摘要:
A method for fabricating a display panel is provided. The method includes steps of: disposing a seal on a first substrate, in which a first side of the seal connects in approximately perpendicular to a second side of the seal and has at least one liquid crystal inlet; forming at least one block on the first substrate and between the liquid crystal inlet and the connection of the first side and the second side of the seal, in which there is a space between the block and the first side of the seal when the block is formed; and pressing a second substrate against the first substrate having the seal and the block thereon, such that the block adjoins the first side of the seal after the second substrate is pressed.
摘要:
A method for fabricating a display panel is provided. The method includes steps of: disposing a seal on a first substrate, in which a first side of the seal connects in approximately perpendicular to a second side of the seal and has at least one liquid crystal inlet; forming at least one block on the first substrate and between the liquid crystal inlet and the connection of the first side and the second side of the seal, in which there is a space between the block and the first side of the seal when the block is formed; and pressing a second substrate against the first substrate having the seal and the block thereon, such that the block adjoins the first side of the seal after the second substrate is pressed.
摘要:
A display panel includes a first substrate, a second substrate, a seal and at least one block. The second substrate is disposed opposite to the first substrate. The seal is disposed between the first substrate and the second substrate and has a first side and a second side. The first side has at least one liquid crystal inlet and connects in approximately perpendicular to the second side. The block is disposed between the first substrate and the second substrate and adjoins the first side of the seal. The block is disposed between the liquid crystal inlet and the connection of the first side and the second side. A method for fabricating a display panel is also disclosed herein.
摘要:
A method of determining a temperature in a deposition reactor includes the steps of depositing a first epitaxial layer of silicon germanium on a substrate, depositing a second epitaxial layer of silicon above the first epitaxial layer, measuring the thickness of the second epitaxial layer and determining the temperature in the deposition reactor using the measured thickness of the second epitaxial layer. The method may also include heating the deposition reactor to approximately a predetermined temperature using a heating device and a temperature measuring device and generating a signal indicative of a temperature within the deposition reactor. The method may also contain the steps of comparing the measured thickness with a predetermined thickness of the second epitaxial layer corresponding to the predetermined temperature and determining the temperature in the deposition reactor using the measured thickness of the second epitaxial layer and the predetermined thickness of the second epitaxial layer.
摘要:
A semiconductor device manufacturing system including a processing subsystem and a compensation thermal subsystem. The processing subsystem includes a process chamber and a thermal control subsystem having a processing subsystem heating element and configured to generate a process chamber temperature profile. The compensation thermal subsystem includes a temperature sensor configured to detect the process chamber temperature profile, a compensation thermal control unit (CTCU) configured to determine variation between the process chamber temperature profile and a desired temperature profile, and a compensation heating element configured to alter the process chamber temperature profile in response to the variation detected by the CTCU.
摘要:
Uniform spatial distribution of plasma over the face of a semiconductor wafer is achieved using a multi-zone electrode forming part of an electrostatic chuck used to hold the wafer in a processing chamber. The electrode includes a plurality of concentric electrode portions to which differing RF bias voltages may be applied to produce an electric field having a desired spatial distribution. Sensors are used to monitor either the spatial distribution of the plasma or the process effects of the plasma, and the sensed information is fed back to a controller that adjusts the bias voltage on the electrode portions in a manner to maintain the spatial uniformity of the plasma.
摘要:
A method of determining a temperature in a deposition reactor includes the steps of depositing a first epitaxial layer of silicon germanium on a substrate, depositing a second epitaxial layer of silicon above the first epitaxial layer, measuring the thickness of the second epitaxial layer and determining the temperature in the deposition reactor using the measured thickness of the second epitaxial layer. The method may also include heating the deposition reactor to approximately a predetermined temperature using a heating device and a temperature measuring device and generating a signal indicative of a temperature within the deposition reactor. The method may also contain the steps of comparing the measured thickness with a predetermined thickness of the second epitaxial layer corresponding to the predetermined temperature and determining the temperature in the deposition reactor using the measured thickness of the second epitaxial layer and the predetermined thickness of the second epitaxial layer.
摘要:
A display panel includes a first substrate, a second substrate, a seal and at least one block. The second substrate is disposed opposite to the first substrate. The seal is disposed between the first substrate and the second substrate and has a first side and a second side. The first side has at least one liquid crystal inlet and connects in approximately perpendicular to the second side. The block is disposed between the first substrate and the second substrate and adjoins the first side of the seal. The block is disposed between the liquid crystal inlet and the connection of the first side and the second side. A method for fabricating a display panel is also disclosed herein
摘要:
A continuous liquid delivery system which includes at least one primary filter and at least one secondary filter for alternatively receiving a liquid such as a CMP polishing slurry. A primary backwash circuit is provided in fluid communication with each primary filter for backwashing of the primary filter. At least one secondary backwash circuit is provided in fluid communication with each secondary filter for backwashing of the secondary filter. As the liquid is distributed through the primary filter or filters, the secondary filter or filters can be backwashed, and vice-versa to facilitate a continuous flow of the liquid from a source to a destination.
摘要:
The present disclosure provides a method of chamber match. The method includes identifying a golden chamber designed operable to implement a semiconductor process; identifying a reference chamber designed operable for the semiconductor process; and extracting a matching index of a processing chamber relative to the golden chamber and the reference chamber using a dynamic variable analysis.