Image sensor having moisture absorption barrier layer, fabricating method thereof, and device comprising the image sensor
    3.
    发明授权
    Image sensor having moisture absorption barrier layer, fabricating method thereof, and device comprising the image sensor 有权
    具有吸湿阻挡层的图像传感器及其制造方法以及包括图像传感器的装置

    公开(公告)号:US08847297B2

    公开(公告)日:2014-09-30

    申请号:US12977950

    申请日:2010-12-23

    Abstract: Image sensor, fabricating method thereof, and device comprising the image sensor are provided, which comprises a substrate in which a photoelectric transformation device is formed, an interconnection structure formed on the substrate and including multiple intermetal dielectric layers and multiple metal interconnections placed in the multiple intermetal dielectric layers, the interconnection structure defining a cavity aligned corresponding to the photoelectric transformation device, a moisture absorption barrier layer conformally formed on a top of the interconnection structure and in the cavity; and a light guide unit formed on the moisture absorption barrier layer and including light transmittance material filling the cavity, wherein the moisture absorption barrier layer is formed with a uniform thickness on both sides and a bottom of the cavity and on a top surface of the multiple intermetal dielectric layer.

    Abstract translation: 提供了图像传感器及其制造方法以及包括图像传感器的装置,其包括形成有光电转换装置的基板,形成在基板上的互连结构,并且包括多个金属间介电层和多个金属互连 金属间电介质层,所述互连结构限定对应于所述光电转换装置对准的空腔;保形地形成在所述互连结构的顶部和所述空腔中的吸湿阻挡层; 以及导光单元,其形成在吸湿阻挡层上并且包括填充空腔的透光材料,其中吸湿阻挡层在空腔的两侧和底部以及多个顶部表面上形成均匀的厚度 金属间电介质层。

    Image Sensor Devices Having Peripheral Circuits Therein that Use Light Guide Materials as Electrical Insulators
    4.
    发明申请
    Image Sensor Devices Having Peripheral Circuits Therein that Use Light Guide Materials as Electrical Insulators 有权
    具有使用导光材料作为电绝缘体的外围电路的图像传感器设备

    公开(公告)号:US20110176022A1

    公开(公告)日:2011-07-21

    申请号:US12964043

    申请日:2010-12-09

    Abstract: An image sensor includes an array of image sensor cells, on a substrate, and a peripheral circuit region extending adjacent the array of image sensor cells. The array of image sensor cells includes a plurality of lens elements and a plurality of color filters extending adjacent the plurality of lens elements. A plurality of photodiodes is provided in the substrate. The plurality of photodiodes are aligned to corresponding ones of the plurality of lens elements. An interconnection structure is also provided, which extends between the plurality of photodiodes and the plurality of color filters. The interconnection structure has an array of cavities therein that are aligned to corresponding ones of the plurality of photodiodes and are filled with a light guide material. The peripheral circuit region includes a metal interconnect pattern and an electrically conductive pad on the metal interconnect pattern. An electrically insulating layer extends on the electrically conductive pad. The electrically insulating layer is formed of the light guide material.

    Abstract translation: 图像传感器包括在基板上的图像传感器单元的阵列和与图像传感器单元阵列相邻延伸的外围电路区域。 图像传感器单元的阵列包括多个透镜元件和与多个透镜元件相邻延伸的多个滤色器。 在基板中设置多个光电二极管。 多个光电二极管与多个透镜元件中的相应的一个对准。 还提供互连结构,其在多个光电二极管和多个滤色器之间延伸。 互连结构具有其中的空腔阵列,其与多个光电二极管中的相应的一个对准,并且填充有导光材料。 外围电路区域包括金属互连图案和金属互连图案上的导电焊盘。 电绝缘层在导电垫上延伸。 电绝缘层由导光材料形成。

    IMAGE SENSOR, FABRICATING METHOD THEREOF, AND DEVICE COMPRISING THE IMAGE SENSOR
    5.
    发明申请
    IMAGE SENSOR, FABRICATING METHOD THEREOF, AND DEVICE COMPRISING THE IMAGE SENSOR 有权
    图像传感器,其制造方法和包含图像传感器的装置

    公开(公告)号:US20110163364A1

    公开(公告)日:2011-07-07

    申请号:US12977950

    申请日:2010-12-23

    Abstract: Image sensor, fabricating method thereof, and device comprising the image sensor are provided, which comprises a substrate in which a photoelectric transformation device is formed, an interconnection structure formed on the substrate and including multiple intermetal dielectric layers and multiple metal interconnections placed in the multiple intermetal dielectric layers, the interconnection structure defining a cavity aligned corresponding to the photoelectric transformation device, a moisture absorption barrier layer conformally formed on a top of the interconnection structure and in the cavity; and a light guide unit formed on the moisture absorption barrier layer and including light transmittance material filling the cavity, wherein the moisture absorption barrier layer is formed with a uniform thickness on both sides and a bottom of the cavity and on a top surface of the multiple intermetal dielectric layer.

    Abstract translation: 提供了图像传感器及其制造方法以及包括图像传感器的装置,其包括形成有光电转换装置的基板,形成在基板上的互连结构,并且包括多个金属间介电层和多个金属互连 金属间电介质层,所述互连结构限定对应于所述光电转换装置对准的空腔;保形地形成在所述互连结构的顶部和所述空腔中的吸湿阻挡层; 以及导光单元,其形成在吸湿阻挡层上并且包括填充空腔的透光材料,其中吸湿阻挡层在空腔的两侧和底部以及多个顶部表面上形成均匀的厚度 金属间电介质层。

    Methods of manufacturing an image sensor
    6.
    发明申请
    Methods of manufacturing an image sensor 有权
    图像传感器的制造方法

    公开(公告)号:US20100009493A1

    公开(公告)日:2010-01-14

    申请号:US12458087

    申请日:2009-06-30

    Abstract: The method of manufacturing an image sensor includes providing a semiconductor substrate including a first pixel region, first forming a first pattern on the first pixel region, first performing a reflow of the first pattern to form a sub-micro lens on the first pixel region, second forming a second pattern on the sub-micro lens, and second performing a reflow of the second pattern to form a first micro lens covering the sub-micro lens.

    Abstract translation: 制造图像传感器的方法包括提供包括第一像素区域的半导体衬底,首先在第一像素区域上形成第一图案,首先在第一像素区域上执行第一图案的回流以形成子微透镜, 在所述亚微透镜上形成第二图案,并且第二图案执行所述第二图案的回流以形成覆盖所述副微透镜的第一微透镜。

    Image sensor and method of fabrication
    7.
    发明授权
    Image sensor and method of fabrication 失效
    图像传感器和制造方法

    公开(公告)号:US07504614B2

    公开(公告)日:2009-03-17

    申请号:US11336906

    申请日:2006-01-23

    Abstract: Disclosed is an image sensor and method of fabricating the same. The image sensor includes a photoelectric transformation region formed in a semiconductor substrate, and pluralities of interlayer dielectric films formed over the photoelectric transformation regions. The interlayer dielectric films contain multilevel interconnection layers. A color filter layer is disposed in a well region formed in the interlayer dielectric films over the photoelectric transformation region. A passivation layer is interposed between the color filter layer and the interlayer dielectric films.

    Abstract translation: 公开了一种图像传感器及其制造方法。 图像传感器包括形成在半导体衬底中的光电转换区域和形成在光电转换区域上的多个层间电介质膜。 层间绝缘膜包含多层互连层。 滤色器层设置在形成于光电转换区域的层间电介质膜的阱区中。 钝化层插在滤色器层和层间绝缘膜之间。

    Image sensor devices having peripheral circuits therein that use light guide materials as electrical insulators
    8.
    发明授权
    Image sensor devices having peripheral circuits therein that use light guide materials as electrical insulators 有权
    其中具有使用光导材料作为电绝缘体的外围电路的图像传感器装置

    公开(公告)号:US08482641B2

    公开(公告)日:2013-07-09

    申请号:US12964043

    申请日:2010-12-09

    Abstract: An image sensor includes an array of image sensor cells, on a substrate, and a peripheral circuit region extending adjacent the array of image sensor cells. The array of image sensor cells includes a plurality of lens elements and a plurality of color filters extending adjacent the plurality of lens elements. A plurality of photodiodes is provided in the substrate. The plurality of photodiodes are aligned to corresponding ones of the plurality of lens elements. An interconnection structure is also provided, which extends between the plurality of photodiodes and the plurality of color filters. The interconnection structure has an array of cavities therein that are aligned to corresponding ones of the plurality of photodiodes and are filled with a light guide material. The peripheral circuit region includes a metal interconnect pattern and an electrically conductive pad on the metal interconnect pattern. An electrically insulating layer extends on the electrically conductive pad. The electrically insulating layer is formed of the light guide material.

    Abstract translation: 图像传感器包括在基板上的图像传感器单元的阵列和与图像传感器单元阵列相邻延伸的外围电路区域。 图像传感器单元的阵列包括多个透镜元件和与多个透镜元件相邻延伸的多个滤色器。 在基板中设置多个光电二极管。 多个光电二极管与多个透镜元件中的相应的一个对准。 还提供互连结构,其在多个光电二极管和多个滤色器之间延伸。 互连结构具有其中的空腔阵列,其与多个光电二极管中的相应的一个对准,并且填充有导光材料。 外围电路区域包括金属互连图案和金属互连图案上的导电焊盘。 电绝缘层在导电垫上延伸。 电绝缘层由导光材料形成。

    Image sensor and method of manufacturing the same
    9.
    发明授权
    Image sensor and method of manufacturing the same 有权
    图像传感器及其制造方法

    公开(公告)号:US08334554B2

    公开(公告)日:2012-12-18

    申请号:US12380844

    申请日:2009-03-04

    Abstract: An image sensor includes a first region of a substrate having photoelectric conversion elements formed therein, and includes a second region of the substrate outside of the first region. The image sensor includes a plurality of lenses, a plurality of embossing structures, and a protective layer. The lenses are formed over the first region. The embossing structures are formed over the second region, and the embossing structures are separated from each-other. The protective layer is formed over the lenses and the embossing structures that prevent crack propagation.

    Abstract translation: 图像传感器包括其中形成有光电转换元件的衬底的第一区域,并且包括在第一区域外部的衬底的第二区域。 图像传感器包括多个透镜,多个压花结构和保护层。 透镜形成在第一区域上。 压花结构形成在第二区域上,并且压花结构彼此分离。 保护层形成在透镜和防止裂纹扩展的压花结构之上。

    Image sensor and method of manufacturing the same
    10.
    发明申请
    Image sensor and method of manufacturing the same 有权
    图像传感器及其制造方法

    公开(公告)号:US20090224347A1

    公开(公告)日:2009-09-10

    申请号:US12380844

    申请日:2009-03-04

    Abstract: An image sensor includes a first region of a substrate having photoelectric conversion elements formed therein, and includes a second region of the substrate outside of the first region. The image sensor includes a plurality of lenses, a plurality of embossing structures, and a protective layer. The lenses are formed over the first region. The embossing structures are formed over the second region, and the embossing structures are separated from each-other. The protective layer is formed over the lenses and the embossing structures that prevent crack propagation.

    Abstract translation: 图像传感器包括其中形成有光电转换元件的衬底的第一区域,并且包括在第一区域外部的衬底的第二区域。 图像传感器包括多个透镜,多个压花结构和保护层。 透镜形成在第一区域上。 压花结构形成在第二区域上,并且压花结构彼此分离。 保护层形成在透镜和防止裂纹扩展的压花结构之上。

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