01L21/3065 , H01L21/311 , H01L21/3213
CPC分类号： H01L21/02071 , H01J37/32082 , H01J37/32192 , H01J37/3244 , H01J37/32449 , H01J37/32834 , H01L21/3065 , H01L21/30655 , H01L21/31116 , H01L21/32136 , H01L21/32137 , H01J2237/3322 , H01J2237/3343
摘要： A plasma treatment method and apparatus utilize various gas inlet and outlet structure arrangements to optimize treatment characteristics for a semiconductor wafer. A buffer zone is created between gas inlets and the discharge zone of the vacuum treatment chamber to enhance uniformity of gas flow. The evacuation arrangement enables reactant gas to be exhausted uniformly to reduce gas residence time below a threshold while maintaining optimum flow rates and etch uniformity at low effective exhaust speeds.
摘要翻译： 等离子体处理方法和装置利用各种气体入口和出口结构布置来优化半导体晶片的处理特性。 在气体入口和真空处理室的排放区之间产生缓冲区，以增强气体流动的均匀性。 排气装置使反应气体均匀排气，以将气体停留时间降低到阈值以下，同时在低有效排气速度下保持最佳流速和蚀刻均匀性。
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公开(公告)号：US07499573B2
公开(公告)日：2009-03-03
申请号：US10887931
申请日：2004-07-12
IPC分类号： G06K9/00
CPC分类号： G06T7/0012 , A01G7/00 , G01N21/13 , G01N21/253 , G01N2035/0494 , G06K9/00
摘要： There are provided an image acquisition system capable of storing high-accuracy measurement of changes in the shape of a plant growing process in image information with high accuracy and an analyzing method for analyzing an acquired image to analyze plant growing.There is provided a plant growing analyzing system having operation detection means of a conveying mechanism of a plant in order that an observed plant in an image is photographed at a constantly fixed position or angle; a position detecting mark in the acquired image; a computation part for evaluating detected data to control a conveying amount; and a conveying control part, wherein the growing process of many plants is stored in image information in a long period, and the stored image is used to realize high-accuracy measurement.
摘要翻译： 提供了一种能够高精度地存储植物生长过程中的变化形状的高精度测量图像信息的图像采集系统和用于分析所获取的图像以分析植物生长的分析方法。 提供了具有植物输送机构的操作检测装置的植物生长分析系统，以便以恒定的位置或角度拍摄图像中的观察植物; 所获取的图像中的位置检测标记; 用于评估检测到的数据以控制传送量的计算部件; 以及输送控制部，其中许多植物的生长过程被长时间存储在图像信息中，并且存储的图像用于实现高精度测量。
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公开(公告)号：US20050180608A1
公开(公告)日：2005-08-18
申请号：US10887931
申请日：2004-07-12
IPC分类号： A01G7/00 , A01G9/00 , G01N21/13 , G01N21/25 , G01N35/02 , G01N35/04 , G06T1/00 , G06T7/00 , G06K9/00
CPC分类号： G06T7/0012 , A01G7/00 , G01N21/13 , G01N21/253 , G01N2035/0494 , G06K9/00
摘要： There are provided an image acquisition system capable of storing high-accuracy measurement of changes in the shape of a plant growing process in image information with high accuracy and an analyzing method for analyzing an acquired image to analyze plant growing. There is provided a plant growing analyzing system having operation detection means of a conveying mechanism of a plant in order that an observed plant in an image is photographed at a constantly fixed position or angle; a position detecting mark in the acquired image; a computation part for evaluating detected data to control a conveying amount; and a conveying control part, wherein the growing process of many plants is stored in image information in a long period, and the stored image is used to realize high-accuracy measurement.
摘要翻译： 提供了一种能够高精度地存储植物生长过程中的变化形状的高精度测量图像信息的图像采集系统和用于分析所获取的图像以分析植物生长的分析方法。 提供了具有植物输送机构的操作检测装置的植物生长分析系统，以便以恒定的位置或角度拍摄图像中的观察植物; 所获取的图像中的位置检测标记; 用于评估检测到的数据以控制传送量的计算部件; 以及输送控制部，其中许多植物的生长过程被长时间存储在图像信息中，并且存储的图像用于实现高精度测量。
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公开(公告)号：US4956043A
公开(公告)日：1990-09-11
申请号：US192178
申请日：1988-05-10
申请人： Masafumi Kanetomo , Shinichi Tachi , Kazunori Tsujimoto , Kiichiro Mukai , Takahiro Daikoku , Shigekazu Kieda , Keijiro Shindo , Kenshiro Tamura
发明人： Masafumi Kanetomo , Shinichi Tachi , Kazunori Tsujimoto , Kiichiro Mukai , Takahiro Daikoku , Shigekazu Kieda , Keijiro Shindo , Kenshiro Tamura
CPC分类号： H01L21/67103 , H01J37/32935 , H01L21/67069
摘要： A dry etching apparatus is disclosed, in which the temperature of an article to be etched, placed on a wafer table, is controlled by a liquefied gas and a heater and the height of the surface of the liquefied gas can be varied arbitrarily. This apparatus enables the controlling of the temperature of the article to be done with a high accuracy over a wide range of low levels. Therefore, a low-temperature dry etching operation, which cannot otherwise be attained by a conventional apparatus of this kind, can be carried out.
摘要翻译： 公开了一种干蚀刻装置，其中放置在晶片台上的待蚀刻制品的温度由液化气和加热器控制，并且液化气表面的高度可以任意变化。 该装置能够在宽范围的低水平下以高精度控制制品的温度。 因此，可以进行这种常规装置不能达到的低温干蚀刻操作。
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公开(公告)号：US20050040654A1
公开(公告)日：2005-02-24
申请号：US10767438
申请日：2004-01-30
CPC分类号： H02N1/006
摘要： Unnecessary moment in a vibrator is remarkably reduced and the power generation efficiency in capacitance-type vibrational power generation is remarkably improved. A vibrator provided in a variable-capacitance type vibrator has a structure in that one ends of oscillation plates extending in a longitudinal direction thereof sandwiches a mass and the other ends thereof sandwiches a spacer, respectively, wherein the oscillation plates are arranged parallel to each other. A space portion between the oscillation plates and in which the mass and the spacer are not in contact with each other functions as a spring. By holding the mass by the two oscillation plates, the mass can be oscillated while it is in parallel to an opposing electrode. Therefore, generation of unnecessary moment in a direction other than an oscillation direction can be remarkably reduced.
摘要翻译： 振动器中不必要的力矩明显降低，电容式振动发电的发电效率显着提高。 设置在可变电容型振动器中的振动器具有以下结构：振动板沿其纵向方向延伸的一端夹着质量，并且其另一端分别夹持间隔件，其中振动板彼此平行布置 。 振动板之间的空间部分和质量块和间隔件彼此不接触的空间部分用作弹簧。 通过用两个振动板保持质量，质量可以在与对置电极平行的同时摆动。 因此，可以显着地减少在振荡方向以外的方向产生不必要的力矩。
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公开(公告)号：US5005434A
公开(公告)日：1991-04-09
申请号：US390720
申请日：1989-08-08
申请人： Yoshio Watanabe , Mamoru Taki , Junkichi Miura , Masao Kamahori , Hiroyuki Miyagi , Yasuhide Matsumura , Masafumi Kanetomo
发明人： Yoshio Watanabe , Mamoru Taki , Junkichi Miura , Masao Kamahori , Hiroyuki Miyagi , Yasuhide Matsumura , Masafumi Kanetomo
CPC分类号： G01N35/1097 , G01N1/14 , G01N2015/0011 , G01N2021/4735 , G01N2201/08 , G01N30/34
摘要： An autosampler consists of a needle to draw specimen from a specimen container into a passage therein; a block having a passage that follows the passge in the needle; a suction mechanism for drawing in the specimen by suction through the passages in the needle and the block; a discharge mechanism for discarding the specimen drawn in by the suction mechanism; and a detecting device for detecting air bubble in the specimen, the detecting device being embedded in the block in such a manner as to face the passage in the block. The detecting device detects the air bubbles in the specimen according to changes in physical or chemical properties of the specimen passing through the passage in the block. The discharge mechanism is activated by the detecting device to discharge air-mixed specimen. When even a small amount of air is drawn into the passage from the specimen container, in which only a small amount of specimen is contained, the air specimen can reliably be distinguished from normal specimen by this autosampler. Therefore the reliability of the system using the autosampler can be significantly improved.
摘要翻译： 自动进样器由将样本从样本容器拉入其中的通道的针头组成; 具有跟随针头中的传递的通道的块; 抽吸机构，用于通过抽吸通过针和块中的通道抽吸样品; 用于废弃由抽吸机构吸入的试样的排出机构; 以及用于检测样本中的气泡的检测装置，所述检测装置以面对块中的通道的方式嵌入块中。 检测装置根据通过块体中的通道的试样的物理或化学特性的变化来检测样品中的气泡。 排出机构由检测装置启动，以排出空气混合样品。 即使少量的空气从容纳少量试样的试样容器的通道中吸入，也可以通过该自动进样器将空气样本与正常试样区分开。 因此，可以显着提高使用自动进样器的系统的可靠性。
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公开(公告)号：US07112911B2
公开(公告)日：2006-09-26
申请号：US10767438
申请日：2004-01-30
CPC分类号： H02N1/006
摘要： Unnecessary moment in a vibrator is remarkably reduced and the power generation efficiency in capacitance-type vibrational power generation is remarkably improved. A vibrator provided in a variable-capacitance type vibrator has a structure in that one ends of oscillation plates extending in a longitudinal direction thereof sandwiches a mass and the other ends thereof sandwiches a spacer, respectively, wherein the oscillation plates are arranged parallel to each other. A space portion between the oscillation plates and in which the mass and the spacer are not in contact with each other functions as a spring. By holding the mass by the two oscillation plates, the mass can be oscillated while it is in parallel to an opposing electrode. Therefore, generation of unnecessary moment in a direction other than an oscillation direction can be remarkably reduced.
摘要翻译： 振动器中不必要的力矩明显降低，电容式振动发电的发电效率显着提高。 设置在可变电容型振动器中的振动器具有以下结构：振动板沿其纵向方向延伸的一端夹着质量，并且其另一端分别夹持间隔件，其中振动板彼此平行布置 。 振动板之间的空间部分和质量块和间隔件彼此不接触的空间部分用作弹簧。 通过用两个振动板保持质量，质量可以在与对置电极平行的同时摆动。 因此，可以显着地减少在振荡方向以外的方向产生不必要的力矩。
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9.发明授权Substrate temperature control system and method for controlling temperature of substrate 失效基板温度控制系统及控制基板温度的方法公开(公告)号：US06394797B1
公开(公告)日：2002-05-28
申请号：US09526460
申请日：2000-03-16
申请人： Masakazu Sugaya , Fumio Murai , Yutaka Kaneko , Masafumi Kanetomo , Shigeki Hirasawa , Tomoji Watanabe , Tatuharu Yamamoto , Katsuhiro Kuroda
发明人： Masakazu Sugaya , Fumio Murai , Yutaka Kaneko , Masafumi Kanetomo , Shigeki Hirasawa , Tomoji Watanabe , Tatuharu Yamamoto , Katsuhiro Kuroda
IPC分类号： F27D500
CPC分类号： H01L21/67103 , H01L21/67248
摘要： To provide a substrate temperature control system capable of unifying the temperature of the substrate and capable of shortening the temperature elevation time (temperature lowering time), the substrate temperature control system is equipped with a temperature control plate (heating or cooling plate) having a plurality of projections on its surface and acting to set the temperature of the substrate. A chuck mechanism is provided to fix the substrate in contact with a plurality of the projections by chucking the substrate toward the temperature control plate.
摘要翻译： 为了提供能够统一基板的温度并且能够缩短升温时间（降温时间）的基板温度控制系统，基板温度控制系统配备有具有多个温度控制板（加热或冷却板） 的表面上的突起并用于设定基板的温度。 提供卡盘机构，通过将基板夹持到温度控制板来固定基板与多个突起接触。
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