-
公开(公告)号：US07737567B2
公开(公告)日：2010-06-15
申请号：US12143197
申请日：2008-06-20
IPC分类号： H01L23/544 , B65H1/00
CPC分类号： H01L23/544 , H01L21/67282 , H01L21/67294 , H01L2223/54426 , H01L2223/54433 , H01L2223/54453 , H01L2223/54473 , H01L2223/5448 , H01L2223/54493 , H01L2924/0002 , Y10S438/975 , H01L2924/00
摘要： A semiconductor substrate is provided. The substrate includes a first surface and an opposing second surface, wherein the first surface includes a marking in a centroid region of the first surface. The marking indicates a location of a center point on the first surface of the semiconductor substrate or identification data unique to the substrate. A system, methods of transporting and marking, and a device for reading the substrate markings are also provided.
摘要翻译： 提供半导体衬底。 衬底包括第一表面和相对的第二表面，其中第一表面包括在第一表面的质心区域中的标记。 标记表示半导体衬底的第一表面上的中心点的位置或衬底独有的识别数据。 还提供了系统，运输和标记的方法以及用于读取基板标记的装置。
-
2.发明授权Ergonomic, variable size, bottom opening system compatible with a vertical interface 失效人体工程学，可变尺寸，底部开口系统兼容垂直界面公开(公告)号：US06220808B1
公开(公告)日：2001-04-24
申请号：US09115526
申请日：1998-07-13
IPC分类号： B65G4907
CPC分类号： H01L21/67772 , H01L21/67775 , Y10S414/139 , Y10S414/14
摘要： A system is described herein including a load port which allows various pod sizes, including 200 mm and 300 mm, add various configurations, including front opening and bottom opening, to operate with a BOLTS interface, or simply with a vertical port on the front end of a process tool in configurations not including the BOLTS interface.
摘要翻译： 本文描述了一种系统，其包括允许各种荚尺寸（包括200mm和300mm）的加载端口，添加包括前开口和底部开口的各种构造，以使用BOLTS接口操作，或者简单地与前端上的垂直端口 在不包括BOLTS接口的配置中的过程工具。
-
公开(公告)号：US20200206601A1
公开(公告)日：2020-07-02
申请号：US16298017
申请日：2019-03-11
IPC分类号： A63F3/02
摘要： A board game including a game board device with a game board surface with a game board pattern. A transparent shield component is configured to cover the game board surface where a frame segment is disposed around a proximate edge of the game board surface and form a section of space between the game board surface and the transparent shield for containing at least one or more magnetic game piece implements. A stylus implement is configured to be operable for generally moving the at least one or more game piece implements from one position to another across the game board surface by magnetically attaching at least one game implement to the stylus implement and sliding the stylus implement across the transparent shield component.
-
公开(公告)号：US06579052B1
公开(公告)日：2003-06-17
申请号：US08891543
申请日：1997-07-11
申请人： Anthony C. Bonora , Raymond S. Martin , Robert Netsch , Joshua T. Oen , Terry Mosier , William J. Fosnight
发明人： Anthony C. Bonora , Raymond S. Martin , Robert Netsch , Joshua T. Oen , Terry Mosier , William J. Fosnight
IPC分类号： B65G100
CPC分类号： H01L21/67161 , H01L21/67769 , Y10S414/14
摘要： A storage, delivery and retrieval system having a rear wall to which is affixed a plurality of shelves capable of supporting one or more wafer-carrying pods. The structure further includes a pair of vertical rails lying in a plane spaced from and substantially parallel to the shelf-supporting wall. The horizontal rail extends between and is translationally mounted to the vertical rails, which horizontal rail supports a gripper capable of movement along the horizontal rail. The movement of the horizontal rail along the vertical rails, and the movement of the gripper along the horizontal rail, allows the gripper to be positioned at any location within an X-Z plane including the storage shelves. The system includes a two-dimensional transport system. That is, all transport of the pods by the system occurs without the pods ever leaving the X-Z plane of the shelves. This feature contributes to the overall small footprint of the system. Additionally, the gripper moves around in the same plane as the pods, and the rails have a small profile and operate directly adjacent the storage shelves. These features further contribute to the storage, delivery and retrieval system according to the present invention.
摘要翻译： 具有后壁的储存，输送和取回系统，其上固定有能够支撑一个或多个晶片承载舱的多个搁架。 该结构还包括位于与支架壁间隔开并基本上平行于支架壁的平面中的一对垂直导轨。 水平导轨在垂直轨道之间延伸并且平行地安装在该横向导轨上，该水平轨道支撑能够沿着水平轨道移动的夹具。 水平导轨沿着垂直导轨的移动以及夹持器沿着水平导轨的运动允许夹具定位在包括存储架的X-Z平面内的任何位置处。 该系统包括二维传输系统。 也就是说，系统的所有荚运输都没有荚果离开架子的X-Z平面。 该功能有助于系统的整体体积小。 此外，夹具在与荚一起在同一平面内移动，并且导轨具有小的轮廓并且直接靠近货架。 这些特征进一步有助于根据本发明的存储，传送和检索系统。
-
公开(公告)号：US5988233A
公开(公告)日：1999-11-23
申请号：US49461
申请日：1998-03-27
IPC分类号： H01L21/677 , H01L21/673 , B65B1/04
CPC分类号： H01L21/67376 , H01L21/67393
摘要： A system for providing uniform, controlled and efficient purge gas flow rates and gas flow patterns for removing contaminants and/or particulates from wafers within a pod. The purge system includes seals at the interfaces between the gas inlet and removal lines to substantially prevent leakage at the interfaces. The system may establish seals at the inlet and outlet without having to use conventional fluid flow pins extending above the support surface. The negative pressure applied at the outlet controls the flow rate through the pod, and the rate at which gas leaves the pod will limit the rate at which gas may enter the pod. In a preferred embodiment, the inlet flow is approximately equal to the outlet flow. With substantially equal inlet and outlet pressures, the purging gas flows through the upper and lower portions of the pod in a substantially uniform flow pattern so that contaminants and particulates are removed evenly from wafers throughout the pod. As an alternative to the normal purge and/or trickle modes of operation, the system may remove a volume of gas from a pod and replace it with a new volume of gas by operating the low pressure source with the high pressure source turned off. Further still, the flow lines may include flow rate control systems that provide purging flow for a predetermined time interval, and thereafter provide a trickle flow as long as the pod is seated on the support surface.
摘要翻译： 一种用于提供均匀，受控和有效的吹扫气体流速和气流模式的系统，用于从荚内的晶片中去除污染物和/或颗粒物。 吹扫系统包括在气体入口和排出管线之间的界面处的密封，以基本上防止在界面处的泄漏。 该系统可以在入口和出口处建立密封件，而不必使用在支撑表面上方延伸的常规流体流动销。 在出口处施加的负压控制通过荚的流速，并且气体离开荚的速率将限制气体可以进入荚的速率。 在优选实施例中，入口流大致等于出口流。 具有基本上相等的入口和出口压力，净化气体以大致均匀的流动方式流过容器的上部和下部，使得污染物和微粒从整个容器中的晶片均匀地除去。 作为正常吹扫和/或滴流操作模式的替代方案，系统可以从容器中去除一定体积的气体，并通过在高压源关闭的情况下操作低压源来替换新的体积的气体。 此外，流动管线可以包括流量控制系统，其提供预定时间间隔的清洗流量，并且此后提供涓流流动，只要荚座位于支撑表面上即可。
-
公开(公告)号：US5944475A
公开(公告)日：1999-08-31
申请号：US730484
申请日：1996-10-11
IPC分类号： B65G49/07 , H01L21/677
CPC分类号： H01L21/67775 , H01L21/67772 , Y10S414/14
摘要： A rotating and translating support assembly for receiving a front-opening pod according to applicable SEMI standards, and thereafter rotating the pod to a desired orientation. In this way, a number of pods may be received at interface ports of a minienvironment, and each of the pods and ports may be angled toward and aligned with a single, 2-arm pick and place robot. In a preferred embodiment of the present invention, the rotating and translating support assembly comprises a plate rotationally and translationally mounted on a shelf extending from the minienvironment adjacent to a front-opening interface port. In one embodiment, the support plate may be mounted on a shaft attached to a rotating assembly, such as for example a worm and drive gear. The rotating assembly may in turn be mounted on a translating assembly, such as for example a carriage riding on a lead screw. The rotating and translating assemblies may be controlled by a host computer, so as to rotate and translate a pod received on the support plate, to align the pod with an interface port which may be provided at an angle with respect to the front of the minienvironment.
摘要翻译： 旋转和平移支撑组件，用于根据适用的SEMI标准接收前开口舱，然后将舱旋转到期望的方位。 以这种方式，可以在微型环境的接口端口处接收多个荚，并且每个荚和端口可以朝向和对准单个2臂拾放和放置机器人。 在本发明的优选实施例中，旋转和平移支撑组件包括旋转地并且平移地安装在从邻近前开口接口端口的小环境延伸的搁架上的板。 在一个实施例中，支撑板可以安装在附接到旋转组件的轴上，例如蜗杆和驱动齿轮。 旋转组件可以依次安装在平移组件上，例如骑在导螺杆上的滑架。 旋转和平移组件可以由主计算机控制，以便旋转和平移容纳在支撑板上的容器，以使该容器与可以相对于小型环境的前部以一定角度提供的接口端口对准 。
-
公开(公告)号：US20090001616A1
公开(公告)日：2009-01-01
申请号：US12143197
申请日：2008-06-20
IPC分类号： H01L23/544 , B65H1/00
CPC分类号： H01L23/544 , H01L21/67282 , H01L21/67294 , H01L2223/54426 , H01L2223/54433 , H01L2223/54453 , H01L2223/54473 , H01L2223/5448 , H01L2223/54493 , H01L2924/0002 , Y10S438/975 , H01L2924/00
摘要： A semiconductor substrate is provided. The substrate includes a first surface and an opposing second surface, wherein the first surface includes a marking in a centroid region of the first surface. The marking indicates a location of a center point on the first surface of the semiconductor substrate or identification data unique to the substrate. A system, methods of transporting and marking, and a device for reading the substrate markings are also provided.
摘要翻译： 提供半导体衬底。 衬底包括第一表面和相对的第二表面，其中第一表面包括在第一表面的质心区域中的标记。 标记表示半导体衬底的第一表面上的中心点的位置或衬底独有的识别数据。 还提供了系统，运输和标记的方法以及用于读取基板标记的装置。
-
公开(公告)号：US06398032B2
公开(公告)日：2002-06-04
申请号：US09073101
申请日：1998-05-05
IPC分类号： B65D8530
CPC分类号： G03F7/7075 , H01L21/67379 , H01L21/67383 , H01L21/67386
摘要： A SMIF pod capable of supporting a cassette at points in the pod located directly over or near a kinematic coupling between the pod and a surface on which the pod is supported. Even if the pod shell warps or otherwise deforms, the three points of contact between the pod and the support surface at the kinematic couplings will always remain at a fixed, controllable and repeatable position. The present invention makes use of this fact by supporting the cassette at or near the three kinematic coupling points. Moreover, the support structure is not affixed to the top or sides of the pod shell. Thus, the position of the cassette, and wafers supported therein, will similarly remain at a fixed, controllable and repeatable position, substantially unaffected by any pod shell deformation which may occur.
摘要翻译： SMIF荚能够在荚果中的点处直接位于或接近荚果与支持荚的表面之间的运动耦合处支撑盒子。 即使荚壳翘曲或其他变形，在运动耦合时，荚和支撑表面之间的三个接触点将始终保持固定，可控和可重复的位置。 本发明通过在三个运动耦合点处或附近支撑盒来利用这一事实。 此外，支撑结构没有固定到荚壳的顶部或侧面。 因此，盒和其中支撑的晶片的位置将类似地保持在固定的，可控制和可重复的位置，基本上不受可能发生的任何荚壳变形的影响。
-
公开(公告)号：US3950024A
公开(公告)日：1976-04-13
申请号：US540525
申请日：1975-01-13
申请人： Raymond S. Martin
发明人： Raymond S. Martin
CPC分类号： A63B67/14
摘要： A device for carrying shuffleboard pucks and similar disc-shaped objects comprising a fixed strip member and a laterally movable strip member held in a common plane by a supporting frame to define a support surface. A plurality of lugs are disposed on both strip members to retain shuffleboard pucks on the aforesaid surface of the carrying device in a planar configuration upon the laterally movable strip member being drawn toward and held in close proximity to the fixed strip member.
-
公开(公告)号：US20100034621A1
公开(公告)日：2010-02-11
申请号：US12432359
申请日：2009-04-29
IPC分类号： H01L21/677
CPC分类号： H01L21/67772 , H01L21/67265 , H01L21/68707
摘要： A port door providing an interface into a processing tool is provided. The port door includes first and second arms pivotably mounted on a top edge of the port door. The first and second arms are configured to extend from a plane of the port door towards a carrier containing substrates for the processing tool. The first arm has an emitter transmitting a beam that is split into a plurality of sub-beams within the first arm. The second arm has a plurality of sensors receiving corresponding sub-beams, wherein one of sub-beams provides information as to a position of an end effector relative to a gap between the substrates in the carrier.
摘要翻译： 提供了一种提供加工工具的接口的端口门。 端口门包括可枢转地安装在端口门的顶部边缘上的第一和第二臂。 第一和第二臂构造成从端口门的平面延伸到包含用于处理工具的基底的载体。 第一臂具有发射器的发射器，该射束分裂成第一臂内的多个子光束。 第二臂具有多个传感器，其接收对应的子光束，其中一个子光束提供关于末端执行器相对于载体中的基板之间的间隙的位置的信息。
-
-
-
-
-
-
-
-
-
搜索结果
15 条记录 (耗时 0.02 秒)
