公开(公告)号：US06927711B2

公开(公告)日：2005-08-09

申请号：US10797080

申请日：2004-03-11

申请人： Noboru Endo ,  Takao Tsuruhara

发明人： Noboru Endo ,  Takao Tsuruhara

IPC分类号： G01L9/00 ,  G01D3/02 ,  G01D3/028 ,  G01D5/12 ,  G01L19/08 ,  G01R27/08 ,  G01R33/02 ,  H03L1/02 ,  H03M1/00

CPC分类号： G01D3/028 ,  G01L19/083

摘要： The present invention relates to a sensor apparatus capable of outputting an accurate sensor signal irrespective of a variation of power supply voltage. In the sensor apparatus, when an A/D conversion circuit produces and outputs digital data, a switch circuit is placed into a first switching condition so that a constant voltage is applied from a constant-voltage circuit to an oscillation circuit, and a stabilized oscillation frequency is outputted from the oscillation circuit to the A/D conversion circuit. Thus, even if a power supply voltage varies, the A/D conversion circuit carries out sampling processing on analog data on the basis of the stabilized oscillation frequency from the oscillation circuit to produce and output the digital data.

摘要翻译： 本发明涉及能够输出精确的传感器信号而与电源电压的变化无关的传感器装置。 在传感器装置中，当A / D转换电路产生并输出数字数据时，将开关电路置于第一开关状态，使得从恒压电路向振荡电路施加恒定电压，并且稳定振荡 频率从振荡电路输出到A / D转换电路。 因此，即使电源电压变化，A / D转换电路基于来自振荡电路的稳定振荡频率对模拟数据进行采样处理，以产生并输出数字数据。

公开(公告)号：US06925478B2

公开(公告)日：2005-08-02

申请号：US09739331

申请日：2000-12-19

申请人： Alireza Jabbari ,  David P Stumbo ,  Michael Sogard

发明人： Alireza Jabbari ,  David P Stumbo ,  Michael Sogard

IPC分类号： G01D3/028 ,  H03H17/02 ,  H03H17/06 ,  G06F17/10

CPC分类号： H03H17/0294

摘要： A system and methods for generating a variable rate filtered output using synchronous filters having the same filter sampling time, that avoids complexities of asynchronous filters. A system employs multiple filters that are staggered in time and set so that the output of one of the multiple filters is available whenever a secondary process requires state information. In another embodiment, the synchronous filters are programmable so as to change the filter sampling time. This configuration is possible when it is known that the prescribed time interval of the secondary process is longer than the filter sampling time and the prescribed time interval is an integer multiple of the filter sampling time. By using programmable filters, the number of filters required to accommodate a certain prescribed time interval can be minimized. Whether a system employs multiple non-programmable filters staggered in time or programmable filters, the invention achieves producing a variable rate filtered output while using synchronous filters. Thus, computationally intensive and complicated variable rate filters can be avoided while minimizing processor requirements. In another aspect of the invention, the inventive method of generating a variable rate filtered output is employed in a lithography system to control the movements of various components therein. In one embodiment, the filtered outputs are used to estimate the relative positions of the reticle and the wafer. With the variable rate feature, the lithography system can dynamically accommodate for the noise arising from component movements and other sources in the wafer exposure process.

摘要翻译： 使用具有相同滤波器采样时间的同步滤波器来生成可变速率滤波输出的系统和方法，避免异步滤波器的复杂性。 系统采用多个过滤器，这些过滤器在时间上交错设置，使得当辅助过程需要状态信息时，多个过滤器之一的输出可用。 在另一个实施例中，同步滤波器是可编程的，以便改变滤波器采样时间。 当已知二次处理的规定时间间隔长于滤波器采样时间并且规定的时间间隔是滤波器采样时间的整数倍时，这种配置是可能的。 通过使用可编程滤波器，可以最小化容纳特定规定时间间隔所需的滤波器数量。 无论系统采用多个在时间上交错的非可编程滤波器或可编程滤波器，本发明实现了在使用同步滤波器时产生可变速率滤波输出。 因此，可以避免计算密集型和复杂的可变速率滤波器，同时最小化处理器要求。 在本发明的另一方面，在光刻系统中采用产生可变速率滤波输出的本发明方法来控制其中各种部件的移动。 在一个实施例中，滤波的输出用于估计标线片和晶片的相对位置。 利用可变速率特征，光刻系统可以动态地适应晶片曝光过程中由元件移动引起的噪声和其他来源。

公开(公告)号：US06900756B2

公开(公告)日：2005-05-31

申请号：US10468377

申请日：2002-02-21

申请人： Neil A Salmon

发明人： Neil A Salmon

IPC分类号： G01K1/14 ,  G01D3/028 ,  G01J5/46 ,  G01K11/00 ,  G01S3/02

CPC分类号： G01K15/00 ,  G01K11/006

摘要： Radiometers detect radio wavelength electromagnetic radiation and typically have an antenna (16), an amplifier (18) and a detector (20). All three of these components have response characteristics that may be dependent on temperature, and in the case of systems using radiometer arrays dependent upon temperatures throughout the system. Different temperatures across a multi-channel antenna and differential channel temperature response can result in poor image quality from imaging radiometers. Resolution of a linear array of detector horns is limited by the size of the horns. An imaging radiometer (10) uses a focussing polariser (36), a quarter wave plate (32), a rotating inclined disk (28), and a detector feed array (16) to perform a conical scan, and compensates for variations in operating temperature of a radiometer using one or more of a variety of techniques including calibrating channels relative to each other, calibrating channels using reference temperatures in situo, and calibrating channels using temperature response predictions stored in the radiometer signal processor (22). Aspects of the invention also optimise image resolution, image quality and allow calibration.

摘要翻译： 辐射计检测无线电波长电磁辐射，并且通常具有天线（16），放大器（18）和检测器（20）。 这些组件中的所有三个具有可能依赖于温度的响应特性，并且在使用依赖于整个系统中的温度的辐射计阵列的系统的情况下。 多通道天线的不同温度和差分通道温度响应可能会导致成像辐射计的图像质量差。 检测器喇叭的线性阵列的分辨率受喇叭尺寸的限制。 成像辐射计（10）使用聚焦偏振器（36），四分之一波片（32），旋转倾斜盘（28）和检测器馈送阵列（16）来执行圆锥扫描，并且补偿操作中的变化 使用一种或多种各种技术的温度，包括相对于彼此校准通道，使用原位参考温度来校准通道，以及使用存储在辐射计信号处理器（22）中的温度响应预测校准通道。 本发明的方面还优化图像分辨率，图像质量并允许校准。

公开(公告)号：US20050073794A1

公开(公告)日：2005-04-07

申请号：US10912678

申请日：2004-08-05

申请人： Rasmus Rettig

发明人： Rasmus Rettig

IPC分类号： H04B15/00 ,  G01D3/028 ,  G01D5/12 ,  G01D5/24 ,  G01L1/00 ,  G01L9/00 ,  G01L9/04 ,  G12B17/00 ,  H01H47/00

CPC分类号： G01L9/04 ,  G01D5/24 ,  Y10T307/735

摘要： The method and circuit arrangement both minimize stray electromagnetic interference in an electronic circuit, in which symmetric measurement signals are evaluated. Both inputs (InP, InM) of an evaluation circuit (2) are provided with a bank of switchable capacitors (Cz) individually or in groups, which are connectable with the respective inputs. A predetermined interference signal is applied to the respective inputs (InP, InM) and individual ones or groups of the switchable capacitors (Cz) are selectively connected with the inputs (InP, InM) so that a maximum suppression of the predetermined interference signal can take place. Data regarding the capacitance values selected during the suppression of the predetermined interference signal is stored in the memory (3′) of a switching controller (3) during selective switching so that the same adjustment occurs automatically during subsequent operation cycles of the circuit arrangement.

摘要翻译： 该方法和电路装置可以最小化电子电路中的杂散电磁干扰，其中评估对称的测量信号。 评估电路（2）的两个输入（InP，InM）分别或分组地设置有可与各个输入连接的一组可切换电容器（Cz）。 预定的干扰信号被施加到相应的输入（InP，InM），并且可切换电容器（Cz）的各个或多个组选择性地与输入（InP，InM）连接，使得可以采取预定干扰信号的最大抑制 地点。 关于在抑制预定干扰信号期间选择的电容值的数据在选择性切换期间被存储在开关控制器（3）的存储器（3'）中，使得在电路装置的后续操作周期期间自动进行相同的调整。

公开(公告)号：US6155105A

公开(公告)日：2000-12-05

申请号：US283239

申请日：1999-04-01

申请人： Martin Klenk ,  Michael Lehner ,  Andrea Lohmann

发明人： Martin Klenk ,  Michael Lehner ,  Andrea Lohmann

IPC分类号： G01P3/488 ,  G01B7/00 ,  G01B7/30 ,  G01D3/00 ,  G01D3/028 ,  G01M15/11 ,  G01P21/02 ,  G01M15/00

CPC分类号： G01M15/11 ,  G01P21/02

摘要： The invention is directed to a method for high-resolution rpm detection in a multicylinder internal combustion engine having a crankshaft. Segment times (ts) are detected in which the crankshaft of the engine passes through predetermined angular regions. First corrective values are formed during overrun operation and logically coupled to the segment times (ts) so that deviations of the segment times (ts) of different segments are compensated in the overrun operation. Second corrective values outside of the overrun operation are determined on the basis of the corrected segment times and logically coupled to at least one of the corrected segment times and further processed segment times so that the deviations of the corrected segment times or the further processed segment times are compensated with each other during misfire-free operation.

摘要翻译： 本发明涉及一种具有曲轴的多缸内燃机中的高分辨率转速检测方法。 检测到发动机的曲轴通过预定角度区域的段时间（ts）。 在超速运行期间形成第一校正值，并逻辑耦合到段时间（ts），以便在超速运行中补偿不同段的段时间（ts）的偏差。 基于校正的段时间确定超载操作之外的第二校正值，并且与校正的段时间和进一步处理的段时间中的至少一个进行逻辑耦合，使得校正段时间或进一步处理段的时间间隔 在无火焰运行期间相互补偿。

公开(公告)号：US6098464A

公开(公告)日：2000-08-08

申请号：US77769

申请日：1998-06-03

申请人： Jean-Bernard Avisse ,  Jeanine Chiron

发明人： Jean-Bernard Avisse ,  Jeanine Chiron

IPC分类号： G01L9/04 ,  G01D3/028 ,  G01D3/036 ,  G01L1/22 ,  G01R17/10 ,  G01L19/04 ,  G01R27/04 ,  G01R27/08

CPC分类号： G01D3/036 ,  G01L1/2281 ,  G01R17/105

摘要： The output voltage of a Wheatstone bridge type electrical circuit compris four main resistances (J.sub.1 to J.sub.4) having substantially the same ohmic value, R, and substantially the same temperature coefficient of resistance, .alpha., is made independent of temperature differences existing between the branches of the bridge by addition, in each of the branches, of a compensation element (r.sub.1 to r.sub.4) in series with the main resistance, each compensation element being physically located very close to a main resistance situated in one of the adjacent branches of the bridge so as to have the same temperature as that main resistance. The compensation elements have the same ohmic value r and the same temperature coefficient of resistance .beta., with R.alpha.=r.beta., r being less than R and, preferably, r/R.ltoreq.1/2, so as to limit the loss of sensitivity of the Wheatstone bridge to variations in the resistances of the bridge.

摘要翻译： PCT No.PCT / FR96 / 01933 Sec。 371日期1998年6月3日第 102（e）1998年6月3日PCT 1996年12月4日PCT PCT。 公开号WO97 / 21083 日期：1997年6月12日由具有基本相同的欧姆值R和基本上相同的电阻温度系数α的四个主电阻（J1至J4）的惠斯通电桥型电路的输出电压独立于温差 存在于桥的分支之间，在每个分支中，与主电阻串联的补偿元件（r1至r4），每个补偿元件物理上位于非常靠近位于相邻的一个中的主电阻 桥的分支具有与该主电阻相同的温度。 补偿元件具有相同的欧姆值r和相同的电阻β的温度系数，其中Rα= rβ，r小于R，并且优选地，r / R i + E，fra 1/2 + EE， 以限制惠斯通电桥对于电桥电阻变化的敏感性损失。

公开(公告)号：US5987984A

公开(公告)日：1999-11-23

申请号：US38776

申请日：1998-03-11

申请人： Johannes Artzner ,  Wolfram Bauer

发明人： Johannes Artzner ,  Wolfram Bauer

IPC分类号： G01C19/5691 ,  G01C25/00 ,  G01D3/00 ,  G01D3/028 ,  G01D18/00 ,  G01P9/04

CPC分类号： G01C19/5691 ,  G01C25/005 ,  G01D18/00

摘要： A device which determines a motion parameter with a sensor having a plurality of sensor elements coupled to one another, in which the motion parameter corresponds to a rotational speed. The device includes a starter loop for putting the sensor in a state of excitation via a starter signal via at least one of the sensor elements and for generating a sensor quantity, with the sensor quantity being a measure of a response of the sensor to the starter signal, and the starter signal having a substantially constant amplitude. A detector loop coupled to at least one of the sensor elements is also provided in the device for providing a measurement signal correlating with the motion parameter. The device further includes an analysis unit for providing an output voltage representing the motion parameter as a function of the measurement signal, a correction unit for keeping a substantially constant correlation between the output voltage and the motion parameter and for generating a correction signal as a function of the sensor quantity, and a multiplier providing the correction signal to the analysis unit.

摘要翻译： 一种用传感器确定运动参数的装置，所述传感器具有彼此耦合的多个传感器元件，其中所述运动参数对应于转速。 该装置包括起动器回路，用于经由至少一个传感器元件经由起动器信号将传感器置于激励状态，并且用于产生传感器量，传感器量是传感器对起动器的响应的量度 信号和启动信号具有基本恒定的振幅。 耦合到至少一个传感器元件的检测器环路也设置在该装置中，用于提供与运动参数相关的测量信号。 该装置还包括分析单元，用于提供表示作为测量信号的函数的运动参数的输出电压;校正单元，用于在输出电压和运动参数之间保持基本上恒定的相关性，并用于产生作为函数的校正信号 以及向分析单元提供校正信号的乘法器。

公开(公告)号：US5907426A

公开(公告)日：1999-05-25

申请号：US884661

申请日：1997-06-27

申请人： Naohiko Kato ,  Hiroshi Ito ,  Tadashi Ichikawa ,  Tomoyoshi Motohiro ,  Tatsumi Hioki

发明人： Naohiko Kato ,  Hiroshi Ito ,  Tadashi Ichikawa ,  Tomoyoshi Motohiro ,  Tatsumi Hioki

IPC分类号： G01D3/028 ,  G01R15/24 ,  G01R29/08 ,  G02F1/01 ,  H04B10/145 ,  G02F1/035 ,  G02F1/055

CPC分类号： G02F1/0123 ,  G01D3/028 ,  G01R29/0885 ,  G01R15/241

摘要： A device for stabilizing a modulation operation of an optical modulator is provided, the optical modulator having an optical waveguide provided on a substrate and an electrode provided so as to correspond to the optical waveguide, modulating light inputted to the optical waveguide by a voltage corresponding to a physical amount to be measured which is inputted to the electrode, and outputting the modulated light. The device includes: an optical detecting device for outputting signal corresponding to intensity of light outputted from the optical modulator; a control signal outputting device for, on the basis of the output signal of the optical detecting device, outputting a control signal which compensates a phase bias fluctuation of the optical modulator; a light source device for outputting control light corresponding to the control signal; and a voltage applying device, provided in contact with the electrode of the optical modulator, for applying voltage corresponding to the control light to the electrode. Accordingly, the light source device illuminates to the voltage applying device a control light corresponding to a driving signal which negatively feeds back a phase bias fluctuation signal. In this way, the voltage applying device applies a voltage which is set so as to offset variation in phase bias fluctuation in accordance with bias fluctuation, and the phase bias fluctuation is offset.

摘要翻译： 提供一种用于稳定光调制器的调制操作的装置，所述光调制器具有设置在基板上的光波导和设置成对应于光波导的电极，将输入到光波导的光调制为对应于 输入到电极的要测量的物理量，并输出调制光。 该装置包括：光检测装置，用于输出对应于从光调制器输出的光强度的信号; 控制信号输出装置，用于根据光学检测装置的输出信号输出补偿光调制器的相位偏差波动的控制信号; 光源装置，用于输出对应于控制信号的控制光; 以及电压施加装置，与光调制器的电极接触，用于将对应于控制光的电压施加到电极。 因此，光源装置向电压施加装置照射与驱动信号对应的控制光，负极反馈相位偏差波动信号。 以这种方式，电压施加装置施加电压，该电压被设定为根据偏置波动来偏移相位偏差波动的变化，并且相位偏差波动被偏移。

公开(公告)号：US5897608A

公开(公告)日：1999-04-27

申请号：US863292

申请日：1997-05-27

申请人： Itoshi Yokoyama ,  Masaaki Nagai ,  Yoshimichi Sanada

发明人： Itoshi Yokoyama ,  Masaaki Nagai ,  Yoshimichi Sanada

IPC分类号： G01D3/028 ,  G01R1/44 ,  G01R31/28 ,  H04N17/00 ,  G01R35/00

CPC分类号： G01R1/44 ,  H04N17/00 ,  G01R31/2839 ,  Y10S348/909

摘要： A compensating method and apparatus is provided which collectively compensates for variations in a variety of characteristics in respective circuit portions of a signal processing circuit. A correction data generator is provided for generating correction value data for correction to be made for an output signal of the signal processing circuit, in order to compensate for variations in the characteristics of the at least one circuit portion. Also, a compensator is connected to receive an output signal from the signal processing circuit as well as to receive the correction value data from the correction data generating means, for correcting the output signal in accordance with the respective correction value data corresponding to the at least one circuit portion to generate a compensated output signal.

摘要翻译： 提供了一种补偿方法和装置，其一起补偿信号处理电路的各个电路部分中的各种特性的变化。 为了补偿至少一个电路部分的特性的变化，提供校正数据发生器，用于产生用于对信号处理电路的输出信号进行校正的校正值数据。 此外，补偿器被连接以从信号处理电路接收输出信号，以及从校正数据产生装置接收校正值数据，用于根据与至少对应的各个校正值数据校正输出信号 一个电路部分，用于产生经补偿的输出信号。

公开(公告)号：US5844427A

公开(公告)日：1998-12-01

申请号：US806905

申请日：1997-02-26

申请人： Ulrich Theus ,  Mario Motz

发明人： Ulrich Theus ,  Mario Motz

IPC分类号： G01D3/028 ,  G01D3/02 ,  G01D5/14 ,  G01R33/06

CPC分类号： G01D3/02 ,  G01D5/142

摘要： A monolithic integrated sensor circuit is disclosed comprising a sensor system for generating an electronic sensor signal; a supply unit for the sensor system; an amplifying stage for amplifying the sensor signal; a plurality of inverting devices in the signal path of the amplifying stage which reverse the polarity of the sensor signal at equal time intervals, the time intervals and inversion of the sensor signal being controlled by a clock signal source; and an averaging combiner stage whose input receives an amplified sensor signal and whose output has a reference polarity which is controlled by means of the inverting devices in such a way as to be always the same regardless of the switching state in the signal path. The monolithic integrated sensor circuit of the present invention minimizes the offset error.

摘要翻译： 公开了一种单片集成传感器电路，其包括用于产生电子传感器信号的传感器系统; 用于传感器系统的供应单元; 用于放大传感器信号的放大级; 放大级的信号路径中的多个反相器件以相等的时间间隔反转传感器信号的极性，传感器信号的时间间隔和反相由时钟信号源控制; 以及平均组合器级，其输入接收放大的传感器信号，并且其输出具有通过反相器件控制的参考极性，使得总是相同的方式，而不管信号路径中的开关状态如何。 本发明的单片集成传感器电路使偏移误差最小化。