公开(公告)号：US20040188643A1

公开(公告)日：2004-09-30

申请号：US10396760

申请日：2003-03-24

Applicant: Photon Dynamics, Inc.

Inventor： Adam Weiss ,  Afsar Saranli ,  Oleksiy Lopatin ,  Alexandre Obotnine

IPC: G01V008/00

CPC classification number: G01N21/95623 ,  G01N21/21 ,  G01N2021/1772 ,  G01N2021/8477 ,  G01N2201/0612 ,  G01N2201/0675

Abstract: In an inspection system for planar objects having periodic structures, programmable optical Fourier filtering in the focal plane of a telecentric lens system is used to directly identify physical phenomena indicative of non-periodic defects. Lens assemblies and a coherent optical source are used to generate and observe a spatial Fourier transform of a periodic structure in the Fourier plane. Optical Fourier filtering (OFF) is performed in the focal plane using an electrically programmable and electrically alignable spatial light modulator. The spatial light modulator with high signal to noise ratio is electrically reconfigurable according to a feedback-driven, filter construction and alignment algorithm. The OFF enhances any non-periodic components present in the Fourier plane and final image plane of the object. A system having a plurality of inspection channels provides high-throughput inspection of objects with small non-periodic defects while maintaining high detection sensitivity.

Abstract translation: 在具有周期结构的平面物体的检查系统中，使用远心透镜系统的焦平面中的可编程光学傅立叶滤波来直接识别指示非周期性缺陷的物理现象。 透镜组件和相干光源用于产生和观察傅立叶平面中周期性结构的空间傅立叶变换。 光学傅立叶滤波（OFF）在焦平面上使用电可编程且电可对准的空间光调制器执行。 具有高信噪比的空间光调制器根据反馈驱动的滤波器构造和对准算法进行电可重构。 OFF增强存在于对象的傅立叶平面和最终图像平面中的任何非周期性分量。 具有多个检查通道的系统提供具有小的非周期缺陷的物体的高通量检查，同时保持高检测灵敏度。

公开(公告)号：US20040109598A1

公开(公告)日：2004-06-10

申请号：US10688326

申请日：2003-10-17

Applicant: Photon Dynamics, Inc.

Inventor： Adam Weiss ,  Afsar Saranli

IPC: G06K009/00

CPC classification number: G01N21/95607 ,  G01N2021/9513 ,  G06T7/001

Abstract: A concurrent low resolution/high resolution parallel scanning system and method are provided as an improvement in the scanning process of an inspection system for planar objects, such as large flat plates employed in panel displays, whereby lower resolution defect detection efficiently overlaps and parallels higher resolution defect review and classification stages in which defects are automatically defined and resolved. Although the invention is a valid solution for the more general problem of optically inspecting the surface of a flat article for defects, the invention is particularly useful for detecting pattern defects on large glass plates deposited with integrated-circuits for forming LCD flat panel displays.

Abstract translation: 提供并行的低分辨率/高分辨率并行扫描系统和方法作为平面物体的检查系统的扫描过程的改进，例如在面板显示器中使用的大平板，由此较低分辨率缺陷检测有效地重叠并且并行更高分辨率 缺陷审查和分类阶段，自动定义和解决缺陷。 虽然本发明是用于光学检查扁平制品的表面以获得缺陷的更普遍的问题的有效解决方案，但是本发明特别适用于在沉积有用于形成LCD平板显示器的集成电路的大型玻璃板上检测图案缺陷。

公开(公告)号：US20040086166A1

公开(公告)日：2004-05-06

申请号：US10439991

申请日：2003-05-16

Applicant: Photon Dynamics, Inc.

Inventor： Adam Weiss ,  Afsar Saranli

IPC: G06K009/00

CPC classification number: G01N21/95607 ,  G01N2021/9513 ,  G06T7/001

Abstract: A concurrent low resolution/high resolution parallel scanning system is provided as an improvement in the scanning process of an inspection system for planar objects, such as large flat plates employed in panel displays, whereby lower resolution defect detection efficiently overlaps and parallels higher resolution defect review and classification stages in which defects are automatically defined and resolved. Although the invention is a valid solution for the more general problem of optically inspecting the surface of a flat article for defects, the invention is particularly useful for detecting pattern defects on large glass plates deposited with integrated-circuits for forming LCD flat panel displays.

Abstract translation: 提供并行的低分辨率/高分辨率并行扫描系统作为用于平面物体的检查系统的扫描过程的改进，例如面板显示器中使用的大平板，其中较低分辨率缺陷检测有效地重叠并且并行更高分辨率缺陷检查 以及自动定义和解决缺陷的分类阶段。 虽然本发明是用于光学检查扁平制品的表面以获得缺陷的更普遍的问题的有效解决方案，但是本发明特别适用于在沉积有用于形成LCD平板显示器的集成电路的大型玻璃板上检测图案缺陷。