公开(公告)号：US6135698A

公开(公告)日：2000-10-24

申请号：US346166

申请日：1999-07-01

申请人： Anthony C. Bonora ,  Edward J. Cortez ,  J. Mark DiPaola ,  Robert R. Netsch

发明人： Anthony C. Bonora ,  Edward J. Cortez ,  J. Mark DiPaola ,  Robert R. Netsch

IPC分类号： B65G49/07 ,  H01L21/673 ,  H01L21/677 ,  H01L21/00

CPC分类号： H01L21/67775 ,  Y10S414/137 ,  Y10S414/139 ,  Y10S414/14

摘要： A universal interface and transfer apparatus is disclosed which may be configured either as an indexer or a load port opener. In each configuration, the universal interface and transfer apparatus includes a port plate having a central opening, and a port door fitting within and sealing the central opening when no pod is present on the apparatus. The apparatus further includes a base and a frame mounted on and extending up from a front of the base. A modular drive assembly is mounted within an exterior side of the frame, which drive assembly includes a linear drive screw, and a motor and torque transmission mechanism for rotating the linear drive screw. A carriage is mounted on the linear drive screw such that rotation of the linear drive screw results in vertical translation of the carriage. In a first configuration, the port plate is mounted to the carriage via a bracket extending between the port plate and carriage so that rotation of the linear drive screw will vertically translate the port plate while the port door remains stationary. In a second configuration, the port door is mounted to the carriage via an arm extending between the port door and carriage, while the port plate is stationarily mounted to the frame so that rotation of the linear drive screw will vertically translate the port door while the port plate remains stationary.

摘要翻译： 公开了通用接口和传送装置，其可以被配置为索引器或负载端口开启器。 在每个配置中，通用接口和传送设备包括具有中心开口的端口板，并且当设备上没有容器时，端口门装配在中心开口内并密封中心开口。 该装置还包括安装在基座前部并从基座的前部向上延伸的基座和框架。 模块化驱动组件安装在框架的外侧，该驱动组件包括线性驱动螺钉，以及用于旋转线性驱动螺杆的马达和扭矩传递机构。 托架安装在线性驱动螺钉上，使得线性驱动螺杆的旋转导致托架的垂直平移。 在第一构造中，端口板通过在端口板和托架之间延伸的托架安装到托架上，使得线性驱动螺杆的旋转将在端口门保持静止的同时垂直平移端口板。 在第二种构造中，端口门通过在端口门和托架之间延伸的臂安装到托架上，同时端口板固定地安装到框架上，使得线性驱动螺杆的旋转将垂直地平移端口门，同时 端口板保持静止。