公开(公告)号：US5159234A

公开(公告)日：1992-10-27

申请号：US635682

申请日：1990-12-27

Applicant: Urs Wegmann ,  Albert Koller ,  Hubert Mannhart

Inventor： Urs Wegmann ,  Albert Koller ,  Hubert Mannhart

IPC: H01J1/18 ,  H01J37/06 ,  H01J37/065 ,  H01J37/067 ,  H01J37/305

CPC classification number: H01J37/3053 ,  H01J37/067

Abstract: An electron beam generator having an electron emission cathode adopted to be rapidly mounted to an installation, has an electronically insulating support body that is clamped on one side to a metal contact body having a large surface area. At the other side of the electrically insulating support body, a quick release device is arranged in order to rapidly mount and dismount the generator to an installation.

Abstract translation: 具有电子发射阴极的电子束发生器被迅速地安装在一个装置上，具有一个电子绝缘支撑体，该电绝缘支撑体一侧夹在具有大表面积的金属接触体上。 在电绝缘支撑体的另一侧，设置快速释放装置，以便将发电机快速安装和拆卸到一个设备上。

公开(公告)号：US4943720A

公开(公告)日：1990-07-24

申请号：US389056

申请日：1989-08-02

Applicant: Barbara L. Jones

Inventor： Barbara L. Jones

IPC: G01B7/34 ,  G01Q60/10 ,  G01Q60/16 ,  G01Q70/10 ,  G01Q70/14 ,  G01Q70/16 ,  G01R1/067 ,  H01J37/06 ,  H01J37/28 ,  H01L21/66

CPC classification number: G01Q60/16 ,  B82Y35/00 ,  G01R1/06711 ,  Y10S977/879

Abstract: An electronic probe consists of a steel elongate base (10) having a conical tip (12) and a thin layer (14) of semi-conducting diamond of the tip (12). The diamond tip (16), viewed end-on, will generally have a radius of less than 3000 angstroms.

公开(公告)号：US4919780A

公开(公告)日：1990-04-24

申请号：US333386

申请日：1989-04-03

Applicant: Hans-Werner Fink ,  Roger Morin ,  Heinz Schmid ,  Werner Stocker

Inventor： Hans-Werner Fink ,  Roger Morin ,  Heinz Schmid ,  Werner Stocker

IPC: H01J37/141 ,  B23K17/00 ,  H01J9/02 ,  H01J9/14 ,  H01J37/06 ,  H01J37/08 ,  H01J37/12 ,  H01J37/244 ,  H01J37/305 ,  H01J37/31

CPC classification number: H01J37/12 ,  B23K17/00 ,  H01J37/31 ,  H01J9/02 ,  H01J2237/0807 ,  Y10S977/856 ,  Y10S977/857 ,  Y10S977/888 ,  Y10S977/89

Abstract: A method for fabricating exactly aligned apertures for use in electron and ion microscopy involves the placing of a very sharply pointed tip (1) in front of a set of extremely thin, precisely spaced metal foils (3,5) in an atmosphere of heavy gas atoms. The application of an elevated voltage at the tip (1) will result in a sputtering operation to commence and erode the metal foils (3,5) at a location underneath the facing tip (1). The sputtering operation is continued until the first ions are detected to emerge on the far side of the lens structure (2).

公开(公告)号：US4890029A

公开(公告)日：1989-12-26

申请号：US80668

申请日：1987-08-03

Applicant: Motosuke Miyoshi ,  Katsuya Okumura

Inventor： Motosuke Miyoshi ,  Katsuya Okumura

IPC: H01J37/06 ,  H01J37/073 ,  H01J37/18 ,  H01J41/12

CPC classification number: H01J37/18 ,  H01J41/12

Abstract: An electron beam apparatus is disclosed which comprises a cylindrical chamber, ion pump exhaust zones arranged in a substantially ring-like array, and an electron gun located on the center axis of the ring-like array, thereby minimizing the distance between the exhaust zone of an ion pump and the electron gun for generating an electron beam. Since the ion pump exhaust zones are located immediately next to the electron gun, it is therefore possible to achieve substantially the same vacuum level at the location of the electron gun as that at the ion pump per se.

公开(公告)号：US4823006A

公开(公告)日：1989-04-18

申请号：US158208

申请日：1988-02-19

Applicant: Gerasimos D. Danilatos ,  George C. Lewis

Inventor： Gerasimos D. Danilatos ,  George C. Lewis

IPC: H01J37/06 ,  G01N23/00 ,  G02B21/02 ,  H01J31/28 ,  H01J37/02 ,  H01J37/141 ,  H01J37/16 ,  H01J37/20 ,  H01J37/244 ,  H01J37/252 ,  H01J37/26 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/141 ,  H01J37/16 ,  H01J37/28 ,  H01J2237/2448 ,  H01J2237/2449 ,  H01J2237/24507 ,  H01J2237/2608

Abstract: This invention provides for an integrated electron optical/differential pumping/imaging signal detection system for an environmental scanning electron microscope (ESEM). The ESEM includes a substantially cylindrical objective lens magnetic housing containing an axially disposed vacuum liner tube and containing means for magnetically focusing a beam of electrons passing through said liner tube. An annular ring comprised of magnetic materials abuts said magnetic housing at the lower end thereof and contains at least two pumping ports therein located axially with respect to one another. At least two annular nonmagnetic diaphragms and a final magnetic annular diaphragm are attached to the annular ring at different axial locations and extending inwardly therefrom. The diaphragms define at least two interior passages which each communicate with one of the pumping ports formed in the annular ring. A combination aperture holder and electron detector is releasably received and sealed with in the central openings of the annular diaphragms. The aperture holder has apertures therein for the passage of the electron beam and gas into and out of the specimen chamber of the ESEM and the interior passages and has electron detector means associated with the lower portion thereof.

Abstract translation: 本发明提供了一种用于环境扫描电子显微镜（ESEM）的集成电子光学/差分泵浦/成像信号检测系统。 ESEM包括基本上圆柱形的物镜磁性壳体，其包含轴向设置的真空衬套管和用于磁化聚焦通过所述衬管的电子束的容纳装置。 由磁性材料构成的环形环在其下端邻接所述磁性壳体并且在其中包含至少两个相对于彼此轴向的泵送端口。 至少两个环形非磁性膜片和最终的磁性环形隔膜在不同的轴向位置附接到环形环并从其向内延伸。 隔膜限定至少两个内部通道，每个内部通道与形成在环形环中的一个泵送端口连通。 组合的孔保持器和电子检测器可释放地接收并密封在环形隔膜的中心开口中。 孔保持器具有用于电子束和气体进入和离开ESEM和内部通道的样本室的孔，并具有与其下部相关联的电子检测器装置。

公开(公告)号：US4719388A

公开(公告)日：1988-01-12

申请号：US765413

申请日：1985-08-13

Applicant: Frederick G. Oess

Inventor： Frederick G. Oess

IPC: H01J15/00 ,  H01J29/46 ,  H01J31/12 ,  H01J37/06 ,  G09G3/10

CPC classification number: H01J31/126

Abstract: A flat visual display device is disclosed herein and includes a flat face plate having a front face and an opposite back face and electrically positive means on the latter which, as a result of the impingement of the electrons thereon, provides a visual image through the front face of the face plate. The device utilizes an arrangement including cathode means for establishing a uniformly dense space-charge cloud of free electrons within a planar band parallel with and rearward of the back face of the display face plate. Means including an apertured address plate disposed in spaced-apart confronting relationship with the back face of the face plate between the latter and the uniform space-charge cloud acts on the electrons within the cloud in a controlled way so as to cause the electrons acted upon to impinge on specific areas of the electrically positive back face plate means of the display face plate in order to produce a desired image through the face plate's front face.

Abstract translation: 本文公开了一种平面视觉显示装置，包括具有前表面和相对后表面的平面面板，并且在其上具有电正面装置，由于其上的电子的撞击，通过前面提供视觉图像 面板的脸。 该装置利用包括阴极装置的装置，用于在与显示面板的背面平行并在后面的平面带内建立均匀致密的空间电荷云。 包括与后面板和均匀空间电荷云之间的面板的背面间隔开面对的关系的多孔地址板的装置以受控的方式作用在云内的电子上，以使电子作用在 以撞击显示面板的电气正面板装置的特定区域，以便通过面板的正面产生期望的图像。

公开(公告)号：US4684782A

公开(公告)日：1987-08-04

申请号：US774735

申请日：1985-09-11

Applicant: Hidenobu Murakami ,  Seiji Yasunaga

Inventor： Hidenobu Murakami ,  Seiji Yasunaga

IPC: H01J37/315 ,  B23K15/00 ,  B23K15/02 ,  H01J37/06 ,  H01J37/24 ,  H01J37/248

CPC classification number: H01J37/243

Abstract: A feedback signal of a beam accelerating voltage, which is input into a feedback control system is fixed at a predetermined value corresponding to a signal under the condition before generation of arcing, when the arcing is generated, and thereafter, the fixed feedback signal is released to continue a feedback control.

Abstract translation: 输入到反馈控制系统中的光束加速电压的反馈信号，在产生电弧时，在产生电弧之前的条件下固定为对应于信号的预定值，之后，释放固定反馈信号 继续反馈控制。

公开(公告)号：US4661741A

公开(公告)日：1987-04-28

申请号：US749787

申请日：1985-06-28

Applicant: John Valun ,  Kenneth J. Harte

Inventor： John Valun ,  Kenneth J. Harte

IPC: H01J37/06 ,  H01J37/065 ,  H01J29/48 ,  H01J19/46

CPC classification number: H01J37/065

Abstract: An electron gun includes a preferably non-metallic apertured grid with a flat upstream-facing surface closely spaced from and parallel to a flat emitting surface of a cathode. The grid aperture diverges in a downstream direction and has its peripheral wall contoured to shape the transverse cross-section of an emitted electron beam at a predetermined downstream location, preferably at the beam crossover. The peripheral wall of the grid aperture is devoid of sharp transitions, has a circular cross section to produce a circular beam crossover of minimum diameter, and has a convex segment extending from the upstream end of the aperture and joining a concave segment extending to the downstream end of the aperture. The convex first segment has a smaller radius of curvature than the second concave segment and has its center of curvature disposed substantially at the upstream facing surface. In the preferred embodiment the grid is made of a synthetic sapphire and the cathode is a thermionic cathode made of lanthanum hexaboride.

Abstract translation: 电子枪包括具有与阴极的平坦发射表面紧密间隔并平行的平坦的上游面向表面的优选非金属有孔网格。 栅格孔径在下游方向上分叉，并且其外围壁成形以在预定的下游位置（优选地在光束交叉处）形成发射的电子束的横截面。 网格孔的周壁没有尖锐的转变，具有圆形横截面以产生最小直径的圆形横梁，并且具有从孔的上游端延伸的凸形段，并且连接延伸到下游的凹形段 孔的端部。 凸形第一段具有比第二凹形段更小的曲率半径，并且其曲率中心基本上位于上游面向表面。 在优选实施例中，栅格由合成蓝宝石制成，阴极是由六硼化镧制成的热离子阴极。

公开(公告)号：US4591753A

公开(公告)日：1986-05-27

申请号：US620777

申请日：1984-06-14

Applicant: Franciscus A. Stoelinga

Inventor： Franciscus A. Stoelinga

IPC: H01J37/06 ,  H01J1/16 ,  H01J37/065 ,  H01J1/18

CPC classification number: H01J37/065

Abstract: An electron beam apparatus comprises an electron source with an electron emitter in the form of a wire, suitably of metal, which slides on two supports. The two supports are constructed and spaced apart at such a distance (not more than 1 millimeter) that for the wire portion between the supports, a thermal equilibrium is achieved which is optimum for high electron emission from a small area of the wire. The wire can be heated to a temperature just below its melting point and is transported across the support under a low tensile stress.

Abstract translation: 电子束装置包括电子源，电子发射体为金属形状的电子发射体，适合金属，其在两个载体上滑动。 这两个支撑件以这样的距离（不大于1毫米）间隔开，对于支撑件之间的导线部分，实现了热平衡，其对于从电线的小区域的高电子发射是最佳的。 电线可以加热到刚好低于其熔点的温度，并在低拉伸应力下运输穿过支撑件。

公开(公告)号：US4495442A

公开(公告)日：1985-01-22

申请号：US415465

申请日：1982-09-07

Applicant: Kazuo Minami

Inventor： Kazuo Minami

IPC: H01J23/06 ,  H01J23/075 ,  H01J35/06 ,  H01J37/06 ,  H01J23/16 ,  H01J29/96

CPC classification number: H01J23/075

Abstract: A magnetron injection gun comprising a conical cold-cathode and a cylindrical anode coaxially surrounding the cold-cathode. The anode is provided with an annular projection extending toward the emission ring surface, and the surface of the conical cold-cathode is coated with an insulating film, except for a portion opposite the end of the annular projection, which forms a conductive emission ring.

Abstract translation: 一种磁控管注射枪，其包括圆锥形冷阴极和同轴围绕冷阴极的圆柱形阳极。 阳极设置有朝向发射环表面延伸的环形突起，并且除了形成导电发射环的与环形突起的端部相对的部分之外，锥形冷阴极的表面涂覆有绝缘膜。