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公开(公告)号：US06308818B1
公开(公告)日：2001-10-30
申请号：US09365457
申请日：1999-08-02
IPC分类号： B65G3700
CPC分类号： H01L21/67706 , B65G19/02 , B65G35/06 , B65G37/02 , B65G2201/0297 , H01L21/67715 , H01L21/67727 , H01L21/6773
摘要： A director assembly for selectively directing a transport carrier from one conveyor path portion to another. The director assembly having a pair of spaced director rails positioned below and in between drive and support rails of the conveyor. The pair of spaced director rails can be selectively raised and rotated and then lowered to direct the carrier to the new path portion.
摘要翻译： 用于选择性地将运输工具从一个输送机路径部分引导到另一个的导向器组件。 导向器组件具有位于输送机的驱动和支撑轨道下方并位于输送机的支撑轨道之间的一对间隔的导轨。 一对间隔的导轨可以选择性地升高和旋转，然后降低以将载体引导到新的路径部分。
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公开(公告)号：US06223886B1
公开(公告)日：2001-05-01
申请号：US09103479
申请日：1998-06-24
IPC分类号： B65G2500
CPC分类号： H01L21/67706 , B65G13/04 , B65G37/02 , H01L21/67727 , H01L21/6773 , Y10S414/14
摘要： A system for transporting articles. The transport system includes a conveyor system which includes a transport device for carrying articles between workstations and a drive rail and a support rail for supporting the transport device. The drive rail includes a drive system for propelling the transport device between workstations. At least one shoe carried by the transport device rides on the support rail for movably supporting the transport device on the support rail. The transport system also includes a protective container including a housing having an interior compartment for supporting a plurality of articles. The bottom surface of the housing is configured to engage the drive system such that actuation of the drive system propels the housing along the drive and support rails. At least one shoe carried by the housing is configured to ride on the support rail of the conveyor system to movably support the housing on the support rail. The transport system also includes the method of transporting articles including the steps of providing a transport device for holding at least one article and having at least one shoe, positioning the transport device with the base of the device supported on a drive rail and the shoe supported on a support rail, and actuating a drive system carried by the drive rail to propel the transport device along the drive rail and support rail.
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33.发明授权Universal tool interface and/or workpiece transfer apparatus for SMIF and open pod applications 有权用于SMIF和开放式应用的通用工具接口和/或工件传送设备
公开(公告)号：US6135698A
公开(公告)日：2000-10-24
申请号：US346166
申请日：1999-07-01
IPC分类号： B65G49/07 , H01L21/673 , H01L21/677 , H01L21/00
CPC分类号： H01L21/67775 , Y10S414/137 , Y10S414/139 , Y10S414/14
摘要： A universal interface and transfer apparatus is disclosed which may be configured either as an indexer or a load port opener. In each configuration, the universal interface and transfer apparatus includes a port plate having a central opening, and a port door fitting within and sealing the central opening when no pod is present on the apparatus. The apparatus further includes a base and a frame mounted on and extending up from a front of the base. A modular drive assembly is mounted within an exterior side of the frame, which drive assembly includes a linear drive screw, and a motor and torque transmission mechanism for rotating the linear drive screw. A carriage is mounted on the linear drive screw such that rotation of the linear drive screw results in vertical translation of the carriage. In a first configuration, the port plate is mounted to the carriage via a bracket extending between the port plate and carriage so that rotation of the linear drive screw will vertically translate the port plate while the port door remains stationary. In a second configuration, the port door is mounted to the carriage via an arm extending between the port door and carriage, while the port plate is stationarily mounted to the frame so that rotation of the linear drive screw will vertically translate the port door while the port plate remains stationary.
摘要翻译： 公开了通用接口和传送装置，其可以被配置为索引器或负载端口开启器。 在每个配置中，通用接口和传送设备包括具有中心开口的端口板，并且当设备上没有容器时，端口门装配在中心开口内并密封中心开口。 该装置还包括安装在基座前部并从基座的前部向上延伸的基座和框架。 模块化驱动组件安装在框架的外侧，该驱动组件包括线性驱动螺钉，以及用于旋转线性驱动螺杆的马达和扭矩传递机构。 托架安装在线性驱动螺钉上，使得线性驱动螺杆的旋转导致托架的垂直平移。 在第一构造中，端口板通过在端口板和托架之间延伸的托架安装到托架上，使得线性驱动螺杆的旋转将在端口门保持静止的同时垂直平移端口板。 在第二种构造中，端口门通过在端口门和托架之间延伸的臂安装到托架上，同时端口板固定地安装到框架上，使得线性驱动螺杆的旋转将垂直地平移端口门，同时 端口板保持静止。
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公开(公告)号：US5846338A
公开(公告)日：1998-12-08
申请号：US584374
申请日：1996-01-11
申请人： Anthony C. Bonora , N. Kedarnath , Joshua T. Oen
发明人： Anthony C. Bonora , N. Kedarnath , Joshua T. Oen
CPC分类号： H01L21/67028 , B08B9/093 , B24C1/003 , B24C3/325 , C11D11/0047 , C11D17/0043 , C11D7/02
摘要： A method and apparatus for dry cleaning a semiconductor wafer storage and transport pod. After the pod is located with respect to the cleaning chamber and opened to expose the interior surfaces of the pod to the cleaning chamber, the pod is conditioned in preparation for the cleaning process. The conditioning of the pod includes purging the pod and cleaning chamber with an ionized nitrogen gas to rid the pod and cleaning chamber of airborne contaminants and to neutralize static electrical charges on the pod surfaces. The conditioning process further includes heating the pod surfaces to prevent condensation of moisture and organic contaminants thereon. After the conditioning process, the pod is cleaned with a dry aerosol sprayed onto the pod surfaces. The aerosol spray is comprised of an ionized carbon dioxide/nitrogen (CO.sub.2 /N.sub.2) gas and fine particles of CO.sub.2. The dry cleaning apparatus further includes a circulation subsystem for circulating a fluid through the pod and cleaning chamber to remove airborne particulate, such as those dislodged from the pod surfaces by the CO.sub.2 /N.sub.2 aerosol spray. A filter provided within the path of the circulating fluid removes particulates from the circulating fluid.
摘要翻译： 一种用于干燥半导体晶片存储和运输盒的方法和装置。 在容器相对于清洁室定位并打开以将容器的内表面暴露于清洁室之后，调节容器以准备清洁过程。 荚的调理包括用离子化氮气吹扫荚果和清洁室，以使荚果和清洁室中的空气污染物排出并中和荚果表面上的静电。 调理过程还包括加热荚表面以防止其上的水分和有机污染物的冷凝。 在调理过程之后，将荚用干燥的气雾剂喷洒到荚果表面上。 气溶胶喷雾由电离二氧化碳/氮（CO2 / N2）气体和二氧化碳细颗粒组成。 干洗设备还包括一个循环子系统，用于使流体通过荚和清洁室循环，以除去空气中的颗粒，例如通过CO 2 / N 2气溶胶喷雾从荚果表面移出的颗粒。 设置在循环流体的路径内的过滤器从循环流体中除去微粒。
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公开(公告)号：US5653565A
公开(公告)日：1997-08-05
申请号：US498455
申请日：1995-07-05
IPC分类号： H01L21/677 , B65B69/00
CPC分类号： H01L21/67772 , Y10S414/14
摘要： An adaptor plate for allowing 200 mm SMIF pods carrying one or more semiconductor wafers to be used on an access port of a wafer processing station configured to accept a 300 mm SMIF pod. The adaptor plate has a substantially circular outer circumference conforming substantially in size and shape to the outer circumference of a conventional 300 mm SMIF pod, and a central opening conforming substantially in size and shape to a conventional rectangular 200 mm SMIF pod. The one or more semiconductor wafers are supported on pod door of the pod, and the semiconductor wafers and pod door are lowered through the central opening in the adaptor plate into the wafer processing station. With the adaptor plate supported on the access port, and a cover of the 200 mm SMIF pod supported around the central opening, the access port is entirely covered and entry of contaminants into the processing station through the access port is prevented.
摘要翻译： 用于允许携带一个或多个半导体晶片的200mm SMIF盒的适配器板被用于被配置为接受300mm SMIF盒的晶片处理站的访问端口。 适配器板具有基本上圆形的外圆周，其尺寸和形状基本上与传统的300mm SMIF荚的外圆周相符合，并且基本上具有尺寸和形状的中心开口，与传统的矩形200mm SMIF荚一致。 一个或多个半导体晶片被支撑在容器的荚门上，并且半导体晶片和荚门通过适配器板中的中心开口下降到晶片处理台中。 在适配板支撑在进出口上，并且200 mm SMIF吊舱的盖子围绕中央开口支撑，进入口完全被覆盖，并且防止污染物通过入口进入加工站。
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公开(公告)号：US5611452A
公开(公告)日：1997-03-18
申请号：US182490
申请日：1994-01-14
IPC分类号： B65D85/00 , B65D85/86 , G03F7/20 , H01L21/673 , H01L21/677 , B65D85/30
CPC分类号： H01L21/67376 , G03F1/66 , G03F7/70741 , G03F7/7075 , H01L21/67396 , Y10S414/135 , Y10S414/14
摘要： A transportable, sealable container, for example a Standard Mechanical Interface (or SMIF) pod, including a box and box door. The box has a first sealing surface and the box door has a second sealing surface. A liner, preferably stainless steel, is attached to the inside surface of the box door. An elastomer sealing material is integrally molded to the liner. The sealing material forms a first seal with the first sealing surface and a second seal with the second sealing surface when the box door is moved in a sealing position with respect to the box.
摘要翻译： 可运输，可密封的容器，例如标准机械接口（或SMIF）荚，包括盒子和箱门。 该箱具有第一密封表面，并且箱门具有第二密封表面。 衬垫，优选不锈钢，连接到箱门的内表面。 弹性体密封材料一体地模制到衬套上。 当箱门相对于盒子的密封位置移动时，密封材料与第一密封表面形成第一密封件和与第二密封表面的第二密封件。
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公开(公告)号：US5469963A
公开(公告)日：1995-11-28
申请号：US865297
申请日：1992-04-08
IPC分类号： B65D85/00 , B65D85/86 , G03F7/20 , H01L21/673 , H01L21/677 , B65D85/30
CPC分类号： H01L21/67376 , G03F1/66 , G03F7/70741 , G03F7/7075 , H01L21/67396 , Y10S414/135 , Y10S414/14
摘要： A transportable, sealable container, which has an improved pod liner. The container includes a box, a box door, and a gasket which forms a seal between the box and the box door. The box door has a conductive liner and a conductive path from the conductive liner to ground potential for electrostatic discharge protection. A membrane for isolating the gasket from the interior region of the container is bonded to the gasket and the conductive liner. The membrane may be impervious to gasses to prevent outgassing of the gasket or impervious to particles but not gasses to prevent particulate matter generated by the gasket from entering the interior region of the container.
摘要翻译： 可运输，可密封的容器，其具有改进的荚式衬垫。 容器包括一个盒子，一个盒子门和一个形成盒子和盒子门之间的密封件的衬垫。 箱门具有导电衬垫和从导电衬套到接地电位的静电放电保护的导电路径。 用于将垫圈与容器的内部区域隔离的膜结合到垫圈和导电衬里。 膜可能不渗透气体，以防止垫圈脱气或不渗透颗粒而不是气体，以防止垫圈产生的颗粒物质进入容器的内部区域。
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公开(公告)号：US4995430A
公开(公告)日：1991-02-26
申请号：US354027
申请日：1989-05-19
IPC分类号： H01L21/677 , B65G49/07 , H01L21/673
CPC分类号： H01L21/67373 , Y10S414/14
摘要： A transportable, sealable container, for example a SMIF pod, has a box and a box door. The box has a first sealing surface and the box door has a second sealing surface which forms a seal with the first sealing surface when the box door is moved in a sealing direction with respect to the box. A latch mechanism provided in the box door is operable in two stages. The first stage of operation moves latch members from a retracted position to an extended position, in the retracted position the latch members are contained in the box door to allow movement of the box door with respect to the box, and in the extended position the latch members are adjacent to latch surfaces of the box. Movement from the retracted to the extended position is performed without contact between the latch members and the latch surfaces to avoid any scraping or rubbing action which would create particles in the "clean" interior region of the box. The second stage of operation engages latch members with the latch surfaces to move the box door in the sealing direction; this second stage of the operation is also performed without scraping or rubbing of the latch members and the latch surfaces.
摘要翻译： 可移动，可密封的容器，例如SMIF荚，具有一个盒子和一个盒子门。 盒子具有第一密封表面，并且盒门具有第二密封表面，当盒门相对于盒子的密封方向移动时，第二密封表面与第一密封表面形成密封。 设置在盒门中的闩锁机构可分两个阶段操作。 第一操作阶段将闩锁构件从缩回位置移动到延伸位置，在缩回位置，闩锁构件容纳在箱门中，以允许箱门相对于箱体移动，并且在延伸位置，闩锁 构件与盒的闩锁表面相邻。 从缩回到延伸位置的运动在闩锁构件和闩锁表面之间没有接触的情况下进行，以避免任何刮擦或摩擦作用，这会在盒子的“清洁”内部区域中产生颗粒。 第二阶段的操作使闩锁构件与闩锁表面接合以沿着密封方向移动箱门; 该操作的第二阶段也在不刮擦或摩擦闩锁构件和闩锁表面的情况下进行。
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公开(公告)号：US4918870A
公开(公告)日：1990-04-24
申请号：US864282
申请日：1986-05-16
IPC分类号： H01L21/304 , B24B37/10
CPC分类号： B24B37/102
摘要： A polishing apparatus has a conventional carrier with a plurality of floating subcarriers. The benefits of single wafer polishing are achieved with the economies of multiple wafer polishing by adding the plurality of floating subcarriers to the conventional carrier. Each subcarrier has a single wafer adhered to its underside. Axial freedom is provided to duplicate the dynamics of single wafer polishing. The required axial freedom is obtained by axially loading each subcarrier via a mechanical spring or via pneumatic/hydraulic devices. In two variations, each subcarrier is also allowed auto-rotational freedom. In another two variations, the subcarriers are rotationally driven. In all variations, the wafers adhered to the floating subcarriers are substantially uniformly polished and the total indicated reading of the maximum deviation on the wafer surface is improved.
摘要翻译： 抛光装置具有具有多个浮动副载波的常规载体。 通过将多个浮动副载波添加到常规载体，通过多晶片抛光的经济性实现单晶片抛光的优点。 每个子载波具有粘附到其下侧的单个晶片。 提供轴向自由度以复制单晶片抛光的动力学。 所需的轴向自由度是通过经由机械弹簧或通过气动/液压装置轴向加载每个副载波而获得的。 在两个变型中，每个子载波也允许自动旋转自由度。 在另外两个变型中，副载波被旋转驱动。 在所有变型中，粘附到浮动子载波上的晶片被基本均匀地抛光，并且提高了晶片表面上最大偏差的总体指示读数。
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公开(公告)号：US4724874A
公开(公告)日：1988-02-16
申请号：US840380
申请日：1986-05-01
申请人： Mihir Parikh , Anthony C. Bonora
发明人： Mihir Parikh , Anthony C. Bonora
IPC分类号： H01L21/677 , B65B1/04
CPC分类号： H01L21/67393 , H01L21/67772 , Y10S414/139 , Y10S414/14
摘要： A sealable transportable container for use with processing equipment having a port plate and port door sealably mating to the port plate, the transportable container including a box having an interior space for containing the articles. The box including a conduit for communicating between the interior space and the environment external the box. The conduit including a filter for filtering fluids passing through the conduit. The box including a box top having sealing surfaces and a box door sealably mating with the box top. The port plate also includes sealing surfaces and is sealably mated to the box top. The port door includes a sealing surface and is sealably mated to the port plate. The box door includes a latch for mechanically opening and closing of the box and the port door includes a device for activating the latch.
摘要翻译： 一种用于加工设备的可密封运输的容器，其具有与端口板密封地配合的端口板和端口门，所述可运输容器包括具有用于容纳物品的内部空间的箱体。 该箱包括用于在箱体外部在内部空间与环境之间进行通信的导管。 导管包括用于过滤通过导管的流体的过滤器。 该盒子包括具有密封表面的盒顶部和与盒子顶部密封地配合的盒子门。 端口板还包括密封表面并且与盒顶部密封地配合。 端口门包括一个密封表面，并且密封地配合到端口板。 箱门包括用于机械地打开和关闭盒的闩锁，并且端口门包括用于启动闩锁的装置。
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