Processing apparatus, coated article and method
    5.
    发明申请
    Processing apparatus, coated article and method 审中-公开
    加工设备,涂层制品和方法

    公开(公告)号:US20080141938A1

    公开(公告)日:2008-06-19

    申请号:US11638039

    申请日:2006-12-13

    Abstract: A processing apparatus for use in a corrosive operating environment is provided. The apparatus includes a base substrate for placing a wafer thereon. The base substrate has a coefficient of thermal expansion. At least one electrode is embedded in or disposed on or under the base substrate. The electrode has a coefficient of thermal expansion in a range of from about 0.70 to about 1.25 times that of the base substrate coefficient of thermal expansion (CTE). At least one coating layer is disposed on the base substrate. The coating layer includes a composition capable of forming a calcium aluminate coating. The calcium aluminate coating layer is doped with one of MgO, CaO, CaF2 and mixtures thereof to control the CTE of the coating layer to match the CTE of the base substrate. The apparatus is exposed to a corrosive operating environment at a temperature range of from about 25 degrees Celsius to about 1500 degrees Celsius. A coated article and associated method are provided.

    Abstract translation: 提供一种用于腐蚀性操作环境的处理装置。 该装置包括用于在其上放置晶片的基底基板。 基底具有热膨胀系数。 至少一个电极嵌入或设置在基底基板上或下方。 电极的热膨胀系数在基底热膨胀系数(CTE)的约0.70至约1.25倍的范围内。 在基底基板上设置至少一层涂层。 涂层包括能够形成铝酸钙涂层的组合物。 铝酸钙涂层掺杂有MgO,CaO,CaF 2 O 2和其混合物中的一种,以控制涂层的CTE以匹配基底基材的CTE。 该装置暴露在约25摄氏度至约1500摄氏度的温度范围内的腐蚀性操作环境中。 提供涂覆制品和相关方法。

    Coatings for glass molding dies and forming tools
    6.
    发明申请
    Coatings for glass molding dies and forming tools 失效
    玻璃模具和成型工具涂料

    公开(公告)号:US20050268662A1

    公开(公告)日:2005-12-08

    申请号:US11147809

    申请日:2005-06-06

    Abstract: The invention provides coatings to achieve the best accommodation of chemical, physical, and mechanical properties desired in high performance and reliable glass molding and forming tools. The substrate material can be any ordinary die or tool material such as cast iron, stainless steel, platinum, tungsten carbide and silicon. A simple coating architecture consisting of a titanium adhesion layer and a Ni—Al—N or Ti—B—C—N working layer is provided. A NiAl working layer can meet the requirements of wear resistance in which abrasive and/or erosive wear is relatively low, while a Ti—B—C—N working layer is sufficient for processes operating at relatively low temperature or in vacuum or a protective environment. The coating architectures, from the coating/substrate interface to the outer most surface of the coating include an inner adhesion layer, an outer working layer and, optionally, one or more finctionally graded material layers. The invention also provides methods of making these coatings.

    Abstract translation: 本发明提供涂层,以实现在高性能和可靠的玻璃成型和成型工具中所需的化学,物理和机械性能的最佳调节。 基板材料可以是任何普通的模具或工具材料,例如铸铁,不锈钢,铂,碳化钨和硅。 提供了由钛粘合层和Ni-Al-N或Ti-B-C-N工作层组成的简单涂层结构。 NiAl工作层可以满足磨损和/或侵蚀磨损相对较低的耐磨性要求,而Ti-B-C-N工作层对于在较低温度或真空或保护环境中操作的工艺是足够的。 从涂层/基底界面到涂层的最外表面的涂层结构包括内部粘合层,外部工作层和任选的一个或多个有序分级的材料层。 本发明还提供了制备这些涂层的方法。

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