公开(公告)号：US20090320167A1

公开(公告)日：2009-12-24

申请号：US11720881

申请日：2005-12-05

Applicant: Dai Kobayashi ,  Hideki Kawakatsu ,  Hiroshi Toshiyoshi

Inventor： Dai Kobayashi ,  Hideki Kawakatsu ,  Hiroshi Toshiyoshi

IPC: G01N13/16 ,  G12B21/08

CPC classification number: G01Q60/38

Abstract: A mechanical oscillator which defines a starting point of a cantilever at a front edge of a base and can determine the length of the cantilever without depending on an alignment accuracy and an etching amount, and a fabrication method of the mechanical oscillator. The mechanical oscillator, produced by processing a wafer, comprises a base (101) formed from a substrate supporting an SOI wafer and a structure to be a cantilever (102) which is formed from a silicon thin film of the SOI wafer and is horizontally protruding from the base (101), wherein a part of a buried oxide film (103) between the base (101) and the structure to be a cantilever (102) is removed, and a cantilever (104) starting from the front edge (105) of the base (101) is formed by directly jointing the structure to be a cantilever (102) to a part including at least the front edge (105) of the base (101) where the buried oxide film was removed.

Abstract translation: 一种机械振荡器，其限定了在基座的前边缘处的悬臂的起始点，并且可以在不依赖于对准精度和蚀刻量的情况下确定悬臂的长度，以及机械振荡器的制造方法。 通过处理晶片产生的机械振荡器包括由支撑SOI晶片的基板和作为由SOI晶片的硅薄膜形成的悬臂（102）的结构形成的基座（101），并且水平突出 从所述底座（101）开始，其中在所述基座（101）与所述悬臂结构（102）之间的一部分埋入氧化膜（103）被移除，并且从所述前边缘（105）开始的悬臂（104） （101）的结构直接连接到至少包括去除埋入氧化膜的基底（101）的前边缘（105）的部分的悬臂（102）上。

公开(公告)号：US07832271B2

公开(公告)日：2010-11-16

申请号：US11914127

申请日：2005-05-24

Applicant: Makoko Mita ,  Hirobumi Saito ,  Hiroshi Toshiyoshi

Inventor： Makoko Mita ,  Hirobumi Saito ,  Hiroshi Toshiyoshi

IPC: G01P9/04

CPC classification number: G01C19/574 ,  Y10T74/1282

Abstract: To provide a compact and high performance gyroscope.A gyroscope (10) comprises an outer frame (11); an inner frame (12) positioned inside the outer frame and supported to be movable in one reciprocating direction; a plurality of proof masses (15) positioned inside the inner frame and supported to be movable in the direction orthogonal to the one reciprocating direction; a plurality of outer support suspensions (13) which connect the outer frame and the inner frame; a plurality of inner support suspensions (14) which connect the inner frame and each of the proof masses; actuators (16) for accelerating each of the proof masses; and detectors (17) for detecting displacement of the inner frame against the outer frame. The actuators oscillate the plurality of proof masses in-phase, and wherein Coriolis forces induced on each of the proof masses are summed up in the inner frame.

Abstract translation: 提供一种紧凑，高性能的陀螺仪。 陀螺仪（10）包括外框架（11）; 内框架（12），其定位在所述外框架内并被支撑以能够在一个往复方向上移动; 多个检测质量块（15），其位于所述内框架的内部并且被支撑为能够沿与所述一个往复方向正交的方向移动; 连接外框架和内框架的多个外支撑悬架（13）; 多个内部支撑悬架（14），其连接所述内部框架和每个所述检验质量块; 致动器（16），用于加速每个检验质量块; 以及用于检测内框架相对于外框架的位移的检测器（17）。 执行器同步地振荡多个证明质量块，并且其中在每个检验质量上感应的科里奥利力在内框架中相加。

公开(公告)号：US20050162811A1

公开(公告)日：2005-07-28

申请号：US11042155

申请日：2005-01-26

Applicant: Hiroshi Obi ,  Hiroshi Toshiyoshi

Inventor： Hiroshi Obi ,  Hiroshi Toshiyoshi

IPC: G02B6/35 ,  H05F1/00

CPC classification number: G02B6/3584 ,  G02B6/3552 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3594

Abstract: A comb-shaped actuator comprising a substrate having an opening formed therein; a fixed electrode comprising a fixed electrode base portion provided along an inner side of the opening on the substrate and a plurality of fixed electrode finger groups arranged in parallel with each other in the shape of teeth of a comb throughout a predetermined length on the fixed electrode base portion; a movable electrode located in the opening of the substrate and comprising a movable electrode base portion and a plurality of movable electrode fingers arranged in parallel with each other in the shape of teeth of a comb facing the fixed electrode throughout a predetermined length, the movable electrode being movable by an attracting force generated between the fixed electrode finger and the movable electrode finger subject to a voltage or a magnetic field applied between the movable electrode and the fixed electrode upon arranging the movable electrode fingers and the fixed electrode fingers in an interdigital pattern with a gap between them; and a suspension supporting member connecting the movable electrode integrally with the substrate and suspending movably the movable electrode from the substrate. Both the fixed electrode and the movable electrode comprise a plurality of electrode finger units containing two fixed electrode fingers next to each other and the movable electrode finger interposed between the two fixed electrode fingers, at least two of the electrode finger units comprising off-centered electrode finger units having the movable electrode finger being off-centered with respect to a central position between the two fixed electrode fingers, the off-centered electrode finger units being located on both sides of a central line dividing the fixed electrode and the movable electrode along the opening into two parts, and directions of off-centering of the both sides being inverse to each other.

Abstract translation: 一种梳形致动器，包括其中形成有开口的基板; 固定电极，其包括沿着基板上的开口的内侧设置的固定电极基部和在固定电极上的整个预定长度上以梳齿形状彼此平行布置的多个固定电极指组 基部; 位于所述基板的开口中的可动电极，包括可动电极基部和多个可移动电极指，所述可动电极基部和多个可动电极指彼此平行布置成具有与所述固定电极整齐的预定长度的梳齿形状，所述可动电极 通过在固定电极指和可动电极指之间产生的吸引力，通过施加在可动电极和固定电极之间的电压或磁场，在可移动电极指和固定电极指以交叉形式布置时，可以移动， 他们之间的差距; 以及悬挂支撑构件，其将所述可动电极与所述基板一体地连接并将所述可动电极从所述基板可移动地悬挂。 固定电极和可动电极都包括彼此相邻的两个固定电极指的多个电极指单元和插在两个固定电极指之间的可动电极指，至少两个电极指单元包括偏心电极 具有可动电极指的相对于两个固定电极指之间的中心位置偏心的手指单元，偏心电极指单元位于沿固定电极和可动电极分开的中心线的两侧 开口两部分，两侧的偏心方向彼此相反。

公开(公告)号：US06611178B1

公开(公告)日：2003-08-26

申请号：US10009560

申请日：2001-12-14

Applicant: Hideki Kawakatsu ,  Hiroshi Toshiyoshi

Inventor： Hideki Kawakatsu ,  Hiroshi Toshiyoshi

IPC: B81B300

CPC classification number: G01P15/00 ,  G01P15/08 ,  G01P15/097 ,  G01Q20/02 ,  G01Q20/04 ,  G01Q60/32 ,  G01Q60/38 ,  G01Q70/06 ,  G11B9/1418 ,  H03H9/02244

Abstract: There are provided a stable and highly sensitive nanometric mechanical oscillator having a considerably high detection resolution that enables detection of variation in force or mass on the nanometer order, as well as a method of fabricating the same, and a measurement apparatus using the same. A nanometric mechanical oscillator (10) includes a base (11), a tetrahedral oscillator mass (13); and an elastic neck portion (12) for connecting the base (11) and the tetrahedral oscillator mass (13). The oscillator (10) assumes a mushroom-like shape and has a nanometric size. The oscillator mass (13) assumes a tetrahedral shape and is suitable to be used as a probe of a scanning forth microscope in which the oscillator mass (13) serving as a probe is caused to approach to an arbitrary sample surface in order to observe the surface state.

Abstract translation: 提供了具有相当高的检测分辨率的稳定且高度敏感的纳米机械振荡器，其能够检测纳米级的力或质量的变化，以及其制造方法，以及使用该方法的测量装置。 纳米机械振荡器（10）包括基座（11），四面体振子质量块（13）; 以及用于连接基座（11）和四面体振子块（13）的弹性颈部（12）。 振荡器（10）呈现蘑菇状形状并具有纳米尺寸。 振荡器质量（13）呈现四面体形状，并且适合用作扫描显微镜的探针，其中用作探针的振荡器质量（13）接近任意的样品表面，以观察 表面状态。

公开(公告)号：US07719163B2

公开(公告)日：2010-05-18

申请号：US11443471

申请日：2006-05-30

Applicant: Mitsuhiro Yoda ,  Keiji Isamoto ,  Hiroshi Toshiyoshi

Inventor： Mitsuhiro Yoda ,  Keiji Isamoto ,  Hiroshi Toshiyoshi

IPC: H02N1/00 ,  G02B26/08

CPC classification number: B81B3/004 ,  B81B2201/042 ,  B81B2201/045 ,  H02N1/008

Abstract: An actuator that can be driven at a reduced voltage and manufactured with ease, and a method for manufacturing the same are provided. The actuator includes second supporting portions 31 and 32 secured to a supporting substrate 4 through a spacer, fixed portions 33 and 34 secured to the supporting substrate 4 with no intervention of the spacer, fixed comb electrodes 331 and 341 integrally formed the fixed portions 33 and 34 and meshing with movable comb electrodes 211 and 212 in a spaced-apart relationship, and bridge portions 35 and 36 for connecting the fixed portions 33 and 34 to the second supporting portions 31 and 32. The fixed portions 33 and 34 are affixed to the supporting substrate 4 in a condition that they are deflected toward the supporting substrate 4 with respect to the second supporting portions 31 and 32 while bending the bridge portions 35 and 36, thereby initially deflecting the fixed comb electrodes 331 and 341 so as to be out of alignment with the movable comb electrodes 211 and 212 in a thickness direction of the supporting substrate 4.

Abstract translation: 提供能够以降低的电压驱动并且容易制造的致动器及其制造方法。 致动器包括通过间隔件固定到支撑基板4的第二支撑部分31和32，固定在支撑基板4上的固定部分33和34，而不需要间隔件，固定梳状电极331和341一体地形成固定部分33和 并且与间隔开的可动梳状电极211,212啮合，以及用于将固定部33,34连接到第二支撑部31,32的桥接部35,36。固定部33,34固定在 支撑基板4在弯曲桥接部分35和36的同时相对于第二支撑部分31和32偏转到支撑基板4的状态，从而最初偏转固定梳状电极331和341以便脱离 在支撑基板4的厚度方向上与可动梳状电极211和212对准。

公开(公告)号：US07224097B2

公开(公告)日：2007-05-29

申请号：US11042155

申请日：2005-01-26

Applicant: Hiroshi Obi ,  Hiroshi Toshiyoshi

Inventor： Hiroshi Obi ,  Hiroshi Toshiyoshi

IPC: G02B26/08 ,  H02N1/00

CPC classification number: G02B6/3584 ,  G02B6/3552 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3594

Abstract: A comb shaped actuator having off centered electrodes to the fixed electrode and the movable electrode comprise a plurality of electrode finger units containing two fixed electrode fingers next to each other and the movable electrode finger interposed between the two fixed electrode fingers, at least two of the electrode finger units comprising off-centered electrode finger units having the movable electrode finger being off-centered with respect to a central position between the two fixed electrode fingers, the off-centered electrode finger units being located on both sides of a central line dividing the fixed electrode and the movable electrode along the opening into two parts, and directions of off-centering of the both sides being inverse to each other.

Abstract translation: 具有偏心的电极到固定电极和可动电极的梳状致动器包括多个电极指单元，其包含彼此相邻的两个固定电极指和插入在两个固定电极指之间的可动电极指，至少两个 包括具有可动电极指的相对于两个固定电极指之间的中心位置偏心的偏心电极指单元的电极指单元，偏心电极指单元位于中心线的两侧， 固定电极和可动电极沿着开口分成两部分，并且两侧的偏心方向彼此相反。

公开(公告)号：US09182592B2

公开(公告)日：2015-11-10

申请号：US13983310

申请日：2012-02-03

Applicant: Taketo Ueno ,  Toshihiko Nakata ,  Yukihiro Shibata ,  Shun'ichi Matsumoto ,  Atsushi Taniguchi ,  Hiroshi Toshiyoshi ,  Takuya Takahashi ,  Kentaro Motohara

Inventor： Taketo Ueno ,  Toshihiko Nakata ,  Yukihiro Shibata ,  Shun'ichi Matsumoto ,  Atsushi Taniguchi ,  Hiroshi Toshiyoshi ,  Takuya Takahashi ,  Kentaro Motohara

IPC: G01N21/00 ,  G02B26/02 ,  G01N21/956 ,  G01N21/95

CPC classification number: G02B26/02 ,  G01N21/9501 ,  G01N21/956

Abstract: An optical filtering device and an optical inspection apparatus for detecting a defect in a high sensitivity using an optical filtering device which includes a shutter array formed in a two-dimensionally on an optically opaque thin film produced on a SOI wafer and the SOI wafer is removed at portions thereof on the lower side of the shutter patterns to form perforation portions while working electrodes are formed at the remaining portion of the SOI wafer, a glass substrate having electrode patterns formed on the surface thereof and having the shutter array mounted thereon, and a power supply section for supplying electric power to the electrode patterns formed on the glass substrate and the working electrodes of the SOI wafer. And the working electrodes is controlled to cause the shutter patterns to carry out opening and closing movements with respect to the perforation portions to carry out optical filtering.

Abstract translation: 使用光学滤波装置来检测高灵敏度的缺陷的光学滤波装置和光学检查装置，该光学滤波装置包括在SOI晶片和SOI晶片上制造的光学不透明薄膜上二维地形成的快门阵列 在闸板图案的下侧的部分处形成穿孔部分，同时在SOI晶片的剩余部分处形成工作电极，在其表面上形成有安装有快门阵列的电极图案的玻璃基板，以及 电源部分，用于向形成在玻璃基板上的电极图案和SOI晶片的工作电极提供电力。 并且控制工作电极以使快门图案相对于穿孔部分进行打开和关闭运动以进行光学过滤。

公开(公告)号：US20110086455A1

公开(公告)日：2011-04-14

申请号：US12904104

申请日：2010-10-13

Applicant: Makoto Mita ,  Hirobumi Saito ,  Hiroshi Toshiyoshi

Inventor： Makoto Mita ,  Hirobumi Saito ,  Hiroshi Toshiyoshi

IPC: H01L21/3065

CPC classification number: G01C19/574 ,  Y10T74/1282

Abstract: To provide a compact and high performance gyroscope.A gyroscope (10) comprises an outer frame (11); an inner frame (12) positioned inside the outer frame and supported to be movable in one reciprocating direction; a plurality of proof masses (15) positioned inside the inner frame and supported to be movable in the direction orthogonal to the one reciprocating direction; a plurality of outer support suspensions (13) which connect the outer frame and the inner frame; a plurality of inner support suspensions (14) which connect the inner frame and each of the proof masses; actuators (16) for accelerating each of the proof masses; and detectors (17) for detecting displacement of the inner frame against the outer frame. The actuators oscillate the plurality of proof masses in-phase, and wherein Coriolis forces induced on each of the proof masses are summed up in the inner frame.

Abstract translation: 提供一种紧凑，高性能的陀螺仪。 陀螺仪（10）包括外框架（11）; 内框架（12），其定位在所述外框架内并被支撑以能够在一个往复方向上移动; 多个检测质量块（15），其位于所述内框架的内部并且被支撑为能够沿与所述一个往复方向正交的方向移动; 连接外框架和内框架的多个外支撑悬架（13）; 多个内部支撑悬架（14），其连接所述内部框架和每个所述检验质量块; 致动器（16），用于加速每个检验质量块; 以及用于检测内框架相对于外框架的位移的检测器（17）。 执行器同步地振荡多个证明质量块，并且其中在每个检验质量上感应的科里奥利力在内框架中相加。

公开(公告)号：US20090090200A1

公开(公告)日：2009-04-09

申请号：US11914127

申请日：2005-05-24

Applicant: Makoto Mita ,  Hirobumi Saito ,  Hiroshi Toshiyoshi

Inventor： Makoto Mita ,  Hirobumi Saito ,  Hiroshi Toshiyoshi

IPC: G01C19/56

CPC classification number: G01C19/574 ,  Y10T74/1282

Abstract: A gyroscope (10) comprises an outer frame (11); an inner frame (12) positioned inside the outer frame and supported to be movable in one reciprocating direction; a plurality of proof masses (15) positioned inside the inner frame and supported to be movable in the direction orthogonal to the one reciprocating direction; a plurality of outer support suspensions (13) which connect the outer frame and the inner frame; a plurality of inner support suspensions (14) which connect the inner frame and each of the proof masses; actuators (16) for accelerating each of the proof masses; and detectors (17) for detecting displacement of the inner frame against the outer frame. The actuators oscillate the plurality of proof masses in-phase, and wherein Coriolis forces induced on each of the proof masses are summed up in the inner frame.

Abstract translation: 陀螺仪（10）包括外框架（11）; 内框架（12），其定位在所述外框架内并被支撑以能够在一个往复方向上移动; 多个检测质量块（15），其位于所述内框架的内部并且被支撑为能够沿与所述一个往复方向正交的方向移动; 连接外框架和内框架的多个外支撑悬架（13）; 多个内部支撑悬架（14），其连接所述内部框架和每个所述检验质量块; 致动器（16），用于加速每个检验质量块; 以及用于检测内框架相对于外框架的位移的检测器（17）。 执行器同步地振荡多个证明质量块，并且其中在每个检验质量上感应的科里奥利力在内框架中相加。

公开(公告)号：US6114788A

公开(公告)日：2000-09-05

申请号：US988290

申请日：1997-12-10

Applicant: Ronald Hendrik Vuillemin (Muller) ,  Hiroshi Toshiyoshi ,  Hannes Bleuler

Inventor： Ronald Hendrik Vuillemin (Muller) ,  Hiroshi Toshiyoshi ,  Hannes Bleuler

IPC: F16C39/06 ,  H02K7/09 ,  H02K1/00 ,  H02K1/22 ,  H02K21/12

CPC classification number: F16C32/0493 ,  H02K7/09

Abstract: A motor/active magnetic bearing combination includes two stator base plates made of magnetic material. A plurality of sets of north and south poles, numbering at least three are formed on each of the stators, and each set comprises one or two south poles and a north pole or vice versa. Appropriate energization of the coils surrounding each of these poles both suspends and creates a magnetic field which imposes a constant speed rotation on the rotor which is suspended between the stators. The rotation is achieved by virtue of the fact that the rotor includes a circumferential set of slots defining regions around the circumference which interact with the energized poles on the stator so that a reluctance motor is formed, driving the rotor in rotation.

Abstract translation: 电动机/主动磁轴承组合包括由磁性材料制成的两个定子基板。 在每个定子上形成多个组合的至少三个的北极和南极，并且每组包括一个或两个南极和北极，反之亦然。 围绕这些极点周围的线圈的适当通电都悬挂并产生磁场，该磁场在悬架在定子之间的转子上施加恒定的速度旋转。 旋转是通过以下事实实现的，即转子包括限定围绕圆周的区域的周向组的槽，其与定子上的通电极相互作用，从而形成磁阻电动机，以驱动转子旋转。