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1.发明申请Releasing and post-releasing processes in fabrications for micromirror array devices 有权微镜阵列器件制造中的释放和释放过程公开(公告)号：US20120184067A1
公开(公告)日：2012-07-19
申请号：US11734458
申请日：2007-04-12
Applicant: Hongqin Shi , Gregory Schaadt , James C. Dunphy , Dmitri Simonian , John D. Porter
Inventor： Hongqin Shi , Gregory Schaadt , James C. Dunphy , Dmitri Simonian , John D. Porter
IPC: H01L21/50
CPC classification number: B81B3/0005 , B81B2201/042 , B81C2201/112 , G02B26/0833 , H01L21/02046 , H01L21/02164 , H01L21/3121
Abstract: A releasing and post-releasing method for making a micromirror device and a micromirror array device are disclosed herein. The releasing method removes the sacrificial materials in the micromirror and micromirror array so as to enabling movements of the movable elements in the micromirror and micromirror array device. The post-releasing method is applied to improve the performance and quality of the released micromirrors and micromirror array devices.
Abstract translation: 本文公开了用于制造微镜器件和微镜阵列器件的释放和释放方法。 释放方法去除了微反射镜和微镜阵列中的牺牲材料，以便使得微镜和微镜阵列器件中的可移动元件能够移动。 应用后释放方法来提高释放的微镜和微镜阵列器件的性能和质量。
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公开(公告)号：US20100115671A1
公开(公告)日：2010-05-06
申请号：US12264268
申请日：2008-11-04
Applicant: Sergiy Pryadkin , Dmitri Simonian
Inventor： Sergiy Pryadkin , Dmitri Simonian
CPC classification number: H02N2/025 , G01B9/02057 , G01B11/03 , H02N2/0055 , H02N2/028 , Y10T29/42
Abstract: We disclose a precision positioner based on an inertial actuator, an optical instrument for accurate positional readout and control, and an electrostatically clamped assembly for holding any instrument or device. All aspects of the present invention present a significant improvement over the prior art: a positioner is robust and compact; an optical instrument for positional control is a profoundly simple and compact module; a clamping assembly is self-aligning and suitable for robotic hot-swapping of objects being positioned.
Abstract translation: 我们公开了基于惯性致动器，用于精确位置读出和控制的光学仪器以及用于保持任何仪器或装置的静电夹紧组件的精密定位器。 与现有技术相比，本发明的所有方面都有显着的改进：定位器坚固紧凑; 用于位置控制的光学仪器是一个非常简单和紧凑的模块; 夹紧组件是自对准的，适用于被定位的物体的机器人热插拔。
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3.发明申请Method and apparatus for lubricating microelectromechanical devices in packages 有权用于在包装中润滑微机电装置的方法和装置公开(公告)号：US20060038269A1
公开(公告)日：2006-02-23
申请号：US11254905
申请日：2005-10-20
Applicant: Jim Dunphy , Dmitri Simonian , John Porter
Inventor： Jim Dunphy , Dmitri Simonian , John Porter
IPC: H01L23/20
CPC classification number: B81B3/0005 , B81C1/0096
Abstract: The present invention provides a lubricant container inside a microelectromechanical device package. The lubricant container contains selected lubricant that evaporates from the container and contact to a surface of the microelectromechanical device for lubricating the surface.
Abstract translation: 本发明提供了一种在微机电装置封装内的润滑剂容器。 润滑剂容器包含从容器蒸发的选定的润滑剂，并与微机电装置的表面接触以润滑表面。
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公开(公告)号：US09029806B2
公开(公告)日：2015-05-12
申请号：US13885774
申请日：2011-12-19
Applicant: Dmitri Simonian , Mikhail Fouksman
Inventor： Dmitri Simonian , Mikhail Fouksman
CPC classification number: G01N21/64 , G01N21/274 , G01N21/59 , G01N2021/4742 , G01N2201/065
Abstract: A structure for testing a luminescent film includes a Lambertian light source, an integrating sphere having an input port, and a measuring device. The Lambertian light source includes a mixing chamber having an input port and an output port, and a light emitter coupled to the input port. During testing the luminescent film is positioned between the output port of the mixing chamber and the input port of the integrating sphere. The measuring device is optically coupled to the integrating sphere.
Abstract translation: 用于测试发光膜的结构包括朗伯光源，具有输入端口的积分球和测量装置。 朗伯光源包括具有输入端口和输出端口的混合室以及耦合到输入端口的光发射器。 在测试期间，发光膜位于混合室的输出端口和积分球的输入端口之间。 测量装置光学耦合到积分球。
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公开(公告)号：US20130313444A1
公开(公告)日：2013-11-28
申请号：US13885774
申请日：2011-12-19
Applicant: Dmitri Simonian , Mikhail Fouksman
Inventor： Dmitri Simonian , Mikhail Fouksman
IPC: G01N21/64
CPC classification number: G01N21/64 , G01N21/274 , G01N21/59 , G01N2021/4742 , G01N2201/065
Abstract: A structure for testing a luminescent film includes a Lambertian light source, an integrating sphere having an input port, and a measuring device. The Lambertian light source includes a mixing chamber having an input port and an output port, and a light emitter coupled to the input port. During testing the luminescent film is positioned between the output port of the mixing chamber and the input port of the integrating sphere. The measuring device is optically coupled to the integrating sphere.
Abstract translation: 用于测试发光膜的结构包括朗伯光源，具有输入端口的积分球和测量装置。 朗伯光源包括具有输入端口和输出端口的混合室以及耦合到输入端口的光发射器。 在测试期间，发光膜位于混合室的输出端口和积分球的输入端口之间。 测量装置光学耦合到积分球。
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Patent Agency Ranking
6.发明授权Releasing and post-releasing processes in fabrications for micromirror array devices 有权微镜阵列器件制造中的释放和释放过程公开(公告)号：US08395837B2
公开(公告)日：2013-03-12
申请号：US11734458
申请日：2007-04-12
Applicant: Hongqin Shi , Gregory Schaadt , James C. Dunphy , Dmitri Simonian , John D. Porter
Inventor： Hongqin Shi , Gregory Schaadt , James C. Dunphy , Dmitri Simonian , John D. Porter
IPC: G02B26/00
CPC classification number: B81B3/0005 , B81B2201/042 , B81C2201/112 , G02B26/0833 , H01L21/02046 , H01L21/02164 , H01L21/3121
Abstract: A releasing and post-releasing method for making a micromirror device and a micromirror array device are disclosed herein. The releasing method removes the sacrificial materials in the micromirror and micromirror array so as to enabling movements of the movable elements in the micromirror and micromirror array device. The post-releasing method is applied to improve the performance and quality of the released micromirrors and micromirror array devices.
Abstract translation: 本文公开了用于制造微镜器件和微镜阵列器件的释放和释放方法。 释放方法去除了微反射镜和微镜阵列中的牺牲材料，以便使得微镜和微镜阵列器件中的可移动元件能够移动。 应用后释放方法来提高释放的微镜和微镜阵列器件的性能和质量。
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公开(公告)号：US07514012B2
公开(公告)日：2009-04-07
申请号：US10766776
申请日：2004-01-27
Applicant: Jonathan Doan , Satyadev R. Patel , Dmitri Simonian
Inventor： Jonathan Doan , Satyadev R. Patel , Dmitri Simonian
CPC classification number: B81C1/00682 , B81B2201/042 , G02B26/0841
Abstract: The present invention discloses a method for processing a deformable element of a microstructure for reducing the plastic deformation by oxidizing the deformable element. The method of the present invention can be performed at a variety of stages of the fabrication and packaging processes.
Abstract translation: 本发明公开了一种用于通过氧化可变形元件来处理微结构的可变形元件以减少塑性变形的方法。 本发明的方法可以在制造和包装过程的各个阶段进行。
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8.发明授权Method and apparatus for lubricating microelectromechanical devices in packages 有权用于在包装中润滑微机电装置的方法和装置公开(公告)号：US07335535B2
公开(公告)日：2008-02-26
申请号：US11254905
申请日：2005-10-20
Applicant: Jim Dunphy , Dmitri Simonian , John Porter
Inventor： Jim Dunphy , Dmitri Simonian , John Porter
IPC: H01L21/44
CPC classification number: B81B3/0005 , B81C1/0096
Abstract: The present invention provides a lubricant container inside a microelectromechanical device package. The lubricant container contains selected lubricant that evaporates from the container and contact to a surface of the microelectromechanical device for lubricating the surface.
Abstract translation: 本发明提供了一种在微机电装置封装内的润滑剂容器。 润滑剂容器包含从容器蒸发的选定的润滑剂，并与微机电装置的表面接触以润滑表面。
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公开(公告)号：US08330963B2
公开(公告)日：2012-12-11
申请号：US13269698
申请日：2011-10-10
Applicant: Sergiy Pryadkin , Dmitri Simonian
Inventor： Sergiy Pryadkin , Dmitri Simonian
IPC: G01B11/02
CPC classification number: H02N2/025 , G01B9/02057 , G01B11/03 , H02N2/0055 , H02N2/028 , Y10T29/42
Abstract: We disclose a method for accurate three-dimensional position measurement in the field of nano-positioning using a single light beam and principles of interferometry to measure position.
Abstract translation: 我们公开了使用单个光束进行纳米定位领域的精确三维位置测量的方法和用于测量位置的干涉测量原理。
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公开(公告)号：US20120235600A1
公开(公告)日：2012-09-20
申请号：US13048427
申请日：2011-03-15
Applicant: Dmitri Simonian , Steven Paolini , Richard Jui-chi Koo
Inventor： Dmitri Simonian , Steven Paolini , Richard Jui-chi Koo
IPC: H05B37/02
CPC classification number: H05B33/086 , H05B37/0209
Abstract: A method of utilizing a light replication luminaire to match the spectral characteristics of light that is output from the luminaire to the spectral characteristics of a target light spectrum is provided. In one example, the method permits the user to assign a weight to one or more characteristics of the target light spectrum to be replicated. A best approximation of the target light spectrum is then determined, taking into account the weight assigned to each characteristic. In another example, the target light spectrum is provided to the luminaire by the user through the specification of various characteristics of the target light spectrum.
Abstract translation: 提供了利用光复制照明器将从照明器输出的光的光谱特性与目标光谱的光谱特性相匹配的方法。 在一个示例中，该方法允许用户为要复制的目标光谱的一个或多个特征分配权重。 然后确定目标光谱的最佳近似值，同时考虑分配给每个特征的权重。 在另一示例中，目标光谱由用户通过对目标光谱的各种特性的规范提供给照明设备。
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