公开(公告)号：US20020139933A1

公开(公告)日：2002-10-03

申请号：US10108391

申请日：2002-03-29

Applicant: KABUSHIKI KAISHA TOSHIBA

Inventor： Yoshinori Iida ,  Keitaro Shigenaka ,  Naoya Mashio

IPC: G01J005/00

CPC classification number: G01J5/08 ,  G01J5/0853 ,  G01J5/20 ,  H01L27/14649 ,  H01L27/16

Abstract: A supporting beam line for supporting, afloat in a cavity on a semiconductor substrate, an infrared detection pixel comprising an infrared absorption portion for absorbing an incident infrared ray and converting it into heat and a thermoelectric conversion portion for converting a temperature change caused by the heat generated in the infrared absorption portion into an electric signal is formed by a damascene metal on the same layer as the gate of a damascene metal gate MOS transistor to be used in a peripheral circuit. The supporting beam line comprises a conductor line with U-shaped cross section inside which a metal is filled.

Abstract translation: 一种用于支撑在半导体衬底上的腔中的支撑束线，包括用于吸收入射红外线并将其转换成热的红外吸收部分的红外检测像素和用于转换由热量引起的温度变化的热电转换部分 在红外线吸收部分中产生的电信号由与外围电路中使用的镶嵌金属栅极MOS晶体管的栅极相同的一层上的镶嵌金属形成。 支撑梁线包括具有U形横截面的导体线，其中填充有金属。

公开(公告)号：US20020131649A1

公开(公告)日：2002-09-19

申请号：US10100076

申请日：2002-03-19

Inventor： Hiroshi Yamaguchi

IPC: G06K009/40 ,  G06K009/03 ,  G06K009/20 ,  G06K007/10 ,  G01J005/00 ,  G01N021/84 ,  G06T005/50 ,  G06T007/00 ,  H04N001/409

CPC classification number: H04N1/4097 ,  G06T5/005 ,  G06T5/50 ,  G06T7/0002 ,  G06T7/0004 ,  G06T2207/10008 ,  G06T2207/10024 ,  G06T2207/10048 ,  G06T2207/30144

Abstract: In an image processing device which carries out processing for detecting and correcting defective portions of an image, it is possible to pre-emptively prevent the defective portion detecting and correcting processing from causing a deterioration in image quality or an excessive processing requiring time requirement. In cases in which a film type of a photographic film on which the image is recorded is a film type known to have a characteristic that an IR image is also formed at a time of image exposure and recording, and in cases in which a density distribution width of IR data is a predetermined value or more, defect detection-correction processing is cancelled. Further, in cases in which a non-image region is included in the image, either defect detection-correction is carried out only on regions other than the non-image region, or defective portion detection-correction is cancelled.

Abstract translation: 在执行用于检测和校正图像的缺陷部分的处理的图像处理装置中，可以预先防止缺陷部分检测和校正处理导致图像质量的劣化或需要时间要求的过度处理。 在其上记录有图像的胶片类型的胶片类型是已知具有在图像曝光和记录时也形成IR图像的特征的胶片类型，并且在密度分布 IR数据的宽度是预定值以上，故消除了缺陷检测修正处理。 此外，在图像中包括非图像区域的情况下，仅对非图像区域以外的区域进行缺陷检测校正，或者消除缺陷部分检测校正。

公开(公告)号：US20020131648A1

公开(公告)日：2002-09-19

申请号：US10097205

申请日：2002-03-12

Inventor： Tadao Hayashide

IPC: G06T005/50 ,  G06K009/03 ,  G06T007/00 ,  H04N001/409 ,  G02B007/04 ,  G02B027/64 ,  G06K009/40 ,  G06K007/10 ,  G06K009/20 ,  G01J005/00 ,  G01N021/84

CPC classification number: H04N1/4097 ,  G06T5/005 ,  G06T5/50 ,  G06T2207/10008 ,  G06T2207/10048

Abstract: An image processing apparatus for processing visible image information and invisible image information obtained from visible light and invisible light directed onto an original and from the original onto an image pick-up element via a focusing optical system. The image processing apparatus includes an infrared light source, a visible light source, a focus correction unit that corrects the focus of the images when the images are formed on the image pick-up element and acquired, and a signal processor that corrects a partial magnification difference between the visible image and the infrared image.

Abstract translation: 一种图像处理装置，用于经由聚焦光学系统处理可见光图像信息和从可见光和不可见光获得的不可见光，以及从原件引导到原始图像的图像拾取元件。 图像处理装置包括红外光源，可见光源，聚焦校正单元，其在图像拾取元件上形成图像并获取时校正图像的焦点;以及信号处理器，其校正部分放大率 可见图像和红外图像之间的差异。

公开(公告)号：US20020126732A1

公开(公告)日：2002-09-12

申请号：US10039290

申请日：2002-01-04

Applicant: THE REGENTS OF THE UNIVERSITY OF CALIFORNIA

Inventor： Ali Shakouri ,  Peyman Milanfar ,  Kenneth Pedrotti ,  James Christofferson

IPC: G01J005/00

CPC classification number: G01J5/58 ,  G01J5/00 ,  G01J5/0096 ,  G01J5/08 ,  G01J5/0862 ,  G01J5/0896 ,  G01J2005/0077

Abstract: Methods and apparatus for non-contact thermal measurement which are capable of providing sub micron surface thermal characterization of samples, such as active semiconductor devices. The method obtains thermal image information by reflecting a light from a surface of a device in synchronous with the modulation of the thermal excitation and then acquiring and processing an AC-coupled thermoreflective image. The method may be utilized for making measurements using different positioning techniques, such as point measurements, surface scanning, two-dimensional imaging, and combinations thereof. A superresolution method is also described for increasing the resultant image resolution, based on multiple images with fractional pixel offsets, without the need to increase the resolution of the image detectors being utilized. The thermoreflective method provides a spatial resolution better than current infrared cameras, operates within a wide temperature range, and is capable of a thermal resolution on the order of 10 mKnull.

Abstract translation: 用于非接触式热测量的方法和装置，其能够提供诸如有源半导体器件的样品的亚微米表面热表征。 该方法通过与热激发的调制同步地反射来自装置的表面的光，然后获取和处理AC耦合的热反射图像来获得热图像信息。 该方法可以用于使用不同的定位技术进行测量，例如点测量，表面扫描，二维成像及其组合。 还描述了超分辨率方法，用于基于具有分数像素偏移的多个图像来增加所得到的图像分辨率，而不需要增加正在使用的图像检测器的分辨率。 该热反射方法提供的空间分辨率优于目前的红外摄像机，在宽温度范围内工作，并能够在10 mK°的数量级下进行热分解。

公开(公告)号：US20020126731A1

公开(公告)日：2002-09-12

申请号：US10046547

申请日：2002-01-16

Inventor： Stergios Stergiopoulos ,  Nikolaos Uzunoglu

IPC: G01J005/00 ,  A61B005/00

CPC classification number: A61B5/015 ,  A61B5/0507 ,  A61B5/4064 ,  G01K11/006

Abstract: A microwave thermography apparatus to measure temperatures within a dielectric body comprises a partial ellipsoidal cavity with an electrical conductive surface wherein the body can be located at one focus of the cavity. A microwave antenna located at a second focus of the cavity is connected to a radiometer. That radiometer amplifies and filters signals from the antenna before they are applied to a detector with the temperature of the body being determined from the voltage amplitude of the detected signals.

Abstract translation: 用于测量电介质体内的温度的微波热成像装置包括具有导电表面的部分椭圆形腔体，其中主体可位于空腔的一个焦点处。 位于空腔的第二焦点处的微波天线连接到辐射计。 在辐射计被施加到检测器之前，该辐射计对来自天线的信号进行放大和滤波，其中身体的温度根据检测到的信号的电压幅度确定。

公开(公告)号：US20020089677A1

公开(公告)日：2002-07-11

申请号：US10033950

申请日：2001-12-28

Inventor： Jurgen Ziegler ,  Reinhold Waller ,  Lothar Pfitzner ,  Claus Schneider ,  Heiner Ryssel ,  Volker Tegeder

IPC: G01B011/28 ,  G01J005/00 ,  G01K011/00 ,  G01J004/00

CPC classification number: B24B37/013 ,  C23C14/547 ,  C23C16/4407 ,  C23C16/52 ,  G01B11/0616 ,  H01J37/32935 ,  H01L22/26

Abstract: The apparatus allows monitoring layer depositions in a process chamber. The apparatus has a light source, a sensor element, and at least one light detector. The sensor element is suitably configured in order to influence the intensity of the light beam measured by the detector by the thickness of the layer growing on the sensor element. The novel monitoring method for measuring the transmitted light intensity utilizes the apparatus. The sensor element has a continuous opening through which the intensity of the light is observed as a function of the opening grown over by the thickness of the growing layer.

Abstract translation: 该装置允许在处理室中监测层沉积。 该装置具有光源，传感器元件和至少一个光检测器。 传感器元件被适当地构造以便通过由传感器元件上生长的层的厚度来影响由检测器测量的光束的强度。 用于测量透射光强度的新型监测方法利用该装置。 传感器元件具有连续的开口，作为根据生长层的厚度生长的开口的函数，观察到光的强度。

公开(公告)号：US20020074499A1

公开(公告)日：2002-06-20

申请号：US09844714

申请日：2001-04-27

Inventor： Neal R. Butler

IPC: G01J005/00

CPC classification number: H04N5/3651 ,  G01J5/10 ,  G01J5/16 ,  G01J5/20 ,  G01J5/22 ,  H04N5/2176 ,  H04N5/33 ,  H04N5/3655

Abstract: Methods and apparatus for compensating a radiation sensor for temperature variations of the sensor. In one example, the radiation sensor is a thermal sensor having at least one property that varies as a function of temperature. The thermal sensor outputs signals based on thermal radiation of interest from a particular radiating body in its view. These signals may contain significant undesirable components due in part to changes in temperature of the sensor itself. Methods and apparatus of the invention compensate the sensor for temperature variations of the sensor that are not due to the radiation of interest, so as to significantly reduce undesirable components in the instantaneous signals output by the sensor. In one example, this is accomplished without thermally stabilizing the sensor itself (i.e., dynamic temperature compensation). In another example, the sensor is thermally stabilized selectively at various predetermined temperatures as a function of the ambient temperature in the proximity of the sensor.

Abstract translation: 用于补偿传感器温度变化的辐射传感器的方法和装置。 在一个示例中，辐射传感器是具有随温度变化的至少一个特性的热传感器。 热传感器在其视图中根据特定辐射体输出感兴趣的热辐射信号。 这些信号可能部分地由于传感器本身的温度变化而含有显着的不合需要的部件。 本发明的方法和装置补偿传感器对传感器的温度变化不是由于感兴趣的辐射引起的，以便显着地减少由传感器输出的瞬时信号中的不期望的部件。 在一个示例中，这是在不使传感器本身热稳定（即，动态温度补偿）的情况下实现的。 在另一个示例中，传感器在传感器附近作为环境温度的函数在各种预定温度下被选择性地热稳定。

公开(公告)号：US20020030163A1

公开(公告)日：2002-03-14

申请号：US09925059

申请日：2001-08-08

Inventor： Evan Y.W. Zhang

IPC: G01J005/00

CPC classification number: G02B23/125 ,  G02B27/1066 ,  H04N5/33

Abstract: An infrared imaging device combines two sensors, each sensor sensitive to a different spectral range of infrared radiation. Both sensors are combined in a single camera sharing one of three common optical apertures, thus parallax is eliminated between the sensors. Further, a display device is aligned along an optical axis in common with the camera eliminating parallax between the display and camera. Images from the first sensor, the second sensor, or both sensors may be viewed optically and/or electronically. The device is handheld, or mountable on a headgear such as a helmet. When mounted on headgear, the display is viewable by directing the operator's gaze upward, thus the display does not interfere with an operator's straight and downward sight. The image can be sent to a remote display by a wireless transceiver, and waterproof, fireproof, vibration/impact resistance, and hot/cold weather resistance are achieved using a high strength plastic enclosure with foam insert.

Abstract translation: 红外成像装置组合了两个传感器，每个传感器对不同的红外辐射光谱范围敏感。 两个传感器组合在共享三个常见光学孔之一的单个相机中，因此在传感器之间消除视差。 此外，显示设备沿着光轴与照相机相同，以消除显示器和照相机之间的视差。 来自第一传感器，第二传感器或两个传感器的图像可以用光学和/或电子方式来观看。 该装置是手持式的，或可安装在诸如头盔的头饰上。 当安装在头饰上时，可以通过向上指示操作者的目视来观察显示器，因此显示器不会干扰操作者的直视和向下的视线。 该图像可以通过无线收发器发送到远程显示器，并且使用具有泡沫插件的高强度塑料外壳来实现防​​水，防火，抗振动/抗冲击和耐寒/耐寒耐候。

公开(公告)号：US20020001333A1

公开(公告)日：2002-01-03

申请号：US09232423

申请日：1999-01-15

Inventor： WILLIAM M. GLASHEEN ,  CHARLES DEMILO ,  HELMAR R. STEGLICH

IPC: G01J005/00 ,  G01J005/02

CPC classification number: G01J5/041 ,  G01J5/0014 ,  G01J5/602 ,  H05H1/0043

Abstract: The present invention relates to a combustion temperature sensor, and, more particularly, to a combustion temperature sensor that measures infrared energy emitted at several preselected wavelengths from a flame and/or a flame's hot gas at a turbine inlet location and applies the energy signals to a calculation model to yield temperature.

Abstract translation: 燃烧温度传感器技术领域本发明涉及一种燃烧温度传感器，更具体地说，涉及一种燃烧温度传感器，该燃烧温度传感器测量在涡轮机入口处的火焰和/或火焰的热气体以几种预选波长发射的红外能量，并将能量信号施加到 产生温度的计算模型。

公开(公告)号：US20040256558A1

公开(公告)日：2004-12-23

申请号：US10860879

申请日：2004-06-03

Inventor： Gunter Kuerbitz ,  Harry Schlemmer ,  Holger Vogel

IPC: G01J005/00

CPC classification number: H04N5/33 ,  G02B13/14 ,  G02B27/017 ,  G02B27/2228 ,  G02B2027/0134 ,  G02B2027/0138 ,  H04N13/239

Abstract: A system and a method for generating three-dimensional image displays with two sensors, in particular two thermal imagers, having two optical channels with fields of view of equal size and with a virtually identical line of sight has at least one image reproduction unit. The optical axes of the sensors are aligned in parallel with one another. The sensors are each provided with a detector for a stereo recording, the stereo recording being performed simultaneously by means of the detectors.

Abstract translation: 具有两个传感器，特别是具有两个光学通道的具有两个具有相同尺寸的视场和具有相同视线的光学通道的三维图像显示器的系统和方法具有至少一个图像再现单元。 传感器的光轴彼此平行排列。 这些传感器分别具有用于立体声记录的检测器，立体声记录通过检测器同时进行。