Method and apparatus for measuring, analyzing, and characterizing irregularities on a surface of an article
    1.
    发明授权
    Method and apparatus for measuring, analyzing, and characterizing irregularities on a surface of an article 失效
    用于测量,分析和表征物品表面上的不规则的方法和装置

    公开(公告)号:US07013716B1

    公开(公告)日:2006-03-21

    申请号:US10207401

    申请日:2002-07-29

    IPC分类号: G01N19/00

    CPC分类号: G01B11/303

    摘要: A surface capacity parameter is determined for a surface of an article having irregularities therein that can be characterized by peaks and valleys relative to a reference point. Initially, an area of interest on the surface of the article and a lateral resolution of that area of interest are determined. An apparatus generates a visual representation of the area of interest on the surface of the article. A deflection contact part factor for the article is calculated, and a bearing ratio curve level is determined based upon the calculated deflection contact part factor and the magnitude of the height or distance between the tallest peak and the lowest valley on the surface of the article. The volume of the material comprising the peaks in the surface of the article and the volume of the space in the surface of the article that is available for the retention of a fluid, such as a lubricant, are determined. Lastly, a surface capacity parameter is calculated as the ratio of the volume of the material comprising the peaks in the surface of the article to the volume of the volume of the space comprising the valleys in the surface of the article.

    摘要翻译: 确定其中具有不规则性的制品的表面的表面容量参数,其可以相对于参考点表征峰和谷。 最初,确定物品表面上的感兴趣区域和该感兴趣区域的横向分辨率。 设备产生物品表面上的感兴趣区域的视觉表示。 计算物品的偏转接触部分因子,并根据计算的偏转接触部分因子和物品表面上最高峰和最低谷之间的高度或距离的大小来确定承载比曲线水平。 确定包括制品表面中的峰的材料的体积和可用于保持流体例如润滑剂的制品表面中空间的体积。 最后,表面容量参数被计算为包括制品表面中的峰的材料的体积与包含制品表面中的谷的空间的体积的体积的比率。

    Storage holder for elastic bands
    2.
    发明授权
    Storage holder for elastic bands 失效
    弹性带存放架

    公开(公告)号:US06186737B1

    公开(公告)日:2001-02-13

    申请号:US09323391

    申请日:1999-06-01

    申请人: Donald K. Cohen

    发明人: Donald K. Cohen

    IPC分类号: B65H7506

    摘要: A method for storing elastic bands makes use of an annular storage device, larger in diameter than the unstretched length of the elastic bands to be stored. The device has a series of clogs around its circumference, thereby creating a recessed area between each pair of adjacent clogs. The elastic bands to be stored are sequentially applied to the device, each elastic band being stretched between diametrically opposed recesses, thereby spanning the center. The elastic bands are then later removed in reverse order, as needed.

    摘要翻译: 用于存储弹性带的方法使用直径大于要存储的弹性带的未拉伸长度的环形存储装置。 该装置围绕其圆周具有一系列堵塞,从而在每对相邻的堵塞物之间形成凹陷区域。 要存储的弹性带被顺序地施加到装置,每个弹性带在直径相对的凹部之间拉伸,从而跨越中心。 然后根据需要以相反的顺序移动弹性带。

    Rough surface profiler and method
    3.
    发明授权
    Rough surface profiler and method 失效
    粗糙表面轮廓仪和方法

    公开(公告)号:US5355221A

    公开(公告)日:1994-10-11

    申请号:US143372

    申请日:1993-10-25

    IPC分类号: G01B11/24 G01B11/00

    CPC分类号: G01B11/2441

    摘要: A method of profiling a rough surface of an object includes moving the object along a z axis so that a highest point of the rough surface is optically aligned with and outside of the focus range of a solid-state imaging array. An interferogram of the rough surface then is produced by means of a two beam interferometer. The solid-state imaging array is operated to scan the rough surface along x and y axes to produce intensity data for each pixel of the solid-state imaging array for a plurality of frames each shifted from the other by a preselected phase difference. The modulation for each pixel is computed from the intensity data. The most recently computed modulation of each pixel is compared with a stored prior value of modulation of that pixel. The prior value is replaced with the most recently computed value if the most recently computed value is greater. The object is incrementally moved a selected distance along the z axis, and the foregoing procedure is repeated until maximum values of modulation and corresponding relative height of the rough surface are obtained and stored for each pixel.

    摘要翻译: 对物体的粗糙表面进行成形的方法包括沿z轴移动物体,使得粗糙表面的最高点与固态成像阵列的聚焦范围光学对准并且在外部。 然后通过双光束干涉仪产生粗糙表面的干涉图。 操作固态成像阵列以扫描沿着x和y轴的粗糙表面,以产生固定状态成像阵列的每个像素的强度数据,该多个帧各自以预定的相位差彼此偏移。 根据强度数据计算每个像素的调制。 将每个像素的最近计算的调制与存储的该像素的先前调制值进行比较。 如果最近计算的值较大,则先前值将替换为最近计算的值。 物体沿着z轴逐渐移动选定的距离,并且重复上述过程,直到为每个像素获得并存储粗调表面的最大值和对应的相对高度。

    Apparatus and method for automatically focusing an interference
microscope
    4.
    发明授权
    Apparatus and method for automatically focusing an interference microscope 失效
    用于自动聚焦干涉显微镜的装置和方法

    公开(公告)号:US4931630A

    公开(公告)日:1990-06-05

    申请号:US333182

    申请日:1989-04-04

    IPC分类号: G02B21/24

    CPC分类号: G02B21/245

    摘要: Automatic focusing of an interference microscope is accomplished by directly sensing an interference pattern produced by a white light source with an auxiliary point detector. A beamsplitter intercepts part of the interference beam and directs it to the point detector. A narrow band filter filters light passing through the beam splitter on its way to a main detector array. A memory lock position of the microscope objective is manually selected and stored. Initially, the objective moves rapidly from the memory lock position until the presence of fringes is detected by the point detector. Momentum of the microscope causes the objective to overshoot beyond a fringe window. The microscope objective then is moved more slowly through the interference window until fringes again are detected; the lower speed results in substantially reduced overshoot. Intensity measurements from the point detector are sensed and stored as the objective moves through the width of the fringe window. The microscope objective then is yet more slowly moved through the fringe window while sensing the intensities produced by the point detector until the objective reaches a point at which the intensity is equal to a preselected percentage of the maximum stored intensity.

    摘要翻译: 干涉显微镜的自动对焦是通过用辅助点检测器直接感测由白光源产生的干涉图案来实现的。 分束器截取干涉光束的一部分并将其引导到点检测器。 窄带滤波器在通过分束器通过主检测器阵列的过程中对其进行滤光。 手动选择和存储显微镜物镜的记忆锁定位置。 最初,目标从存储器锁定位置快速移动,直到点检测器检测到边缘的存在。 显微镜的动量使目标超过边缘窗口。 然后,显微镜物镜通过干涉窗更慢地移动,直到检测到条纹; 较低的速度导致显着减小的过冲。 当物镜移动通过边缘窗口的宽度时,来自点检测器的强度测量被感测和存储。 然后,显微镜物镜在通过边缘窗口更缓慢地移动,同时感测由点检测器产生的强度,直到目标达到强度等于最大存储强度的预选百分比的点。

    Optical systems employing ovate light beams
    5.
    发明授权
    Optical systems employing ovate light beams 失效
    采用卵形光束的光学系统

    公开(公告)号:US4609813A

    公开(公告)日:1986-09-02

    申请号:US713208

    申请日:1985-03-18

    申请人: Donald K. Cohen

    发明人: Donald K. Cohen

    摘要: An optical system, preferably used in an optical data recorder, has a laser light source emitting a light beam having an ovate or elliptical cross-section. An astigmatic optical element, such as a hemicylinder or cylindrical lens, disposed at 45 degrees with respect to the major axis, also termed the beam ellipse axis, in front of a focus detector eliminates focus offset errors caused by beam ellipticity.

    摘要翻译: 优选在光学数据记录器中使用的光学系统具有发射具有卵形或椭圆形横截面的光束的激光光源。 在焦点检测器前面相对于长轴(也称为光束椭圆轴)设置为45度的散光光学元件,例如半圆柱形或圆柱形透镜,消除了由光束椭圆率引起的焦点偏移误差。

    Method and apparatus for measuring irregularities on an outer surface of a rotatable cylindrical shaft
    6.
    发明授权
    Method and apparatus for measuring irregularities on an outer surface of a rotatable cylindrical shaft 有权
    用于测量可旋转圆柱形轴的外表面上的凹凸的方法和装置

    公开(公告)号:US06816250B1

    公开(公告)日:2004-11-09

    申请号:US09879866

    申请日:2001-06-12

    IPC分类号: G01N2188

    CPC分类号: G01N21/952

    摘要: A method for measuring irregularities on the outer surface of an article employs an apparatus to obtain qualitative information regarding a first portion of the outer surface of the article, which can be used to generate a visual representation of a first portion of the outer surface of the article. Then, the article is moved by a predetermined amount, and the apparatus is again used to generate a visual representation of a second portion of the surface of the article. This process is repeated to obtain a plurality of visual representations that together span across a predetermined amount of the surface of the article. Then, the plurality of visual representations are processed to generate a single comprehensive enlarged visual representation of a relatively large surface area of the article, which is preferably shaded, colored, or otherwise highlighted to illustrate the irregularities that are formed therein. The single comprehensive enlarged visual representation can be used to analyze the nature of such irregularities.

    Apparatus and method for simultaneous measurement of film thickness and
surface height variation for film-substrate sample
    7.
    发明授权
    Apparatus and method for simultaneous measurement of film thickness and surface height variation for film-substrate sample 失效
    用于同时测量薄膜基片样品的薄膜厚度和表面高度变化的装置和方法

    公开(公告)号:US5129724A

    公开(公告)日:1992-07-14

    申请号:US647555

    申请日:1991-01-29

    IPC分类号: G01B11/06

    CPC分类号: G01B11/0608 G01B11/0675

    摘要: The relative height variation and the thickness of a film of an object are simultaneously measured. A first interference pattern is produced for a calibration surface at a first wavelength and detected. Intensities of the first interference pattern are measured and used to compute a first group of phase values for each pixel. Intensity values of a point of the calibration samples are measured and used to compute a corresponding phase. A second interference pattern for the calibration surface is produced at a second wavelength and detected. Intensities of the second interference pattern are measured and used to compute a second group of phase values for each pixel. Intensity values of the point of the calibration surface are measured and used to compute a corresponding phase. A value for the surface height change .DELTA.h is computed by obtaining a linear combination of the corresponding phase values of the data groups. A drift value is computer by obtaining the difference between the first and second phase values at the point. A corrected surface height change value is computed for the calibration sample by adding the two. This procedure is repeated for a test surface to obtain its corrected surface height change. A corrected relative surface height change value .thrfore.h' is computed by subtracting the corrected surface height change value of the calibration surface from the corrected surface height change value for the test surface for each pixel. Computed .DELTA.h' values are compared to corresponding values from a mathematical model to obtain a best fit value of film thickness t for each pixel and the height error due to phase change is subtracted.

    摘要翻译: 同时测量物体的膜的相对高度变化和厚度。 对于第一波长的校准表面产生第一干涉图案并被检测。 测量第一干涉图案的强度并用于计算每个像素的第一组相位值。 测量校准样品点的强度值并用于计算相应的相位。 在第二波长处产生用于校准表面的第二干涉图案并被检测。 测量第二干涉图案的强度并用于计算每个像素的第二组相位值。 测量校准表面点的强度值,并用于计算相应的相位。 通过获得数据组的相应相位值的线性组合来计算表面高度变化DELTA h的值。 通过获得该点上的第一和第二相位值之间的差异来计算漂移值。 通过添加两个来计算校准样品的校正表面高度变化值。 对于测试表面重复该过程以获得其校正的表面高度变化。 经校正的相对表面高度变化值由于每个像素的测试表面的校正表面高度变化值减去校正表面的校正表面高度变化值来计算h'。 将计算的DELTA h'值与来自数学模型的对应值进行比较,以获得每个像素的膜厚度t的最佳拟合值,并且减去由于相变引起的高度误差。

    Optical signal recorders employing two lasers and methods therefor
    8.
    发明授权
    Optical signal recorders employing two lasers and methods therefor 失效
    采用两种激光器的光信号记录器及其方法

    公开(公告)号:US4694447A

    公开(公告)日:1987-09-15

    申请号:US630456

    申请日:1984-07-12

    摘要: An optical head for an optical signal recorder includes a nonpolarizing beam combiner for combining the light beams from two like-frequency, sic wavelength, lasers along one light path. The combined beams travel slightly diverging paths so that a first one of the beams can record signals on a disk while a second beam follows the first beam on the disk for direct reading-after-recording. Intermediate the combiner and the disk are a polarization type beam splitter and a focuser. One or more detectors receive reflected light from the disk via the beam splitter for detecting focus, sensed recorded signals and for tracking the beams to tracks of the disk. The combiner and splitter are preferably secured together as a single unit. The combiner uses refraction and internal reflection properties to combine the two like-frequency beams without polarization changes of either beam.

    摘要翻译: 用于光信号记录器的光学头包括非偏振光束组合器,用于组合来自两个相同频率,sic波长的激光器沿着一条光路的光束。 组合的光束行进稍微发散的路径,使得第一个光束可以在盘上记录信号,而第二光束跟随盘上的第一光束,用于直接读取后读取。 中间组合器和磁盘是偏振型分束器和聚焦器。 一个或多个检测器经由分束器接收来自盘的反射光,用于检测聚焦,感测的记录信号以及用于将光束跟踪到光盘的轨道。 组合器和分离器优选地作为单个单元固定在一起。 组合器使用折射和内部反射特性来组合两个相同频率的光束,而不影响任一光束的偏振变化。

    Automatic faucet with polarization sensor
    9.
    发明授权
    Automatic faucet with polarization sensor 失效
    带有偏振传感器的自动水龙头

    公开(公告)号:US07278624B2

    公开(公告)日:2007-10-09

    申请号:US11113702

    申请日:2005-04-25

    IPC分类号: F16K31/02

    CPC分类号: E03C1/057

    摘要: An automatic faucet system includes a sensor and a controller. The sensor includes an emitter constructed and arranged to emit light having a first polarization toward an object. The sensor further includes a detector configured to detect light reflected from the object having a second polarization that is different from the first polarization. The controller is operatively coupled to the detector. The controller is configured to supply water to a faucet, or other water supply, upon sensing by the detector the light having the second polarization. By sensing in such a manner, the level of false positive readings in the system is reduced. The detector is further configured to determine the location of the object so that the faucet is only activated when the object is in close proximity to the faucet.

    摘要翻译: 自动水龙头系统包括传感器和控制器。 传感器包括发射器,其被构造和布置成发射朝向物体的第一极化的光。 传感器还包括检测器,其被配置为检测具有与第一偏振不同的第二偏振的从物体反射的光。 控制器可操作地耦合到检测器。 控制器被配置为在由检测器检测到具有第二极化的光时,向水龙头或其他供水源供水。 通过以这种方式进行感测,系统中的假阳性读数的水平降低。 检测器还被配置成确定物体的位置,使得只有在物体靠近水龙头时才激活水龙头。

    Apparatus and method for automatically focusing an interference
microscope
    10.
    发明授权
    Apparatus and method for automatically focusing an interference microscope 失效
    用于自动聚焦干涉显微镜的装置和方法

    公开(公告)号:US5122648A

    公开(公告)日:1992-06-16

    申请号:US531884

    申请日:1990-06-01

    IPC分类号: G02B21/24

    CPC分类号: G02B21/241

    摘要: Automatic focusing of an interference microscope is accomplished by directly sensing an interference pattern produced by a white light source with an auxiliary point detector. A beamsplitter intercepts part of the interference beam and directs it to the point detector. A narrow band filter filters light passing through the beam splitter on its way to a main detector array. An objective of the interference microscope is rapidly moved to an initial position between a sample surface and a fringe window by operating a position sensor to sense when the objective is a predetermined safe distance from the sample surface and turning off a motor moving the objective. The objective then moves rapidly from the initial position until the presence of fringes is detected by the point detector. Momentum of the microscope causes the objective to overshoot beyond a fringe window. The microscope objective then is moved more slowly through the interference window until fringes again are detected; the lower speed results in substantially reduced overshoot. Intensity measurements from the detector are sensed and stored as the objective moves through the width of the fringe window. The microscope objective then is yet more slowly moved through the fringe window while sensing the intensities produced by the point detector until the objective reaches a point at which the intensity is equal to a preselected percentage of the maximum stored intensity.

    摘要翻译: 干涉显微镜的自动对焦是通过用辅助点检测器直接感测由白光源产生的干涉图案来实现的。 分束器截取干涉光束的一部分并将其引导到点检测器。 窄带滤波器在通过分束器通过主检测器阵列的过程中对其进行滤光。 干涉显微镜的目的是通过操作位置传感器来快速移动到样品表面和边缘窗口之间的初始位置,以便在目标距离样品表面预定的安全距离以及关闭移动物镜的电机时感测。 然后,目标从初始位置快速移动,直到点检测器检测到边缘的存在。 显微镜的动量使目标超过边缘窗口。 然后,显微镜物镜通过干涉窗更慢地移动,直到检测到条纹; 较低的速度导致显着减小的过冲。 当物镜移动通过边缘窗口的宽度时,来自检测器的强度测量被感测和存储。 然后,显微镜物镜在通过边缘窗口更缓慢地移动,同时感测由点检测器产生的强度,直到目标达到强度等于最大存储强度的预选百分比的点。