Method Of Calibrating Spectroscopic Apparatus And Method Of Producing Calibrated Spectroscopic Apparatus

    公开(公告)号:US20200088575A1

    公开(公告)日:2020-03-19

    申请号:US15746216

    申请日:2016-07-06

    Abstract: Spectral apparatus includes sensors that output signals indicating the respective energy amounts of a plurality of wavelength components. For each of the sensors, its reference spectral sensitivity is acquired, and an indicator indicating the reference spectral sensitivity of the sensor, is acquired. The deviation of an indicator indicating the spectral sensitivity of the sensor from the indicator indicating the reference spectral sensitivity of the sensor, is expressed by a linear function of an indicator indicating a mechanical error in the spectral apparatus. The indicator indicating the mechanical error in the spectral apparatus, is acquired to adapt a spectral sensitivity set of sensors to a signal set output by the sensors. For each of the sensors, the deviation of the indicator indicating the spectral sensitivity of the sensor from the indicator indicating the reference spectral sensitivity of the sensor, is acquired, so that the spectral sensitivity of the sensor is acquired.

    MONOLITHICALLY CONFIGURED SPECTROSCOPIC INSTRUMENT

    公开(公告)号:US20190368931A1

    公开(公告)日:2019-12-05

    申请号:US16425685

    申请日:2019-05-29

    Abstract: A spectroscopic instrument includes a first aperture limiting device, a second aperture limiting device, a first mirror, a movable MEMS mirror, and a dispersive element spatially separate from the MEMS mirror, the movable MEMS mirror being movable in relation to the dispersive element, the movable MEMS mirror being monolithically configured as a common component with at least one of the first aperture limiting device, the second aperture limiting device, and the dispersive element, and the first and second aperture limiting devices being arranged to be spatially separate from the movable MEMS mirror and having a lateral offset from a rotational axis of the movable MEMS mirror.

    SPECTRAL FEATURE CONTROL APPARATUS
    444.
    发明申请

    公开(公告)号:US20190353920A1

    公开(公告)日:2019-11-21

    申请号:US16524261

    申请日:2019-07-29

    Applicant: Cymer, LLC

    Abstract: A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

    Spectrometry device, image forming apparatus, and spectrometry method

    公开(公告)号:US10442228B2

    公开(公告)日:2019-10-15

    申请号:US16106716

    申请日:2018-08-21

    Inventor: Tsugio Gomi

    Abstract: A printer that incorporates a spectrometry device includes a spectroscope, a distance measurer, and a spectrometry unit. The spectroscope includes a wavelength-selective interference filter on which light from a position of measurement in a medium is incident. The distance measurer measures the distance between the position of measurement and the spectroscope, and the spectrometry unit performs spectrometry at the position of measurement by using the spectroscope and correct a measured value obtained by the spectrometry based on the measured distance.

    Spectral feature control apparatus
    447.
    发明授权

    公开(公告)号:US10416471B2

    公开(公告)日:2019-09-17

    申请号:US15295280

    申请日:2016-10-17

    Applicant: Cymer, LLC

    Abstract: A spectral feature selection apparatus includes a dispersive optical element arranged to interact with a pulsed light beam; three or more refractive optical elements arranged in a path of the pulsed light beam between the dispersive optical element and a pulsed optical source; and one or more actuation systems, each actuation system associated with a refractive optical element and configured to rotate the associated refractive optical element to thereby adjust a spectral feature of the pulsed light beam. At least one of the actuation systems is a rapid actuation system that includes a rapid actuator configured to rotate its associated refractive optical element about a rotation axis. The rapid actuator includes a rotary stepper motor having a rotation shaft that rotates about a shaft axis that is parallel with the rotation axis of the associated refractive optical element.

    Compact spectrometer
    450.
    发明授权

    公开(公告)号:US10317281B2

    公开(公告)日:2019-06-11

    申请号:US15387449

    申请日:2016-12-21

    Applicant: Oak Analytics

    Abstract: A compact spectrometer includes an excitation light source configured to generate excitation light and arranged to illuminate a spot on a sample. A dispersive element includes at least one movable component and spatially separates output light emanating from the sample in response to the excitation light into a plurality of different wavelength bands. A moveable component of the dispersive element causes the plurality of different wavelength bands of the output light to be scanned across a detector. The detector includes at least one light sensor that senses the wavelength bands of the output light and generates an output electrical signal in response to the sensed output light.

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