MAGNETIC BEARING, A ROTARY STAGE, AND A REFLECTIVE ELECTRON BEAM LITHOGRAPHY APPARATUS
    1.
    发明申请
    MAGNETIC BEARING, A ROTARY STAGE, AND A REFLECTIVE ELECTRON BEAM LITHOGRAPHY APPARATUS 有权
    磁力轴承,旋转台和反射电子束光刻机

    公开(公告)号:US20120038233A1

    公开(公告)日:2012-02-16

    申请号:US13265676

    申请日:2010-04-14

    IPC分类号: H02K7/09

    摘要: A magnetic bearing (108) with an axis of rotation (106), wherein the magnetic bearing comprises: a cylindrical rotor (116) comprising a ferromagnetic material (118, 338, 440) wherein the cylindrical rotor has an axis of symmetry (114), wherein the cylindrical rotor has an inner radius (124), wherein the cylindrical rotor has a top side (128), a static hub (120), wherein the static hub has an overhang (122) which protrudes from the static hub and is located adjacent to the top side, a lift magnetic actuator apparatus (130) for controlling the distance (126) between the top side and the overhang, a radial magnetic actuator apparatus (132) for controlling the distance (136) between the inner radius and the axis of rotation.

    摘要翻译: 一种具有旋转轴线(106)的磁性轴承(108),其中所述磁性轴承包括:包括铁磁材料(118,338,440)的圆柱形转子(116),其中所述圆柱形转子具有对称轴线(114) ,其中所述圆柱形转子具有内半径(124),其中所述圆柱形转子具有顶侧(128),静态毂(120),其中所述静态毂具有从所述静态毂突出的突出部(122) 位于与顶侧相邻的用于控制顶侧和突出端之间的距离(126)的升降磁致动器装置(130),用于控制内径和内径之间的距离(136)的径向磁致动器装置(132) 旋转轴。

    Magnetic bearing, a rotary stage, and a reflective electron beam lithography apparatus
    2.
    发明授权
    Magnetic bearing, a rotary stage, and a reflective electron beam lithography apparatus 有权
    磁轴承,旋转台和反射电子束光刻设备

    公开(公告)号:US08836190B2

    公开(公告)日:2014-09-16

    申请号:US13265676

    申请日:2010-04-14

    IPC分类号: H02K7/09 F16C32/04 H01J37/20

    摘要: A magnetic bearing (108) with an axis of rotation (106), wherein the magnetic bearing comprises: a cylindrical rotor (116) comprising a ferromagnetic material (118, 338, 440) wherein the cylindrical rotor has an axis of symmetry (114), wherein the cylindrical rotor has an inner radius (124), wherein the cylindrical rotor has a top side (128), a static hub (120), wherein the static hub has an overhang (122) which protrudes from the static hub and is located adjacent to the top side, a lift magnetic actuator apparatus (130) for controlling the distance (126) between the top side and the overhang, a radial magnetic actuator apparatus (132) for controlling the distance (136) between the inner radius and the axis of rotation.

    摘要翻译: 一种具有旋转轴线(106)的磁性轴承(108),其中所述磁性轴承包括:包括铁磁材料(118,338,440)的圆柱形转子(116),其中所述圆柱形转子具有对称轴线(114) ,其中所述圆柱形转子具有内半径(124),其中所述圆柱形转子具有顶侧(128),静态毂(120),其中所述静态毂具有从所述静态毂突出的突出部(122) 位于与顶侧相邻的用于控制顶侧和突出端之间的距离(126)的升降磁致动器装置(130),用于控制内径和内径之间的距离(136)的径向磁致动器装置(132) 旋转轴。