ELECTROFILL VACUUM PLATING CELL
    75.
    发明申请
    ELECTROFILL VACUUM PLATING CELL 有权
    ELECTROFILL真空镀层电池

    公开(公告)号:US20140097088A1

    公开(公告)日:2014-04-10

    申请号:US14102239

    申请日:2013-12-10

    IPC分类号: C25D5/22 C25D17/00

    摘要: The disclosed embodiments relate to methods and apparatus for immersing a substrate in electrolyte in an electroplating cell under sub-atmospheric conditions to reduce or eliminate the formation/trapping of bubbles as the substrate is immersed. Various electrolyte recirculation loops are disclosed to provide electrolyte to the plating cell. The recirculation loops may include pumps, degassers, sensors, valves, etc. The disclosed embodiments allow a substrate to be immersed quickly, greatly reducing the issues related to bubble formation and uneven plating times during electroplating.

    摘要翻译: 所公开的实施方案涉及用于在亚低温大气条件下将基板浸入电镀池中的电解质中的方法和装置,以减少或消除基底浸入时气泡的形成/捕获。 公开了各种电解质循环回路以向电镀槽提供电解质。 再循环回路可以包括泵,脱气器,传感器,阀门等。所公开的实施例允许衬底被快速浸入,大大减少了与电镀期间的气泡形成和电镀时间不均有关的问题。

    Method for electromechanical fabrication
    76.
    发明授权
    Method for electromechanical fabrication 有权
    机电制造方法

    公开(公告)号:US08551315B2

    公开(公告)日:2013-10-08

    申请号:US13441573

    申请日:2012-04-06

    申请人: Adam L. Cohen

    发明人: Adam L. Cohen

    IPC分类号: C25D5/02 C25D5/10

    摘要: An electroplating method that includes: a) contacting a first substrate with a first article, which includes a substrate and a conformable mask disposed in a pattern on the substrate; b) electroplating a first metal from a source of metal ions onto the first substrate in a first pattern, the first pattern corresponding to the complement of the conformable mask pattern; and c) removing the first article from the first substrate, is disclosed. Electroplating articles and electroplating apparatus are also disclosed.

    摘要翻译: 一种电镀方法,包括:a)使第一衬底与第一制品接触,所述第一制品包括衬底和以衬底形式设置的贴合掩模; b)以第一图案将来自金属离子源的第一金属电镀到所述第一基板上,所述第一图案对应于所述适形掩模图案的所述补体; 和c)从第一基板上去除第一制品。 还公开了电镀制品和电镀装置。

    Methods for atomic layer deposition (ALD) using a proximity meniscus
    79.
    发明授权
    Methods for atomic layer deposition (ALD) using a proximity meniscus 有权
    使用邻近半月板的原子层沉积(ALD)方法

    公开(公告)号:US07939139B2

    公开(公告)日:2011-05-10

    申请号:US12624369

    申请日:2009-11-23

    IPC分类号: B05D1/36 B05D7/00 B08B3/00

    摘要: Provided are methods for processing a substrate using a proximity system defined by one or more meniscus windows on one or more proximity heads. One method includes applying a first fluid meniscus to a surface of the substrate to apply a chemical precursor to the surface of the substrate. The first fluid meniscus is applied to first proximity meniscus window. Then, applying a second fluid meniscus to the surface of the substrate to leave an atomic layer of the chemical precursor on the surface of the substrate, through a second proximity meniscus window. A third fluid meniscus is applied to the surface of the substrate to apply a chemical reactant configured to react with the atomic layer of the chemical precursor to generate a layer of a material, through a third proximity meniscus window. The first, second and third proximity meniscus windows are arranged to apply the first fluid meniscus, the second fluid meniscus and the third fluid meniscus one after the other to a same location of the surface of the substrate during movement of the substrate through the proximity system.

    摘要翻译: 提供了使用由一个或多个邻近头上的一个或多个弯液面窗口限定的接近系统来处理衬底的方法。 一种方法包括将第一流体弯月面施加到衬底的表面以将化学前体施加到衬底的表面。 第一流体弯液面被应用于第一接近弯月面窗口。 然后,将第二流体弯月面施加到衬底的表面,以通过第二接近弯月面窗口在衬底的表面上留下化学前体的原子层。 将第三流体弯液面施加到基底的表面,以施加配置成与化学前体的原子层反应以产生材料层的化学反应物,通过第三接近弯月面窗口。 第一,第二和第三接近弯液面窗口被布置成在衬底通过邻近系统移动期间将第一流体弯月面,第二流体弯月面和第三流体弯月面一个接一个地施加到衬底的表面的相同位置 。

    METHOD OF MANUFACTURING PRINTED WIRING BOARD
    80.
    发明申请
    METHOD OF MANUFACTURING PRINTED WIRING BOARD 审中-公开
    制造印刷线路板的方法

    公开(公告)号:US20110056838A1

    公开(公告)日:2011-03-10

    申请号:US12862331

    申请日:2010-08-24

    申请人: Satoru KAWAI

    发明人: Satoru KAWAI

    IPC分类号: C25D5/02 C25D3/20

    摘要: A printed wiring board is manufactured by a method in which an opening is formed in a substrate, and a seed layer for electrolytic plating is formed on an inner wall of the opening and a surface of the substrate. The substrate with the seed layer is placed in an electrolytic plating solution, and an insulative body is placed in the electrolytic plating solution. The substrate and the insulative body are moved relative to each other to form an electrolytic plated film on the substrate and fill the opening with the electrolytic plated film. A conductive circuit is formed on the substrate. The electrolytic plating solution includes copper sulfate, sulfuric acid, and iron ions.

    摘要翻译: 通过在基板上形成开口的方法制造印刷布线板,并且在开口的内壁和基板的表面上形成用于电解电镀的种子层。 将具有种子层的基板放置在电解电镀液中,将绝缘体置于电镀液中。 基板和绝缘体相对于彼此移动,以在基板上形成电解电镀膜,并用电解电镀膜填充开口。 在基板上形成导电电路。 电解电镀液包括硫酸铜,硫酸和铁离子。