POLISHING METHOD AND POLISHING APPARATUS
    54.
    发明申请

    公开(公告)号:US20180021917A1

    公开(公告)日:2018-01-25

    申请号:US15697047

    申请日:2017-09-06

    申请人: EBARA CORPORATION

    摘要: A polishing method and a polishing apparatus which can increase a polishing rate and can control a polishing profile of a substrate being polished by adjusting a surface temperature of a polishing pad are disclosed. The polishing method for polishing a substrate by pressing the substrate against a polishing pad on a polishing table includes a pad temperature adjustment step of adjusting a surface temperature of the polishing pad, and a polishing step of polishing the substrate by pressing the substrate against the polishing pad having the adjusted surface temperature. In the pad temperature adjustment step, the surface temperature of a part of an area of the polishing pad, the area being to be brought in contact with the substrate, is adjusted during the polishing step so that the rate of temperature change of a temperature profile in a radial direction of the surface of the polishing pad becomes constant in the radial direction of the polishing pad.

    METHOD OF GRINDING A WORKPIECE AND METHOD FOR DETERMINING PROCESSING PARAMETERS
    59.
    发明申请
    METHOD OF GRINDING A WORKPIECE AND METHOD FOR DETERMINING PROCESSING PARAMETERS 审中-公开
    研磨工艺的方法和确定加工参数的方法

    公开(公告)号:US20170072527A1

    公开(公告)日:2017-03-16

    申请号:US15310502

    申请日:2015-05-06

    申请人: SCANIA CV AB

    IPC分类号: B24B19/12 B24B49/14 B24B51/00

    摘要: The present disclosure relates to a grinding method for grinding of non-circular workpieces with an improved productivity and quality of the resulting workpiece. The method comprises a first and a second stage. The rotational speed profile of the workpiece in the first stage is controlled with the purpose of maintaining a pre-selected maximum surface temperature of the workpiece during said first stage, and grinding of the workpiece in said second stage is performed while controlling an aggressiveness number of said second stage so as to achieve an intended final surface quality. The present disclosure also relates to a method for determining the processing parameters of such a grinding method wherein the first and the second stage of the grinding method are iterated to thereby determine the processing parameters leading to a high productivity and desired quality of the workpiece after grinding.

    摘要翻译: 本公开涉及一种用于研磨非圆形工件的研磨方法,其具有提高的所得工件的生产率和质量。 该方法包括第一和第二阶段。 为了在第一阶段保持工件的预选最大表面温度,在第一阶段中工件的转速分布被控制,并且在所述第二阶段中对工件进行研磨,同时控制侵蚀性数量 所述第二阶段以达到期望的最终表面质量。 本公开还涉及一种用于确定这种研磨方法的处理参数的方法,其中重复研磨方法的第一阶段和第二阶段,从而确定导致研磨后工件的高生产率和期望质量的加工参数 。