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31.发明授权Device for testing components of transparent material for surface irregularities and occlusions 失效用于测试表面不规则和闭塞的透明材料的部件的装置
公开(公告)号：US4815844A
公开(公告)日：1989-03-28
申请号：US62183
申请日：1987-06-15
Applicant: Harald Schmalfuss , Friedel Sinsel , Reinhold Bolz
Inventor： Harald Schmalfuss , Friedel Sinsel , Reinhold Bolz
IPC: G01M11/00 , G01M11/02 , G01N21/88 , G01N21/95 , G01N21/958
CPC classification number: G01M11/0278 , G01N21/88 , G01N21/958 , G01N2021/4719 , G01N2021/9511 , G01N21/8851 , G01N2201/06113 , G01N2201/065 , G01N2201/1045
Abstract: A device for testing components of transparent material for surface irregularities and occlusions which comprises a mechanism for rotatably mounting the component so that the component may be rotated on its axis; a mechanism for generating a light ray which moves linearly so that the light ray can dot-scan the component along a diameter of the component; at least one signal generating device disposed at a predetermined angle to the direction of impingement of the light ray for detecting surface irregularities and occlusions of the component and then generating a signal representative of the irregularity or occlusion; and a signal evaluation device for evaluating the signals produced in the signal generating device. The signal generating device comprises an image forming optical system; an interchangeable mask disposed at the focal plane of the image forming optical system for selecting the image of a plane of the component; and a receiver for receiving the light rays passing the mask and generating a signal representative of the light rays received.
Abstract translation: 用于测试用于表面不规则和闭塞的透明材料的部件的装置，其包括用于可旋转地安装所述部件的机构，使得所述部件可以在其轴线上旋转; 用于产生线性移动的光线的机构，使得光线可以沿着部件的直径对部件进行点扫描; 至少一个信号产生装置，以与所述光线的冲击方向成预定角度设置，用于检测所述部件的表面不规则和闭塞，然后产生表示不规则性或闭塞的信号; 以及用于评估信号产生装置中产生的信号的信号评估装置。 信号发生装置包括成像光学系统; 设置在所述图像形成光学系统的焦平面处的可互换掩模，用于选择所述部件的平面的图像; 以及接收器，用于接收通过掩模的光线并产生表示所接收的光线的信号。
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公开(公告)号：US4469442A
公开(公告)日：1984-09-04
申请号：US338384
申请日：1982-01-11
Applicant: Frederich R. Reich
Inventor： Frederich R. Reich
CPC classification number: G01N21/88 , G01N2021/8427 , G01N21/21 , G01N2201/1045
Abstract: Irregularities in a coating on a substrate in which the coating includes optical scattering centers can be detected by irradiating the coating with polarized light and examining light from the coating through a filter which removes light having the same polarization as the initial beam. Light scattered by the optical scattering centers is transmitted through the filter, while specularly reflected light from the top surface of the coating, from the substrate exposed by gaps in the coating, or reflected by alien material on the coating is filtered out. As a result irregularities can be detected as intensity minima of the transmitted radiation.
Abstract translation: 可以通过用偏振光照射涂层来检测其中涂层包括光散射中心的基底上的涂层中的不规则性，并通过滤光器检查来自涂层的光，该滤光器去除具有与初始光束相同的偏振光。 由光散射中心散射的光通过滤光片传播，而从涂层顶表面，从涂层中间隙暴露的基底或涂层外的异物材料反射的镜面反射光被过滤掉。 因此，可以将不规则性检测为发射辐射的强度最小值。
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公开(公告)号：US20180045570A1
公开(公告)日：2018-02-15
申请号：US15552752
申请日：2016-03-08
Applicant: RENISHAW PLC
Inventor： Timothy SMITH , Richard John BLACKWELL-WHITEHEAD
CPC classification number: G01J3/44 , G01J3/06 , G01J2003/064 , G01N21/65 , G01N2201/103 , G01N2201/1045 , G01N2201/1087 , G02B21/002
Abstract: A transmission Raman spectroscopy apparatus has a light source for generating a light profile on a sample, a photodetector having at least one photodetector element, collection optics arranged to collect Raman scattered light transmitted through the sample and direct the Raman light onto the at least one photodetector element and a support for supporting the sample. The support and light source are arranged such that the light profile can be moved relative to the sample in order that the at least one photodetector element receives Raman scattered light generated for different locations of the light profile on the sample.
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公开(公告)号：US20170059485A1
公开(公告)日：2017-03-02
申请号：US15250136
申请日：2016-08-29
Applicant: CAPTL LLC
Inventor： Masanobu Yamamoto , J. Paul Robinson
CPC classification number: G01N33/582 , B01L3/502761 , G01N15/1434 , G01N15/1456 , G01N15/1459 , G01N15/1484 , G01N21/645 , G01N35/00069 , G01N2035/00881 , G01N2201/1045
Abstract: A measurement system includes a system for causing relative motion between a sample and an irradiation spot. The sample includes fluorescent markers having respective wavelengths. A gating system provides a gating signal based at least in part on resultant light substantially at an irradiation wavelength. A detection system detects fluorescent light from the irradiated markers and provides detection signals representing the fluorescent light detected concurrently with a gate-open signal. In some examples, the detection system detects fluorescent light at multiple wavelengths and provides respective detection signals. A spectral discriminator arranged optically between the sample and the detection system receives the fluorescent light from the sample and provides respective fluorescent light at the wavelengths to the detection system. A flow cytometer can spectrally disperse resultant fluorescent light and measure the wavelengths separately. Light from a sample disposed over a reflective phase grating can be dispersed, measured, and gated.
Abstract translation: 测量系统包括用于引起样品和照射点之间的相对运动的系统。 样品包括具有各自波长的荧光标记。 门控系统至少部分地提供基本上在照射波长处的合成光的门控信号。 检测系统检测来自照射标记的荧光，并提供表示与门开启信号同时检测的荧光的检测信号。 在一些示例中，检测系统检测多个波长的荧光并提供相应的检测信号。 在样本和检测系统之间光学地布置的光谱鉴别器接收来自样品的荧光，并向检测系统提供波长的相应荧光。 流式细胞仪可以光谱分散所得的荧光并分别测量波长。 来自设置在反射相位光栅上的样品的光可以被分散，测量和门控。
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公开(公告)号：US20160069820A1
公开(公告)日：2016-03-10
申请号：US14665748
申请日：2015-03-23
Applicant: GENERAL ELECTRIC COMPANY
Inventor： Manuel Kenneth Bueno , Robert Martin Roney, Jr.
IPC: G01N21/954 , G01N21/88 , G01S17/89
CPC classification number: G01N21/8851 , G01N21/88 , G01N21/954 , G01N2021/9544 , G01N2021/9546 , G01N2021/9548 , G01N2201/06113 , G01N2201/104 , G01N2201/1045 , G01S7/4815 , G01S7/4817 , G01S7/4818 , G01S17/88 , G01S17/89
Abstract: A system includes a vessel floating on a body of water. The system also includes at least one conduit extending from the vessel to below the body of water. The system also includes a scanning device disposed within the at least one conduit. The scanning device includes at least one two-dimensional (2D) line scanner and a rotary encoder coupled to the at least one 2D line scanner. The scanning device is configured to generate three-dimensional (3D) image data of a surface of the at least one conduit or at least one component disposed within the at least one conduit.
Abstract translation: 系统包括浮在水体上的船只。 该系统还包括从容器延伸到水体下方的至少一个导管。 该系统还包括设置在至少一个导管内的扫描装置。 扫描装置包括至少一个二维（2D）线扫描器和耦合到至少一个2D线扫描器的旋转编码器。 扫描装置被配置为生成至少一个管道的表面或设置在至少一个管道内的至少一个部件的表面的三维（3D）图像数据。
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Patent Agency Ranking
公开(公告)号：US20150346115A1
公开(公告)日：2015-12-03
申请号：US14727641
申请日：2015-06-01
Applicant: Eric J. Seibel , Yuanzheng Gong , Fred Braun , David L. Gourley
Inventor： Eric J. Seibel , Yuanzheng Gong , Fred Braun , David L. Gourley
CPC classification number: G01N21/954 , A61B1/00009 , A61B1/00096 , A61B1/00165 , A61B1/00172 , A61B1/00193 , A61B1/005 , A61B1/07 , G01N2021/646 , G01N2021/6484 , G01N2021/8887 , G01N2021/9546 , G01N2201/0833 , G01N2201/084 , G01N2201/101 , G01N2201/1045 , G06T7/0004 , G06T7/33 , G06T2207/10012 , G06T2207/10028 , G06T2207/30164 , H04N5/2256 , H04N13/207 , H04N13/211 , H04N13/282 , H04N2005/2255 , H04N2013/0081
Abstract: Embodiments regard 3D optical metrology of internal surfaces. Embodiments may include a system having an imaging device to capture multiple images of an internal surface, including a first image that is captured at a first location on an axial path and a second image that is captured at a second location on the axial path, and a transport apparatus to move the imaging device along the axial path. The system further includes a control system that is coupled with the imaging, wherein the control system is to receive the multiple images from the imaging device and to generate a 3D representation of the surface based at least in part on content information and location information for the multiple images.
Abstract translation: 实施例涉及内表面的3D光学测量。 实施例可以包括具有成像装置以捕获内表面的多个图像的系统，包括在轴向路径上的第一位置处捕获的第一图像和在轴向路径上的第二位置处被捕获的第二图像，以及 沿着轴向移动成像装置的输送装置。 该系统还包括与成像耦合的控制系统，其中控制系统将从成像设备接收多个图像，并且至少部分地基于内容信息和位置信息来生成表面的3D表示 多个图像。
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公开(公告)号：US20130301042A1
公开(公告)日：2013-11-14
申请号：US13976178
申请日：2011-10-21
Applicant: Yuta Urano , Toshifumi Honda , Yukihiro Shibata
Inventor： Yuta Urano , Toshifumi Honda , Yukihiro Shibata
IPC: G01N21/956
CPC classification number: G01N21/956 , G01B11/0608 , G01N21/9501 , G01N21/95623 , G01N2021/8854 , G01N2201/1045
Abstract: A defect inspection method includes: illuminating an area on surface of a specimen as a test object under a specified illumination condition; scanning a specimen to translate and rotate the specimen; detecting scattering lights to separate each of scattering lights scattered in different directions from the illuminated area on the specimen into pixels to be detected according to a scan direction at the scanning a specimen and a direction approximately orthogonal to the scan direction; and processing to perform an addition process on each of scattering lights that are detected at the step and scatter approximately in the same direction from approximately the same area of the specimen, determine presence or absence of a defect based on scattering light treated by the addition process, and compute a size of the determined defect using at least one of the scattering lights corresponding to the determined defect.
Abstract translation: 缺陷检查方法包括：在规定的照明条件下照射作为被检体的试样表面的面积; 扫描样品以平移和旋转样品; 检测散射光，根据扫描样本的扫描方向和与扫描方向大致正交的方向，将从样本上的照射区域向不同方向散射的散射光分离成要检测的像素; 对在步骤中检测到的每个散射光进行加法处理，并且从与样本的大致相同的区域大致相同的方向散射，基于通过加法处理的散射光确定缺陷的存在或不存在 并且使用与所确定的缺陷相对应的散射光中的至少一个来计算确定的缺陷的大小。
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公开(公告)号：US08477302B2
公开(公告)日：2013-07-02
申请号：US12412776
申请日：2009-03-27
Applicant: Yuta Urano , Toshiyuki Nakao , Yoshimasa Oshima , Akira Hamamatsu
Inventor： Yuta Urano , Toshiyuki Nakao , Yoshimasa Oshima , Akira Hamamatsu
IPC: G01N21/00
CPC classification number: G01N21/9501 , G01N21/9505 , G01N2021/8854 , G01N2021/8874 , G01N2201/103 , G01N2201/1045
Abstract: A defect inspection apparatus for inspecting a surface of a sample includes a stage for holding the sample, an illumination optical system that irradiates a laser beam to form a linear illuminated area on the surface of the sample, a detection optical system, and a signal processing system. The detection optical system includes a detector device having a plurality of pixels for detecting light scattered from the linear illuminated area of the surface of the sample, and that outputs in parallel a plurality of detection signals having mutually different sensitivities acquired from the plurality of pixels of the detector device. The signal processing system selects an unsaturated detection signal from the plurality of detection signals and detects a defect in accordance with the selected detection signal.
Abstract translation: 用于检查样品表面的缺陷检查装置包括用于保持样品的载物台，照射光学系统，其照射激光束以在样品的表面上形成线性照射区域，检测光学系统和信号处理 系统。 检测光学系统包括具有多个像素的检测器装置，用于检测从样品表面的线性照射区域散射的光，并且并行地输出具有从多个像素获得的具有相互不同的灵敏度的多个检测信号 检测器装置。 信号处理系统从多个检测信号中选择不饱和检测信号，并根据所选择的检测信号检测缺陷。
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公开(公告)号：US20090279081A1
公开(公告)日：2009-11-12
申请号：US12412776
申请日：2009-03-27
Applicant: Yuta Urano , Toshiyuki Nakao , Yoshimasa Oshima , Akira Hamamatsu
Inventor： Yuta Urano , Toshiyuki Nakao , Yoshimasa Oshima , Akira Hamamatsu
IPC: G01N21/896
CPC classification number: G01N21/9501 , G01N21/9505 , G01N2021/8854 , G01N2021/8874 , G01N2201/103 , G01N2201/1045
Abstract: A defect inspection apparatus for inspecting a surface of a sample includes a stage for holding the sample, an illumination optical system that irradiates a laser beam to form a linear illuminated area on the surface of the sample, a detection optical system, and a signal processing system. The detection optical system includes a detector device having a plurality of pixels for detecting light scattered from the linear illuminated area of the surface of the sample, and that outputs in parallel a plurality of detection signals having mutually different sensitivities acquired from the plurality of pixels of the detector device. The signal processing system selects an unsaturated detection signal from the plurality of detection signals and detects a defect in accordance with the selected detection signal.
Abstract translation: 用于检查样品表面的缺陷检查装置包括用于保持样品的载物台，照射光学系统，其照射激光束以在样品的表面上形成线性照射区域，检测光学系统和信号处理 系统。 检测光学系统包括具有多个像素的检测器装置，用于检测从样品表面的线性照射区域散射的光，并且并行地输出具有从多个像素获得的具有相互不同的灵敏度的多个检测信号 检测器装置。 信号处理系统从多个检测信号中选择不饱和检测信号，并根据所选择的检测信号检测缺陷。
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公开(公告)号：US20080151259A1
公开(公告)日：2008-06-26
申请号：US11614837
申请日：2006-12-21
Applicant: Woo Sik Yoo
Inventor： Woo Sik Yoo
CPC classification number: G01N21/9501 , G01N21/95607 , G01N2021/8864 , G01N2201/1045
Abstract: A system and method for mapping a wafer includes scanning the wafer with a laser beam using a continuous spiraling pattern on the wafer surface, where the spiraling can be inward or outward. A microprocessor analyzes characteristics of the reflected, diffracted, and/or scattered beams and synchronizes each beam with a location on the wafer to generate a map of the wafer.
Abstract translation: 用于映射晶片的系统和方法包括使用在晶片表面上的连续螺旋图案的激光束扫描晶片，其中螺旋可以向内或向外。 微处理器分析反射，衍射和/或散射光束的特性，并使每个光束与晶片上的位置同步，以产生晶片的图。
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