Abstract:
A thin film transistor includes: a substrate; a semiconductor layer disposed on the substrate, including a source region, a drain region and a channel region, and made of a polycrystalline silicon layer; a gate electrode disposed to correspond to the channel region of the semiconductor layer; a gate insulating layer disposed between the semiconductor layer and the gate electrode; and source and drain electrodes electrically connected to the source and drain regions of the semiconductor layer, respectively, wherein the polycrystalline silicon layer comprises a plurality of regions having different Raman spectrum peaks from each other.
Abstract:
A method of fabricating a p-type thin film transistor (TFT) includes: performing a first annealing process on a substrate to diffuse a metal catalyst through a capping layer into a surface of an amorphous silicon layer, and to crystallize the amorphous silicon layer to a polycrystalline silicon layer due to the diffused metal catalyst; removing the capping layer; patterning the polycrystalline silicon layer to form a semiconductor layer; forming a gate insulating layer and a gate electrode on the substrate; implanting p-type impurity ions into the semiconductor layer; and implanting a gettering material into the semiconductor layer and performing a second annealing process to remove the metal catalyst. Herein, the p-type impurity ions are implanted at a dose of 6×1013/cm2 to 5×1015/cm2, and the gettering material is implanted at a dose of 1×1011/cm2 to 3×1015/cm2.
Abstract translation:一种制造p型薄膜晶体管(TFT)的方法包括:在衬底上进行第一退火处理,将金属催化剂通过覆盖层扩散到非晶硅层的表面中,并将非晶硅层结晶成 由于扩散金属催化剂而导致的多晶硅层; 去除覆盖层; 图案化多晶硅层以形成半导体层; 在基板上形成栅极绝缘层和栅电极; 将p型杂质离子注入到半导体层中; 以及将吸气材料注入到所述半导体层中,并进行第二退火处理以除去所述金属催化剂。 这里,p型杂质离子以6×10 3 / cm 2至5×10 15 / cm 2的剂量注入, / SUP>,并且吸除材料以1×10 11 / cm 2至3×10 15 / cm 2的剂量注入, / SUP>。
Abstract:
The present invention relates to a flat panel display device comprising a polycrystalline silicon thin film transistor and provides a flat panel display device having improved characteristics by having a different number of grain boundaries included in polycrystalline silicon thin film formed in active channel regions of a driving circuit portion and active channel regions of pixel portion. This may be achieved by having a different number of grain boundaries included in the polycrystalline silicon thin film formed in active channel regions of a switching thin film transistor and a driving thin film transistor formed in the pixel portion, and by having a different number of grain boundaries included in polycrystalline silicon thin film formed in active channel regions of a thin film transistor for driving the pixel portion for each red, green and blue of the pixel portion. Further, this may be achieved by having a different number of grain boundaries included in polycrystalline silicon formed in active channel regions of an NMOS thin film transistor and a PMOS thin film transistor for forming CMOS transistor used in flat panel display device, thereby constructing a thin film transistor to obtain the improved characteristics for each transistor.
Abstract:
A thin film transistor and method for fabricating the same are provided. The thin film transistor comprises a semiconductor layer having a MILC region that has first crystalline grains crystallized by MILC method and second crystalline grains disposed between the first crystalline grains and having different crystalline properties from the first crystalline grains.
Abstract:
The present invention relates to compounds of the following formula (I) or pharmaceutically acceptable salts thereof. The present invention also relates to use for a cognitive-enhancing agent of compounds of the following formula (I) or pharmaceutically acceptable salts thereof and to a process for preparing the same. Further, the present invention relates to use for a congnitive-enhancing agent of decursin of the following formula (II) or pharmaceutically acceptable salts thereof. In addition, the present invention relates to extracts of Angelica gigantis Radix comprising decursin of the following formula (II), having cognitive-enhancing effects.
Abstract:
A flat panel display and method for fabricating the same are disclosed. In the flat panel display a substrate includes a pixel region having a plurality of unit pixels, and a peripheral circuit region arranged in the periphery of the pixel region. The peripheral circuit region also includes a driving circuit for driving the plurality of unit pixels. At least one circuit thin film transistor is positioned in the peripheral circuit region and includes a first semiconductor layer crystallized by a sequential lateral solidification method. At least one pixel thin film transistor is positioned in the pixel region and includes a second semiconductor layer having a channel region crystallized by one of a metal induced crystallization method or a metal induced lateral crystallization method.
Abstract:
A poly-silicon layer of a thin film transistor (TFT) having an active channel region, wherein a probability P that a maximum number of a primary grain boundary exists on the active channel region is not 0.5, the probability obtained by the following equation: P = D - ( N max - 1 ) · Gs Gs , where D=L cos &thgr;+W sin &thgr;, L is a channel length of the active channel region, W is a width of the active channel region, Nmax is the maximum number of the primary boundary existing on the active channel region, Gs is a grain size, and &thgr; is a tilt angle of the primary grain boundary and the display device having thereof.
Abstract:
A polycrystalline silicon thin film for a TFT and a display device using the same where the number of crystal grain boundaries exerts a fatal influence on movement of electric charge carrier, providing a distance “S” between active channels of the TFT having dual or multiple channels with a relation S=mGs·sec &thgr;−L, and also providing a display device in which uniformity of TFT characteristics is improved by synchronizing the number of the crystal grain boundaries included in each of the channels of the dual or multiple channels S=mGs·sec &thgr;−L Gs is a size of crystal grains of the polycrystalline silicon thin film, m is an integer of 1 or more, &thgr; is an inclined angle where fatal crystal grain boundaries, that is, “primary” crystal grain boundaries are inclined in a direction perpendicular to an active channel direction, and L represents a length of active channels for each TFT having dual or multiple channels.
Abstract:
A separated target apparatus includes a base plate; and a plurality of source units including a plurality of separated targets that are adhered on one surface of the base plate and that form a regular array, and a plurality of magnets that are adhered on the other surface of the base plate and that make a pair with the plurality of separated targets. The plurality of source units are arrayed in parallel at an angle between a first direction that is a direction of the regular array and a second direction that is perpendicular to the first direction. Sputtering is performed by using the separated target apparatus having the aforementioned structure.
Abstract:
A method of forming a polycrystalline silicon layer includes forming a first amorphous silicon layer and forming a second amorphous silicon layer such that the first amorphous silicon layer and the second amorphous silicon layer have different film qualities from each other, and crystallizing the first amorphous silicon layer and the second amorphous silicon layer using a metal catalyst to form a first polycrystalline silicon layer and a second polycrystalline silicon layer. A thin film transistor includes the polycrystalline silicon layer formed by the method and an organic light emitting device includes the thin film transistor.