公开(公告)号：US06798226B2

公开(公告)日：2004-09-28

申请号：US10252363

申请日：2002-09-24

申请人： Stephen Maximilian Altmann ,  Johann Karl Heinrich Hörber

发明人： Stephen Maximilian Altmann ,  Johann Karl Heinrich Hörber

IPC分类号： G01R3102

CPC分类号： G01Q20/02 ,  G01Q40/00 ,  G01Q70/06 ,  Y10S977/863 ,  Y10S977/869 ,  Y10S977/874 ,  Y10S977/875

摘要： The invention provides a probe measuring device for effecting local measurements referring to a sample, having a first probe and a second probe, a measurement condition adjustment arrangement adapted to commonly adjust a first measurement condition of the first probe with respect to a sample or a reference surface and a second measurement condition of the second probe with respect to a sample or a reference surface, a detection arrangement having a first detection arrangement associated with the first probe adapted to independently detect first measurement data referring to local measurements effected by the first probe and a second detection arrangement associated with the second probe adapted to independently detect second measurement data referring to local measurements effected by the second probe. Also provided are methods for effecting local measurements and local manipulations using multiple probes.

摘要翻译： 本发明提供了一种探针测量装置，用于参照具有第一探针和第二探针的样品进行局部测量，测量条件调节装置适于相对于样品或参考物共同调节第一探针的第一测量条件 表面和相对于样品或参考表面的第二探针的第二测量条件，检测装置具有与第一探针相关联的第一检测装置，其适于独立地检测第一测量数据，参考由第一探针实施的局部测量， 与第二探针相关联的第二检测装置，其适于独立地检测参考由第二探针实现的局部测量的第二测量数据。 还提供了使用多个探针进行局部测量和局部操作的方法。

公开(公告)号：US20040089816A1

公开(公告)日：2004-05-13

申请号：US10616896

申请日：2003-07-09

申请人： California Institute of Technology

发明人： Stephen R. Quake ,  Guillaume Lessard ,  Lawrence A. Wade ,  Jordan M. Gerton

IPC分类号： G01N021/64

CPC分类号： G01Q60/20 ,  G01Q30/025 ,  G01Q30/04 ,  G01Q30/18 ,  G01Q40/00 ,  G01Q60/06 ,  G01Q70/12 ,  G02B21/16 ,  Y10S977/862

摘要： Methods and systems for operating an apertureless microscope for observing one or more features to a molecular sensitivity on objects are described. More particularly, the method includes moving a tip of a probe coupled to a cantilever in a vicinity of a feature of a sample, which emits one or more photons at a detected rate relative to a background rate of the sample based upon the presence of the tip of the probe in the vicinity of the feature. The method modifies the detected rate of the feature of the sample, whereupon the modifying of the detected rate causes the feature of the sample to enhance relative to background rate of the feature.

摘要翻译： 描述了用于操作无孔显微镜以观察一个或多个特征以使物体上的分子灵敏度的方法和系统。 更具体地，该方法包括将耦合到悬臂的探针的尖端移动到样品特征附近，基于样品的存在以相对于样品的背景速率以检测的速率发射一个或多个光子 探头尖端附近的特征。 该方法修改检测到的样本特征的速率，因此修改检测到的速率导致样本的特征相对于特征的背景速率增强。

公开(公告)号：US06661004B2

公开(公告)日：2003-12-09

申请号：US09789992

申请日：2001-02-21

申请人： Bernardo D. Aumond ,  Kamal Youcef-Toumi

发明人： Bernardo D. Aumond ,  Kamal Youcef-Toumi

IPC分类号： G01N1316

CPC分类号： G06T5/003 ,  G01Q30/06 ,  G01Q40/00 ,  G06T5/30 ,  G06T2207/10056 ,  Y10S977/85 ,  Y10S977/863 ,  Y10S977/875 ,  Y10S977/881

摘要： An apparatus and method are provided for processing the images obtained from an atomic force microscopy when profiling high aspect ratio features. A deconvolution technique for deconvolving the sample image includes the use of multiple images but does not require exact calibration of the scanning probe. In one embodiment, erosion and dilation techniques are used to obtain an undistorted image of the sample being measured. In another embodiment, Legendre transforms are used to obtain an undistorted image of the sample being measured. Also described is a technique for measuring the tip radius of the scanning probe.

摘要翻译： 提供了一种装置和方法，用于在分析高纵横比特征时处理从原子力显微镜获得的图像。 用于对样本图像进行去卷积的去卷积技术包括使用多个图像，但不需要精确校准扫描探针。 在一个实施例中，使用侵蚀和扩张技术来获得待测样品的未失真图像。 在另一个实施例中，使用勒让德变换来获得待测样品的未失真图像。 还描述了一种用于测量扫描探针的尖端半径的技术。

公开(公告)号：US06633660B1

公开(公告)日：2003-10-14

申请号：US09490615

申请日：2000-01-25

申请人： John Carl Schotland

发明人： John Carl Schotland

IPC分类号： G06K936

CPC分类号： G01Q40/00

摘要： A method for the direct reconstruction of an object from measurements, called scattering data, of scattered waves due to probing waves as emitted by a source. The scattering data is related to a scattering kernel by an integral operator. The image is directly reconstructed by executing a prescribed mathematical algorithm, as determined with reference to the integral operator, on the scattering data.

摘要翻译： 一种用于从由源发出的探测波的散射波的测量（称为散射数据）直接重建物体的方法。 散射数据通过积分算子与散射核相关。 通过执行在散射数据上参照积分算子确定的规定的数学算法直接重建图像。

公开(公告)号：US20030055588A1

公开(公告)日：2003-03-20

申请号：US09945527

申请日：2001-09-04

发明人： Arkady Nikitin

IPC分类号： G01C017/38 ,  G06F019/00 ,  G01P021/00

CPC分类号： H01J37/28 ,  G01Q40/00 ,  G02B21/002 ,  G02B21/004 ,  H01J2237/2816 ,  H01J2237/2826

摘要： A scan nonlinearity in scan microscopes is determined so as to take into consideration of a contribution of a nonlinearity of scans and a uniformity of a test object in a total, imaginary nonlinearity of image.

摘要翻译： 确定扫描显微镜中的扫描非线性，以便考虑到图像的非线性和扫描的均匀性以及图像的全部虚构非线性的均匀性的贡献。

公开(公告)号：US06489611B1

公开(公告)日：2002-12-03

申请号：US09410123

申请日：1999-09-30

申请人： Bernardo D. Aumond ,  Kamal Youcef-Toumi

发明人： Bernardo D. Aumond ,  Kamal Youcef-Toumi

IPC分类号： G01N1316

CPC分类号： G01Q10/06 ,  G01Q40/00 ,  Y10S977/851 ,  Y10S977/881

摘要： Apparatus and methods are provided for using atomic force microscopy for profiling high aspect ratio features. Probe landing techniques include scanning prior to bringing the probe into contact with the feature. In one embodiment, the probe assembly cantilever is brought into contact with the feature and subsequent scanning is used to locate the feature with the probe. In another embodiment, the probe is moved in a scanning pattern in progressively lower horizontal planes until the probe contacts the sample feature. Also described is a deconvolution technique for deconvolving the sample image and a technique for measuring the tip radius of the feature.

摘要翻译： 提供了使用原子力显微镜分析高纵横比特征的装置和方法。 探头着陆技术包括在使探头与特征接触之前进行扫描。 在一个实施例中，探针组件悬臂与特征接触，并且随后的扫描用于利用探针定位特征。 在另一个实施例中，探针以逐渐下降的水平面以扫描图案移动，直到探针接触样本特征。 还描述了用于对样本图像进行去卷积的去卷积技术和用于测量特征的尖端半径的技术。

公开(公告)号：US20020166368A1

公开(公告)日：2002-11-14

申请号：US10103524

申请日：2002-03-21

申请人： JEOL Ltd.

发明人： Kazushi Yamanaka ,  Keiichi Nakamoto

IPC分类号： G01B005/28

CPC分类号： G01Q40/00 ,  G01Q60/32 ,  Y10S977/85

摘要： A method and apparatus for observing a specimen in atomic force microscopy with a vibrating cantilever maintained in resonance while a probe attached to the cantilever is maintained in contact with the specimen. The Q factor of the cantilever is determined based upon the detected amplitude.

摘要翻译： 一种用悬臂梁固定的探针与试样保持共振同时用原子力显微镜观察试样的方法和装置。 基于检测到的振幅来确定悬臂的Q因子。

公开(公告)号：US20020117611A1

公开(公告)日：2002-08-29

申请号：US09919780

申请日：2001-07-31

发明人： Victor B. Kley

IPC分类号： H01J003/14 ,  H01J005/16

CPC分类号： G01Q60/58 ,  G01B7/31 ,  G01N23/225 ,  G01Q10/02 ,  G01Q10/04 ,  G01Q10/06 ,  G01Q20/00 ,  G01Q20/02 ,  G01Q30/04 ,  G01Q40/00 ,  G01Q60/04 ,  G01Q60/16 ,  G01Q60/22 ,  G01Q60/38 ,  G01Q70/02 ,  G01Q70/06 ,  G01Q80/00 ,  G02B21/002 ,  G03F1/72 ,  G03F1/84 ,  G03F7/2049 ,  G03F7/704 ,  G03F7/70616 ,  G11B5/232 ,  G11B5/3116 ,  G11B5/3163 ,  G11B5/3166 ,  G11B9/14 ,  G11B9/1409 ,  G11B9/1418 ,  G11B9/1427 ,  G11B9/1436 ,  G11B9/1445 ,  G11B9/1454 ,  G11B9/149 ,  G11B11/12 ,  G11B11/16 ,  G11B2005/0002 ,  G11B2005/0021 ,  H02N1/006 ,  Y10S977/855 ,  Y10S977/871

摘要： A scanning probe microscopy (SPM) inspection and/or modification system which uses SPM technology and techniques. The system includes various types of microstructured SPM probes for inspection and/or modification of the object. The components of the SPM system include microstructured calibration structures. A probe may be defective because of wear or because of fabrication errors. Various types of reference measurements of the calibration structure are made with the probe or vice versa to calibrate it. The components of the SPM system further include one or more tip machining structures. At these structures, material of the tips of the SPM probes may be machined by abrasively lapping and chemically lapping the material of the tip with the tip machining structures.

摘要翻译： 使用SPM技术和技术的扫描探针显微镜（SPM）检查和/或修改系统。 该系统包括用于检查和/或修改物体的各种类型的微结构化SPM探针。 SPM系统的组件包括微结构校准结构。 由于磨损或由于制造错误，探头可能有缺陷。 校准结构的各种参考测量用探针进行，反之亦然，以校准它。 SPM系统的部件还包括一个或多个尖端加工结构。 在这些结构中，SPM探针的尖端的材料可以通过用尖端加工结构进行研磨研磨和化学研磨尖端的材料来加工。

公开(公告)号：US06211686B1

公开(公告)日：2001-04-03

申请号：US09126133

申请日：1998-07-30

申请人： Kazuya Matsuzawa ,  Yukihito Oowaki

发明人： Kazuya Matsuzawa ,  Yukihito Oowaki

IPC分类号： G01R3126

CPC分类号： G01Q40/00 ,  H01L22/14 ,  H01L22/20 ,  Y10S977/854

摘要： The present invention comprises a SCM measuring apparatus and a control section. A control section adjusts shape data of a probe tip initially inputted based on SCM measurement for a standard specimen and a simulated result by the measuring apparatus, and then performs the SCM measurement by a standard specimen, and then on the basis of the measuring result, a impurity distribution is assumed. Next, the impurity distribution is adjusted so that the CV property calculated by the SCM simulation coincides with the CV property measured by the SCM measuring apparatus, and then the CV property is calculated again. The impurity distribution in case both of the CV properties coincide with each other is determined as a definitive impurity distribution. The definitive impurity distribution is outputted to a display apparatus, a printer, and so on. Therefore, it is possible to analyze the impurity distribution with accuracy smaller than a width of the probe tip.

摘要翻译： 本发明包括一个SCM测量装置和一个控制部分。 控制部根据标准样本的基于SCM测量的最初输入的探针尖端的形状数据和由测量装置的模拟结果进行调整，然后通过标准样本进行SCM测量，然后基于测量结果， 假定杂质分布。 接下来，调整杂质分布，使得通过SCM模拟计算的CV性质与由SCM测量装置测量的CV性质一致，然后再次计算CV性质。 在两种CV性质彼此一致的情况下的杂质分布被确定为确定的杂质分布。 确定的杂质分布被输出到显示装置，打印机等。 因此，可以精度小于探针尖端的宽度来分析杂质分布。

公开(公告)号：USRE35514E

公开(公告)日：1997-05-20

申请号：US325997

申请日：1994-10-19

申请人： Thomas R. Albrecht ,  Moris-Musa Dovek ,  Michael D. Kirk ,  Sang-Il Park

发明人： Thomas R. Albrecht ,  Moris-Musa Dovek ,  Michael D. Kirk ,  Sang-Il Park

IPC分类号： G01Q20/02 ,  G01Q40/00 ,  G01Q70/02 ,  H01J37/20 ,  H01J40/14

CPC分类号： G01Q40/00 ,  B82Y35/00 ,  G01Q70/02 ,  Y10S977/868

摘要： A scanning force microscope having a sensor head and a base wherein a moveable sample holder is housed in the base and is positioned relative to a probe housed in the sensor head, such sample being monitored by an optical deflection detection system. The detection system is configured to provide direct visual observation of the probe with respect to the sample. The mirror of the detection system is mounted in a cut away portion of a sphere and defines the axis of rotation of a kinematic mount, such providing ease of fine adjustment of the detection system. The sensor head is in communication with the base by a stage kinematic mount, such providing ease of position adjustment of the sensor head with respect to the base.

摘要翻译： 一种扫描力显微镜，其具有传感器头和基座，其中可移动的样品保持器容纳在基座中并且相对于容纳在传感器头中的探针定位，该样品由光学偏转检测系统监测。 检测系统被配置为提供相对于样品的探针的直接目视观察。 检测系统的镜子安装在球体的切除部分中并且限定运动学座架的旋转轴线，从而提供了检测系统的微调。 传感器头通过平台运动学支架与基座连通，从而提供传感头相对于底座的位置调节的便利性。