公开(公告)号：US20050012038A1

公开(公告)日：2005-01-20

申请号：US10622187

申请日：2003-07-17

Applicant: R. Marcus ,  W. Davis

Inventor： R. Marcus ,  W. Davis

IPC: G01J3/10 ,  G01N21/67 ,  G01N21/69 ,  H01J49/12 ,  G01J3/30

CPC classification number: G01N21/67 ,  G01J3/10 ,  G01N21/69 ,  H01J49/00

Abstract: A glow discharge optical emission spectroscopy (GD-OES) source operates at atmospheric pressure. One of the discharge electrodes of the device is formed by an electrolytic solution 27 containing the analyte specimen. The passage of electrical current (either electrons or positive ions) across the solution/gas phase interface causes local heating and the volatilization of the analyte species. Collisions in the discharge region immediately above the surface of the solution results in optical emission that is characteristic of the analyte elements. The device uses the analyte solution as either the cathode or anode. Operating parameters depend on the electrolyte concentration (i.e. solution conductivity) and the gap 35 between the solution surface and the counter electrode. Typical conditions include discharge currents of about 30 to about 60 mA and potentials of about 200 to about 1000 volts. Electrolyte solutions of pH, pNa or pLi values of about 0.5 to about 2 and interelectrode gaps of about 0.5 to about 3 mm produce stable plasmas where the analyte solutions are totally consumed at flow rates of up to about 2.0 mL/min.

Abstract translation: 辉光放电光发射光谱（GD-OES）源在大气压下工作。 器件的放电电极之一由含有分析物样品的电解液27形成。 通过溶液/气相界面的电流（电子或正离子）通过导致局部加热和分析物种的挥发。 在溶液表面正上方的放电区域中的碰撞导致分析物质特征的光发射。 该设备使用分析物溶液作为阴极或阳极。 操作参数取决于电解质浓度（即溶液电导率）和溶液表面和对电极之间的间隙35。 典型的条件包括约30至约60mA的放电电流和约200至约1000伏特的电位。 约0.5至约2的pH值，pNa值或pLi值的电解质溶液约为0.5至约3毫米的电极间隙产生稳定的等离子体，其中分析物溶液以高达约2.0毫升/分钟的流速完全消耗。

公开(公告)号：US6019949A

公开(公告)日：2000-02-01

申请号：US72552

申请日：1998-05-05

Applicant: Ove Karl Dunder

Inventor： Ove Karl Dunder

IPC: C01B13/11 ,  G01N21/67 ,  G01N21/69 ,  B01J19/08 ,  B01J19/12

CPC classification number: C01B13/11 ,  C01B13/115 ,  C01B2201/90

Abstract: An ozone generator control circuit comprising corona discharge, circuitry to electrically control a regulator voltage applied to a pulse generating device for a corona discharge; circuitry to electrically control the frequency of the pulses applied to the pulse generator for the corona discharge. The electrical control circuit is optically isolated from the pulse generating circuit.

Abstract translation: 一种包括电晕放电的臭氧发生器控制电路，用于电控制施加到用于电晕放电的脉冲发生装置的调节器电压的电路; 用于电控制施加到用于电晕放电的脉冲发生器的脉冲的频率的电路。 电气控制电路与脉冲发生电路光学隔离。

公开(公告)号：US5408315A

公开(公告)日：1995-04-18

申请号：US99144

申请日：1993-07-28

Applicant: Joel C. Mitchell ,  Ted J. Casper

Inventor： Joel C. Mitchell ,  Ted J. Casper

IPC: G01N27/62 ,  G01N21/67 ,  G01N21/68 ,  H01J49/10 ,  G01J3/443

CPC classification number: H01J49/105 ,  G01N21/68

Abstract: A non-conductive isolator for supporting a sample to be analyzed by radio frequency energy induced glow discharge techniques has a conductive ring for coupling a source of radio frequency energy to the same surface of a sample which is in direct contact with the induced glow discharge. An adapter kit for converting a direct current glow discharge analysis apparatus to a radio frequency energy induced flow discharge is also disclosed as well as the method of analyzing non-conductive and sample conductive using a source of RF energy coupled to the same sample surface being analyzed.

Abstract translation: 用于通过射频能量感应辉光放电技术支持要分析的样品的非导电隔离器具有用于将射频能量源耦合到与感应辉光放电直接接触的样品的相同表面的导电环。 还公开了一种用于将直流辉光放电分析装置转换成射频能量感应流量放电的适配器套件，以及使用耦合到被分析的相同样品表面的RF能量源分析非导电和样品导电的方法 。

公开(公告)号：US5288367A

公开(公告)日：1994-02-22

申请号：US11630

申请日：1993-02-01

Applicant: David Angell ,  Carl J. Radens

Inventor： David Angell ,  Carl J. Radens

IPC: G01N21/67 ,  H01J37/32 ,  G01N21/00

CPC classification number: H01J37/32935 ,  G01N21/67 ,  H01J37/32972

Abstract: A wavelength of light is monitored for end-point detection during etching. Spectral data is collected during etching which characterizes variation of light emitted by discharge produced during etching. At least one principal component of the data is calculated. Each principal component has variables, each variable has a weight, and each variable corresponds to a wavelength of the light emitted by the discharge. By examining or analyzing the weights, it is then determined which variable of the principal component varies during etching such that end-point of the etch can be detected by monitoring the wavelength corresponding to the variable.

Abstract translation: 在蚀刻期间监视光的波长以进行端点检测。 在蚀刻期间收集光谱数据，其表征在蚀刻期间产生的放电发射的光的变化。 计算数据的至少一个主成分。 每个主成分都有变量，每个变量都有一个权重，每个变量对应于放电发出的光的波长。 通过检查或分析权重，然后确定主要成分的哪个变量在蚀刻期间变化，使得可以通过监测对应于变量的波长来检测蚀刻的终点。

公开(公告)号：US5160576A

公开(公告)日：1992-11-03

申请号：US664826

申请日：1991-03-05

Applicant: Michael Robbins

Inventor： Michael Robbins

IPC: G01B11/06 ,  G01J3/12 ,  G01J3/443 ,  G01N21/67 ,  G02B5/28

CPC classification number: G02B5/289 ,  G01B11/0683 ,  G01N21/67 ,  G01J2003/1213 ,  G01J3/443

Abstract: A method of optically detecting a change in intensity of an emission peak in a plasma process, such as a plasma etching process, by reflecting an emission spectrum of radiation from the plasma reaction off of a pair of rugate filters. The reflected emission spectrum has increased in-band reflections and decreased out-of-band reflections which provides reduced noise and an easier-to-detect emission peak. The method can be used for end-point detection in a plasma etching process such as etching of SiO.sub.2.

Abstract translation: 通过将来自等离子体反应的辐射的发射光谱反射离开一对贪婪滤光器，光电检测等离子体工艺中的发射峰值的变化的方法，例如等离子体蚀刻工艺。 反射的发射光谱具有增加的带内反射和减少的带外反射，其提供降低的噪声和更易于检测的发射峰。 该方法可用于诸如蚀刻SiO 2的等离子体蚀刻工艺中的端点检测。

公开(公告)号：US5086226A

公开(公告)日：1992-02-04

申请号：US591544

申请日：1990-10-01

Applicant: R. Kenneth Marcus

Inventor： R. Kenneth Marcus

IPC: G01N21/67 ,  G01N21/68 ,  H01J49/04 ,  H01J49/10 ,  H01J49/14 ,  H05H1/48

CPC classification number: G01N21/68 ,  G01N21/67 ,  H01J49/04 ,  H01J49/105 ,  H01J49/142 ,  H05H1/48

Abstract: A method and apparatus for analyzing solid sample materials mounted externally to the apparatus is provided wherein a low pressure glow discharge is initiated by applying a radio frequency potential to an integral, continuous solid sample and an electrically grounded anode in the presence of an inert gas, the glow discharge being maintained such that the inert gas is ionized and the ionized gas sputters sample material, the sputtered sample material then passing into an analyzer region for analysis.

Abstract translation: 提供一种用于分析安装在设备外部的固体样品材料的方法和装置，其中通过在惰性气体存在下将积分的连续固体样品和电接地的阳极施加射频电势来启动低压辉光放电， 维持辉光放电，使得惰性气体离子化并且电离气体对样品进行喷射，溅射的样品材料然后进入分析器区域进行分析。

公开(公告)号：US4900149A

公开(公告)日：1990-02-13

申请号：US215015

申请日：1988-07-05

Applicant: Joachim Mohr ,  Holger Gerecke

Inventor： Joachim Mohr ,  Holger Gerecke

IPC: G01N21/67

CPC classification number: G01N21/67

Abstract: A method for the simultaneous analysis of several elements, in which the analyte, after a thermal vaporization, is athermally excited in the same volume by a hollow cathode discharge, assigns a discharge pressure range, in which the atomization temperature increases steadily with pressure, to the "cold" and "hot" hollow cathode discharge. The transition from one range to the other takes place suddenly. The discharge current intensity is increased with increasing atomization temperature.

Abstract translation: 用于同时分析几种元素的方法，其中分析物在热蒸发之后通过空心阴极放电在同一体积中被自发激发，分配了其中雾化温度随压力稳定增加的排出压力范围， “冷”和“热”空心阴极放电。 从一个范围到另一个范围的过渡突然发生。 放电电流强度随着雾化温度的升高而增加。

公开(公告)号：US4898466A

公开(公告)日：1990-02-06

申请号：US274332

申请日：1988-11-21

Applicant: Isao Fukui ,  Shuzo Hayahsi ,  Takao Miyama

Inventor： Isao Fukui ,  Shuzo Hayahsi ,  Takao Miyama

IPC: G01N21/62 ,  G01N21/67

CPC classification number: G01N21/67

Abstract: Method and apparatus for emisson spectroscopic analysis by spark discharge, wherein each and every one of a number of spark discharges conducted for analysis of a sample comprises a high energy portion providing a sufficient amount of energy to vaporize the elements contained in the sample and a low energy portion providing a sufficient amount of energy to cause the vaporized elements to emit light, and wherein spectroscopic measurement is conducted in the low energy portion, or initiated in the end portion of high energy portion to continue in the low energy portion.

公开(公告)号：US4824249A

公开(公告)日：1989-04-25

申请号：US165261

申请日：1987-12-01

Applicant: Michael A. Lucas ,  Terry C. Hughes

Inventor： Michael A. Lucas ,  Terry C. Hughes

IPC: G01J3/28 ,  G01J3/443 ,  G01N21/67 ,  G01J3/30

CPC classification number: G01N21/67 ,  G01J2003/283 ,  G01J3/443

Abstract: An analysis system for directly analyzing solid samples by atomic emission spectroscopy wherein the system includes an atomic spectral lamp (1) of the type which enables a solid sample to be analyzed to be demountably located as a cathode of the lamp (1), means (2) for producing a primary electric discharge by cathodic sputtering from the sample via connection (8) and a secondary boosted discharge for analytical emission via connection (9), spectral wave length analysis device (4) being arranged to receive and determine the intensity of spectral lines emitted by the lamp (1), and control means (3) for controlling the system, the current level of the sample cathode and the operation of the spectral wave length analysis device (4) being controlled on the basis of output from the photomultiplier tube (7) such that the intensity of the spectral lines is maximized and the relationship between spectral line intensity and concentration of the corresponding element in the sample is maintained in a region which is substantially linear.

Abstract translation: PCT No.PCT / AU87 / 00101 Sec。 371 1987年12月1日第 102（e）1987年12月1日PCT PCT 1987年4月15日PCT公布。 公开号WO87 / 06341 日本1987年10月22日。用于通过原子发射光谱直接分析固体样品的分析系统，其中所述系统包括能够使固体样品被分析的类型的原子光谱灯（1）可拆卸地定位为 灯（1），用于通过连接（8）从样品通过阴极溅射产生一次放电的装置（2）和经由连接（9）进行分析发射的次级升压放电，光谱波长分析装置（4）被布置 接收和确定由灯（1）发射的光谱线的强度，以及用于控制系统的控制装置（3），样品阴极的电流水平和光谱波长分析装置（4）的操作被控制 基于光电倍增管（7）的输出，使得光谱线的强度最大化，并且光谱线强度与sa中相应元素的浓度之间的关系 mple保持在基本上线性的区域中。

公开(公告)号：US4723438A

公开(公告)日：1988-02-09

申请号：US810609

申请日：1985-12-19

Applicant: Steven Adler-Golden ,  Lawrence S. Bernstein ,  Fritz Bien

Inventor： Steven Adler-Golden ,  Lawrence S. Bernstein ,  Fritz Bien

IPC: G01J3/30 ,  G01N21/67 ,  G01N21/69 ,  G21C17/028

CPC classification number: G21C17/028 ,  G01N21/67 ,  G01J3/30 ,  G01N21/69 ,  G01N2201/08

Abstract: A spark spectroscopic high-pressure gas analyzer including a spark chamber, having a pair of electrodes, for receiving a sample of the pressurized gas to be analyzed. A voltage is provided across the electrodes for generating a spark in the pressurized gas sample. A selected wavelength band of radiation emitted from the spark discharge in the pressurized gas corresponding to a component to be sensed in the gas is detected. The intensity of the emission in the wavelength band is integrated during the afterglow time interval of the spark emission and a signal representative of the integrated intensity of the emission in the selected narrow wavelength band is employed to determine the proportion of the component in the gas.

Abstract translation: 一种火花光谱高压气体分析仪，包括具有一对电极的火花室，用于接收待分析的加压气体的样品。 在电极两端提供电压以在加压气体样品中产生火花。 检测从加压气体中的火花放电发出的对应于待检测气体中的成分的所选择的波长带的波长带。 在火花发射的余辉时间间隔期间，波长带中的发射强度被积分，并且采用表示所选窄波段中的发射的积分强度的信号来确定气体中的成分的比例。