摘要:
A lithographic apparatus includes a support constructed to support a patterning device. The patterning device is capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam. The support includes a force actuator device to exert a force onto the patterning device in a direction of movement of the support. The force actuator device includes a movable part which is pivotably about a pivot axis and thereby connected to the support. The movable part is in the direction of movement of the support substantially balanced with respect to the pivot axis. The force actuator device further includes an actuator to exert via the movable part the force onto the patterning device, to at least partly compensate for the information or a risk of slippage due to acceleration of the support in the direction of movement.
摘要:
A magnetic bearing (108) with an axis of rotation (106), wherein the magnetic bearing comprises: a cylindrical rotor (116) comprising a ferromagnetic material (118, 338, 440) wherein the cylindrical rotor has an axis of symmetry (114), wherein the cylindrical rotor has an inner radius (124), wherein the cylindrical rotor has a top side (128), a static hub (120), wherein the static hub has an overhang (122) which protrudes from the static hub and is located adjacent to the top side, a lift magnetic actuator apparatus (130) for controlling the distance (126) between the top side and the overhang, a radial magnetic actuator apparatus (132) for controlling the distance (136) between the inner radius and the axis of rotation.
摘要:
A patient interface assembly includes a support member having a central support portion and a pair of cheek mount supports coupled to the central portion. Each cheek mount support applies a force on or on a side of a user's cheekbone. A seal member is coupled to the support portion and seals against the user. An additional nasal support member is provided that includes a first lateral side member operatively coupled to the central support portion and arranged to be disposed along a first side of a user's nose, and a second lateral side member also operatively coupled the central support portion and arranged to be disposed along a second side of a user's nose. At least a portion of the first lateral side member and the second lateral side member is rigid or semi rigid.
摘要:
A patient interface assembly includes a support member having a central support portion and a pair of cheek mount supports coupled to the central portion. Each cheek mount support applies a force on or on a side of a user's cheekbone. A seal member is coupled to the support portion and seals against the user. An additional nasal support member is provided that includes a first lateral side member operatively coupled to the central support portion and arranged to be disposed along a first side of a user's nose, and a second lateral side member also operatively coupled the central support portion and arranged to be disposed along a second side of a user's nose. At least a portion of the first lateral side member and the second lateral side member is rigid or semi rigid.
摘要:
A magnetic bearing (108) with an axis of rotation (106), wherein the magnetic bearing comprises: a cylindrical rotor (116) comprising a ferromagnetic material (118, 338, 440) wherein the cylindrical rotor has an axis of symmetry (114), wherein the cylindrical rotor has an inner radius (124), wherein the cylindrical rotor has a top side (128), a static hub (120), wherein the static hub has an overhang (122) which protrudes from the static hub and is located adjacent to the top side, a lift magnetic actuator apparatus (130) for controlling the distance (126) between the top side and the overhang, a radial magnetic actuator apparatus (132) for controlling the distance (136) between the inner radius and the axis of rotation.