Imprint method
    67.
    发明授权

    公开(公告)号:US10705422B2

    公开(公告)日:2020-07-07

    申请号:US15714080

    申请日:2017-09-25

    Inventor: Yoshihiro Shiode

    Abstract: The present invention provides an imprint apparatus comprising a deforming unit configured to deform a pattern surface by applying a force to a mold, a measuring unit configured to measure a deformation amount of the pattern surface, a control unit configured to control the measuring unit to measure the deformation amount in each of a plurality of states in which a plurality of the forces are applied to the mold, a calculation unit configured to calculate a rate of change in the deformation amount as a function of a change in the force applied to the mold, and a calibration unit configured to calibrate a control profile describing a time in the imprint process, and the force applied to the mold, based on the rate of change in the deformation amount.

    Method for printing a three-dimensional structure, method for controlling a print head and a printed article

    公开(公告)号:US10556417B2

    公开(公告)日:2020-02-11

    申请号:US14398561

    申请日:2013-04-29

    Abstract: The present invention relates to a method for printing a three-dimensional structure comprising the steps of providing structural parameters defining the shape of the three-dimensional structure in a first step, converting the structural parameters into an intensity image having multiple pixels which are arranged in a two-dimensional pattern and which comprises at least different intensities in a second step and controlling the print head in dependency of the intensity image in order to print the three-dimensional structure in a third step, wherein the print head moves to a certain position and deposits at least one droplet of printing material when processing a certain pixel and wherein the number of droplets and/or the amount of printing material deposited at the certain position by the print head is chosen in dependency of the intensity of the corresponding pixel.

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