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    High aspect ratio chemical microreactor
    7.
    发明申请
    High aspect ratio chemical microreactor 审中-公开
    高纵横比化学微反应器

    公开(公告)号：US20050207953A1

    公开(公告)日：2005-09-22

    申请号：US10896413

    申请日：2004-07-20

    申请人： Ravindra Upadhye ,  Jeffrey Morse ,  David Sopchak ,  Mark Havstad ,  Robert Graff

    发明人： Ravindra Upadhye ,  Jeffrey Morse ,  David Sopchak ,  Mark Havstad ,  Robert Graff

    IPC分类号： B01J19/00 ,  H01M8/06

    CPC分类号： H01M8/0625 ,  B01J19/0093 ,  B01J2219/0086 ,  H01M8/0668

    摘要： A chemical microreactor with a high aspect ratio. In one embodiment the chemical microreactor has a chemical microreactor section with channels having a height and with spacings having a width. There is a high aspect ratio of the height to the width. The high aspect ratio in one embodiment is more than substantially 5:1. The high aspect ratio in another embodiment is more than substantially 10:1. The high aspect ratio another embodiment is more than substantially 15:1. The high aspect ratio in one embodiment is substantially 20:1.

    摘要翻译： 具有高纵横比的化学微反应器。 在一个实施方案中，化学微反应器具有化学微反应器部分，其通道具有高度并具有宽度的间隔。 高度与宽度的高宽比是高的。 一个实施例中的高纵横比大于5:1。 另一个实施例中的高纵横比大于10:1。 另一实施例的高纵横比大体上大致为15：1。 一个实施例中的高纵横比基本上为20:1。

    Method of forming a package for MEMS-Based fuel cell
    8.
    发明申请
    Method of forming a package for MEMS-Based fuel cell 有权
    形成用于基于MEMS的燃料电池的封装的方法

    公开(公告)号：US20050064256A1

    公开(公告)日：2005-03-24

    申请号：US10952260

    申请日：2004-09-27

    申请人： Jeffrey Morse ,  Alan Jankowski

    发明人： Jeffrey Morse ,  Alan Jankowski

    IPC分类号： H01M4/86 ,  H01M4/88 ,  H01M8/02 ,  H01M8/04 ,  H01M8/24 ,  H01M8/18 ,  H01M8/12 ,  H01M8/10 ,  H01M2/00 ,  H01M2/02 ,  H01M2/14

    CPC分类号： H01M8/247 ,  H01M8/04007 ,  H01M8/2404 ,  H01M8/241 ,  Y10T29/49108 ,  Y10T29/4911 ,  Y10T29/49112 ,  Y10T29/49114 ,  Y10T29/53135 ,  Y10T156/1057

    摘要： A MEMS-based fuel cell package and method thereof is disclosed. The fuel cell package comprises seven layers: (1) a sub-package fuel reservoir interface layer, (2) an anode manifold support layer, (3) a fuel/anode manifold and resistive heater layer, (4) a Thick Film Microporous Flow Host Structure layer containing a fuel cell, (5) an air manifold layer, (6) a cathode manifold support structure layer, and (7) a cap. Fuel cell packages with more than one fuel cell are formed by positioning stacks of these layers in series and/or parallel. The fuel cell package materials such as a molded plastic or a ceramic green tape material can be patterned, aligned and stacked to form three dimensional microfluidic channels that provide electrical feedthroughs from various layers which are bonded together and mechanically support a MEMS-based miniature fuel cell. The package incorporates resistive heating elements to control the temperature of the fuel cell stack. The package is fired to form a bond between the layers and one or more microporous flow host structures containing fuel cells are inserted within the Thick Film Microporous Flow Host Structure layer of the package.

    摘要翻译： 公开了一种基于MEMS的燃料电池组件及其方法。 燃料电池组件包括七层：（1）一个子包装燃料储存器界面层，（2）一个阳极歧管支撑层，（3）燃料/阳极歧管和电阻加热器层，（4）厚膜微孔流 包含燃料电池的主体结构层，（5）空气歧管层，（6）阴极歧管支撑结构层，和（7）盖。 具有多于一个燃料电池的燃料电池组件通过将这些层的堆叠定位成串联和/或平行而形成。 诸如模制塑料或陶瓷生胶带材料的燃料电池封装材料可以被图案化，对准和堆叠以形成三维微流体通道，其提供来自各种层的电馈通，这些层通过粘合在一起并机械地支撑基于MEMS的微型燃料电池 。 该封装包含电阻加热元件以控制燃料电池堆的温度。 烧结包装以形成层之间的结合，并且将一个或多个含有燃料电池的微孔流动主体结构插入到包装的厚膜微孔流动主体结构层内。

    Submicron patterned metal hole etching
    9.
    发明授权
    Submicron patterned metal hole etching 失效
    亚微米图案金属孔蚀刻

    公开(公告)号：US6139716A

    公开(公告)日：2000-10-31

    申请号：US315387

    申请日：1999-05-18

    申请人： Anthony M. McCarthy ,  Robert J. Contolini ,  Vladimir Liberman ,  Jeffrey Morse

    发明人： Anthony M. McCarthy ,  Robert J. Contolini ,  Vladimir Liberman ,  Jeffrey Morse

    IPC分类号： C25F3/12

    CPC分类号： C25F3/12

    摘要： A wet chemical process for etching submicron patterned holes in thin metal layers using electrochemical etching with the aid of a wetting agent. In this process, the processed wafer to be etched is immersed in a wetting agent, such as methanol, for a few seconds prior to inserting the processed wafer into an electrochemical etching setup, with the wafer maintained horizontal during transfer to maintain a film of methanol covering the patterned areas. The electrochemical etching setup includes a tube which seals the edges of the wafer preventing loss of the methanol. An electrolyte composed of 4:1 water: sulfuric is poured into the tube and the electrolyte replaces the wetting agent in the patterned holes. A working electrode is attached to a metal layer of the wafer, with reference and counter electrodes inserted in the electrolyte with all electrodes connected to a potentiostat. A single pulse on the counter electrode, such as a 100 ms pulse at +10.2 volts, is used to excite the electrochemical circuit and perform the etch. The process produces uniform etching of the patterned holes in the metal layers, such as chromium and molybdenum of the wafer without adversely effecting the patterned mask.

    摘要翻译： 借助于润湿剂，使用电化学蚀刻在薄金属层中蚀刻亚微米图案化孔的湿法化学方法。 在此过程中，待处理的待蚀刻晶片在将经处理的晶片插入电化学蚀刻装置之前，浸入润湿剂（如甲醇）中几秒钟，晶片在转移过程中保持水平，以保持甲醇膜 覆盖图案区域。 电化学蚀刻装置包括密封晶片边缘的管，防止甲醇损失。 将由4:1水：硫酸盐组成的电解液倒入管中，并且电解质代替图案化孔中的润湿剂。 将工作电极连接到晶片的金属层上，其中参考电极和对置电极插入电解质中，所有电极连接到恒电位仪。 对电极上的单个脉冲，例如+10.2伏特的100ms脉冲，用于激发电化学电路并进行蚀刻。 该方法对金属层中的图案化孔进行均匀蚀刻，例如晶片的铬和钼，而不会对图案化掩模产生不利影响。

    Chemical microreactor and method thereof
    10.
    发明申请
    Chemical microreactor and method thereof 失效
    化学微反应器及其方法

    公开(公告)号：US20060057039A1

    公开(公告)日：2006-03-16

    申请号：US11196634

    申请日：2005-08-02

    申请人： Jeffrey Morse ,  Alan Jankowski

    发明人： Jeffrey Morse ,  Alan Jankowski

    IPC分类号： B01J19/24 ,  B81B1/00

    CPC分类号： B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00824 ,  B01J2219/00828 ,  B01J2219/00831 ,  B01J2219/00835 ,  B01J2219/00844 ,  B01J2219/00871 ,  B01J2219/00873

    摘要： Disclosed is a chemical microreactor that provides a means to generate hydrogen fuel from liquid sources such as ammonia, methanol, and butane through steam reforming processes when mixed with an appropriate amount of water. The microreactor contains capillary microchannels with integrated resistive heaters to facilitate the occurrence of catalytic steam reforming reactions. Two distinct embodiment styles are discussed. One embodiment style employs a packed catalyst capillary microchannel and at least one porous membrane. Another embodiment style employs a porous membrane with a large surface area or a porous membrane support structure containing a plurality of porous membranes having a large surface area in the aggregate, i.e., greater than about 1 m2/cm3. Various methods to form packed catalyst capillary microchannels, porous membranes and porous membrane support structures are also disclosed.

    摘要翻译： 公开了一种化学微反应器，其提供了当与适量的水混合时通过蒸汽重整过程从液体源例如氨，甲醇和丁烷产生氢燃料的手段。 微反应器包含具有集成电阻加热器的毛细管微通道，以促进催化蒸汽重整反应的发生。 讨论了两种不同的实施方式。 一种实施方案采用填充催化剂毛细管微通道和至少一种多孔膜。 另一实施例采用具有大表面积的多孔膜或多孔膜支撑结构，其包含多个聚集体中具有大表面积的多孔膜，即大于约1m 2 / cm 3 。 还公开了形成填充催化剂毛细管微通道，多孔膜和多孔膜支撑结构的各种方法。