公开(公告)号：US06786236B2

公开(公告)日：2004-09-07

申请号：US10396757

申请日：2003-03-21

Applicant: Harvey B. Jansen

Inventor： Harvey B. Jansen

IPC: F15B13043

CPC classification number: F15B13/0435 ,  F15B13/0402 ,  F15B2013/0409 ,  Y10T137/8659 ,  Y10T137/86614

Abstract: A two, three or four-way valve includes two stages each with working valve components linked by a feedback spring so that a first stage servo unit is auto-nulling and the stroke of the valve member in a second stage valve unit is proportional to the input current to the first stage. An inherently balanced clevis member in the first stage controls flow of pressurized control media, which in combination with direct pressure flow, controls the position of a spool member in the second stage. The spool in turn controls pressure flow to a either one or two metering or input/output flow ports. Transient movement of the clevis due to change in input current to a magnetic servo drive assembly is opposed by bending of the feedback spring arising from the associated movement of the spool, which returns the clevis to its centered null position and stops the spool.

Abstract translation: 二，三或四通阀包括两个阶段，每个阶段均具有通过反馈弹簧连接的工作阀部件，使得第一级伺服单元自动归零，并且第二级阀单元中的阀构件的行程与 输入电流到第一级。 第一级中固有平衡的U形夹构件控制加压控制介质的流动，其与直接压力流结合控制第二级中的阀芯构件的位置。 阀芯依次控制压力流向一个或两个测量或输入/输出流量端口。 由于输入电流向磁性伺服驱动组件的变化而导致的U形夹的瞬态运动是通过由线轴的相关运动引起的反馈弹簧的弯曲而相反的，其将U形夹返回到其居中的零位置并停止线轴。

公开(公告)号：US20040159354A1

公开(公告)日：2004-08-19

申请号：US10652720

申请日：2003-08-28

Inventor： Per Cederstav ,  Emmanuel Vyers ,  William Ballard ,  Sean Mallory

IPC: G05D007/06

CPC classification number: G05D16/202 ,  Y10T137/0396 ,  Y10T137/7761 ,  Y10T137/8225 ,  Y10T137/86614

Abstract: A closed loop pressure controller system that sets, measures and controls the process pressure within a semiconductor process is shown. The system is commonly composed of a pressure sensor to collect the pressure information, a controller box that hosts the control electronics, and a valve to physically affect the conductivity of the inlet or outlet gas line and accordingly the process pressure. The present invention differs from the prior art by using closed-loop motor control of the valve, rather than the method of the prior art, where the valve position is controlled by a stepper motor actuator driven in an open loop fashion. It is demonstrated that the utility of such prior art open-loop configurations is limited by the fact that the achievable precision of the valve position is hindered by static friction in the valve system, and the non-linear character of the torque versus shaft-angle of the motor (among other error components). The method of the present invention more accurately positions the valve, and accordingly enhances the overall precision and allowable loop-gain of the pressure control system by providing the valve drive with feedback as to the actual angular position of the valve in extremely high resolution. The closed-loop motor control approach of the present invention has also been adapted to other semiconductor and vacuum processing applications, including linear and rotary feedthrough devices and impedance matching networks.

Abstract translation: 示出了设置，测量和控制半导体工艺中的工艺压力的闭环压力控制器系统。 该系统通常由用于收集压力信息的压力传感器，托管控制电子装置的控制器盒以及物理地影响入口或出口气体管线的导电性以及因此的过程压力的阀组成。 本发明与现有技术不同之处在于使用阀的闭环电动机控制，而不是现有技术的方法，其中阀位由以开环方式驱动的步进电机致动器控制。 现有技术证明，这种现有技术的开环结构的实用性受限于阀门位置的可实现精度受到阀门系统中的静摩擦的影响，扭矩与轴角度的非线性特性 的电机（以及其他误差部件）。 本发明的方法更精确地定位阀门，并且因此通过以极高的分辨率向阀驱动器提供关于阀的实际角位置的反馈来提高压力控制系统的总体精度和允许的环路增益。 本发明的闭环电动机控制方法也适用于其他半导体和真空处理应用，包括线性和旋转馈通装置和阻抗匹配网络。

公开(公告)号：US06739293B2

公开(公告)日：2004-05-25

申请号：US10164046

申请日：2002-06-05

Applicant: Christopher Wayne Turner ,  Miguel Angelo Raimao ,  Guy Robert Babbitt

Inventor： Christopher Wayne Turner ,  Miguel Angelo Raimao ,  Guy Robert Babbitt

IPC: F01L902

CPC classification number: F01L9/02 ,  F01L1/36 ,  F01L2800/00 ,  F02B2275/32 ,  Y02T10/142 ,  Y10T137/86614 ,  Y10T137/86622

Abstract: Hydraulic engine valve actuation systems and methods for internal combustion engines. The systems utilize a proportional valve to regulate the flow of a working fluid to and from a hydraulic actuator controlling the engine valve position. The position of the proportional valve is controlled by one or more high speed valves to control various engine valve parameters, including engine valve takeoff and landing velocities. Returning all valves to a known starting position between engine valve events avoids accumulation of errors in proportional valve positioning. Embodiments using spool valves for the high speed valves and the proportional valve, and spring return and hydraulic return for the engine valve, are disclosed. A specially shaped spool in the proportional valve provides enhanced control over the engine valve operation. Various further alternate embodiments are disclosed.

Abstract translation: 液压发动机气门驱动系统和内燃机的方法。 该系统利用比例阀来调节工作流体与控制发动机气门位置的液压致动器的流动。 比例阀的位置由一个或多个高速阀控制，以控制各种发动机气门参数，包括发动机气门起飞和降落速度。 将所有阀门返回到发动机气门事件之间的已知起始位置可避免比例阀定位中的误差累积。 公开了使用用于高速阀和比例阀的滑阀以及用于发动机气门的弹簧复位和液压返回的实施例。 比例阀中的特殊形状的阀芯可以增强对发动机气门操作的控制。 公开了各种另外的替代实施例。

公开(公告)号：US20040089354A1

公开(公告)日：2004-05-13

申请号：US10623387

申请日：2003-07-18

Inventor： Jose Carlos Bento

IPC: F15B013/043

CPC classification number: F15B13/0402 ,  F15B11/028 ,  F15B13/0431 ,  F15B21/14 ,  F15B2211/20538 ,  F15B2211/3051 ,  F15B2211/30525 ,  F15B2211/327 ,  F15B2211/329 ,  F15B2211/355 ,  F15B2211/365 ,  F15B2211/6054 ,  F15B2211/6355 ,  F15B2211/7053 ,  F15B2211/72 ,  F15B2211/76 ,  F15B2211/88 ,  F16K31/426 ,  Y10T137/0379 ,  Y10T137/5109 ,  Y10T137/5196 ,  Y10T137/86614

Abstract: A control valve system includes a housing having an inlet port, a first output port, a second output port, and a valve chamber. A primary spool and a secondary spool are independently slidable in the valve chamber. The secondary spool has a first end for abutting against the primary spool and has a second end with a working surface area greater than the working surface areas at the ends of the primary spool. A solenoid valve assembly controllably connects the inlet port to the second end of the secondary spool. A biaser provides a biasing force to the primary spool. A first fluid passage through the primary spool provides fluid communication between the first output port and a second end of the primary spool for displacing the primary spool relative to the secondary spool in an energy saving mode, thereby regulating a pressure at the first output relative to the predetermined magnitude of the biasing force.

公开(公告)号：US20030196457A1

公开(公告)日：2003-10-23

申请号：US10125905

申请日：2002-04-18

Inventor： Gerald R. Morin ,  Richard Alan Walker

IPC: C03B009/36

CPC classification number: C03B9/406 ,  C03B9/3636 ,  F16K11/044 ,  F16K27/003 ,  Y10T137/86582 ,  Y10T137/86614 ,  Y10T137/87209 ,  Y10T137/87861 ,  Y10T137/87869

Abstract: A valve block assembly includes a cartridge block and a plurality of modular pilot valve operated poppet valve assemblies. The cartridge block has a plurality of bores therein dimensioned and configured for receiving respective modular pilot valve operated poppet valve assemblies. The cartridge block has a first side and each of the bores extend from the first side into the cartridge block. Each of the modular pilot valve operated poppet valve assemblies having a supply air port, an operating air out port and an exhaust passage and each of the modular pilot valve operated poppet valve assemblies are accessible for installation and removal from the cartridge block from the first side. Other forms of the invention include a modular pilot valve operated poppet valve assembly for use with an associated valve block assembly of an associated glassware manufacturing machine which includes a solenoid control valve having an input port for connection to an associated source of pilot air and an outlet port, the solenoid control valve having a first position and a second position, the position changing in response to being energized and a poppet valve having a first port for connection to an associated source of control air, a second port for connection to associated apparatus being controlled and a third port for exhaust air passing from the associated apparatus being controlled, and a poppet, the poppet having an axes and being mounted for axial movement responsive to air pressure at the outlet port of the solenoid control valve.

Abstract translation: 阀块组件包括筒体和多个模块化先导阀操作的提升阀组件。 筒体具有多个孔，其尺寸和构造用于接收相应的模块化先导阀操作的提升阀组件。 盒体具有第一侧面，并且每个孔从第一侧延伸到盒体中。 每个模块化先导阀操作的提升阀组件具有供气口，操作空气出口和排气通道，并且每个模块化先导阀操作的提升阀组件都可接近以从第一侧安装和拆卸 。 本发明的其它形式包括用于与相关联的玻璃器皿制造机器相关联的阀块组件一起使用的模块化先导阀操作的提升阀组件，其包括具有用于连接到相关联的先导空气源的输入端口的电磁控制阀和出口 所述电磁控制阀具有第一位置和第二位置，所述位置响应于被通电而改变，并且提升阀具有用于连接到相关联的控制空气源的第一端口，用于连接到相关联的设备的第二端口 控制的第三端口和用于从被控制的相关设备通过的排气的第三端口，以及提升阀，所述提升阀具有轴线并且被安装成响应于电磁控制阀的出口处的空气压力而轴向移动。

公开(公告)号：US06615867B2

公开(公告)日：2003-09-09

申请号：US10033780

申请日：2002-01-03

Applicant: Masamichi Tajima ,  Hiroyuki Katsuta

Inventor： Masamichi Tajima ,  Hiroyuki Katsuta

IPC: F15B1304

CPC classification number: F15B13/0832 ,  F15B11/028 ,  F15B13/0828 ,  F15B13/0857 ,  F15B13/086 ,  F15B13/0871 ,  F15B13/0875 ,  F15B13/0896 ,  F15B2211/30525 ,  F15B2211/365 ,  F15B2211/50554 ,  F15B2211/6355 ,  F16K27/003 ,  G05D16/2093 ,  Y10T137/261 ,  Y10T137/86614 ,  Y10T137/87169 ,  Y10T137/87885

Abstract: A spacer type pressure reducing valve for adjusting a fluid pressure is mounted between a solenoid valve, which switches a flowing direction of pressurized fluid, and a base, which supplies pressurized fluid to the solenoid valve. First and second pressure-reducing portions are integrally accommodated in a valve body of the spacer type pressure reducing valve. The spacer type pressure reducing valve is compact and is capable of adjusting pressure in two output ports.

Abstract translation: 用于调节流体压力的隔离式减压阀安装在切换加压流体的流动方向的电磁阀与向电磁阀供给加压流体的基座之间。 第一减压部和第二减压部一体地容纳在间隔型减压阀的阀体中。 间隔式减压阀紧凑，能够调节两个输出口的压力。

公开(公告)号：US06591865B2

公开(公告)日：2003-07-15

申请号：US10028765

申请日：2001-12-28

Applicant: Keiji Misumi

Inventor： Keiji Misumi

IPC: F16K3700

CPC classification number: F15B13/0817 ,  F15B13/0402 ,  F15B13/0431 ,  F15B13/0853 ,  F15B13/086 ,  F15B2013/0409 ,  F16K27/003 ,  F16K37/0033 ,  F16K37/0041 ,  Y10T137/8242 ,  Y10T137/86614 ,  Y10T137/86622 ,  Y10T137/87885

Abstract: To make it easy to mount magnets for monitoring a switched state of a valve element in a solenoid valve and to easily mount magnetometric sensors for sensing an approach of the magnet in a state of excellent water resistance and dustproof property. In a solenoid valve for switching a direction of a flow of pressure fluid by driving the solenoid valve by pilot fluid pressure, ring-shaped magnets 13A and 13B are fitted with small-diameter portions 11a formed at end portions of a valve element 11 and is fixed by press fitting and engaging caps 14A and 14B forming faces to be in contact with pistons 14A and 14B at the valve element ends. A housing chamber 30 is formed outside a valve hole 10a in a valve body 10 and in a position close to the magnets, magnetometric sensors 31A and 31B are housed in the housing chamber 30, and a cover 35 is mounted to the housing chamber 30. A connector 37 for leading out a current-carrying wire to pilot valves 20A and 20B and signal lines from the magnetometric sensors is provided to the cover.

公开(公告)号：US06571828B2

公开(公告)日：2003-06-03

申请号：US10086005

申请日：2002-02-28

Applicant: Louis C. Harms ,  Zilek Liberfarb

Inventor： Louis C. Harms ,  Zilek Liberfarb

IPC: F15B13043

CPC classification number: G05D16/2013 ,  F15B13/0402 ,  F15B13/0433 ,  F15B2211/513 ,  F15B2211/526 ,  F15B2211/575 ,  F16H61/0251 ,  F16H2061/0258 ,  Y10T137/0396 ,  Y10T137/8659 ,  Y10T137/86614 ,  Y10T137/87241

Abstract: This invention generally concerns electronically controlled hydraulic valves for use in electro-hydraulically controlled transmissions. The proportional pressure control valve 20 includes a hollow cage 42 pierced by cage tank ports 52, cage clutch ports 54, and cage pump ports 56. The cage pump ports 56 receive fluid from a pump. The cage clutch ports 54 supply fluid to a hydraulic actuator. The cage tank ports 52 return fluid from the valve 20 to a tank from where fluid circulates back to the pump. Main spool 112 controls fluid flow between cage clutch ports 54 and cage pump ports 56 or cage tank ports 52. An electromagnetically operated pilot valve regulates fluid pressure applied to a control pressure surface 138. A feedback pressure passage 126, having a feedback restriction orifice 128, restrains the rate fluid flows between the cage clutch ports 54 and the feedback pressure surface 114.

Abstract translation: 本发明一般涉及用于电液压传动装置的电子控制液压阀。 比例压力控制阀20包括由保持架罐口52，保持架离合器端口54和保持架泵口56刺穿的中空笼42。保持架泵口56从泵接收流体。 笼式离合器端口54向液压致动器供应流体。 笼式罐口52将流体从阀20返回到液体，液体从流体回流到泵。 主阀芯112控制笼式离合器端口54和保持架泵口56或笼式罐口52之间的流体流动。电磁操作的先导阀调节施加到控制压力表面138的流体压力。反馈压力通道126具有反馈限制孔口128 限制了笼式离合器端口54和反馈压力表面114之间的流体流量流动。

公开(公告)号：US20030084946A1

公开(公告)日：2003-05-08

申请号：US10316405

申请日：2002-12-10

Applicant: Acutex, Inc.

Inventor： John Michael Douglass ,  Paul Anders Christensen

IPC: F15B013/043

CPC classification number: F16K31/0637 ,  F16D25/14 ,  F16D48/02 ,  F16D2048/0221 ,  Y10T137/86614 ,  Y10T137/87217

Abstract: A variable pressure solenoid (VPS) control valve. The VPS control valve includes an hydraulic section and a magnetic section. The hydraulic section includes a movable valve that receives a pressurized fluid and generates a control pressure, and the magnetic section controls the operation of the movable valve. The movable valve includes an inlet ball valve for limiting the flow of pressurized fluid into the hydraulic section and an exhaust valve for limiting the exhaust of pressurized fluid out of the hydraulic section. The magnetic section includes a spring-biased armature, and an electromagnetic coil for generating a variable electromagnetic field in response to an electrical input signal for moving the spring biased armature.

Abstract translation: 可变压力电磁阀（VPS）控制阀。 VPS控制阀包括液压部分和磁性部分。 液压部件包括可接受加压流体并产生控制压力的可移动阀，并且磁力部分控制可动阀的操作。 可移动阀包括用于限制加压流体进入液压段的入口球阀和用于限制加压流体排出液压段的排气阀。 磁性部分包括弹簧偏置电枢和用于响应用于移动弹簧偏置电枢的电输入信号产生可变电磁场的电磁线圈。

公开(公告)号：US06527010B1

公开(公告)日：2003-03-04

申请号：US09948846

申请日：2001-09-07

Applicant: Richard R. Watson

Inventor： Richard R. Watson

IPC: F15B13043

CPC classification number: F15B13/042 ,  E21B34/04 ,  F15B13/0405 ,  F16K11/048 ,  F16K31/1221 ,  Y10T137/86606 ,  Y10T137/86614 ,  Y10T137/8663

Abstract: A spool valve may be used in a subsea system with a single upstream pilot valve to control the spool valve. The spool valve opens and closes a main valve in response to fluid signals from the pilot valve. The main valve is connected to a source of pressurized supply fluid, which is selectively directed to a downstream apparatus. The spool valve and the main valve can be produced in an integrated design with a single body. In an alternative embodiment, the spool valve and main valve are separate with separate bodies. The spool valve may also be used in non-subsea systems.

Abstract translation: 滑阀可用于具有单个上游先导阀的海底系统以控制滑阀。 滑阀响应于先导阀的流体信号打开和​​关闭主阀。 主阀连接到加压供应流体源，其被选择性地导向下游装置。 滑阀和主阀可以一体式设计生产。 在替代实施例中，滑阀和主阀与独立的主体分开。 滑阀也可用于非海底系统。