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11 条记录 (耗时 0.014 秒)

    LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
    4.
    发明申请
    LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD 审中-公开
    LITHOGRAPHIC装置和装置制造方法

    公开(公告)号：US20090268190A1

    公开(公告)日：2009-10-29

    申请号：US12428110

    申请日：2009-04-22

    申请人： Jacobus Frederik Molenaar ,  Michael Johannes Vervoordeldonk ,  Funda Sahin Nomaler

    发明人： Jacobus Frederik Molenaar ,  Michael Johannes Vervoordeldonk ,  Funda Sahin Nomaler

    IPC分类号： G03B27/58 ,  G03F7/20

    CPC分类号： G03B27/58 ,  G03F7/70816

    摘要： A lithographic apparatus includes a bearing configured to support a first part with respect to a second part of the apparatus in a first direction such that the first part is moveable in a second direction relative to the second part. The bearing passively supports the first part in three degrees of freedom. The first part is coupled to at least one permanent magnet, and the second part is coupled to at least two permanent magnets. The permanent magnet of the first part is positioned substantially between the permanent magnets of the second part. A field orientation of the permanent magnets is substantially parallel to the first direction and the permanent magnet of the first part has a substantially opposite polarity to at least one of the magnets of the second part.

    摘要翻译： 光刻设备包括轴承，该轴承构造成在第一方向上相对于设备的第二部分支撑第一部分，使得第一部件可相对于第二部件在第二方向上移动。 轴承以三自由度被动地支撑第一部分。 第一部分耦合到至少一个永磁体，而第二部分耦合到至少两个永磁体。 第一部分的永磁体基本位于第二部分的永磁体之间。 永磁体的场方位基本上平行于第一方向，并且第一部分的永磁体具有与第二部分的至少一个磁体基本上相反的极性。

    LINEAR MOTOR COIL ASSEMBLY AND LINEAR MOTOR
    6.
    发明申请
    LINEAR MOTOR COIL ASSEMBLY AND LINEAR MOTOR 审中-公开
    线性电机线圈组件和线性电机

    公开(公告)号：US20090127938A1

    公开(公告)日：2009-05-21

    申请号：US11577818

    申请日：2005-10-20

    申请人： Funda Sahin Nomaler ,  Johan Cornelis Compter ,  Ed Bos

    发明人： Funda Sahin Nomaler ,  Johan Cornelis Compter ,  Ed Bos

    IPC分类号： H02K41/03

    CPC分类号： H02K41/031 ,  H02K3/04 ,  H02K3/47

    摘要： An ironless linear motor (5) comprising a magnet track (53) and a coil assembly (50) operating in cooperation with said magnet track (53) and having a plurality of concentrated multi-turn coils (31 a-f, 41 a-d, 51 a-k), wherein the end windings (31E) of the coils (31 a-f, 41 a-e) are substantially rounded, the coil part (31 S) between the end windings (31E) is straight and the coils (31 a-f, 41a-d, 51a-k) are arranged in an overlapping manner, wherein the end windings (31E) are pressed together, is provided. The coil assembly has the advantage to be flat, thus being easy to handle, and leading to a high steepness.

    摘要翻译： 一种无铁线性电动机（5），包括磁体轨道（53）和与所述磁体轨道（53）配合操作的线圈组件（50），并且具有多个集中的多匝线圈（31f，41d，51ak ），其中所述线圈（31 af，41a）的端部绕组（31E）基本上是圆形的，所述端部绕组（31E）之间的线圈部分（31S）是直的，并且所述线圈（31f1，41a-d， 51a-k）以重叠的方式布置，其中端部绕组（31E）被压在一起。 线圈组件具有平坦的优点，因此易于处理并且导致高陡度。

    ELECTROSTATIC DEVICE FOR DISPLACING AN OBJECT
    8.
    发明申请
    ELECTROSTATIC DEVICE FOR DISPLACING AN OBJECT 审中-公开
    用于偏移对象的静电装置

    公开(公告)号：US20090243426A1

    公开(公告)日：2009-10-01

    申请号：US11721696

    申请日：2005-12-12

    申请人： Funda Sahin Nomaler ,  Johan Cornelis Compter ,  Piet Van Der Meer

    发明人： Funda Sahin Nomaler ,  Johan Cornelis Compter ,  Piet Van Der Meer

    IPC分类号： H02N1/08

    CPC分类号： H02N1/004 ,  H01L21/6831

    摘要： Electrostatic displacement devices (1) with high forces and high accelerations are provided by arranging the electrodes (31, 31a, 31b) such that an electric field is generated extending over an area equivalent to the surface area of the object (2) to be displaced. Preferably, higher voltages are applied to the electrodes (31a) in the edge region than to the electrodes (31b) in the middle region, to further increase the shear forces inducing the actual displacement.

    摘要翻译： 通过布置电极（31,31a，31b）使得产生电场而延伸超过待移动物体（2）的表面积的区域上来提供具有高力和高加速度的静电位移装置（1） 。 优选地，在边缘区域中的电极（31a）上施加更高的电压，而不是中间区域中的电极（31b），以进一步增加引起实际位移的剪切力。

    High force density linear electric motor
    9.
    发明申请
    High force density linear electric motor 审中-公开
    高力密度线性电动机

    公开(公告)号：US20060028070A1

    公开(公告)日：2006-02-09

    申请号：US10531976

    申请日：2003-09-22

    申请人： Funda Sahin Nomaler

    发明人： Funda Sahin Nomaler

    IPC分类号： H02K41/00

    CPC分类号： H02K41/031 ,  H02K1/02 ,  H02K1/146

    摘要： Linear electric motor or actuator comprising a movable part (21) consisting of a soft-magnetic core (22) which supports a set of electrically conductive turns (25), which movable part is slidably supported by a rail (26) which is provided with at least one set of permanent magnets (27, 30, 31) extending in longitudinal direction along the core's periphery. The magnets (27, 30, 31) produce a magnetic field that cooperates with the set of turns (27, 30, 31) via an air-gap. The soft-magnetic core (22) of the movable part (21) is made of soft-magnetic composite material. The electrically conductive turns (25) are wound around the periphery of the core (21) substantially perpendicularly to the centerline thereof, and at least two sets of magnets (27, 30, 31) are arranged along its periphery such that the at least two sets of magnets (27, 30, 31) are arranged at different angles to the core (22).

    摘要翻译： 线性电动机或致动器包括由支撑一组导电匝（25）的软磁芯（22）组成的可移动部分（21），所述可动部分由轨道（26）可滑动地支撑，导轨设置有 至少一组永久磁铁（27,30,31）沿着芯部的周边沿纵向方向延伸。 磁体（27,30,31）经由气隙产生与匝数组合（27,30,31）的磁场。 可动部件（21）的软磁芯（22）由软磁性复合材料制成。 导电线圈（25）大致垂直于其中心线缠绕在芯部（21）的周边上，并且至少两组磁体（27,30,31）沿其周边布置，使得至少两个 一组磁体（27,30,31）以与芯部（22）不同的角度布置。

    GENERATOR ASSEMBLY AND BEARING EQUIPPED WITH THE SAME
    10.
    发明申请
    GENERATOR ASSEMBLY AND BEARING EQUIPPED WITH THE SAME 审中-公开
    发电机总成及其配套装置

    公开(公告)号：US20160254725A1

    公开(公告)日：2016-09-01

    申请号：US15052231

    申请日：2016-02-24

    申请人： Georgo ANGELIS ,  Nicolaas Simon Willem DEN HAAK ,  Funda Sahin NOMALER

    发明人： Georgo ANGELIS ,  Nicolaas Simon Willem DEN HAAK ,  Funda Sahin NOMALER

    IPC分类号： H02K7/08 ,  F16C41/00 ,  H02K1/06

    CPC分类号： H02K7/08 ,  F16C19/38 ,  F16C41/004 ,  F16C2326/02 ,  H02K7/1846

    摘要： A generator assembly for harvesting energy in a bearing arrangement having a first component and a second component, wherein the first component is configured to rotate in relation to the second component. The generator assembly includes a plurality of coils attached to the first component, wherein the coils are configured to interact with a magnet ring with alternating magnetization directions attached to the second component. In order to achieve an adaptable and flexible design, the coils are placed and oriented such that a winding axis of the coils is oriented in an essentially circumferential direction in relation to a rotation axis of the bearing arrangement.

    摘要翻译： 一种用于在具有第一部件和第二部件的轴承装置中收获能量的发生器组件，其中所述第一部件构造成相对于所述第二部件旋转。 发电机组件包括附接到第一部件的多个线圈，其中线圈构造成与磁环相互作用，该磁环具有连接到第二部件的交变磁化方向。 为了实现适应性和灵活性的设计，线圈被放置和定向，使得线圈的卷绕轴线相对于轴承装置的旋转轴线在基本圆周方向上定向。