公开(公告)号：US11670732B2

公开(公告)日：2023-06-06

申请号：US17464299

申请日：2021-09-01

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Massimo Cataldo Mazzillo ,  Giovanni Condorelli

IPC: H01L31/107 ,  H01L31/18 ,  G01N21/75 ,  H01L27/146

CPC classification number: H01L31/1075 ,  G01N21/75 ,  H01L27/14643 ,  H01L31/18

Abstract: A device for detecting a chemical species, including a Geiger-mode avalanche diode, which includes a body of semiconductor material delimited by a front surface. The semiconductor body includes: a cathode region having a first type of conductivity, which forms the front surface; and an anode region having a second type of conductivity, which extends in the cathode region starting from the front surface. The detection device further includes: a sensitive structure arranged on the anode region and including at least one sensitive region, which has an electrical permittivity that depends upon the concentration of the chemical species; and a resistive region, arranged on the sensitive structure and electrically coupled to the anode region.

公开(公告)号：US11670730B2

公开(公告)日：2023-06-06

申请号：US16573941

申请日：2019-09-17

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Massimo Cataldo Mazzillo ,  Antonella Sciuto ,  Dario Sutera

IPC: H01L31/107 ,  H01L31/0224 ,  H01L31/18

CPC classification number: H01L31/107 ,  H01L31/022416 ,  H01L31/18

Abstract: An avalanche photodiode for detecting ultraviolet radiation, including: a silicon carbide body having a first type of conductivity, which is delimited by a front surface and forms a cathode region; an anode region having a second type of conductivity, which extends into the body starting from the front surface and contacts the cathode region; and a guard ring having the second type of conductivity, which extends into the body starting from the front surface and surrounds the anode region.

公开(公告)号：US11171255B2

公开(公告)日：2021-11-09

申请号：US16386170

申请日：2019-04-16

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Massimo Cataldo Mazzillo ,  Giovanni Condorelli ,  Lucio Renna

IPC: H01L31/14 ,  H01L27/144 ,  H01L31/024 ,  H01L31/0352 ,  H01L31/107 ,  G01J1/44 ,  H01L31/18 ,  G01J1/42

Abstract: A device for detecting a chemical species including a Geiger mode avalanche photodiode, which comprises a body of semiconductor material delimited by a front surface. The semiconductor body includes: a cathode region having a first type of conductivity, which forms the front surface; and an anode region having a second type of conductivity, which extends within the cathode region starting from the front surface. The detection device further includes: a dielectric region, which extends on the front surface; and a sensitive region, which is arranged on top of the dielectric region and electrically coupled to the anode region and has a resistance that depends upon the concentration of the chemical species.

公开(公告)号：US11049990B2

公开(公告)日：2021-06-29

申请号：US16535026

申请日：2019-08-07

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Massimo Cataldo Mazzillo ,  Valeria Cinnera Martino ,  Antonella Sciuto

IPC: H01L31/12 ,  H01L33/06 ,  H01L31/18 ,  H01L33/32 ,  H01L33/00 ,  H01L33/12 ,  H01L31/107 ,  H01L31/0376 ,  H01L33/34

Abstract: An optoelectronic device with a semiconductor body that includes: a bottom cathode structure, formed by a bottom semiconductor material, and having a first type of conductivity; and a buffer region, arranged on the bottom cathode structure and formed by a buffer semiconductor material different from the bottom semiconductor material. The optoelectronic device further includes: a receiver comprising a receiver anode region, which is formed by the bottom semiconductor material, has a second type of conductivity, and extends in the bottom cathode structure; and an emitter, which is arranged on the buffer region and includes a semiconductor junction formed at least in part by a top semiconductor material, different from the bottom semiconductor material.

公开(公告)号：US10797196B2

公开(公告)日：2020-10-06

申请号：US16386163

申请日：2019-04-16

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Massimo Cataldo Mazzillo ,  Valeria Cinnera Martino

IPC: H01L31/14 ,  H01L27/14 ,  H01L31/024 ,  H01L31/0216 ,  H01L31/107 ,  H01L31/18 ,  G01J1/44 ,  H01L31/0352 ,  H01L27/144

Abstract: A photodetector includes a Geiger mode avalanche photodiode, which includes a body of semiconductor material, which is delimited by a front surface. The avalanche photodiode further includes: a cathode region having a first type of conductivity, which forms the front surface; and an anode region having a second type of conductivity, which extends in the cathode region starting from the front surface. The photodetector further includes: a dielectric region, arranged on the front surface; a quenching resistor, which extends on the dielectric region, is electrically connected to the anode region, and is laterally spaced apart with respect to the anode region; and an optical-isolation region, which extends through the dielectric region and laterally delimits a portion of the dielectric region, the anode region extending underneath the portion of the dielectric region, the optical-isolation region being moreover interposed between the portion of the dielectric region and the quenching resistor.

公开(公告)号：US20180284090A1

公开(公告)日：2018-10-04

申请号：US15782626

申请日：2017-10-12

Applicant: STMicroelectronics S.R.L. ,  Consiglio Nazionale delle Ricerche - CNR

Inventor： Massimo Cataldo Mazzillo ,  Antonella Sciuto

IPC: G01N33/00 ,  G01N21/84 ,  H01L31/02 ,  H01L31/0232 ,  H01L31/101

CPC classification number: G01N33/0047 ,  G01N21/251 ,  G01N21/255 ,  G01N21/31 ,  G01N21/33 ,  G01N21/8422 ,  G01N27/4141 ,  G01N33/0031 ,  G01N33/0067 ,  H01L27/1443 ,  H01L31/02024 ,  H01L31/02327 ,  H01L31/1013 ,  H01L31/103

Abstract: An optoelectronic device for detecting volatile organic compounds is described, including a die with a semiconductor body, the die forming a MOSFET transistor and at least one photodiode. The optoelectronic device is optically couplable to an optical source that emits radiation with a spectrum at least partially overlapping the absorption spectrum range of the semiconductor body. The MOSFET transistor is planar and includes a gate region and a catalytic region that is arranged on the gate region such that, in the presence of a gas mixture including volatile organic compounds, the MOSFET transistor can be biased to generate an electrical signal indicating the overall concentration of the gas mixture. The photodiode generates a photocurrent that is a function of the concentration of one or more polycyclic aromatic hydrocarbons present in the gas mixture.

公开(公告)号：US09933301B2

公开(公告)日：2018-04-03

申请号：US14960131

申请日：2015-12-04

Applicant: STMicroelectronics S.R.L.

Inventor： Massimo Cataldo Mazzillo ,  Antonella Sciuto ,  Paolo Badalà

IPC: G01J1/42 ,  H01L27/146 ,  H01L31/101 ,  H01L31/108

CPC classification number: G01J1/429 ,  H01L27/14621 ,  H01L27/14683 ,  H01L31/1013 ,  H01L31/108

Abstract: An integrated electronic device for detecting the composition of ultraviolet radiation includes a cathode region formed by a semiconductor material with a first type of conductivity. A first anode region and a second anode region are laterally staggered with respect to one another and are set in contact with the cathode region. The cathode region and the first anode region form a first sensor. The cathode region and the second anode region form a second sensor. In a spectral range formed by the UVA band and by the UVB band, the first and second sensors have, respectively, a first spectral responsivity and a second spectral responsivity different from one another.

公开(公告)号：US09899557B2

公开(公告)日：2018-02-20

申请号：US15045384

申请日：2016-02-17

Applicant: STMicroelectronics S.r.l.

Inventor： Anna Muscara' ,  Massimo Cataldo Mazzillo

IPC: H01L27/146 ,  H01L31/107 ,  H01L27/144 ,  H01L31/0232

CPC classification number: H01L31/107 ,  H01L27/1443 ,  H01L27/1446 ,  H01L31/02327

Abstract: An avalanche photodiode includes a cathode region and an anode region. A lateral insulating region including a barrier region and an insulating region surrounds the anode region. The cathode region forms a planar optical guide within a core of the cathode region, the guide being configured to guide photons generated during avalanche. The barrier region has a thickness extending through the planar optical guide to surround the core and prevent propagation of the photons beyond the barrier region. The core forms an electrical-confinement region for minority carriers generated within the core.

公开(公告)号：US09725308B2

公开(公告)日：2017-08-08

申请号：US14303522

申请日：2014-06-12

Applicant: STMicroelectronics S.r.l.

Inventor： Alfio Russo ,  Massimo Cataldo Mazzillo ,  Ferenc Nagy

IPC: G01H9/00 ,  B81C1/00 ,  G01H3/06

CPC classification number: B81C1/0015 ,  B81C2203/075 ,  G01H3/06 ,  G01H9/00

Abstract: A MEMS sensor has at least a movable element designed to oscillate at an oscillation frequency, and an integrated measuring system coupled to the movable element to provide a measure of the oscillation frequency. The measuring system has a light source to emit a light beam towards the movable element and a light detector to receive the light beam reflected back from the movable element, including a semiconductor photodiode array. In particular, the light detector is an integrated photomultiplier having an array of single photon avalanche diodes.

公开(公告)号：US09671351B2

公开(公告)日：2017-06-06

申请号：US14659038

申请日：2015-03-16

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Massimo Cataldo Mazzillo ,  Alfio Russo

IPC: G01N21/85 ,  G01N21/31 ,  G01N21/05 ,  H01L31/18 ,  H01L31/0216 ,  G01N21/61 ,  H01L31/00 ,  G01N21/33

CPC classification number: H01L27/1443 ,  G01M15/108 ,  G01N21/05 ,  G01N21/31 ,  G01N21/314 ,  G01N21/33 ,  G01N21/61 ,  G01N21/85 ,  G01N2021/3137 ,  G01N2021/8578 ,  G01N2201/0612 ,  H01L31/00 ,  H01L31/02162 ,  H01L31/0312 ,  H01L31/1035 ,  H01L31/1037 ,  H01L31/108 ,  H01L31/18 ,  H01L31/1812 ,  Y02E10/50

Abstract: An optical device for detecting a first chemical species and a second chemical species contained in a specimen, which includes: a first optical sensor, which may be optically coupled to an optical source through the specimen and is sensitive to radiation having a wavelength comprised in a first range of wavelengths; and a second optical sensor, which may be optically coupled to the optical source through the specimen and is sensitive to radiation having a wavelength comprised in a second range of wavelengths, different from the first range of wavelengths.