Lithographic apparatus and stage apparatus
    1.
    发明授权
    Lithographic apparatus and stage apparatus 失效
    平版印刷设备和舞台设备

    公开(公告)号:US07667822B2

    公开(公告)日:2010-02-23

    申请号:US11353249

    申请日:2006-02-14

    IPC分类号: G03B27/62

    摘要: A lithographic apparatus includes a support constructed to support a patterning device. The patterning device is capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam. The support includes a force actuator device to exert a force onto the patterning device in a direction of movement of the support. The force actuator device includes a movable part which is pivotably about a pivot axis and thereby connected to the support. The movable part is in the direction of movement of the support substantially balanced with respect to the pivot axis. The force actuator device further includes an actuator to exert via the movable part the force onto the patterning device, to at least partly compensate for the information or a risk of slippage due to acceleration of the support in the direction of movement.

    摘要翻译: 光刻设备包括构造成支撑图案形成装置的支撑件。 图案形成装置能够在其横截面中赋予具有图案的辐射束以形成图案化的辐射束。 该支撑件包括一个力促动器装置,以在支撑件的移动方向上向图案形成装置施加力。 力致动器装置包括可枢转地围绕枢转轴线并由此连接到支撑件的可移动部件。 可移动部分在支撑件的运动方向上相对于枢转轴线基本平衡。 力致动器装置还包括致动器,其经由可移动部件施加力到图案形成装置上,以至少部分地补偿由于支撑件沿着移动方向的加速而导致的信息或滑动的风险。

    Magnetic bearing, a rotary stage, and a reflective electron beam lithography apparatus
    2.
    发明授权
    Magnetic bearing, a rotary stage, and a reflective electron beam lithography apparatus 有权
    磁轴承,旋转台和反射电子束光刻设备

    公开(公告)号:US08836190B2

    公开(公告)日:2014-09-16

    申请号:US13265676

    申请日:2010-04-14

    IPC分类号: H02K7/09 F16C32/04 H01J37/20

    摘要: A magnetic bearing (108) with an axis of rotation (106), wherein the magnetic bearing comprises: a cylindrical rotor (116) comprising a ferromagnetic material (118, 338, 440) wherein the cylindrical rotor has an axis of symmetry (114), wherein the cylindrical rotor has an inner radius (124), wherein the cylindrical rotor has a top side (128), a static hub (120), wherein the static hub has an overhang (122) which protrudes from the static hub and is located adjacent to the top side, a lift magnetic actuator apparatus (130) for controlling the distance (126) between the top side and the overhang, a radial magnetic actuator apparatus (132) for controlling the distance (136) between the inner radius and the axis of rotation.

    摘要翻译: 一种具有旋转轴线(106)的磁性轴承(108),其中所述磁性轴承包括:包括铁磁材料(118,338,440)的圆柱形转子(116),其中所述圆柱形转子具有对称轴线(114) ,其中所述圆柱形转子具有内半径(124),其中所述圆柱形转子具有顶侧(128),静态毂(120),其中所述静态毂具有从所述静态毂突出的突出部(122) 位于与顶侧相邻的用于控制顶侧和突出端之间的距离(126)的升降磁致动器装置(130),用于控制内径和内径之间的距离(136)的径向磁致动器装置(132) 旋转轴。

    PATIENT INTERFACE ASSEMBLY WITH IMPROVED STABILIZATION
    4.
    发明申请
    PATIENT INTERFACE ASSEMBLY WITH IMPROVED STABILIZATION 有权
    患者接口大会改善了稳定性

    公开(公告)号:US20120216812A1

    公开(公告)日:2012-08-30

    申请号:US13448791

    申请日:2012-04-17

    IPC分类号: A61M16/06

    摘要: A patient interface assembly includes a support member having a central support portion and a pair of cheek mount supports coupled to the central portion. Each cheek mount support applies a force on or on a side of a user's cheekbone. A seal member is coupled to the support portion and seals against the user. An additional nasal support member is provided that includes a first lateral side member operatively coupled to the central support portion and arranged to be disposed along a first side of a user's nose, and a second lateral side member also operatively coupled the central support portion and arranged to be disposed along a second side of a user's nose. At least a portion of the first lateral side member and the second lateral side member is rigid or semi rigid.

    摘要翻译: 患者接口组件包括具有中心支撑部分和联接到中心部分的一对颊部安装支撑件的支撑构件。 每个脸颊安装支架在用户的颊骨上或侧面施加力。 密封构件联接到支撑部分并且密封抵靠使用者。 提供了另外的鼻支撑构件,其包括可操作地联接到中心支撑部分并且布置成沿着使用者的鼻子的第一侧布置的第一侧向侧构件,以及还可操作地联接中心支撑部分并且布置 沿着使用者的鼻子的第二侧布置。 第一横向侧构件和第二横向侧构件的至少一部分是刚性或半刚性的。

    MAGNETIC BEARING, A ROTARY STAGE, AND A REFLECTIVE ELECTRON BEAM LITHOGRAPHY APPARATUS
    5.
    发明申请
    MAGNETIC BEARING, A ROTARY STAGE, AND A REFLECTIVE ELECTRON BEAM LITHOGRAPHY APPARATUS 有权
    磁力轴承,旋转台和反射电子束光刻机

    公开(公告)号:US20120038233A1

    公开(公告)日:2012-02-16

    申请号:US13265676

    申请日:2010-04-14

    IPC分类号: H02K7/09

    摘要: A magnetic bearing (108) with an axis of rotation (106), wherein the magnetic bearing comprises: a cylindrical rotor (116) comprising a ferromagnetic material (118, 338, 440) wherein the cylindrical rotor has an axis of symmetry (114), wherein the cylindrical rotor has an inner radius (124), wherein the cylindrical rotor has a top side (128), a static hub (120), wherein the static hub has an overhang (122) which protrudes from the static hub and is located adjacent to the top side, a lift magnetic actuator apparatus (130) for controlling the distance (126) between the top side and the overhang, a radial magnetic actuator apparatus (132) for controlling the distance (136) between the inner radius and the axis of rotation.

    摘要翻译: 一种具有旋转轴线(106)的磁性轴承(108),其中所述磁性轴承包括:包括铁磁材料(118,338,440)的圆柱形转子(116),其中所述圆柱形转子具有对称轴线(114) ,其中所述圆柱形转子具有内半径(124),其中所述圆柱形转子具有顶侧(128),静态毂(120),其中所述静态毂具有从所述静态毂突出的突出部(122) 位于与顶侧相邻的用于控制顶侧和突出端之间的距离(126)的升降磁致动器装置(130),用于控制内径和内径之间的距离(136)的径向磁致动器装置(132) 旋转轴。