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公开(公告)号:US07375479B2
公开(公告)日:2008-05-20
申请号:US10539371
申请日:2003-12-15
申请人: Jan Van Eijk , Arjan Franklin Bakker , Dennis Erwin Bos , Johan Cornelis Compter , Angelo Cesar Peter De Klerk , Franciscus Martinus Roes , Hubert Gerard Jean Joseph Amaury Vroomen , Thomas Petrus Hendricus Warmerdam
发明人: Jan Van Eijk , Arjan Franklin Bakker , Dennis Erwin Bos , Johan Cornelis Compter , Angelo Cesar Peter De Klerk , Franciscus Martinus Roes , Hubert Gerard Jean Joseph Amaury Vroomen , Thomas Petrus Hendricus Warmerdam
CPC分类号: F16C32/0472 , F16C32/0444 , G05B2219/41327 , G05B2219/42092 , G05B2219/49276 , H01J37/20 , H01J2237/20278 , H01J2237/3175 , H02K11/22 , H02K41/031
摘要: A apparatus processes an object (19), such as a semi-conductor wafer at accurately controlled positions. The object (19) is supported by a working platform (12) that is moveable along a path. A suspension actuator part (14) attached to the working platform (12), contains a soft magnetic core (24) with poles facing the surface of a soft magnetic element (34) on the support structure along the path and a winding (20) for application of a current to generate a magnetic field that runs through the core (24) v the poles and returns via the soft magnetic element (34). A sensor (17) senses a measured position of the suspension actuator part (14) relative to the position reference element (16). A control circuit comprises an outer control circuit (40) and an inner control circuit (42). The outer control circuit (40) receives a sensing result and determines force set point information to regulate the measured position of the actuator part (14) to a required value. The inner control circuit (42) receives the force set point information and controls the current to realize a force between the actuator part (14) and the support structure (10) according to the force set point information.
摘要翻译: 一种设备在精确控制的位置处理诸如半导体晶片的物体(19)。 物体(19)由可沿着路径移动的工作平台(12)支撑。 安装在工作平台(12)上的悬架致动器部件(14)包含一个软磁芯(24),该软磁芯(24)具有面向沿该路径的支撑结构上的软磁元件(34)表面的磁极和一个绕组(20) 用于施加电流以产生穿过磁芯(24)的磁场,并通过软磁元件(34)返回磁极。 传感器(17)相对于位置参考元件(16)感测悬架致动器部件(14)的测量位置。 控制电路包括外部控制电路(40)和内部控制电路(42)。 外部控制电路(40)接收感测结果并且确定力设定点信息以将致动器部件(14)的测量位置调节到所需值。 内部控制电路(42)接收力设定点信息并根据力设定点信息控制电流以实现致动器部件(14)和支撑结构(10)之间的力。
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公开(公告)号:US20100266740A1
公开(公告)日:2010-10-21
申请号:US12747539
申请日:2008-12-04
摘要: A method for making ice coffee comprises the following steps: extracting coffee by using water at a temperature that is in a range of 35° C. to 55° C., at a normal brewing pressure that is in a range of ambient pressure to 1.5 bar, and at an extraction time that is shorter than 60 seconds, and supplying a quantity of ice to the beverage which is obtained as a result of this extraction process, in order to get the ice coffee at a temperature at which it is ready to drink. An appliance for carrying out the method may also be adapted to make hot coffee, so that a user may choose which type of coffee he/she would like to receive from the appliance.
摘要翻译: 一种制作冰咖啡的方法包括以下步骤:在温度为35℃至55℃的温度下,在环境压力为1.5的正常冲泡压力下,提取咖啡 并且在短于60秒的提取时间内,并且为由该提取过程获得的饮料提供一定量的冰以便将冰咖啡置于其准备好的温度 喝。 用于执行该方法的设备还可以适于制造热咖啡,使得用户可以选择他/她想要从设备接收哪种类型的咖啡。
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公开(公告)号:US20090277950A1
公开(公告)日:2009-11-12
申请号:US12506065
申请日:2009-07-20
申请人: THOMAS Markus KAMPSCHREUR , JOEP STOKKERMANS , ARJAN Franklin BAKKER , PIET Christiaan Jozef VAN RENS , ARNOLDUS Jacobus Cornelis Bernardus DE VET , PIET VAN DER MEER
发明人: THOMAS Markus KAMPSCHREUR , JOEP STOKKERMANS , ARJAN Franklin BAKKER , PIET Christiaan Jozef VAN RENS , ARNOLDUS Jacobus Cornelis Bernardus DE VET , PIET VAN DER MEER
IPC分类号: B23K37/04
CPC分类号: H01L24/85 , H01L24/78 , H01L2224/451 , H01L2224/78301 , H01L2224/85 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/01039 , H01L2924/01082 , H01L2924/14 , H01L2224/48
摘要: A method and apparatus are discloses for wirebonding leads of a plurality of lead frames being part of a lead frame assembly by a wirebonding tool to semiconductor products mounted on the respective lead frames. The semiconductor products are clamped by a clamping mechanism comprising a stationary clamp and a movable clamp. The movable clamp follows the indexing movement of the lead frame assembly during wirebonding of the semiconductor products clamped by the movable clamp. The wirebonding process does not need to be interrupted for the indexing.
摘要翻译: 公开了一种方法和装置,用于将引线框架组件的一部分的多个引线框架的引线通过引线键合工具引导到安装在相应的引线框架上的半导体产品。 半导体产品通过包括固定夹具和可移动夹具的夹持机构夹紧。 在由可移动夹具夹持的半导体产品的引线接合期间,可移动夹具遵循引线框架组件的分度运动。 引线键合过程不需要中断索引。
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公开(公告)号:US07578425B2
公开(公告)日:2009-08-25
申请号:US10538281
申请日:2003-11-17
申请人: Thomas Markus Kampschreur , Joep Stokkermans , Arjan Franklin Bakker , Piet Christiaan Jozef Van Rens , Arnoldus Jacobus Cornelis Bernardus De Vet , Piet Van Der Meer
发明人: Thomas Markus Kampschreur , Joep Stokkermans , Arjan Franklin Bakker , Piet Christiaan Jozef Van Rens , Arnoldus Jacobus Cornelis Bernardus De Vet , Piet Van Der Meer
IPC分类号: B23K31/00
CPC分类号: H01L24/85 , H01L24/78 , H01L2224/451 , H01L2224/78301 , H01L2224/85 , H01L2924/00014 , H01L2924/01005 , H01L2924/01006 , H01L2924/01033 , H01L2924/01039 , H01L2924/01082 , H01L2924/14 , H01L2224/48
摘要: A method and apparatus are discloses for wirebonding leads of a plurality of lead frames being part of a lead frame assembly by a wirebonding tool to semiconductor products mounted on the respective lead frames. The semiconductor products are clamped by a clamping mechanism comprising a stationary clamp and a movable clamp. The movable clamp follows the indexing movement of the lead frame assembly during wirebonding of the semiconductor products clamped by the movable clamp. The wirebonding process does not need to be interrupted for the indexing.
摘要翻译: 公开了一种方法和装置,用于将引线框架组件的一部分的多个引线框架的引线通过引线键合工具引导到安装在相应的引线框架上的半导体产品。 半导体产品通过包括固定夹具和可移动夹具的夹持机构夹紧。 在由可移动夹具夹持的半导体产品的引线接合期间,可移动夹具遵循引线框架组件的分度运动。 引线键合过程不需要中断索引。
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公开(公告)号:US07459808B2
公开(公告)日:2008-12-02
申请号:US11273634
申请日:2005-11-15
申请人: Sven Antoin Johan Hol , Angelo Cesar Peter De Klerk , Erik Roelof Loopstra , Fransicus Mathijs Jacobs , Mark Scholten , Arjan Franklin Bakker
发明人: Sven Antoin Johan Hol , Angelo Cesar Peter De Klerk , Erik Roelof Loopstra , Fransicus Mathijs Jacobs , Mark Scholten , Arjan Franklin Bakker
CPC分类号: H02K41/03 , G03F7/70758 , H02K2201/18
摘要: A motor includes a magnet assembly to generate a magnetic field. The field includes along the first direction parts which are alternately orientated in the first and the second direction. The parts extend in a third direction which is perpendicular to the first and the second direction. The motor further includes a first coil winding to carry a first current. The first coil winding to extend in the first direction between parts of the magnetic field orientated in the second direction, to generate the force in the first direction. The motor also includes a second coil winding to carry a second current. The second coil winding to extend in the first direction between parts of the magnetic field substantially orientated in the first direction, to generate the force in the second direction.
摘要翻译: 电动机包括用于产生磁场的磁体组件。 该场包括沿着第一方向的部分,其沿第一方向和第二方向交替取向。 这些部件在垂直于第一和第二方向的第三方向上延伸。 电动机还包括用于承载第一电流的第一线圈绕组。 所述第一线圈绕组在所述第一方向上沿着在所述第二方向上定向的所述磁场的部分之间延伸,以在所述第一方向上产生力。 电动机还包括用于承载第二电流的第二线圈绕组。 所述第二线圈绕组在所述磁场的各部分之间沿所述第一方向沿所述第一方向大致取向,以在所述第二方向上产生所述力。
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公开(公告)号:US20110158382A1
公开(公告)日:2011-06-30
申请号:US13060930
申请日:2009-08-31
申请人: Funda Sahin Nomaler , Johan Cornelis Compter , Arjan Franklin Bakker , Anthonius Johannes Dirk Verdel
发明人: Funda Sahin Nomaler , Johan Cornelis Compter , Arjan Franklin Bakker , Anthonius Johannes Dirk Verdel
CPC分类号: F16C32/0493 , A61B6/035 , A61B6/4435 , F16C32/0461 , F16C2300/14 , F16C2316/10 , F16C2380/26 , G01N2223/3303 , H02K7/09 , H02K41/03
摘要: The present invention relates to a rotating ring apparatus comprising: —a stationary ring (1), —a rotating ring (2) for rotation around a central region (3), —a rotation unit (4, 5) for radially bearing and rotating said rotating ring (2) with respect to the stationery ring (1), said rotation unit including a stationary induction element (4) mounted on said stationery ring (1) and a rotating induction element (5) mounted on said rotating ring (2), and —a controller (8) for controlling said rotation unit (4, 5) to rotate and levitate the rotating induction element (5).
摘要翻译: 旋转环设备技术领域本发明涉及一种旋转环设备,包括:固定环(1),围绕中心区域旋转的旋转环(2), - 用于径向轴向旋转的旋转单元(4,5) 所述旋转环(2)相对于所述文具环(1),所述旋转单元包括安装在所述文具环(1)上的固定感应元件(4)和安装在所述旋转环(2)上的旋转感应元件(5) )和 - 用于控制所述旋转单元(4,5)旋转并悬浮所述旋转感应元件(5)的控制器(8)。
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公开(公告)号:US20080144008A1
公开(公告)日:2008-06-19
申请号:US10597708
申请日:2005-01-25
IPC分类号: G01N21/00
CPC分类号: G03F7/70691
摘要: A system for positioning a product, comprising a chuck (71) for supporting the product, an intermediate stage (79) supporting said chuck (71), and a stationary base (72) supporting said intermediate stage (79). The chuck (71) can move with respect to the intermediate stage (79) in a first direction X (80), and the intermediate stage (79) can move with respect to said stationary base in a second direction Y (81). The system furthermore comprises at least one laser interferometer (73,74,75,76,77,78) for measuring the position of the chuck (71) relative to the stationary base (72). The main part (73,74,75,76,77,78) of said laser interferometer is attached to said intermediate stage (79), so that it can measure the distance between a reflector (83,84,85) on the chuck (71) and a reflector (82,87) on the stationary base (72).
摘要翻译: 一种用于定位产品的系统,包括用于支撑产品的卡盘(71),支撑所述卡盘(71)的中间台(79)和支撑所述中间台(79)的固定基座(72)。 卡盘71可以在第一方向X(80)上相对于中间台(79)移动,并且中间台(79)可以在第二方向Y(81)上相对于所述固定基座移动。 该系统还包括用于测量卡盘(71)相对于固定基座(72)的位置的至少一个激光干涉仪(73,74,75,76,77,78)。 所述激光干涉仪的主要部分(73,74,75,76,77,78)附接到所述中间台(79),使得其可以测量卡盘上的反射器(83,84,85)之间的距离 (71)和在固定基座(72)上的反射器(82,87)。
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公开(公告)号:US09011001B2
公开(公告)日:2015-04-21
申请号:US13060930
申请日:2009-08-31
申请人: Funda Sahin Nomaler , Johan Cornelis Compter , Arjan Franklin Bakker , Anthonius Johannes Dirk Verdel
发明人: Funda Sahin Nomaler , Johan Cornelis Compter , Arjan Franklin Bakker , Anthonius Johannes Dirk Verdel
CPC分类号: F16C32/0493 , A61B6/035 , A61B6/4435 , F16C32/0461 , F16C2300/14 , F16C2316/10 , F16C2380/26 , G01N2223/3303 , H02K7/09 , H02K41/03
摘要: The present invention relates to a rotating ring apparatus comprising: —a stationary ring (1), —a rotating ring (2) for rotation around a central region (3), —a rotation unit (4, 5) for radially bearing and rotating said rotating ring (2) with respect to the stationery ring (1), said rotation unit including a stationary induction element (4) mounted on said stationery ring (1) and a rotating induction element (5) mounted on said rotating ring (2), and —a controller (8) for controlling said rotation unit (4, 5) to rotate and levitate the rotating induction element (5).
摘要翻译: 旋转环设备技术领域本发明涉及一种旋转环设备,包括:固定环(1),围绕中心区域旋转的旋转环(2), - 用于径向轴向旋转的旋转单元(4,5) 所述旋转环(2)相对于所述文具环(1),所述旋转单元包括安装在所述文具环(1)上的固定感应元件(4)和安装在所述旋转环(2)上的旋转感应元件(5) )和 - 用于控制所述旋转单元(4,5)旋转并悬浮所述旋转感应元件(5)的控制器(8)。
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公开(公告)号:US07903258B2
公开(公告)日:2011-03-08
申请号:US10597708
申请日:2005-01-25
IPC分类号: G01B11/02
CPC分类号: G03F7/70691
摘要: A system for positioning a product, comprising a chuck for supporting the product, an intermediate stage supporting said chuck, and a stationary base supporting said intermediate stage. The chuck can move with respect to the intermediate stage in a first direction X, and the intermediate stage can move with respect to said stationary base in a second direction Y. The system furthermore comprises at least one laser interferometer for measuring the position of the chuck relative to the stationary base. The main part of the laser interferometer is attached to the intermediate stage, so that it can measure the distance between a reflector on the chuck and a reflector on the stationary base.
摘要翻译: 一种用于定位产品的系统,包括用于支撑产品的卡盘,支撑所述卡盘的中间台和支撑所述中间台的固定基座。 卡盘可以在第一方向X相对于中间台移动,并且中间台可以在第二方向Y上相对于所述固定基座移动。该系统还包括至少一个用于测量卡盘位置的激光干涉仪 相对于固定基座。 激光干涉仪的主要部分连接到中间阶段,从而可以测量卡盘上的反射器与固定基座上的反射器之间的距离。
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公开(公告)号:US07667822B2
公开(公告)日:2010-02-23
申请号:US11353249
申请日:2006-02-14
申请人: Fransicus Mathijs Jacobs , Erik Roelof Loopstra , Harmen Klaas Van der Schoot , Arjan Franklin Bakker , Arjan Martin Van der Wel , Krijn Frederik Bustraan , Marcel Koenraad Marie Baggen
发明人: Fransicus Mathijs Jacobs , Erik Roelof Loopstra , Harmen Klaas Van der Schoot , Arjan Franklin Bakker , Arjan Martin Van der Wel , Krijn Frederik Bustraan , Marcel Koenraad Marie Baggen
IPC分类号: G03B27/62
CPC分类号: G03F7/70716 , G03F7/70358 , G03F7/707
摘要: A lithographic apparatus includes a support constructed to support a patterning device. The patterning device is capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam. The support includes a force actuator device to exert a force onto the patterning device in a direction of movement of the support. The force actuator device includes a movable part which is pivotably about a pivot axis and thereby connected to the support. The movable part is in the direction of movement of the support substantially balanced with respect to the pivot axis. The force actuator device further includes an actuator to exert via the movable part the force onto the patterning device, to at least partly compensate for the information or a risk of slippage due to acceleration of the support in the direction of movement.
摘要翻译: 光刻设备包括构造成支撑图案形成装置的支撑件。 图案形成装置能够在其横截面中赋予具有图案的辐射束以形成图案化的辐射束。 该支撑件包括一个力促动器装置,以在支撑件的移动方向上向图案形成装置施加力。 力致动器装置包括可枢转地围绕枢转轴线并由此连接到支撑件的可移动部件。 可移动部分在支撑件的运动方向上相对于枢转轴线基本平衡。 力致动器装置还包括致动器,其经由可移动部件施加力到图案形成装置上,以至少部分地补偿由于支撑件沿着移动方向的加速而导致的信息或滑动的风险。
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