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    SOI WAFER, MANUFACTURING METHOD THEREFOR, AND MEMS DEVICE
    1.
    发明申请
    SOI WAFER, MANUFACTURING METHOD THEREFOR, AND MEMS DEVICE 审中-公开
    SOI WAFER，其制造方法和MEMS器件

    公开(公告)号：US20140175573A1

    公开(公告)日：2014-06-26

    申请号：US14193209

    申请日：2014-02-28

    申请人： Eiji YOSHIKAWA ,  Jyunichi ICHIKAWA ,  Yukihisa YOSHIDA

    发明人： Eiji YOSHIKAWA ,  Jyunichi ICHIKAWA ,  Yukihisa YOSHIDA

    IPC分类号： B81B7/00 ,  H01L23/26

    CPC分类号： B81B7/0038 ,  B81B3/0018 ,  B81C1/00285 ,  H01L21/76259 ,  H01L23/26 ,  H01L29/16 ,  H01L2924/0002 ,  H01L2924/00

    摘要： In order to obtain a SOI wafer having an excellent ability of gettering metal impurities, an efficient method of manufacturing a SOI wafer, and a highly reliable MEMS device using such a SOI wafer, provided is a SOI wafer including: a support wafer (1) and an active layer wafer (6) which are bonded together with an oxide film (3) therebetween, each of the support wafer (1) and the active layer wafer (6) being a silicon wafer; a cavity (1b) formed in a bonding surface of at least one of the silicon wafers; and a gettering material (2) formed on a surface on a side opposite to the bonding surface.

    摘要翻译： 为了获得具有优异的金属杂质吸收能力的SOI晶片，提供了一种制造SOI晶片的有效方法和使用这种SOI晶片的高可靠性MEMS器件，其包括：支撑晶片（1） 以及与它们之间的氧化膜（3）结合在一起的有源层晶片（6），所述支撑晶片（1）和所述有源层晶片（6）中的每一个都是硅晶片; 形成在所述硅晶片中的至少一个的接合面中的空腔（1b） 以及形成在与所述接合面相反的一侧的表面上的吸气材料（2）。

    Angular velocity sensor
    3.
    发明授权
    Angular velocity sensor 失效
    角速度传感器

    公开(公告)号：US06584840B2

    公开(公告)日：2003-07-01

    申请号：US09978666

    申请日：2001-10-18

    申请人： Masahiro Tsugai ,  Nobuaki Konno ,  Eiji Yoshikawa ,  Hiroyuki Fujita

    发明人： Masahiro Tsugai ,  Nobuaki Konno ,  Eiji Yoshikawa ,  Hiroyuki Fujita

    IPC分类号： G01C1900

    CPC分类号： G01C19/5719

    摘要： A sensitive angular velocity sensor is provided without increasing an inter-electrode gap for inducing a torsional vibration. An angular velocity sensor which employs an electrostatic drive system for inducing drive vibration by using inter-electrode electrostatic attraction includes a pair of inertial mass members which are connected to each other through a connection frame having a length such that the inertial mass members are point-symmetrical with respect to a central point of the connection frame and which are held along a plane direction of a substrate, a pair of elastic beams which are connected to each other at an interval in opposite directions along a longitudinal direction from the central point of the connection frame on opposite sides of the connection frame, a pair of drive plates which are connected to the ends of the elastic beams, which have an electrode constituting an electrostatic attraction generating structure together with a drive electrode on the substrate, and which are supported such that the drive plates can be moved in at least one direction along the plane direction of the substrate to torsionally vibrate the inertial mass members about the central point of the connection frame.

    摘要翻译： 提供灵敏的角速度传感器，而不增加用于引起扭转振动的电极间间隙。 使用静电驱动系统的角速度传感器，其通过使用电极间静电吸引而引起驱动振动的方法包括：一对惯性质量部件，其通过具有长度使得惯性质量部件为点状的连接框架彼此连接， 相对于连接框架的中心点对称并且沿着基板的平面方向保持的一对弹性梁，沿着从中心点沿相反方向以相反方向彼此连接的一对弹性梁 连接框架的连接框架，连接到弹性梁的端部的一对驱动板，其具有与基板上的驱动电极一起构成静电引力产生结构的电极，并且被支撑为 驱动板可以沿着基板的平面方向在至少一个方向上移动 使惯性质量构件围绕连接框架的中心点扭转振动。

    Die-cushion apparatus of press machine
    4.
    发明授权
    Die-cushion apparatus of press machine 失效
    冲压机模座设备

    公开(公告)号：US5339665A

    公开(公告)日：1994-08-23

    申请号：US39318

    申请日：1993-04-23

    申请人： Eiji Yoshikawa

    发明人： Eiji Yoshikawa

    IPC分类号： B21D24/02 ,  B21D24/14 ,  B30B15/16

    CPC分类号： B21D24/02 ,  B21D24/14 ,  B30B15/16

    摘要： The object of the present invention is to provide a die-cushion apparatus of a press machine capable of performing a preliminary acceleration imparted to a die-cushion pad following the lowering of a slide with an exact timing and high precision and being improved so as to eliminate a pressure deviation between an actual pressure in a hydraulic cylinder and a preliminarily set aimed value at a portion near a lower dead point of the slide stroke. The die-cushion apparatus is provided with a pneumatic cylinder (6), a servo valve (40) for discharge pressure control and a hydraulic cylinder (7) to which a pressurized oil is made up by suction and constructed such that the make-up of the pressurized oil to the hydraulic cylinder (7) at the preliminary acceleration is performed by a pressurized oil makeup circuit (16) provided with a servo valve (22) controlled by a control unit body (14), and a control signal from a pressure control body (27) controlling the discharge pressure control servo valve (40) is corrected in response to the slide lowering speed and the press operation speed.

    摘要翻译： PCT No.PCT / JP91 / 01501 Sec。 371日期：1993年4月23日 102（e）日期1993年4月23日PCT 1991年11月1日PCT PCT。 出版物WO92 / 07711 日本公开于1992年5月14日。本发明的目的在于提供一种冲压机的模具缓冲装置，其能够以精确的时间和精度降低滑块后，对模具垫进行预加速度 并且被改进以消除液压缸中的实际压力与在滑动行程的下死点附近的部分处的预先设定的目标值之间的压力偏差。 模具缓冲装置设置有气缸（6），用于排出压力控制的伺服阀（40）和液压缸（7），压力油通过抽吸构成，构成为使得化妆 通过设置有由控制单元主体（14）控制的伺服阀（22）的加压油补充回路（16）进行预加速时的加压油到液压缸（7）的控制信号， 控制排气压力控制伺服阀（40）的压力控制体（27）响应于滑动降低速度和冲压操作速度而被校正。

    Method of guiding an unmanned vehicle
    5.
    发明授权
    Method of guiding an unmanned vehicle 失效
    引导无人驾驶车辆的方法

    公开(公告)号：US4866617A

    公开(公告)日：1989-09-12

    申请号：US30193

    申请日：1987-03-25

    申请人： Tomoo Matsuda ,  Mitsuo Hosoi ,  Yohkichi Nishi ,  Eiji Yoshikawa

    发明人： Tomoo Matsuda ,  Mitsuo Hosoi ,  Yohkichi Nishi ,  Eiji Yoshikawa

    IPC分类号： G05D1/02

    CPC分类号： G05D1/0282 ,  G05D1/0246 ,  G05D1/0261 ,  G05D1/0265 ,  G05D1/0272 ,  G05D1/0263 ,  G05D1/027 ,  G05D2201/0216

    摘要： A method of an unmanned vehicle comprises the steps of placing a certain number of ground marks each of which comprises a plurality of line segments on a passage of the vehicle measuring amount of movement of the vehicle between the adjacent line segments when the vehicle moves across each of the ground marks, and obtaining a relative positional relation between the ground mark and the vehicle with reference to the amount of movement thereof whereby movement of the vehicle is properly guided in accordance with the thus obtained positional relation. In the case of a navigational guiding method typically employed in aircraft or ship, an estimated position of the vehicle is corrected with reference to the aforesaid relative positional relation.

    摘要翻译： 一种无人驾驶车辆的方法包括以下步骤：当车辆在每个车辆上行驶时，在车辆的通道上设置一定数量的地面标记，每个路标包括多个线段，该车道测量车辆在相邻线段之间的移动量 并且根据其移动量获得地面标记与车辆之间的相对位置关系，由此根据由此获得的位置关系适当地引导车辆的移动。 在飞行器或船舶通常使用的导航指导方法的情况下，参考上述相对位置关系校正车辆的估计位置。

    Control device for a vacuum advancer
    6.
    发明授权
    Control device for a vacuum advancer 失效
    真空推进器的控制装置

    公开(公告)号：US3978831A

    公开(公告)日：1976-09-07

    申请号：US413620

    申请日：1973-11-07

    申请人： Eiji Yoshikawa

    发明人： Eiji Yoshikawa

    IPC分类号： F02P5/10 ,  F02P5/08

    CPC分类号： F02P5/106

    摘要： A control device for a vacuum advancer of the type for actuating the vacuum advancer in the directions of advancing and delaying the ignition timing under the control of a discriminating means to evaluate the operating condition of the engine. The vacuum advancer is adapted to be selectively driven in either of said two directions by the difference between a fraction of the vacuum in the inlet tube of the carbureter or the inlet manifold and either the total vacuum in the inlet tube or manifold or the atmospheric pressure by employing only one switch-over valve.

    摘要翻译： 一种用于真空推进器的控制装置，用于在识别装置的控制下沿着推进和延迟点火正时的方向致动真空推进器，以评估发动机的运行状态。 真空推进器适于在所述两个方向中的任一方向上被选择性地驱动，该差异是通过在该化油器或入口歧管的入口管中的真空度的一部分与入口管或歧管中的总真空度或大气压 只需一个切换阀。

    Semiconductor pressure sensor
    7.
    发明授权
    Semiconductor pressure sensor 有权
    半导体压力传感器

    公开(公告)号：US08710600B2

    公开(公告)日：2014-04-29

    申请号：US12949459

    申请日：2010-11-18

    申请人： Eiji Yoshikawa ,  Shinichi Izuo

    发明人： Eiji Yoshikawa ,  Shinichi Izuo

    IPC分类号： H01L29/84

    CPC分类号： G01L9/0042 ,  B81B3/0078 ,  B81B2201/0264 ,  B81B2203/0127

    摘要： A semiconductor pressure sensor that can improve diaphragm breakage pressure tolerance is provided.Included are: a first semiconductor substrate on which is formed a recess portion that has an opening on a first surface in a thickness direction; a second semiconductor substrate that is disposed so as to face the first surface of the first semiconductor substrate; and a first silicon oxide film that is interposed between the first semiconductor substrate and the second semiconductor substrate, and on which is formed a penetrating aperture that communicates between the recess portion and the second semiconductor substrate, and at least a portion of an edge portion of the penetrating aperture is positioned inside an opening edge portion of the recess portion when viewed from a side facing the penetrating aperture and the opening of the recess portion.

    摘要翻译： 提供了可以提高隔膜破裂压力公差的半导体压力传感器。 包括：第一半导体衬底，其上形成有在厚度方向上在第一表面上具有开口的凹部; 第二半导体衬底，其被设置为面对第一半导体衬底的第一表面; 以及第一氧化硅膜，其被插入在所述第一半导体基板和所述第二半导体基板之间，并且在所述第一氧化硅膜上形成有在所述凹部和所述第二半导体基板之间连通的贯通孔，并且所述第一氧化硅膜的至少一部分 当从面向穿透孔的侧面和凹部的开口观察时，贯通孔位于凹部的开口边缘部的内侧。

    Transition metal complexes, ligands, polymerization catalysts for olefins, and process for production of olefin polymers
    10.
    发明授权
    Transition metal complexes, ligands, polymerization catalysts for olefins, and process for production of olefin polymers 失效
    过渡金属络合物，配体，烯烃聚合催化剂和烯烃聚合物生产方法

    公开(公告)号：US07141690B2

    公开(公告)日：2006-11-28

    申请号：US10503252

    申请日：2003-02-06

    申请人： Hidenori Hanaoka ,  Taichi Senda ,  Eiji Yoshikawa ,  Satoshi Kobayashi

    发明人： Hidenori Hanaoka ,  Taichi Senda ,  Eiji Yoshikawa ,  Satoshi Kobayashi

    IPC分类号： C08F4/64 ,  C07F7/28 ,  C07F7/00

    CPC分类号： C08F10/00 ,  C07F17/00 ,  C08F4/65908 ,  C08F4/65912 ,  C08F10/02 ,  C08F210/16 ,  Y10S526/943 ,  C08F4/6592 ,  C08F210/14 ,  C08F2500/03 ,  C08F2500/10

    摘要： A transition metal complex represented by the formula (1): wherein M is a Group 4 transition metal, A is a Group 16 element, B is a Group 14 element, n is an integer of 0 or 1, R1, R2, R3 and R4 may be the same or different and each independently denotes a substituent selected from the group consisting of the groups (I) and (II): group (I): hydrogen, alkyl and so on, group (II): alkoxy, alkylthio and so on, provided that at least one of R1, R2, R3 and R4 is a substituent selected from group (II); R5, R6, R7, R8, R9, R10, X1 and X2 may be the same or different and are each hydrogen, halogen, alkyd or the like; and a catalyst for olefin polymerization comprising said complex, an organoaluminum compound and a boron compound are provided.

    摘要翻译： 由式（1）表示的过渡金属络合物：其中M是第4族过渡金属，A是第16族元素，B是第14族元素，n是0或1的整数，R 1， R 2，R 3，R 4和R 4可以相同或不同，并且各自独立地表示选自以下的取代基： 的基团（I）和（II）：基团（I）：氢，烷基等，基团（II）：烷氧基，烷硫基等，条件是R 1， R 2，R 3和R 4是选自（II）组的取代基。 R 5，R 6，R 7，R 8，R 9， R 10，X 1和X 2可以相同或不同，各自为氢，卤素，醇酸等; 并提供包含所述络合物，有机铝化合物和硼化合物的烯烃聚合催化剂。