SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER
    72.
    发明申请
    SPECTRAL PURITY FILTER, LITHOGRAPHIC APPARATUS, AND METHOD FOR MANUFACTURING A SPECTRAL PURITY FILTER 有权
    光谱滤光片,光刻设备和制造光谱滤光片的方法

    公开(公告)号:US20120154778A1

    公开(公告)日:2012-06-21

    申请号:US13392434

    申请日:2010-07-21

    CPC classification number: G03F7/70575 G02B5/1809 G21K1/10

    Abstract: A method of forming a spectral purity filter having a plurality of apertures configured to transmit extreme ultraviolet radiation and suppress transmission of a second type of radiation, in which trenches are formed in a base material in a pattern corresponding to the walls to be formed between the apertures. The trenches are filled with a grid material to form walls of the grid material, and the base material is selectively removed until the grid material is exposed and forms the spaces between the walls of the grid material for the apertures.

    Abstract translation: 一种形成光谱纯度滤光片的方法,该光谱纯度滤光器具有多个孔,其被配置为透射极紫外辐射并抑制第二类型辐射的透射,其中沟槽以对应于待形成的壁之间的壁的图案形成在基材中 孔。 沟槽填充有栅格材料以形成栅格材料的壁,并且选择性地去除基底材料,直到栅格材料暴露并且在孔的栅格材料的壁之间形成空间。

    SENSOR FOR DETECTING BUBBLES IN A LIQUID FLOWING THROUGH A FLOW PATH
    75.
    发明申请
    SENSOR FOR DETECTING BUBBLES IN A LIQUID FLOWING THROUGH A FLOW PATH 有权
    用于检测通过流动路径流动的液体中的泡沫的传感器

    公开(公告)号:US20110308328A1

    公开(公告)日:2011-12-22

    申请号:US13203801

    申请日:2010-03-03

    Abstract: The invention relates to a sensor (102, 202, 402, 502) for detecting bubbles in gas phase present in a liquid (208, 408, 527) flowing through a flow path (204, 406, 508). The sensor comprises a heating element (106, 210) for heating the liquid, which heating element is provided with a predetermined level of power at least during detecting, and a transducer arrangement (108, 112, 212) arranged for generating a measurement signal (114) indicative for the temperature of the heating element. The sensor furthermore comprises a comparator arrangement (116) for comparing a measurement value of the measurement signal with a predetermined threshold level, which predetermined threshold level corresponds to a reference temperature attainable by the heating element in response to said predetermined level of power and a minimum velocity attainable by the liquid in the flow path. Based on the latter comparison, the comparator arrangement generates an output signal (118) indicative for a possible presence of bubbles in gas phase.

    Abstract translation: 本发明涉及一种用于检测存在于流过流路(204,406,508)的液体(208,408,527)中的气相中的气泡的传感器(102,202,402,502)。 传感器包括用于加热液体的加热元件(106,210),所述加热元件至少在检测期间被提供有预定水平的功率;以及换能器布置(108,112,212),其布置成用于产生测量信号 114),其指示加热元件的温度。 该传感器还包括比较器装置(116),用于将测量信号的测量值与预定阈值电平进行比较,该预定阈值电平响应于所述预定功率水平而对应于由加热元件可达到的参考温度,并且最小值 通过流路中的液体可获得的速度。 基于后一种比较,比较器装置产生指示气相中可能存在气泡的输出信号(118)。

    METHOD AND SYSTEM FOR CONTROLLING THE OUTPUT OF A LUMINAIRE
    78.
    发明申请
    METHOD AND SYSTEM FOR CONTROLLING THE OUTPUT OF A LUMINAIRE 审中-公开
    用于控制灯泡输出的方法和系统

    公开(公告)号:US20100148675A1

    公开(公告)日:2010-06-17

    申请号:US11993480

    申请日:2006-06-26

    CPC classification number: H05B33/0803 H05B33/0863 H05B33/0869

    Abstract: The present invention relates to a method of controlling the output of a luminaire comprising an array of LEDs emitting light of at least one color. The array has single color LED groups, wherein each group consists of at least one LED. The method comprises the following steps for each LED group:spectrally filtering the light emitted by the LED group by means of a first filter as well as by means of a second filter; detecting the spectrally filtered light from said first and said second filter and generating respective first and second response signals, wherein the levels of said first and second response signals are related to the respective amounts of detected spectrally filtered light; and controlling the light output of said LED group on the basis of said first and second response signals, wherein the filter characteristics of said first and said second filter are at least partly non-overlapping. The invention also relates to a corresponding control system for performing the method.

    Abstract translation: 本发明涉及一种控制照明器的输出的方法,该方法包括发射至少一种颜色的光的LED阵列。 阵列具有单色LED组,其中每组由至少一个LED组成。 该方法包括以下步骤:对每个LED组进行以下步骤:通过第一滤光器以及借助于第二滤光器对由LED组发射的光进行光谱滤波; 检测来自所述第一和所述第二滤波器的频谱滤波的光,并产生相应的第一和第二响应信号,其中所述第一和第二响应信号的电平与检测到的光谱滤波光的相应量相关; 以及基于所述第一和第二响应信号来控制所述LED组的光输出,其中所述第一和所述第二滤波器的滤波器特性至少部分地不重叠。 本发明还涉及用于执行该方法的相应控制系统。

    ELECTRICALLY ISOLATED CATHETER WITH WIRELESS SENSORS
    80.
    发明申请
    ELECTRICALLY ISOLATED CATHETER WITH WIRELESS SENSORS 有权
    电动隔离导管与无线传感器

    公开(公告)号:US20100042010A1

    公开(公告)日:2010-02-18

    申请号:US12519817

    申请日:2007-12-19

    Abstract: A local power-delivery/data-reception unit is installed within an insertion end of a sealed catheter. The local power-delivery/data-reception unit wirelessly powers a separately sealed sensor that is attached to the insertion end and configured for wirelessly sending a data signal to the local power-delivery/data-reception unit. The catheter may further feature a remote power-delivery/data-reception unit disposed within the handle and configured for wirelessly communicating with the local power-delivery/data-reception unit and a controller for controlling the sensor.

    Abstract translation: 局部送电/数据接收单元安装在密封导管的插入端内。 本地供电/数据接收单元无线地对附接到插入端的单独密封的传感器供电,并被配置为将数据信号无线发送到本地电力传送/数据接收单元。 导管还可以具有设置在手柄内并被配置为与本地供电/数据接收单元无线通信的远程电力传送/数据接收单元和用于控制传感器的控制器。

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