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48 条记录 (耗时 0.046 秒)

    Method and apparatus for observing inside structures, and specimen holder
    21.
    发明申请
    Method and apparatus for observing inside structures, and specimen holder 有权
    用于观察内部结构和试样架的方法和装置

    公开(公告)号：US20050061971A1

    公开(公告)日：2005-03-24

    申请号：US10912148

    申请日：2004-08-06

    申请人： Shohei Terada ,  Kazutoshi Kaji ,  Shigeto Isakozawa

    发明人： Shohei Terada ,  Kazutoshi Kaji ,  Shigeto Isakozawa

    IPC分类号： G01N23/04 ,  G01N23/00 ,  G01N23/225 ,  H01L21/66

    CPC分类号： H01J37/20 ,  G01N23/2251 ,  G01N23/2252 ,  H01J37/26 ,  H01J2237/2008 ,  H01J2237/206 ,  H01J2237/2802

    摘要： An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.

    摘要翻译： 本发明的目的是提供一种用于观察内部结构和样本保持器的方法和装置，其中可以使用相同的样本在相同的视野中跟踪良好样本的老化劣化到不良样本，以便确定 失败的机制。 本发明是用于观察内部结构的方法。 该方法包括用从粒子束源产生的粒子束照射样本，检测由样本透射的透射粒子，向样本的一部分施加电压，并观察施加电压的透射粒子的检测状态 部分。

    Method and apparatus for scanning transmission electron microscopy
    22.
    发明授权
    Method and apparatus for scanning transmission electron microscopy 失效
    扫描透射电子显微镜的方法和装置

    公开(公告)号：US06531697B1

    公开(公告)日：2003-03-11

    申请号：US09259334

    申请日：1999-03-01

    申请人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

    发明人： Kuniyasu Nakamura ,  Hiroshi Kakibayashi ,  Mikio Ichihashi ,  Shigeto Isakozawa ,  Yuji Sato ,  Takahito Hashimoto

    IPC分类号： H01J3700

    CPC分类号： H01J37/1471 ,  H01J37/28 ,  H01J2237/2802

    摘要： A scanning transmission electron microscope (STEM) has an electron source for generating a primary electron beam and an electron illuminating lens system for converging the primary electron beam from the electron source onto a specimen for illumination. An electron deflecting system is provided for scanning the specimen with the primary electron beam. The STEM also has a scattered electron detector for detecting scattered electrons transmitted through the specimen. A projection lens system projects the scattered electrons onto a detection surface of the scattered electron detector. An image displaying device displays the scanning transmission electron microscope image of the specimen using a detection signal from the scattered electron detector. A detection angle changing device for establishes the range of the scattering angle of the scattered electrons detected by the scattered electron detector. This structure enhances the contrast of a desired portion of the specimen under observation for a scanning transmitted image by selective establishment of detection angle ranges for the scattered electron detector.

    摘要翻译： 扫描透射电子显微镜（STEM）具有用于产生一次电子束的电子源和用于将来自电子源的一次电子束聚焦到用于照明的样本上的电子照明透镜系统。 提供电子偏转系统用于用一次电子束扫描样本。 STEM还具有散射电子检测器，用于检测通过样品传播的散射电子。 投影透镜系统将散射的电子投射到散射电子检测器的检测表面上。 图像显示装置使用来自散射电子检测器的检测信号来显示样本的扫描透射电子显微镜图像。 一种用于确定由散射电子检测器检测的散射电子的散射角的范围的检测角度改变装置。 该结构通过选择性地建立散射电子检测器的检测角度范围，增强了扫描透射图像观察下的样本的期望部分的对比度。

    Focusing apparatus used in a transmission electron microscope
    24.
    发明授权
    Focusing apparatus used in a transmission electron microscope 失效
    用于透射电子显微镜的聚焦装置

    公开(公告)号：US4698503A

    公开(公告)日：1987-10-06

    申请号：US821454

    申请日：1986-01-22

    申请人： Setsuo Nomura ,  Morioki Kubozoe ,  Shigeto Isakozawa

    发明人： Setsuo Nomura ,  Morioki Kubozoe ,  Shigeto Isakozawa

    IPC分类号： H01J37/21 ,  H01J37/26

    CPC分类号： H01J37/21 ,  H01J37/265

    摘要： A focus control system used in a transmission electron microscope includes an electron lens for imaging the electron beam transmitted through a specimen onto the imaging plate, apparatus for deflecting the electron beam irradiation angle, and several electron beam sensors disposed of the imaging plane. Output signals produced by each sensor at two irradiation angles are integrated and stored in the memory separately. The difference between each pair of integrated values in the memory is calculated, and all differences for all sensor output pairs are summed up. The lens current of the electron lens is controlled so that the summed output is a minimum value.

    摘要翻译： 在透射电子显微镜中使用的聚焦控制系统包括用于将通过样本透射的电子束成像到成像板上的电子透镜，用于偏转电子束照射角度的装置和设置在成像平面上的几个电子束传感器。 由两个照射角度的每个传感器产生的输出信号被分离存储在存储器中。 计算存储器中每对积分值之间的差异，并且总结所有传感器输出对的所有差异。 控制电子透镜的透镜电流，使得相加的输出为最小值。

    Electron beam control device for electron microscopes
    25.
    发明授权
    Electron beam control device for electron microscopes 失效
    电子显微镜用电子束控制装置

    公开(公告)号：US4451737A

    公开(公告)日：1984-05-29

    申请号：US391917

    申请日：1982-06-24

    申请人： Shigeto Isakozawa

    发明人： Shigeto Isakozawa

    IPC分类号： H01J37/04 ,  H01J37/26

    CPC分类号： H01J37/265 ,  H01J37/26

    摘要： An electron beam control device for electron microscopes is disclosed in which various digital signals used for deflecting an electron beam are previously stored in a memory for each observation mode. When one of the observation modes is specified by a selector, one of the digital signals corresponding to the specified observation mode is read out from the memory to a digital-to-analog converter and is thereby converted into an analog signal.The analog signal is supplied to electron beam deflectors to control the beam alignment.

    摘要翻译： 公开了一种用于电子显微镜的电子束控制装置，其中用于偏转电子束的各种数字信号预先存储在每个观察模式的存储器中。 当其中一个观察模式由选择器指定时，对应于指定的观察模式的数字信号之一从存储器读出到数 - 模转换器，从而被转换为模拟信号。 模拟信号被提供给电子束偏转器以控制光束对准。

    Method and Apparatus for Observing Inside Structures, and Specimen Holder
    26.
    发明申请
    Method and Apparatus for Observing Inside Structures, and Specimen Holder 有权
    观察内部结构的方法和装置以及试样支架

    公开(公告)号：US20090302234A1

    公开(公告)日：2009-12-10

    申请号：US12329661

    申请日：2008-12-08

    申请人： Shohei Terada ,  Kazutoshi Kaji ,  Shigeto Isakozawa

    发明人： Shohei Terada ,  Kazutoshi Kaji ,  Shigeto Isakozawa

    IPC分类号： G21K5/10 ,  G21K7/00

    CPC分类号： H01J37/20 ,  G01N23/2251 ,  G01N23/2252 ,  H01J37/26 ,  H01J2237/2008 ,  H01J2237/206 ,  H01J2237/2802

    摘要： An object of the invention is to provide a method and apparatus for observing inside structures and a specimen holder, wherein aging degradation of a good sample to a bad sample can be tracked in the same field of view, using the same specimen in order to determine the mechanism of failure. The present invention is a method for observing inside structures. The method comprises irradiating a specimen with a corpuscular beam generated from a corpuscular beam source, detecting transmitted particles transmitted by the specimen, applying a voltage to a portion of the specimen, and observing of a detection status of the transmitted particles in the voltage-applied portion as needed.

    摘要翻译： 本发明的目的是提供一种用于观察内部结构和样本保持器的方法和装置，其中可以使用相同的样本在相同的视野中跟踪良好样本的老化劣化到不良样本，以便确定 失败的机制。 本发明是用于观察内部结构的方法。 该方法包括用从粒子束源产生的粒子束照射样本，检测由样本透射的透射粒子，向样本的一部分施加电压，并观察施加电压的透射粒子的检测状态 部分。

    Charged particle system and a method for measuring image magnification
    27.
    发明授权
    Charged particle system and a method for measuring image magnification 有权
    带电粒子系统和测量图像放大倍数的方法

    公开(公告)号：US07372047B2

    公开(公告)日：2008-05-13

    申请号：US11038478

    申请日：2005-01-21

    申请人： Mitsugu Sato ,  Atsushi Takane ,  Shigeto Isakozawa ,  Takashi Iizumi ,  Tatsuya Maeda ,  Hiromi Inada

    发明人： Mitsugu Sato ,  Atsushi Takane ,  Shigeto Isakozawa ,  Takashi Iizumi ,  Tatsuya Maeda ,  Hiromi Inada

    IPC分类号： G21K5/00

    CPC分类号： H01J37/28 ,  H01J2237/2826

    摘要： A charged particle beam apparatus capable of automatically measuring an image magnification error of an apparatus and capable of automatically calibrating the image magnification in high precision is provided. To this end, while an image processing operation of either an auto-correlation function or an FFT transformation is employed with respect to a scanning image of a reference material having a periodic structure, the averaged pitch dimension of which is known, averaged periodic information owned by the scanning image is detected so as to measure an image magnification error of the apparatus. Also, the information as to the acquired image magnification error is fed back to an image magnification control means of the apparatus so as to automatically execute a calibration as to the image magnification in high precision.

    摘要翻译： 提供一种能够自动测量装置的图像放大误差并且能够以高精度自动校准图像放大率的带电粒子束装置。 为此，当对具有周期性结构的参考材料的扫描图像采用自相关函数或FFT变换的图像处理操作时，其平均间距尺寸已知，所拥有的平均周期信息 检测扫描图像以测量装置的图像放大误差。 此外，关于获取的图像放大误差的信息被反馈到装置的图像倍率控制装置，以便以高精度自动执行关于图像放大的校准。

    Micro manipulator
    29.
    发明授权
    Micro manipulator 失效
    微机械手

    公开(公告)号：US07146872B2

    公开(公告)日：2006-12-12

    申请号：US10214196

    申请日：2002-08-08

    申请人： Kazuhiro Morita ,  Motohide Ukiana ,  Kazuhiro Fujii ,  Shigeto Isakozawa ,  Hidemi Koike ,  Tamio Tanikawa

    发明人： Kazuhiro Morita ,  Motohide Ukiana ,  Kazuhiro Fujii ,  Shigeto Isakozawa ,  Hidemi Koike ,  Tamio Tanikawa

    IPC分类号： B25J17/00

    CPC分类号： B25J17/0266 ,  B25J7/00 ,  B25J9/0015 ,  Y10T29/53 ,  Y10T74/20335 ,  Y10T74/20341

    摘要： Provision of a 3-DOF micro manipulator easy to operate and capable of executing accurate positioning, wherein the link mechanisms of the micro manipulator whose main operation is parallel 3-DOF operation are implemented by cutting, folding, and moding a sheet of metal plate. Base and end effector are connected by three link mechanisms. The three link mechanisms are manufactured by cutting and folding a flexible plate material, and are equipped with plate-like arm portions each having a spread in the axially peripheral direction of the end effector, with hinge portions that are formed longitudinally across each arm portion in order to function as revolving joints R, and with a hinge portion also formed at the middle position of the arm portion in order to function as revolving joints R. Also, a parallelogrammatic link is formed between one longitudinal end of the arm portion and the middle portion thereof in order to function as a prismatic joint pair P.

    摘要翻译： 提供易于操作并能够执行精确定位的3-DOF微操纵器，其中主操作是平行3自由度操作的微操纵器的连杆机构通过切割，折叠和模制一块金属板来实现。 基本和末端执行器通过三个连杆机构连接。 三连杆机构通过切割和折叠柔性板材来制造，并且配备有在端部执行器的轴向周向方向上具有扩展的板状臂部分，铰链部分纵向跨越每个臂部分形成 为了作为旋转接头R起作用，并且铰链部分也形成在臂部分的中间位置，以起到旋转接头R.而且，臂部分的一个纵向端部与中间部分之间形成一个平行四边形连杆 部分，以便作为棱柱形接头对P.