SEMICONDUCTOR DEVICES AND METHODS FOR FABRICATING THE SAME

    公开(公告)号:US20190214391A1

    公开(公告)日:2019-07-11

    申请号:US16053315

    申请日:2018-08-02

    Abstract: A semiconductor device includes a substrate that includes a cell region and a peripheral circuit region, a cell insulating pattern disposed in the cell region of the substrate that defines a cell active region, and a peripheral insulating pattern disposed in the peripheral circuit region of the substrate that defines a peripheral active region. The peripheral insulating pattern includes a first peripheral insulating pattern having a first width and a second peripheral insulating pattern having a second width greater than the first width. A topmost surface of at least one of the first peripheral insulating pattern and the second peripheral insulating pattern is positioned higher than a topmost surface of the cell insulating pattern.

    Semiconductor device
    22.
    发明授权

    公开(公告)号:US12218212B2

    公开(公告)日:2025-02-04

    申请号:US18496336

    申请日:2023-10-27

    Abstract: A semiconductor device includes a gate stack including a gate insulating layer and a gate electrode on the gate insulating layer. The gate insulating layer includes a first dielectric layer and a second dielectric layer on the first dielectric layer, and a dielectric constant of the second dielectric layer is greater than a dielectric constant of the first dielectric layer. The semiconductor device also includes a first spacer on a side surface of the gate stack, and a second spacer on the first spacer, wherein the second spacer includes a protruding portion extending from a level lower than a lower surface of the first spacer towards the first dielectric layer, and a dielectric constant of the second spacer is greater than the dielectric constant of the first dielectric layer and less than a dielectric constant of the first spacer.

    Semiconductor device
    26.
    发明授权

    公开(公告)号:US11545554B2

    公开(公告)日:2023-01-03

    申请号:US17406162

    申请日:2021-08-19

    Abstract: A semiconductor device includes a gate stack including a gate insulating layer and a gate electrode on the gate insulating layer. The gate insulating layer includes a first dielectric layer and a second dielectric layer on the first dielectric layer, and a dielectric constant of the second dielectric layer is greater than a dielectric constant of the first dielectric layer. The semiconductor device also includes a first spacer on a side surface of the gate stack, and a second spacer on the first spacer, wherein the second spacer includes a protruding portion extending from a level lower than a lower surface of the first spacer towards the first dielectric layer, and a dielectric constant of the second spacer is greater than the dielectric constant of the first dielectric layer and less than a dielectric constant of the first spacer.

    Semiconductor devices and methods for fabricating the same

    公开(公告)号:US11201156B2

    公开(公告)日:2021-12-14

    申请号:US16934874

    申请日:2020-07-21

    Abstract: A semiconductor device includes a substrate that includes a cell region and a peripheral circuit region, a cell insulating pattern disposed in the cell region of the substrate that defines a cell active region, and a peripheral insulating pattern disposed in the peripheral circuit region of the substrate that defines a peripheral active region. The peripheral insulating pattern includes a first peripheral insulating pattern having a first width and a second peripheral insulating pattern having a second width greater than the first width. A topmost surface of at least one of the first peripheral insulating pattern and the second peripheral insulating pattern is positioned higher than a topmost surface of the cell insulating pattern.

    SEMICONDUCTOR AND MANUFACTURING METHOD OF THE SAME

    公开(公告)号:US20210066305A1

    公开(公告)日:2021-03-04

    申请号:US16896470

    申请日:2020-06-09

    Abstract: A semiconductor device includes: an active region defined by a device isolation layer formed in a substrate; a word line configured to cross the active region, the word line extending in a first direction and being formed in the substrate; a bit line extending in a second direction perpendicular to the first direction on the word line; a first contact connecting the bit line to the active region; a first mask for forming the active region, the first mask being formed on the active region; and a second mask of which a height of a top surface thereof is greater than a height of a top surface of the active region, the second mask covering the word line, wherein the active region has a bar shape that extends to form an acute angle with respect to the first direction.

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