公开(公告)号：US20080094081A1

公开(公告)日：2008-04-24

申请号：US11875655

申请日：2007-10-19

申请人： Kent Nguyen ,  Eric Thompson ,  Hai Tran ,  Kaushal Gangakhedkar ,  Robert Barnett ,  Daniel Toet ,  David Baldwin ,  Steve Aochi ,  Neil Nguyen

发明人： Kent Nguyen ,  Eric Thompson ,  Hai Tran ,  Kaushal Gangakhedkar ,  Robert Barnett ,  Daniel Toet ,  David Baldwin ,  Steve Aochi ,  Neil Nguyen

IPC分类号： G01R31/302

CPC分类号： G09G3/006 ,  G02F2001/136254

摘要： A system performs continuous full linear scan of a flat media. The system includes, in part, a chuck, and at least first, second and third gantries. The chuck is adapted to support the flat media during the test. The first gantry includes at least one linear array of non-contacting sensors that spans the width of the flat media and is adapted to move across an entire length of the flat media. Each of the second and third gantries includes a probe head that spans the width of the flat media and each is adapted to apply an electrical signal to the flat media. Each probe head is further adapted to move along a direction substantially perpendicular to the surface of the flat media during the times when the first gantry is in motion and while test signals are being continuously applied.

摘要翻译： 系统执行平面介质的连续全线性扫描。 该系统部分地包括卡盘以及至少第一，第二和第三门架。 在测试期间卡盘适于支撑平面介质。 第一机架包括至少一个线性阵列的非接触式传感器，它们跨过平坦介质的宽度并且适于在平坦介质的整个长度上移动。 第二和第三门架中的每一个包括跨越平坦介质的宽度的探头，并且每个都适于将电信号施加到平坦介质。 每个探针头还适于在第一台架运动期间以及在连续施加测试信号的同时沿着基本上垂直于平坦介质的表面的方向移动。

公开(公告)号：US07301133B2

公开(公告)日：2007-11-27

申请号：US11314960

申请日：2005-12-20

申请人： Adam Weiss

发明人： Adam Weiss

IPC分类号： G01N21/00 ,  H01J3/14

CPC分类号： G02B21/245 ,  G02B7/282 ,  G02B7/285

摘要： A tracking auto-focus system maintains a microscope pointed at a TFT array continuously in focus so as to eliminate the auto-focusing time that would otherwise be required. The tracking auto-focus system includes, in part, a microscope Z actuator, an auto-focus sensor, an analog-to-digital converter (ADC), a signal conditioner, a digital proportional integrating and differentiating (PID) controller, and a digital-to-analog converter. The actuator adjusts the distance between the microscope's objective lens and the target and includes, in part, an amplifier, a linear motor, and a linear encoder which provides positional feedback. The auto-focus sensor together with the ADC and signal conditioner continuously monitor and detect the distance between the microscope's objective lens and the target and supply the measured distance to the amplifier. The PID controller together with the DAC stabilizes the distance separating the microscope's objective lens and the target to maintain the best focus.

摘要翻译： 跟踪自动对焦系统将保持指向TFT阵列的显微镜连续聚焦，以消除否则将需要的自动对焦时间。 跟踪自动对焦系统部分地包括显微镜Z致动器，自动对焦传感器，模数转换器（ADC），信号调节器，数字比例积分和微分（PID）控制器，以及 数模转换器。 致动器调节显微镜物镜与目标之间的距离，部分包括放大器，线性电机和提供位置反馈的线性编码器。 自动对焦传感器与ADC和信号调节器一起连续监测和检测显微镜物镜与目标之间的距离，并将测量距离提供给放大器。 PID控制器与DAC一起稳定了分离显微镜物镜和目标的距离，以保持最佳对焦。

公开(公告)号：US20070045566A1

公开(公告)日：2007-03-01

申请号：US11468206

申请日：2006-08-29

申请人： Barry McGinley ,  Lloyd Jones ,  Digby Pun ,  Robert Barnett

发明人： Barry McGinley ,  Lloyd Jones ,  Digby Pun ,  Robert Barnett

IPC分类号： G01N23/00

CPC分类号： G01B11/272 ,  G03F9/7011 ,  G03F9/7088

摘要： The position of a substrate's edge is detected using a substrate alignment system that includes, in part, a light source, an optical module adapted to receive a light emanating from the light source to form a multi-dimensional light beam; and an array sensor positioned at a focal plane of the optical module and oriented substantially perpendicular to the sample's edge. The substrate alignment system detects the substrate's edge position as soon as the substrate is loaded and placed within the capture range of the linear array sensor. As long as the substrate's edge position is within the capture range, the substrate does not have to be moved to determine its position relative to the tool's coordinate space. The capture range is substantially larger than the position accuracy required. The sensor array includes a multitude of sensors disposed along one or more rows.

摘要翻译： 使用衬底对准系统来检测衬底边缘的位置，该衬底对准系统部分地包括光源，适于接收从光源发出的光以形成多维光束的光学模块; 以及位于所述光学模块的焦平面处并且基本上垂直于所述样品的边缘定向的阵列传感器。 一旦衬底被加载并放置在线性阵列传感器的捕获范围内，衬底对准系统就检测衬底的边缘位置。 只要基板的边缘位置在捕获范围内，则基板不必被移动以确定其相对于工具坐标空间的位置。 捕获范围远大于所需的位置精度。 传感器阵列包括沿着一行或多行布置的多个传感器。

公开(公告)号：US06866887B1

公开(公告)日：2005-03-15

申请号：US10686367

申请日：2003-10-14

申请人： Xianhai Chen ,  Alexander Nagy

发明人： Xianhai Chen ,  Alexander Nagy

IPC分类号： G02F1/1334 ,  B05D3/12 ,  B05D1/36

CPC分类号： G02F1/1334

摘要： Electro-optic structures are constructed by spin coating water based emulsions or solvent based sensor materials, preferably a solvent-based polymer dispersed liquid crystal (PDLC), onto a substrate under conditions of controlled solvent evaporation. In a particular process, the uniformity of the PDLC coating is achieved by 1) spin coating in a semi-sealed chamber, 2) “converting” a square substrate into round substrate by using a fixture; 3) providing a controllable distance between the substrate and a spin coater top cover; and 4) providing a controllable solvent evaporation rate.

摘要翻译： 在受控溶剂蒸发的条件下，将基于水的乳液或基于溶剂的传感器材料，优选溶剂基聚合物分散液晶（PDLC））旋涂到基底上来构建电光结构。 在一个特定的过程中，PDLC涂层的均匀性通过1）在半密封室中旋涂2）通过使用夹具将正方形衬底“转化”成圆形衬底来实现; 3）在基底和旋涂机顶盖之间提供可控的距离; 和4）提供可控的溶剂蒸发速率。

公开(公告)号：US06840667B2

公开(公告)日：2005-01-11

申请号：US10419709

申请日：2003-04-18

申请人： Jerry Schlagheck ,  Marc Pastor ,  Marc Levesque ,  Alain Cournoyer

发明人： Jerry Schlagheck ,  Marc Pastor ,  Marc Levesque ,  Alain Cournoyer

IPC分类号： G01N25/72

CPC分类号： G01N25/72

摘要： A method for inspecting an object and detecting defects is taught (BGA and Flip-Chip solder joints on a PCB particularly). The method comprises injecting a thermal stimulation on the object; capturing a sequence of consecutive infrared images of the object to record heat diffusion resulting from the heat pulse; comparing the heat diffusion on said object to a reference; and determining whether the object comprises any defects. Also described is a system comprising a mounting for mounting the object; a thermal stimulation module for applying a thermal stimulation to the bottom surface of the object; an infrared camera for capturing infrared images of the object on the top surface of the object to record a change in infrared radiation from the top surface resulting from the thermal stimulation; and a computer for comparing the change in infrared radiation within a region on the top surface to a reference and determining whether the object comprises any defects.

摘要翻译： 教导了一种检测物体和检测缺陷的方法（特别是PCB上的BGA和Flip-Chip焊点）。 该方法包括在物体上注入热刺激; 捕获对象的连续红外图像的序列，以记录由热脉冲引起的热扩散; 将所述物体上的热扩散与参考进行比较; 并确定对象是否包含任何缺陷。 还描述了一种包括用于安装物体的安装件的系统; 用于将热刺激施加到所述物体的底表面的热刺激模块; 用于捕获物体顶表面上的物体的红外图像以记录由热刺激产生的来自顶表面的红外辐射的变化的红外相机; 以及用于将顶表面上的区域中的红外辐射的变化与参考进行比较并确定对象是否包括任何缺陷的计算机。

公开(公告)号：US20040188643A1

公开(公告)日：2004-09-30

申请号：US10396760

申请日：2003-03-24

申请人： Photon Dynamics, Inc.

发明人： Adam Weiss ,  Afsar Saranli ,  Oleksiy Lopatin ,  Alexandre Obotnine

IPC分类号： G01V008/00

CPC分类号： G01N21/95623 ,  G01N21/21 ,  G01N2021/1772 ,  G01N2021/8477 ,  G01N2201/0612 ,  G01N2201/0675

摘要： In an inspection system for planar objects having periodic structures, programmable optical Fourier filtering in the focal plane of a telecentric lens system is used to directly identify physical phenomena indicative of non-periodic defects. Lens assemblies and a coherent optical source are used to generate and observe a spatial Fourier transform of a periodic structure in the Fourier plane. Optical Fourier filtering (OFF) is performed in the focal plane using an electrically programmable and electrically alignable spatial light modulator. The spatial light modulator with high signal to noise ratio is electrically reconfigurable according to a feedback-driven, filter construction and alignment algorithm. The OFF enhances any non-periodic components present in the Fourier plane and final image plane of the object. A system having a plurality of inspection channels provides high-throughput inspection of objects with small non-periodic defects while maintaining high detection sensitivity.

摘要翻译： 在具有周期结构的平面物体的检查系统中，使用远心透镜系统的焦平面中的可编程光学傅立叶滤波来直接识别指示非周期性缺陷的物理现象。 透镜组件和相干光源用于产生和观察傅立叶平面中周期性结构的空间傅立叶变换。 光学傅立叶滤波（OFF）在焦平面上使用电可编程且电可对准的空间光调制器执行。 具有高信噪比的空间光调制器根据反馈驱动的滤波器构造和对准算法进行电可重构。 OFF增强存在于对象的傅立叶平面和最终图像平面中的任何非周期性分量。 具有多个检查通道的系统提供具有小的非周期缺陷的物体的高通量检查，同时保持高检测灵敏度。

公开(公告)号：US5543729A

公开(公告)日：1996-08-06

申请号：US758884

申请日：1991-09-10

申请人： Francois J. Henley

发明人： Francois J. Henley

IPC分类号： G01M11/00 ,  G01N21/88 ,  G01N21/956 ,  G01R31/00 ,  G01R31/308 ,  G02F1/13 ,  G02F1/1345 ,  G09F9/00 ,  G09G3/00 ,  H01L21/66 ,  H01R13/24 ,  G01R19/00

CPC分类号： G09G3/006 ,  G01R31/308 ,  H01R13/2414

摘要： An elastic member is wrapped with wire or a wire mesh to provide uniform electrical contact with a substrate. The elastic member is compressible, allowing pressure to be applied, and a firmer contact established without damaging the contact points on the substrate.

摘要翻译： 弹性构件用线或丝网包裹以提供与基底的均匀电接触。 弹性构件是可压缩的，允许施加压力，并且建立更坚固的接触而不损坏基底上的接触点。

公开(公告)号：US5504438A

公开(公告)日：1996-04-02

申请号：US757467

申请日：1991-09-10

申请人： Francois J. Henley

发明人： Francois J. Henley

IPC分类号： G01M11/00 ,  G01N17/04 ,  G01N21/88 ,  G01N21/956 ,  G01R31/00 ,  G02F1/13 ,  G06T1/00 ,  G09F9/00 ,  G09G3/00 ,  G01R31/28

CPC分类号： G09G3/006 ,  G01N2021/9513

摘要： A method for testing liquid crystal display substrates with use of a testing apparatus which includes an electro-optical element. The test protocol includes applying a voltage between the circuitry on the liquid crystal display and the electro-optical element, irradiating the electro-optical element, evaluating performance under a variety of voltage conditions, and evaluating the corresponding response characteristics of the electro-optical element. The response characteristics are recorded by a plurality of CCD devices, each recording a different section of the panel. The changes in the magnitude of impressed voltage and polarity are synchronized with the recording timing. The recorded data is stored as frame memory which is subjected to frame by frame analysis to obtain quantitative information regarding the status of defective pixels. The resulting data is synthesized to obtain a composite performance picture of the entire panel which can be displayed as a unit to quickly obtain quantitative information regarding the overall defect presence. The technique is independent of the screen size, since the final large size screen image can be constructed from a plurality of smaller screens.

摘要翻译： 一种使用包括电光元件的测试装置测试液晶显示器基板的方法。 测试协议包括在液晶显示器上的电路与电光元件之间施加电压，照射电光元件，评估各种电压条件下的性能，以及评估电光元件的相应响应特性 。 响应特性由多个CCD器件记录，每个CCD器件记录面板的不同部分。 外加电压和极性的幅度变化与记录时序同步。 记录的数据被存储为帧存储器，其经过逐帧分析以获得关于缺陷像素的状态的定量信息。 合成所得到的数据以获得整个面板的复合性能图像，其可以作为单元显示，以快速获得关于整体缺陷存在的定量信息。 该技术独立于屏幕尺寸，因为可以从多个较小的屏幕构建最终的大尺寸屏幕图像。

公开(公告)号：US5459410A

公开(公告)日：1995-10-17

申请号：US46546

申请日：1993-04-13

申请人： Francois J. Henley

发明人： Francois J. Henley

IPC分类号： G02F1/13 ,  G02F1/1343 ,  G02F1/1362 ,  G09G3/00 ,  G01R31/02

CPC分类号： G09G3/006 ,  G02F1/136259 ,  G02F1/136213 ,  G02F2001/136254 ,  G09G2330/10 ,  Y10S345/904

摘要： LCD panels are inspected in-process to measure pixel decay, turn-on time and parasitic capacitance and/or identify pixel defects and line defects. Prior to final assembly, panels identified as having sufficiently few repairable defects are repaired. Line defects may be repaired. Further pixel defects may be repaired when redundant structures are included by splicing out the defective TFT or storage capacitor and splicing in a redundant, built-in TFT or storage capacitor. The inspection and repair systems are linked through a repair file. The inspection system identifies each defect by type and location and includes such information in the repair file. The repair system accesses such file and follows a prescribed repair method for a given type of defect at the location of such defect. The inspection system includes an automated non-contact voltage imaging system. The repair system includes lasers and means for repairing defects by adding metallization.

摘要翻译： 液晶面板在过程中进行检查，以测量像素衰减，导通时间和寄生电容和/或识别像素缺陷和线路缺陷。 在最终组装之前，确定具有足够少的可修复缺陷的面板被修复。 线路缺陷可能被修复。 当通过拼接缺陷TFT或存储电容器并在冗余的内置TFT或存储电容器中拼接冗余结构时，可能会修复其他像素缺陷。 检查和维修系统通过修复文件链接。 检查系统根据类型和位置识别每个缺陷，并在修复文件中包括这些信息。 修复系统访问这样的文件，并且在这种缺陷的位置遵循给定类型的缺陷的规定的修复方法。 检查系统包括自动非接触电压成像系统。 修复系统包括激光器和通过添加金属化来修复缺陷的装置。

公开(公告)号：US5406213A

公开(公告)日：1995-04-11

申请号：US758895

申请日：1991-09-10

申请人： Francois J. Henley

发明人： Francois J. Henley

IPC分类号： G01M11/00 ,  G01N21/88 ,  G01N21/956 ,  G01R31/00 ,  G02F1/13 ,  G02F1/1362 ,  G09F9/00 ,  G09G3/00 ,  G01R31/28

CPC分类号： G09G3/006 ,  G02F1/1309 ,  G02F2001/136254

摘要： An instrument for testing defects on active matrix liquid crystal display base plates used for liquid crystal display panels. The instrument includes a testing device having an electro-optical element and active matrix liquid crystal display base plate, a light source for emitting light to said base plate, a light guide for guiding light perpendicular to said electro-optical element, and a photo-receiver for receiving light reflected from the electro-optical element. The lighting device has a halogen light, a filter, and other elements, and the electro-optical element is equipped with an optically reflective part made of a dielectric multi-layer coating. The light guide has a translucent mirror incorporated inside a transparent vessel and is positioned at an angle with respect to the optical axis. The instrument can also detect various defects in active matrix liquid crystal display base plates with high accuracy.

摘要翻译： 用于液晶显示面板的有源矩阵液晶显示基板的缺陷检测仪器。 该仪器包括具有电光元件和有源矩阵液晶显示基板的测试装置，用于向所述基板发射光的光源，用于引导垂直于所述电光元件的光的光导， 用于接收从电光元件反射的光的接收器。 照明装置具有卤素灯，过滤器等元件，并且电光元件配备有由电介质多层涂层制成的光反射部件。 导光体具有并入透明容器内的半透明镜，并且相对于光轴成一定角度。 仪器还可以高精度检测有源矩阵液晶显示基板的各种缺陷。