公开(公告)号：US20160313547A1

公开(公告)日：2016-10-27

申请号：US15198634

申请日：2016-06-30

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Ikuo ARATA ,  Yoshihiro ITO

IPC: G02B21/36 ,  G02B21/00 ,  G02B21/16 ,  G02B21/24

CPC classification number: G02B21/361 ,  G02B5/006 ,  G02B21/0004 ,  G02B21/0016 ,  G02B21/04 ,  G02B21/16 ,  G02B21/248 ,  G02B27/0018

Abstract: An optical device for microscopic observation 4 comprises: a cold stop 13 having openings 13d, 13e corresponding to a low-magnification microscope optical system 5 and being a stop member arranged in a vacuum vessel 12 to let the light from the sample S pass to the camera 3; a warm stop 10 having an opening 14 corresponding to a high-magnification microscope optical system 5 and being a stop member arranged outside the vacuum vessel 12 to let the light from the sample S pass toward the cold stop 13; and a support member 11 supporting the warm stop 10 so that the warm stop can be inserted to or removed from on the optical axis of the light from the sample S, wherein the warm stop 10 has a reflective surface 15 on the camera 3 side and wherein the opening 14 is smaller than the openings 13d, 13e.

Abstract translation: 用于显微镜观察的光学装置4包括：具有对应于低倍率显微镜光学系统5的开口13d，13e的冷止端13，并且是设置在真空容器12中以使来自样品S的光通过到 相机3; 具有对应于高倍率显微镜光学系统5的开口14的热止动件10，并且是设置在真空容器12外部以使来自样品S的光通向冷止器13的止动构件; 以及支撑暖挡件10的支撑构件11，使得暖挡件可以插入到来自样品S的光的光轴上或从其上移除，其中暖挡件10在相机3侧具有反射表面15， 其中开口14小于开口13d，13e。

公开(公告)号：US20150309115A1

公开(公告)日：2015-10-29

申请号：US14692019

申请日：2015-04-21

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tomonori NAKAMURA ,  Mitsunori NISHIZAWA

IPC: G01R31/308 ,  G01R19/00

CPC classification number: G01R31/311 ,  G01R31/308

Abstract: An image generation apparatus is an image generation apparatus that generates an image based on measurement light from the semiconductor device, and the image generation apparatus includes an optical sensor that detects the measurement light, an optical sensor power supply that applies a constant voltage to the optical sensor to supply a current to the optical sensor, a current detector that generates a pattern signal according to magnitude of the current supplied to the optical sensor by the optical sensor power supply, and a control device that generates a pattern image based on the pattern signal.

Abstract translation: 图像生成装置是根据来自半导体装置的测定光生成图像的图像生成装置，图像生成装置具备检测测定光的光学传感器，向光学系统施加恒定电压的光学传感器电源 传感器，用于向光学传感器提供电流;电流检测器，其根据由光学传感器电源提供给光学传感器的电流的幅度产生图案信号;以及控制装置，其基于图案信号产生图案图像 。