公开(公告)号：US09964941B2

公开(公告)日：2018-05-08

申请号：US14907980

申请日：2015-05-06

申请人： Aleader Vision Technology Co., Ltd.

发明人： Tao Liu ,  Zhenbin Jiang ,  Hengchang Wen ,  Wenkai Xu

IPC分类号： G05B13/02 ,  G05B13/04 ,  G05B19/402 ,  G05B19/404

CPC分类号： G05B19/402 ,  G05B19/404 ,  G05B2219/37506 ,  G05B2219/37558 ,  G05B2219/49368

摘要： Disclosed are a method, a device and a system for improving system accuracy of an X-Y motion platform, and the method includes: taking a picture of a preset calibration board synchronously as a controlled equipment on an X-Y motion platform moves, and analyzing the picture to obtain pixel coordinates of a calibration point in the picture, where the preset calibration board is taken as a reference; acquiring actual coordinates of the calibration point on the calibration board, and calculating actual position coordinates of the controlled equipment on the X-Y motion platform from the actual coordinates and the pixel coordinates of the calibration point; and adjusting a motion control system of the X-Y motion platform according to the actual position coordinates, to control the motion of the X-Y motion platform to perform motion compensation for the controlled equipment. With the technical solution of the invention, the system accuracy can be improved, and the requirements for assembly and device selection can be reduced.

公开(公告)号：US20160176004A1

公开(公告)日：2016-06-23

申请号：US14959214

申请日：2015-12-04

申请人： Okuma Corporation

发明人： Masashi MIYAJI

IPC分类号： B23Q15/013 ,  G05B19/19 ,  B23Q15/12

CPC分类号： B23Q15/013 ,  B23Q15/12 ,  G05B19/404 ,  G05B2219/37506 ,  G05B2219/49168 ,  Y02P90/265

摘要： A position controller includes a position detector, a speed command operator, a first adder, a torque command operator, a second adder, a drive unit, a runout amount correcting device, and a third adder. The runout amount correcting device is configured to employ a value related to deviation between a command value and a detection value in physical quantity of a movable part as a reference signal. The runout amount correcting device is configured to calculate a position correction amount from rotation angle information of the main spindle and the reference signal. The runout amount correcting device is configured to estimate a runout amount of a cutting edge of the tool from the reference signal. The runout amount correcting device is configured to calculate the position correction amount such that influences of the respective cutting edges appearing in the reference signal are leveled.

摘要翻译： 位置控制器包括位置检测器，速度指令运算器，第一加法器，转矩指令运算符，第二加法器，驱动单元，跳动量校正装置和第三加法器。 跳动量校正装置被配置为使用与可移动部件的物理量中的命令值和检测值之间的偏差相关的值作为参考信号。 跳动量校正装置被配置为从主轴的旋转角度信息和参考信号计算位置校正量。 跳动量校正装置被配置为从参考信号估计工具的切削刃的跳动量。 跳动量校正装置被配置为计算位置校正量，使得出现在参考信号中的各个切削刃的影响被调平。

公开(公告)号：US09002503B2

公开(公告)日：2015-04-07

申请号：US13419817

申请日：2012-03-14

申请人： Tetsuya Matsushita

发明人： Tetsuya Matsushita

IPC分类号： B29C39/00 ,  G05B19/401

CPC分类号： G05B19/401 ,  G05B2219/37506 ,  G05B2219/50353 ,  Y10T409/305824

摘要： The present invention provides a method of computing a correction value for the machine tool having two or more translational axes and one or more rotational axes for correcting error in a position and an orientation of the tool with respect to a workpiece due to the geometric error. The method includes a rotational axis correction value computing step (S3) for computing a correction value for the rotational axis by use of a geometric parameter representing the geometric error, and a translational axis correction value computing step (S4) for computing a correction value for the translational axis by use of a command value for each of the rotational axes, a command value for each of the translational axes, and the geometric parameter.

摘要翻译： 本发明提供了一种用于计算具有两个或多个平移轴和一个或多个旋转轴的机床的校正值的方法，用于根据几何误差校正刀具相对于工件的位置和取向的误差。 该方法包括用于通过使用表示几何误差的几何参数来计算旋转轴的校正值的旋转轴校正值计算步骤（S3），以及用于计算修正值的平移轴校正值计算步骤（S4） 通过使用每个旋转轴的命令值的平移轴，每个平移轴的命令值和几何参数。

公开(公告)号：US20100166291A1

公开(公告)日：2010-07-01

申请号：US12664011

申请日：2008-06-11

申请人： Jong-Guk Lee

发明人： Jong-Guk Lee

IPC分类号： G06K9/62 ,  G01R35/00 ,  G06F19/00

CPC分类号： G05B19/402 ,  G01R31/2891 ,  G05B2219/37506 ,  G05B2219/37555 ,  G05B2219/45031

摘要： Provided is an error measurement and correction device of a stage of a wafer prober. The error measurement and correction device includes a jig member, a vision module, a central processing unit, and an interface unit. The jig member is disposed on a chuck on the stage, and the vision module is disposed on an upper plate of the wafer prober disposed at a position facing the jig member to enable the camera of the vision module to acquire images of the patterns of the jig member and transmits the acquired images to the central processing unit. The central processing unit acquires images of the patterns of the jig member disposed on the chuck by using the vision module to extract reference position information, moves the stage at a unit interval of the pattern, acquires images of the patterns of the jig member again to extract measured position information, and generates and stores mapping data by calculating difference between the measured position information and the reference position information. The central processing unit corrects the movement position information on the stage to be moved by using the mapping data when the stage is moved, so that irrespective of physical deterioration of the stage, the stage can be moved to an accurate position.

摘要翻译： 提供了晶片探测器的阶段的误差测量和校正装置。 误差测量和校正装置包括夹具构件，视觉模块，中央处理单元和接口单元。 夹具构件设置在台架上的卡盘上，并且视觉模块设置在设置在面向夹具构件的位置处的晶片探测器的上板上，以使得视觉模块的照相机能够获取图像的图像 将所获取的图像发送到中央处理单元。 中央处理单元通过使用视觉模块获取配置在卡盘上的夹具构件的图案的图像，提取基准位置信息，以图案的单位间隔移动台，再次获取夹具构件的图案的图像， 提取测量位置信息，并通过计算测量位置信息和参考位置信息之间的差异来生成并存储映射数据。 当舞台移动时，中央处理单元通过使用映射数据校正要移动的舞台上的移动位置信息，因此，不论舞台的物理劣化如何，舞台可以移动到准确的位置。

公开(公告)号：US20090230911A1

公开(公告)日：2009-09-17

申请号：US12403741

申请日：2009-03-13

申请人： Takayuki Kikuchi

发明人： Takayuki Kikuchi

IPC分类号： G05B15/02 ,  H02P8/32

CPC分类号： G05B5/01 ,  G05B19/23 ,  G05B2219/37506 ,  G05B2219/41326

摘要： An optical apparatus ensuring smooth driving control of an optical member is disclosed. The optical apparatus includes an optical member, a stepping motor configured to drive the optical member, a driving commander configured to generate driving pulses supplied to the stepping motor, a pulse count generator configured to count the driving pulses output from the driving commander, a position detector configured to detect a position of the optical member, and a pulse count presetter configured to replace, based on an output of the pulse count presetter and an output of the position detector, a pulse count output from the pulse count presetter with a pulse count corresponding to the output of the position detector.

摘要翻译： 公开了一种确保光学构件的平滑驱动控制的光学装置。 光学装置包括：光学构件;驱动光学构件的步进电机;驱动指令器，被配置为产生提供给步进电机的驱动脉冲;脉冲计数发生器，其对从驱动指令器输出的驱动脉冲进行计数， 检测器，其被配置为检测光学构件的位置;以及脉冲计数预设器，其被配置为基于脉冲计数预置器的输出和位置检测器的输出来替换脉冲计数预置器的脉冲计数，脉冲计数 对应于位置检测器的输出。

公开(公告)号：US07046367B2

公开(公告)日：2006-05-16

申请号：US11154130

申请日：2005-06-15

申请人： Henry A. Hill

发明人： Henry A. Hill

IPC分类号： G01B9/02

CPC分类号： G01B9/02007 ,  G01B9/02003 ,  G01B9/02059 ,  G01B9/02067 ,  G01B9/02083 ,  G01B2290/70 ,  G03F7/70725 ,  G03F7/70775 ,  G05B19/19 ,  G05B2219/37275 ,  G05B2219/37506 ,  G05B2219/41184

摘要： The invention features a method for determining non-linear cyclic errors in a metrology system that positions a measurement object under servo-control based on an interferometrically derived position signal. The method includes: translating the measurement object under servo-control at a fixed speed; identifying frequencies of any oscillations in the position of measurement object as it is translated at the fixed speed; and determining amplitude and phase coefficients for sinusoidal components at the identified frequencies which when combined with the position signal suppress the oscillations. The invention also features a method for positioning a measurement object under servo-control based on an interferometrically derived position signal indicative of a position for the measurement object. This method includes: generating a compensated position signal based on the interferometrically derived position signal and at least one correction term that has a sinusoidal dependence on the position of the measurement object; and repositioning the measurement object based on the compensated position signal and a desired position for the measurement object.

公开(公告)号：US20040189998A1

公开(公告)日：2004-09-30

申请号：US10819257

申请日：2004-04-05

申请人： Zygo Corporation, a Delaware corporation

发明人： Henry A. Hill

IPC分类号： G01B009/02

CPC分类号： G01B9/02007 ,  G01B9/02003 ,  G01B9/02059 ,  G01B9/02067 ,  G01B9/02083 ,  G01B2290/70 ,  G03F7/70725 ,  G03F7/70775 ,  G05B19/19 ,  G05B2219/37275 ,  G05B2219/37506 ,  G05B2219/41184

摘要： The invention features a method for determining non-linear cyclic errors in a metrology system that positions a measurement object under servo-control based on an interferometrically derived position signal. The method includes: translating the measurement object under servo-control at a fixed speed; identifying frequencies of any oscillations in the position of measurement object as it is translated at the fixed speed; and determining amplitude and phase coefficients for sinusoidal components at the identified frequencies which when combined with the position signal suppress the oscillations. The invention also features a method for positioning a measurement object under servo-control based on an interferometrically derived position signal indicative of a position for the measurement object. This method includes: generating a compensated position signal based on the interferometrically derived position signal and at least one correction term that has a sinusoidal dependence on the position of the measurement object; and repositioning the measurement object based on the compensated position signal and a desired position for the measurement object.

公开(公告)号：US6030154A

公开(公告)日：2000-02-29

申请号：US100618

申请日：1998-06-19

申请人： Jonathan C. Whitcomb ,  David E. Houser ,  Pamela Lulkoski

发明人： Jonathan C. Whitcomb ,  David E. Houser ,  Pamela Lulkoski

IPC分类号： G05B19/19 ,  H05K3/00 ,  H05K3/46 ,  B23B35/00 ,  G06F19/00

CPC分类号： H05K3/4638 ,  G05B19/19 ,  G05B2219/36404 ,  G05B2219/37506 ,  G05B2219/37569 ,  G05B2219/45035 ,  G05B2219/50071 ,  H05K2203/163 ,  H05K3/0008 ,  H05K3/0047 ,  Y10T408/03 ,  Y10T408/05 ,  Y10T408/08

摘要： A method and apparatus for optimizing the drilling position of a multi-layer printed circuit board prior to drilling. Each board is x-rayed to determine location coordinates information of the inner layers of multi layer circuit board panels. An optimization process determines optimal locations for drilling. The board is then drilled according to the optimized coordinates. By minimizing misregistration between the drilled holes and inner layers of the multi layer semiconductor circuit board, the present invention reduces a significant cause of scrap to the circuit board industry as well as removing a major impediment to further increasing circuit density and wireability.

摘要翻译： 一种用于在钻孔之前优化多层印刷电路板的钻孔位置的方法和装置。 每个板被x射线以确定多层电路板面板内层的位置坐标信息。 优化过程确定钻井的最佳位置。 然后根据优化的坐标钻出板。 通过最小化多层半导体电路板的钻孔和内层之间的配准不足，本发明减少了对电路板工业的废料的重大原因，并且消除了进一步增加电路密度和可线性的主要障碍。

公开(公告)号：US5305241A

公开(公告)日：1994-04-19

申请号：US757462

申请日：1991-09-10

申请人： Yasukazu Hayashi ,  Shinji Shibata

发明人： Yasukazu Hayashi ,  Shinji Shibata

IPC分类号： G01B21/00 ,  G01D5/244 ,  G01D5/245 ,  G05B19/33 ,  G06F15/46

CPC分类号： G01D5/24452 ,  G01D5/2449 ,  G05B19/33 ,  G05B2219/34048 ,  G05B2219/34215 ,  G05B2219/37473 ,  G05B2219/37506

摘要： Position detection data having large sized data quantities are arranged into small-sized data by converting the data into several periodic components using Fourier series expansion. Therefore, regardless of the resolution of a position detector, the position detector error data can be stored in a small-sized non-volatile memory having a small capacity. Further, since noise does not have a periodic property, it is possible to remove or omit the noise component yielded in the measurement by a filter effect when the Fourier expansion is carried out.

摘要翻译： 具有大尺寸数据量的位置检测数据通过使用傅立叶级数展开将数据转换成若干周期分量而被排列成小尺寸数据。 因此，无论位置检测器的分辨率如何，位置检测器误差数据都可以存储在具有小容量的小尺寸非易失性存储器中。 此外，由于噪声不具有周期性，因此当进行傅里叶展开时，可以通过滤波器效应去除或省略测量中产生的噪声分量。