公开(公告)号：US20180067376A1

公开(公告)日：2018-03-08

申请号：US15696432

申请日：2017-09-06

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Hisanari TAKAHASHI ,  Yoichi KAWADA ,  Takashi INOUE ,  Koyo WATANABE ,  Koji TAKAHASHI ,  Hironori TAKAHASHI

IPC: G02F1/35 ,  G02F1/355

CPC classification number: G02F1/353 ,  G02F1/3551 ,  G02F2001/3548 ,  G02F2201/34 ,  G02F2202/20 ,  G02F2203/13

Abstract: A wavelength conversion element includes a crystal having a periodically poled structure in which polarization is inverted with an inversion period Λ along a z-axis which is an input axis of a light pulse. The wavelength conversion element is configured to generate an output light pulse converted to have an output frequency f(x) corresponding to the inversion period Λ(x) at each position x by change of the inversion period Λ according to the position x, and when a target frequency linearly changing with the position x is set to fT(x)=b+ax, a frequency width of the output frequency is set to δf(x), and the output frequency is set to f(x)=fT(x)+α(x), the output frequency is set to coincide with the target frequency within a range satisfying a condition |α(x)|≦δf(x).

公开(公告)号：US20170031158A1

公开(公告)日：2017-02-02

申请号：US15290233

申请日：2016-10-11

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Haruyasu ITO ,  Naoya MATSUMOTO ,  Takashi INOUE

IPC: G02B27/00 ,  B23K26/03 ,  B23K26/06 ,  B23K26/064 ,  G02B21/06 ,  G02B5/18 ,  G02B21/00 ,  G02B21/02 ,  G02B21/36 ,  B23K26/00 ,  B23K26/40

CPC classification number: G02B27/0025 ,  B23K26/00 ,  B23K26/03 ,  B23K26/032 ,  B23K26/06 ,  B23K26/064 ,  B23K26/36 ,  B23K26/364 ,  B23K26/38 ,  B23K26/40 ,  B23K26/53 ,  B23K26/57 ,  B23K2101/40 ,  B23K2103/50 ,  G02B5/1876 ,  G02B5/32 ,  G02B21/0032 ,  G02B21/02 ,  G02B21/06 ,  G02B21/361 ,  G02B27/0068 ,  G02F1/01 ,  G02F2203/18

Abstract: In an aberration-correcting method according to an embodiment of the present invention, in an aberration-correcting method for a laser irradiation device 1 which focuses a laser beam on the inside of a transparent medium 60, aberration of a laser beam is corrected so that a focal point of the laser beam is positioned within a range of aberration occurring inside the medium. This aberration range is not less than n×d and not more than n×d+Δs from an incidence plane of the medium 60, provided that the refractive index of the medium 60 is defined as n, a depth from an incidence plane of the medium 60 to the focus of the lens 50 is defined as d, and aberration caused by the medium 60 is defined as Δs.

Abstract translation: 在根据本发明实施例的像差校正方法中，在将激光束聚焦在透明介质60的内部的激光照射装置1的像差校正方法中，校正激光束的像差，使得 激光束的焦点位于介质内发生的像差范围内。 该像差范围不小于介质60的入射面的n×d且不大于n×d +Δs，条件是介质60的折射率被定义为n，从 将透镜50的焦点的介质60定义为d，将由介质60引起的像差定义为Δs。

公开(公告)号：US20160349496A1

公开(公告)日：2016-12-01

申请号：US15164052

申请日：2016-05-25

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Koyo WATANABE ,  Takashi INOUE

IPC: G02B21/36 ,  G02F1/01 ,  G02B21/06

CPC classification number: G02B21/365 ,  G02B21/06 ,  G02F1/0121

Abstract: A control apparatus includes a lens, an SLM presenting a modulation pattern on a modulation plane and outputting modulated light L2 for forming light spots P1 and P2 on a pupil plane of the lens, an imaging device imaging a fringe pattern image formed on a focal plane of the lens and generating image data Da indicating the fringe pattern image, a calculation unit calculating at least one kind of parameter among an intensity amplitude, a phase shift amount, and an intensity average from the image data Da, an analysis unit obtaining a deviation in relative positions of an optical axis of the lens and a reference coordinate of the modulation plane based on the parameter, and a changing unit changing an origin position of the reference coordinate so that the deviation in the relative positions is decreased.

Abstract translation: 控制装置包括透镜，在调制平面上呈现调制图案的SLM，并输出用于在透镜的光瞳平面上形成光斑P1和P2的调制光L2，成像装置成像在焦平面上形成的条纹图案图像 并生成指示条纹图案图像的图像数据Da，计算单元从图像数据Da计算强度幅度，相移量和强度平均中的至少一种参数，获得偏差的分析单元 在透镜的光轴的相对位置和基于参数的调制平面的参考坐标，以及改变单元改变参考坐标的原点位置，使得相对位置的偏差减小。

公开(公告)号：US20160329246A1

公开(公告)日：2016-11-10

申请号：US15213723

申请日：2016-07-19

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Makoto NAKANO ,  Koji KUNO ,  Tetsuya OSAJIMA ,  Takashi INOUE ,  Masayoshi KUMAGAI

IPC: H01L21/78 ,  C03B33/02 ,  B23K26/53 ,  B23K26/064 ,  H01L23/544 ,  B23K26/00

CPC classification number: H01L21/78 ,  B23K26/0006 ,  B23K26/046 ,  B23K26/0624 ,  B23K26/064 ,  B23K26/0861 ,  B23K26/128 ,  B23K26/40 ,  B23K26/402 ,  B23K26/53 ,  B23K2103/50 ,  B23K2103/56 ,  B28D1/221 ,  B28D5/00 ,  C03B33/0222 ,  H01L23/544 ,  H01L2223/54453 ,  Y10T29/49826

Abstract: An object is irradiated with a laser light modulated by a reflection type spatial light modulator such that aberration of the laser light converged inside the object becomes a predetermined aberration or less. Therefore, aberration of the laser light generated at a position on which a converging point of the laser light is located is made as small as possible, to enhance the energy density of the laser light at that position, which makes it possible to form a modified region with a high function as a starting point for cutting. In addition, because the reflection type spatial light modulator is used, it is possible to improve the utilization efficiency of the laser light as compared with a transmissive type spatial light modulator.

Abstract translation: 用由反射型空间光调制器调制的激光照射物体，使得会聚在物体内的激光的像差成为预定像差或更小。 因此，在激光的会聚点所在的位置处产生的激光的像差尽可能地小，以增强该位置处的激光的能量密度，这使得可以形成经修改的 具有高功能的区域作为切割的起点。 此外，由于使用反射型空间光调制器，与透射型空间光调制器相比，可以提高激光的利用效率。

公开(公告)号：US20160054576A1

公开(公告)日：2016-02-25

申请号：US14782005

申请日：2014-03-25

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Takashi INOUE ,  Hirotoshi TERADA

IPC: G02B27/28 ,  G02B27/09 ,  G02B5/30 ,  G02B27/00

CPC classification number: G02B27/283 ,  G01N21/6458 ,  G01N2201/0675 ,  G02B5/3016 ,  G02B21/0032 ,  G02B21/0076 ,  G02B21/0092 ,  G02B27/0025 ,  G02B27/0905

Abstract: An optical module (1A) includes a polarization beam splitter (10A) having a light splitting surface (11), polarization elements (20, 40), and respectively arranged on an optical path of a first polarization component (L2) transmitted through the light splitting surface (11) and an optical path of a second polarization component (L4) reflected by the light splitting surface (11), a reflective SLM (30) that modulates and reflects the first polarization component (L2) passing through the polarization element (20), and a reflective SLM (50) that modulates and reflects the second polarization component (L4) passing through the polarization element (40). The first modulation light (L3) passing through the polarization element (20) again and then reflected by the light splitting surface (11) and the second modulation light (L5) passing through the polarization element (40) again and then transmitted through the light splitting surface (11) are combined with each other.

Abstract translation: 光学模块（1A）包括具有光分离表面（11）的偏振分束器（10A），偏振元件（20,40），并且分别布置在透过该光的第一偏振分量（L2）的光路上 分离表面（11）和由所述光分离表面（11）反射的第二偏振分量（L4）的光路;反射SLM（30），其对通过所述偏振元件的所述第一偏振分量（L2）进行调制和反射 20），以及反射SLM（50），其对通过偏振元件（40）的第二偏振分量（L4）进行调制和反射。 再次通过偏振元件（20）的第一调制光（L3），然后再次通过分光表面（11）和第二调制光（L5）反射，然后透过该光 分离表面（11）彼此组合。

公开(公告)号：US20140036182A1

公开(公告)日：2014-02-06

申请号：US14045513

申请日：2013-10-03

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Naoya MATSUMOTO ,  Norihiro FUKUCHI ,  Takashi INOUE ,  Yasunori IGASAKI

IPC: G02F1/133

CPC classification number: G02F1/13318 ,  G02F1/136277 ,  G02F2203/50 ,  G09G3/2092 ,  G09G3/3611 ,  G09G2300/0491 ,  G09G2320/02 ,  G09G2320/0285

Abstract: The present invention relates to a phase modulating apparatus capable of highly accurately and easily correcting the phase modulation characteristic of a reflective electric address spatial light modulator even when a condition of input light is changed. In the LCOS phase modulating apparatus, an input unit inputs the condition of the input light, and a processing unit sets an input value for each pixel. A correction value deriving unit determines a correction condition according to the condition of the input light. A control input value converting unit converts the input value set for each pixel into a corrected input value based on the correction condition. An LUT processing unit converts the corrected input value into a voltage value, and drives each pixel by using a drive voltage equivalent to the converted voltage value.

Abstract translation: 本发明涉及即使当输入光的条件改变时也能高精度地且容易地校正反射式电地址空间光调制器的相位调制特性的相位调制装置。 在LCOS相位调制装置中，输入单元输入输入光的条件，并且处理单元设置每个像素的输入值。 校正值导出单元根据输入光的条件来确定校正条件。 控制输入​​值转换单元基于校正条件将针对每个像素设置的输入值转换为校正输入值。 LUT处理单元将校正的输入值转换为电压值，并且通过使用与转换的电压值相当的驱动电压驱动每个像素。