知搜-全球专利检索

  1. 登录
  2. 注册

搜索结果

96 条记录 (耗时 0.018 秒)

    Three-dimensional integrated CMOS-MEMS device and process for making the same
    31.
    发明授权
    Three-dimensional integrated CMOS-MEMS device and process for making the same 有权
    三维集成CMOS-MEMS器件及其制造方法

    公开(公告)号：US07071031B2

    公开(公告)日：2006-07-04

    申请号：US10446461

    申请日：2003-05-28

    申请人： H. Bernhard Pogge ,  Michel Despont ,  Ute Drechsler ,  Peter Vettiger ,  Roy Yu

    发明人： H. Bernhard Pogge ,  Michel Despont ,  Ute Drechsler ,  Peter Vettiger ,  Roy Yu

    IPC分类号： H01L21/44 ,  H01L21/48 ,  H01L21/50

    CPC分类号： B81C1/00238 ,  B81B2203/0307 ,  H01L21/76898 ,  H01L2224/16225

    摘要： A vertically integrated structure includes a micro-electromechanical system (MEMS) and a chip for delivering signals to the MEMS. The structure includes a metal stud connecting a surface of the chip and the MEMS; the MEMS has an anchor portion having a conducting pad on an underside thereof contacting the metal stud. The MEMS is spaced from the chip by a distance corresponding to a height of the metal stud, and the MEMS includes a doped region in contact with the conducting pad. In particular, the MEMS may include a cantilever structure, with the end portion including a tip extending in the vertical direction. A support structure (e.g. of polyimide) may surround the metal stud and contact both the underside of the MEMS and the surface of the chip. A temporary carrier plate is used to facilitate handling of the MEMS and alignment to the chip.

    摘要翻译： 垂直集成的结构包括微机电系统（MEMS）和用于将信号传递到MEMS的芯片。 该结构包括连接芯片表面和MEMS的金属螺柱; MEMS具有在其下侧具有接触金属螺柱的导电垫的锚固部分。 MEMS与芯片间隔一定距离对应于金属螺柱的高度，并且MEMS包括与导电焊盘接触的掺杂区域。 特别地，MEMS可以包括悬臂结构，其中端部包括在垂直方向上延伸的尖端。 支撑结构（例如聚酰亚胺）可以围绕金属螺柱并且接触MEMS的下侧和芯片的表面。 使用临时载体板来促进MEMS的处理和与芯片的对准。

    Three-dimensional integrated CMOS-MEMS device and process for making the same
    32.
    发明授权
    Three-dimensional integrated CMOS-MEMS device and process for making the same 有权
    三维集成CMOS-MEMS器件及其制造方法

    公开(公告)号：US06835589B2

    公开(公告)日：2004-12-28

    申请号：US10294140

    申请日：2002-11-14

    申请人： H. Bernhard Pogge ,  Michel Despont ,  Ute Drechsler ,  Chandrika Prasad ,  Peter Vettiger ,  Roy Yu

    发明人： H. Bernhard Pogge ,  Michel Despont ,  Ute Drechsler ,  Chandrika Prasad ,  Peter Vettiger ,  Roy Yu

    IPC分类号： H01L2100

    CPC分类号： B81C1/00238 ,  B81B2203/0307 ,  H01L21/76898 ,  H01L2224/16225

    摘要： A vertically integrated structure includes a micro-electromechanical system (MEMS) and a chip for delivering signals to the MEMS. The MEMS has an anchor portion having a conductor therethrough, by which it is connected to a substrate. The chip is attached to the MEMS substrate in a direction normal to the substrate surface, so as to make a conductive path from the chip to the MEMS. The chip may be attached by bonding the conductor to C4 metal pads formed on the chip, or by bonding the conductor to metal studs on the chip. The MEMS substrate may be thinned before attachment to the chip, or may be removed from the underside of the MEMS. A temporary carrier plate is used to facilitate handling of the MEMS and alignment to the chip.

    摘要翻译： 垂直集成的结构包括微机电系统（MEMS）和用于将信号传递到MEMS的芯片。 MEMS具有一个具有穿过其中的导体的锚固部分，通过它连接到基底。 芯片沿垂直于衬底表面的方向连接到MEMS衬底上，从而形成从芯片到MEMS的导电路径。 可以通过将导体连接到形成在芯片上的C4金属焊盘，或者通过将导体连接到芯片上的金属螺柱来附接芯片。 在附接到芯片之前MEMS基板可以被薄化，或者可以从MEMS的下侧去除。 使用临时载体板来促进MEMS的处理和与芯片的对准。

    Mask and method for modification of a surface
    34.
    发明授权
    Mask and method for modification of a surface 失效
    用于修饰表面的掩模和方法

    公开(公告)号：US6080513A

    公开(公告)日：2000-06-27

    申请号：US072534

    申请日：1998-05-04

    申请人： Juergen Brugger ,  Michel Despont ,  Peter Vettiger

    发明人： Juergen Brugger ,  Michel Despont ,  Peter Vettiger

    IPC分类号： G03F1/00 ,  G03F9/00

    CPC分类号： G03F9/00 ,  C23C14/042

    摘要： A surface of a substrate (3) is to be exposed to a medium (11) directed towards said surface and which modifies said surface. A mask (4) to be used therefor has at least one opening (9) through which said medium (11) is allowed to reach said surface. The opening (9) is located in a protrusion (10) of said mask (4) which is directed versus said surface.

    摘要翻译： 衬底（3）的表面将暴露于指向所述表面的介质（11）并且修改所述表面。 用于其的掩模（4）具有至少一个开口（9），所述介质（11）可以通过所述开口到达所述表面。 开口（9）位于所述面罩（4）的与所述表面相对的突起（10）中。

    Electromechanical switch device and method of operating the same
    35.
    发明授权
    Electromechanical switch device and method of operating the same 有权
    机电开关装置及其运行方法

    公开(公告)号：US08928435B2

    公开(公告)日：2015-01-06

    申请号：US13807049

    申请日：2011-06-08

    申请人： Michel Despont ,  Christoph Hagleitner ,  Charalampos Pozidis ,  Abu Sebastian

    发明人： Michel Despont ,  Christoph Hagleitner ,  Charalampos Pozidis ,  Abu Sebastian

    IPC分类号： H01H51/22 ,  H01H59/00 ,  H01H47/00

    CPC分类号： H01H59/00 ,  H01H47/00 ,  H01H59/0009

    摘要： An electromechanical switch device includes a first switch portion, a second switch portion and an actuator device. The actuator device is configured to provide an actuation force, thereby actuating the first and second switch portion relative to each other to change from a disconnected to a connected state. The actuator device is further configured to provide the actuation force with a modulation at least when the first and second switch portion are in the connected state. A method of operating an electromechanical switch device is also provided.

    摘要翻译： 机电开关装置包括第一开关部分，第二开关部分和致动器装置。 致动器装置构造成提供致动力，从而相对于彼此致动第一和第二开关部分，以从断开状态切换到连接状态。 致动器装置进一步构造成至少当第一和第二开关部分处于连接状态时，通过调制来提供致动力。 还提供了一种操作机电开关装置的方法。

    Micro-electro-mechanical device with a piezoelectric actuator
    39.
    发明授权
    Micro-electro-mechanical device with a piezoelectric actuator 失效
    具有压电执行器的微机电装置

    公开(公告)号：US08222796B2

    公开(公告)日：2012-07-17

    申请号：US12578619

    申请日：2009-10-14

    申请人： Harish Bhaskaran ,  Michel Despont

    发明人： Harish Bhaskaran ,  Michel Despont

    IPC分类号： H01L41/00

    CPC分类号： B81B3/0021 ,  B81B2201/032 ,  B81B2203/0118 ,  F16K31/004 ,  G02B26/0858 ,  H01G5/18 ,  H01H2057/006 ,  H01L41/094 ,  Y10T137/2213

    摘要： A micro-electro-mechanical device including a substrate with a main surface, a piezoelectric actuator with a first side mechanically coupled to the substrate, an elastic member with a first end mechanically coupled to the substrate, and a transfer member mechanically coupling a second side of the piezoelectric actuator to the elastic member. The piezoelectric actuator is positioned lateral to an unfixed region of the elastic member. The method includes applying a voltage to a piezoelectric actuator altering the piezoelectric actuator's dimension vertical to the main surface of the substrate; and mechanically transferring the alteration to a coupling point of an elastic member.

    摘要翻译： 一种微电子机械装置，包括具有主表面的基板，具有机械耦合到所述基板的第一侧的压电致动器，具有机械耦合到所述基板的第一端的弹性构件，以及将第二侧 的压电致动器。 压电致动器位于弹性构件的未固定区域的侧面。 该方法包括向压电致动器施加电压，该压电致动器改变垂直于衬底的主表面的压电致动器的尺寸; 并将所述改变机械地转移到弹性构件的联接点。

    DEVICE COMPRISING A CANTILEVER AND SCANNING SYSTEM
    40.
    发明申请
    DEVICE COMPRISING A CANTILEVER AND SCANNING SYSTEM 失效
    包含CANTILEVER和扫描系统的设备

    公开(公告)号：US20110126329A1

    公开(公告)日：2011-05-26

    申请号：US12952346

    申请日：2010-11-23

    申请人： Michel Despont ,  Venkataraman Kartik ,  Charalampos Pozidis ,  Deepak Ranjan Sahoo

    发明人： Michel Despont ,  Venkataraman Kartik ,  Charalampos Pozidis ,  Deepak Ranjan Sahoo

    IPC分类号： G01Q70/00

    CPC分类号： H01H35/144 ,  G01Q10/04 ,  G01Q10/045

    摘要： A device including a first part and a second part, one of which is a cantilever, the first and second parts being connected to each other and movable relative to each other. The device includes a magnetic element arranged on the first part and configured to provide a magnetic field. The device further includes a magnetization device arranged on the second part and configured to provide an actuation magnetic field which interacts with the magnetic field of the magnetic element, thereby causing or suppressing relative movement of the first and second parts. A scanning system including such a device is also described.

    摘要翻译： 一种包括第一部分和第二部分的装置，其中一个是悬臂，第一和第二部分彼此连接并且可相对于彼此移动。 该装置包括布置在第一部分上并被配置成提供磁场的磁性元件。 该装置还包括布置在第二部分上并被配置为提供与磁性元件的磁场相互作用的致动磁场，从而引起或抑制第一和第二部分的相对运动的磁化装置。 还描述了包括这种装置的扫描系统。