公开(公告)号：US4438363A

公开(公告)日：1984-03-20

申请号：US311677

申请日：1981-10-15

Applicant: Rudolf Babitzka ,  Ernst Linder

Inventor： Rudolf Babitzka ,  Ernst Linder

IPC: G05B19/06 ,  H01L41/083 ,  H01L41/09 ,  H02N2/00 ,  H04R17/00 ,  H01L41/08

CPC classification number: H02N2/021

Abstract: To provide for extremely fast response of positioning of a positioned element (3) operating within a guide bore (2) formed in a housing (1), upon application of a force, for example by loading of a spring (14), the element (3) is a hollow body (4) within which a stack assembly (5) of piezoelectric disks (6) is located, the piezoelectric disks expanding or contracting under application of electrical energy from a cable (11) against an elastomer disk or cushion (9) which, consequently, will elastically expand the side walls of the body (4) to clamp the element (3) in the guide bore (2) and permit release, for example, at time of maximum applied force to result in abrupt, sudden high operating force and acceleration of the positioned element. Positioning times of between 10 to 100 microseconds can be obtained.

Abstract translation: 为了提供在形成在壳体（1）中的导向孔（2）内操作的定位元件（3）的定位的非常快速的响应，在施加力时，例如通过装载弹簧（14），元件 （3）是中空体（4），压电盘（6）的堆叠组件（5）位于该空心体内，压电盘在施加电能时从电缆（11）伸展或收缩抵靠弹性体盘或垫 （9），其因此将弹性地膨胀主体（4）的侧壁以将元件（3）夹紧在引导孔（2）中并且允许例如在最大施加力的时候释放以导致突然的 ，定位元件的突然高操作力和加速度。 可以获得10到100微秒的定位时间。

公开(公告)号：US20180262128A1

公开(公告)日：2018-09-13

申请号：US15913070

申请日：2018-03-06

Applicant: STRATEC Biomedical AG

Inventor： Tibor Horvarth ,  Jens Großmann

IPC: H02N2/04 ,  B06B1/06

CPC classification number: H02N2/043 ,  B06B1/0603 ,  H02N2/021 ,  H02N2/06

Abstract: A piezoelectric motor with form-locked drive mechanism avoiding step losses and undefined step sizes caused by environmental conditions such as temperature, surface quality and air humidity by engaging actuator teeth interacting with the toothed structure of a driven rack.

公开(公告)号：US20160373029A1

公开(公告)日：2016-12-22

申请号：US15030221

申请日：2014-10-20

Applicant: SHANGHAI JIAOTONG UNIVERSITY

Inventor： Junbin ZHANG ,  Peisen S. HUANG

IPC: H02N2/02 ,  H02N2/06

CPC classification number: H02N2/028 ,  G01D5/347 ,  G01D5/34715 ,  H02N2/0095 ,  H02N2/021 ,  H02N2/06

Abstract: Provided is a piezo-actuated planar motor, comprising a planar substrate and a mover installed on the planar substrate, the piezo-actuated planar motor further comprising: at least one piezo driving leg which is disposed on said mover so as to drive said mover to move on said planar substrate omnidirectionally in the plane. Further provided is a method of driving a planar motor by using piezo driving legs, which implements three movement modes, i.e., a sliding mode, a walking mode, and a fine tuning mode. The sliding mode has the fastest speed of motion, the walking mode has a relatively slow speed of motion but has a high positioning accuracy and a high-accuracy tracking capability, and the fine tuning mode is used for the adjustment of the planar motor at a final position and has the highest positioning accuracy. The piezo-actuated planar motor of the present invention can effectively overcome the defects of a small movement range and a low speed in a conventional nano-positioning platform.

Abstract translation: 提供了一种压电致动平面电动机，其包括平面基板和安装在平面基板上的动子，所述压电致动平面电动机还包括：至少一个压电驱动支路，其设置在所述动子上以驱动所述移动器到 在平面上全方位地在所述平面基板上移动。 还提供了一种通过使用实现三种移动模式即滑动模式，行走模式和微调模式的压电驱动腿驱动平面电动机的方法。 滑动模式具有最快的运动速度，行走模式运动速度相对较慢，但是具有较高的定位精度和高精度跟踪能力，微调模式用于平面电动机的调整 最终定位精度最高。 本发明的压电致动平面电动机可以有效地克服传统的纳米定位平台中的小移动范围和低速度的缺陷。

公开(公告)号：US09197141B2

公开(公告)日：2015-11-24

申请号：US13848525

申请日：2013-03-21

Applicant: Discovery Technology International, Inc.

Inventor： Serhiy F. Petrenko ,  Viacheslav V. Lavrinenko

IPC: H02N2/00 ,  H02N2/02 ,  H02N2/04 ,  H02N2/10 ,  H02N2/12

CPC classification number: H02N2/0065 ,  H02N2/002 ,  H02N2/006 ,  H02N2/021 ,  H02N2/04 ,  H02N2/101 ,  H02N2/12

Abstract: Provided are embodiments of piezoelectric motors which comprise at least one piezo-electrically active part and one passive part which are mounted with the ability of relative movement with respect to each other and which interact with each other by friction. The piezo-electrically active part includes at least one oscillator of acoustic vibrations with one or more piezoelectric elements in the form of a planar ring with acoustically attached flat pushers made from materials such as steel or ceramic. The flat pushers are pressed to a flat surface of the piezoelectric element, either directly or through an elastic element.

Abstract translation: 提供了包括至少一个压电有源部分和一个被动部件的压电电动机的实施例，其被安装成具有相对于彼此相对运动并且通过摩擦彼此相互作用的能力。 压电有源部分包括至少一个声振动振荡器，其中一个或多个压电元件呈平面环的形式，具有由诸如钢或陶瓷的材料制成的声学附接平面推动器。 扁平推动器直接或通过弹性元件压到压电元件的平坦表面。

公开(公告)号：US08410662B2

公开(公告)日：2013-04-02

申请号：US13068203

申请日：2011-05-05

Applicant: Hans Richter

Inventor： Hans Richter

IPC: H01L41/08

CPC classification number: H02N2/101 ,  F16D55/2245 ,  F16D65/54 ,  F16D2125/68 ,  H02N2/021

Abstract: In a universal drive with a rotatable or linearly movable drive member and piezo actuators supported on a carrier for acting on a leg supported on the drive member and moving the leg in a high-frequency stepping sequence in a drive direction, wherein the carriers are jointly supported on a stator by a pretension member which biases them elastically toward the drive member via an elbow lever mechanism including a first elbow lever and at least a second elbow lever which are both connected to an actuator by a coupling member and this arrangement is such that, with the first elbow lever stretched, the second elbow lever is kinked and vice versa.

Abstract translation: 在具有可旋转或可线性移动的驱动构件的通用驱动器和支撑在载体上的压电致动器用于作用在支撑在驱动构件上的腿上并以驱动方向的高频步进顺序移动腿，其中载体共同 通过预紧构件支撑在定子上，该预紧构件通过包括第一肘杆和至少第二肘杆的肘杆机构朝向驱动构件弹性地偏压，所述肘杆机构都通过联接构件连接到致动器，并且这种布置使得 第一肘杆拉伸，第二肘杆扭结，反之亦然。

公开(公告)号：US20120320353A1

公开(公告)日：2012-12-20

申请号：US13589313

申请日：2012-08-20

Applicant: Sascha Bleidistel ,  Bernhard Geuppert

Inventor： Sascha Bleidistel ,  Bernhard Geuppert

IPC: G03B27/34

CPC classification number: G03F7/70833 ,  G02B7/023 ,  G03F7/70258 ,  G03F7/70825 ,  H01L41/0913 ,  H02N2/0095 ,  H02N2/021 ,  H02N2/028

Abstract: The disclosure relates to a projection exposure apparatus and an optical system, such as a projection objective or an illumination system in a projection exposure apparatus for microlithography, that includes at least one optical element and at least one manipulator having a drive device for the optical element. The drive device can have at least one movable partial element and at least one stationary partial element movable relative to one another in at least one direction of movement.

Abstract translation: 本发明涉及投影曝光装置和光学系统，例如用于微光刻的投影曝光装置中的投影物镜或照明系统，其包括至少一个光学元件和至少一个具有用于光学元件的驱动装置的操纵器 。 驱动装置可以具有至少一个可移动部分元件和至少一个可在至少一个运动方向上相对于彼此移动的固定部分元件。

公开(公告)号：US08269948B2

公开(公告)日：2012-09-18

申请号：US12390685

申请日：2009-02-23

Applicant: Sascha Bleidistel ,  Bernhard Geuppert

Inventor： Sascha Bleidistel ,  Bernhard Geuppert

IPC: G03B27/54 ,  G03B27/52

CPC classification number: G03F7/70833 ,  G02B7/023 ,  G03F7/70258 ,  G03F7/70825 ,  H01L41/0913 ,  H02N2/0095 ,  H02N2/021 ,  H02N2/028

Abstract: The disclosure relates to a projection exposure apparatus and an optical system, such as a projection objective or an illumination system in a projection exposure apparatus for microlithography, that includes at least one optical element and at least one manipulator having a drive device for the optical element. The drive device can have at least one movable partial element and at least one stationary partial element movable relative to one another in at least one direction of movement.

Abstract translation: 本发明涉及投影曝光装置和光学系统，例如用于微光刻的投影曝光装置中的投影物镜或照明系统，其包括至少一个光学元件和至少一个具有用于光学元件的驱动装置的操纵器 。 驱动装置可以具有至少一个可移动部分元件和至少一个可在至少一个运动方向上相对于彼此移动的固定部分元件。

公开(公告)号：US20120056509A1

公开(公告)日：2012-03-08

申请号：US13148639

申请日：2010-02-01

Applicant: Iain Alexander Anderson ,  Emilio Patricio Calius ,  Todd Alan Gisby ,  Benjamin Marc O'Brien ,  Shane Xie

Inventor： Iain Alexander Anderson ,  Emilio Patricio Calius ,  Todd Alan Gisby ,  Benjamin Marc O'Brien ,  Shane Xie

IPC: H01L41/09

CPC classification number: H02N2/10 ,  F04B43/043 ,  F04B43/084 ,  F04B43/12 ,  H01L41/098 ,  H02N2/021

Abstract: An array of actuators is provided which is adapted for sequential actuation by way of mechano-sensitivity propagating actuation through the array, triggering each actuator upon deformation thereof caused by an adjacent actuator or a load in the form of a fluid or a solid object. Actuation is thus coordinated with minimal computational overhead. Also provided is an actuator suitable for use in such an array, a method of controlling an actuator, and a method of controlling an array of mechano-sensitive actuators.

Abstract translation: 提供了一系列致动器，其适于通过机械传感驱动通过阵列进行顺序致动，在由相邻致动器或流体或固体物体形式的负载引起的变形时触发每个致动器。 因此，致动与最小的计算开销协调。 还提供了适用于这种阵列的致动器，控制致动器的方法以及控制机械敏感致动器阵列的方法。

公开(公告)号：US20110096423A1

公开(公告)日：2011-04-28

申请号：US12997670

申请日：2009-06-10

Applicant: Takatoshi Ashizawa

Inventor： Takatoshi Ashizawa

IPC: G02B7/02 ,  H02N2/04

CPC classification number: G02B7/08 ,  G02B7/102 ,  H01L41/0913 ,  H02N2/021

Abstract: A piezoelectric actuator having reduced sizes, a lens barrel and an optical device. A piezoelectric actuator is provided with: a first actuator including first piezoelectric elements to be displaced in a first direction; a second actuator, which includes second piezoelectric elements to be displaced in a second direction intersecting with the first direction, and is arranged in a direction intersecting with the first direction with respect to the first actuator; and a relative displacement member, which is arranged between the first actuator and the second actuator and can be relatively displaced in the first direction with respect to the first actuator.

Abstract translation: 具有减小尺寸的压电致动器，镜筒和光学装置。 压电致动器设置有：第一致动器，包括将沿第一方向移位的第一压电元件; 第二致动器，其包括在与第一方向相交的第二方向上移位的第二压电元件，并且相对于第一致动器沿与第一方向相交的方向布置; 以及相对位移构件，其布置在第一致动器和第二致动器之间，并且可以相对于第一致动器沿第一方向相对移位。

公开(公告)号：US20100031856A1

公开(公告)日：2010-02-11

申请号：US12095012

申请日：2006-11-13

Applicant: Kazuo Shoda ,  Tomoyuki Oizumi

Inventor： Kazuo Shoda ,  Tomoyuki Oizumi

IPC: F16M11/18 ,  H04B5/00 ,  F16M11/22

CPC classification number: F16C29/005 ,  B60L5/005 ,  B60L13/03 ,  F16C29/008 ,  F16C41/008 ,  H02K11/0094 ,  H02K41/02 ,  H02N2/0085 ,  H02N2/021 ,  Y02T90/16

Abstract: A wireless actuator has a structure in which movement of a movable table (2) can be controlled on a base (1) without connecting a power supply cable or a signal cable to the movable table, and even when the plurality of movable tables are provided, each of the movable tables can be independently controlled. The wireless actuator includes a track rail (30, 80), a slide member (31, 81) movable along the track rail, a drive means (4) which is mounted on the slide member and which allows the slide member to travel with respect to the track rail, a radio receiver portion (70) which is mounted on the slide member and which receives a drive control signal for the drive means, a control unit (6) which generates the drive control signal and transmits the drive control signal to the radio receiver portion, and a non-contact power supply means (5) which includes a primary side member (50) provided to the track rail and a secondary side member (51) provided to the slide member and supplies electric power from a side of the track rail to the drive means and the radio receiver portion which are mounted on the slide member.

Abstract translation: 无线致动器具有这样的结构，其中可移动台（2）的移动可以在基座（1）上被控制，而不将电源电缆或信号电缆连接到可移动台，并且即使当设置多个可移动台时 ，可以独立地控制每个活动台。 无线致动器包括轨道轨道（30,80），可沿着轨道轨道移动的滑动构件（31,81），驱动装置（4），其安装在滑动构件上并允许滑动构件相对于 轨道轨道，安装在滑动构件上并且接收用于驱动装置的驱动控制信号的无线电接收器部分（70），产生驱动控制信号并将驱动控制信号发送到 无线电接收器部分和非接触供电装置（5），其包括设置在轨道轨道上的初级侧构件（50）和设置在滑动构件上的副侧构件（51），并从侧面提供电力 的驱动装置和无线电接收器部分安装在滑动构件上。