公开(公告)号：US4560879A

公开(公告)日：1985-12-24

申请号：US532899

申请日：1983-09-16

Applicant: Chung P. Wu ,  Frank Kolondra

Inventor： Chung P. Wu ,  Frank Kolondra

IPC: H01J37/05 ,  H01J37/317 ,  G21K5/00

CPC classification number: H01J37/3171 ,  H01J37/05 ,  H01J2237/0213 ,  H01J2237/022

Abstract: An ion implantation apparatus and method are disclosed for reducing contamination of doubly-charged ions by singly-charged ions. A liner, with a grooved or smooth surface, formed of beryllium or graphite reduces secondary electron scattering into the ion beam. Solid red phosphorus reduces the operating vacuum thereby reducing contamination.

Abstract translation: 公开了一种用于减少单电荷离子对双电荷离子的污染的离子注入装置和方法。 由铍或石墨形成的带有凹槽或光滑表面的衬垫减少了二次电子散射到离子束中。 固体红磷降低了操作真空度，从而减少了污染。

公开(公告)号：US4551625A

公开(公告)日：1985-11-05

申请号：US513605

申请日：1983-07-14

Applicant: Burkhard Lischke ,  Erich Plies

Inventor： Burkhard Lischke ,  Erich Plies

IPC: G01N23/22 ,  G01R19/155 ,  G01R31/302 ,  H01J37/05 ,  H01J37/10 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J49/48

CPC classification number: H01J37/244 ,  H01J37/05 ,  H01J37/10 ,  H01J37/266 ,  H01J49/488 ,  H01J2237/2443

Abstract: An arrangement for particle beam measurement utilizes, an objective for the imaging of primary probe particles on a specimen and a spectrometer for the detection of secondary particles. The arrangement also utilizes the superposition of the electric field of the spectrometer with the electric field of the objective lens to render possible an effective increase of the probe current and/or an improved potential resolution. A portion of the field of the objective is provided for the focusing of the secondary particles onto an electrode for determining energy selection.

Abstract translation: 用于粒子束测量的布置利用了用于在样本上成像初级探针颗粒的目标和用于检测次级颗粒的光谱仪。 该装置还利用光谱仪的电场与物镜的电场的叠加使得探针电流的有效增加和/或改进的电位分辨率成为可能。 目标场的一部分用于将二次粒子聚焦到用于确定能量选择的电极上。

公开(公告)号：US4540885A

公开(公告)日：1985-09-10

申请号：US513762

申请日：1983-07-14

Applicant: Erich Plies ,  Reinhard Weyl ,  Burkhard Lischke

Inventor： Erich Plies ,  Reinhard Weyl ,  Burkhard Lischke

IPC: G01N23/22 ,  G01R19/155 ,  G01R31/302 ,  H01J37/05 ,  H01J37/10 ,  H01J37/244 ,  H01J37/26 ,  H01J37/28 ,  H01J49/48 ,  H01J49/44

CPC classification number: H01J37/10 ,  H01J37/05 ,  H01J37/266 ,  H01J49/488

Abstract: An apparatus for the potential measuring technique has an objective lens for focusing primary electrons onto an object, and also has a spectrometer for the energy selection of secondary electrons to provide an improvement of the quantitative potential measurement on printed conductors of integrated microelectronic components with improved local resolution, higher probe current, and improved potential resolution. The objective lens is a magnetic lens in which the lens field lies largely outside the lens body, and the spectrometer is an electrostatic retarding field spectrometer arranged in the magnetic field of the lens.

Abstract translation: 用于电位测量技术的装置具有用于将一次电子聚焦到物体上的物镜，并且还具有用于二次电子的能量选择的光谱仪，以提供具有改进的局部的集成微电子部件的印刷导体上的定量电位测量的改进 分辨率，更高的探针电流和改进的电位分辨率。 物镜是其中透镜场大部分位于透镜体外部的磁性透镜，并且光谱仪是布置在透镜的磁场中的静电延迟场光谱仪。

公开(公告)号：US4464571A

公开(公告)日：1984-08-07

申请号：US409630

申请日：1982-08-19

Applicant: Erich Plies

Inventor： Erich Plies

IPC: G01R31/26 ,  G01Q30/02 ,  G01R31/302 ,  G01R31/305 ,  H01J37/05 ,  H01J37/252 ,  H01J49/44 ,  H01L21/66

CPC classification number: H01J37/05 ,  G01R31/305

Abstract: An improved electrostatic opposing field spectrometer of the type which may be utilized for undertaking measurements with an electron beam probe has an extraction electrode and an opposing field electrode and two spherical networks for generating a spherically symmetrical opposing field, the lower spherical network being at substantially the same potential as the extraction electrode and the upper spherical network being at a potential in the range of approximately 15 through -15 volts. The spherical network permit transmission of a large solid angle distribution of the secondary electrons emitted at the test point on the surface of a specimen. The centers of both spherical networks may be coincident at an imaginary source point.

Abstract translation: 可用于用电子束探针进行测量的改进的静电相对场光谱仪具有提取电极和相对的场电极以及用于产生球对称的相对场的两个球形网络，所述下球面网络基本上位于 与提取电极和上球面网络相同的电位处于大约15至-15伏范围内的电位。 球形网络允许传输在试样表面上的试验点发射的二次电子的大的立体角分布。 两个球形网络的中心可以在虚拟源点重合。

公开(公告)号：US4246479A

公开(公告)日：1981-01-20

申请号：US8691

申请日：1979-01-30

Applicant: Kannampuzha G. Gopinathan

Inventor： Kannampuzha G. Gopinathan

IPC: G01Q30/02 ,  G01Q30/04 ,  H01J37/05 ,  H01J40/00 ,  G01N23/00

CPC classification number: H01J37/05

Abstract: An element for the retarding field analysis of the energy distribution of electrons is constructed from three or more similar planar grids superimposed in parallel planes. The element is arranged for rigid location with respect to the beam axis of a scanning electron microscope so that the beam passes through aligned apertures in the grids and so that secondary electrons produced from a specimen are collected by the element. In use in the electron microscope the potential of the retarding grid is automatically maintained at a level such that the ratio of electron collection at high and low energies is held constant. The potential so determined can be related to the potential of the surface at the point of origin of the electrons.

Abstract translation: 用于电子能量分布的延迟场分析的元件由叠加在平行平面中的三个或更多个相似的平面网格构成。 元件布置成相对于扫描电子显微镜的光束轴线刚性定位，使得光束通过格栅中的对准的孔，并且使得由样品产生的二次电子被元件收集。 在电子显微镜使用中，延迟栅格的电位自动保持在使得高和低能量下的电子收集率保持恒定的水平。 如此确定的电位可能与电子原点处的表面的电位有关。

公开(公告)号：US4044254A

公开(公告)日：1977-08-23

申请号：US715847

申请日：1976-08-19

Applicant: Burkhard Krisch ,  Moriz V. Rauch

Inventor： Burkhard Krisch ,  Moriz V. Rauch

IPC: H01J37/26 ,  H01J37/05 ,  H01J37/147

CPC classification number: H01J37/05 ,  H01J37/1474

Abstract: A scanning corpuscular-beam transmission-type microscope including an energy analyzer below the specimen and a first deflection system disposed between the beam source and the specimen. A second deflection system is disposed between the specimen and the energy analyzer for redirecting the beam to the input aperture of the energy analyzer and is rotated with respect to the first deflection system to compensate for rotation of the specimen image by the objective lens of the microscope.

Abstract translation: 扫描型红外光束透射型显微镜，其包括在试样下方的能量分析装置和设置在光束源与试样之间的第一偏转系统。 第二偏转系统设置在样本和能量分析器之间，用于将光束重定向到能量分析仪的输入孔，并且相对于第一偏转系统旋转以补偿由显微镜的物镜显示的标本图像的旋转 。

公开(公告)号：US3979590A

公开(公告)日：1976-09-07

申请号：US562965

申请日：1975-03-28

Applicant: Willem Hendrik Jan Andersen

Inventor： Willem Hendrik Jan Andersen

IPC: G01N23/225 ,  G01Q30/02 ,  G01Q30/04 ,  H01J37/05 ,  H01J37/153 ,  H01J37/252 ,  H01J37/26

CPC classification number: H01J37/05 ,  H01J37/153

Abstract: A Wien filter, used as an energy analyzer in an electron microscope, includes a four-pole lens which enlarges the dispersion of electrons in one direction. By addition of six-pole lenses and an additional four-pole lens, correction can be made for opening errors in the electron beam to be analyzed.

Abstract translation: 在电子显微镜中用作能量分析仪的维恩滤波器包括扩大电子在一个方向上的分散的四极透镜。 通过添加六极透镜和附加的四极透镜，可以对要分析的电子束中的开路误差进行校正。

公开(公告)号：US3631238A

公开(公告)日：1971-12-28

申请号：US3631238D

申请日：1969-11-17

Applicant: NORTH AMERICAN ROCKWELL

Inventor： MACDONALD NOEL C

IPC: G01Q90/00 ,  H01J37/05 ,  H01J37/26 ,  H01J49/48 ,  G01N23/00

CPC classification number: H01J37/05 ,  H01J37/266 ,  H01J49/482

Abstract: A method and apparatus for quantitatively measuring potential on surfaces with submicron spatial resolution employs conventional scanning electron microscope and electron energy analyzer to obtain potential measurements and, in effect, a map of potential at different points on a surface such as a semiconductor or integrated circuit device. A micrograph of the surface to be analyzed is employed to locate points at which potential is to be measured. An Auger electron spectrum including several Auger peaks characteristic of secondary electrons emitted from a point of known potential on which the electron beam of the microscope impinges is first obtained. Then either the potential on the surface at that point is changed or the electron beam is moved to a second point and a second Auger electron spectrum is obtained. The magnitude of the shift in corresponding Auger peaks from the first spectrum to the second spectrum constitutes a direct quantitative measure of the potential of the second point with respect to the potential of the first point.

公开(公告)号：US3619607A

公开(公告)日：1971-11-09

申请号：US3619607D

申请日：1970-06-24

Applicant: TAKEO ICHINOKAWA

Inventor： ICHINOKAWA TAKEO

IPC: G01Q20/02 ,  G01Q30/02 ,  H01J29/84 ,  H01J37/05 ,  H01J49/46 ,  H01J37/26

CPC classification number: H01J49/46 ,  H01J29/845 ,  H01J37/05

Abstract: Apparatus for analyzing the energy of an electron beam in an electron microscope includes a cylindrical lens of the magnetic field type inserted additionally or in place of a conventional intermediate lens, and a slit member cooperating with said cylindrical lens, said cylindrical lens being excited under preselected conditions.

公开(公告)号：US20250157779A1

公开(公告)日：2025-05-15

申请号：US18506957

申请日：2023-11-10

Applicant: FEI Company

Inventor： Radovan Vašina ,  Bohuslav Sed'a ,  Mostafa Maazouz ,  Lukáš Král

IPC: H01J37/05 ,  H01J37/04 ,  H01J37/10 ,  H01J37/147

Abstract: Charged-particle beam (CPB) optical systems can include a beam acceptance aperture plate defining a first acceptance aperture and at least one second acceptance aperture, situated with respect to a CPB source so that a first CPB is transmitted by the first acceptance aperture and a second CPB is transmitted by a second acceptance aperture. A CPB lens is situated to receive the first and second CPBs from the beam acceptance aperture plate and direct the first and second CPBs towards a filter aperture plate to transmit selected spectral portion of the second CPB. The selected spectral component of the first CPB can be selectively directed to a workpiece by a beam steering deflector along the same axis. In some examples, the first and second CPBs have different beam currents and only one is directed to a workpiece.