公开(公告)号：US20230215685A1

公开(公告)日：2023-07-06

申请号：US18000118

申请日：2021-05-25

Applicant: ASML Netherlands B.V.

Inventor： Yongxin WANG

IPC: H01J37/244 ,  H01J37/28

CPC classification number: H01J37/244 ,  H01J37/28 ,  H01J2237/2448

Abstract: A detector includes a plurality of sensing elements, section circuitry that communicatively couples a first set of sensing elements to an input of first signal processing circuitry, and a switch network that connects sets of sensing elements. Inter-element switches may connect adjacent sensing elements, including those in a diagonal direction. An output bus may be connected to each sensing element of the first set by a switching element. There may be a common output (pickup point) arranged at one sensing element that is configured to output signals from the first set. Various switching and wiring schemes are proposed. For example, the common output may be directly connected to the switch network. A switch may be provided between the output bus and first signal processing circuitry. A switch may be provided between the switch network and the first signal processing circuitry.

公开(公告)号：US20230170179A1

公开(公告)日：2023-06-01

申请号：US17922780

申请日：2021-04-23

Applicant: ASML Netherlands B.V.

Inventor： Yongxin WANG

IPC: H01J37/244 ,  G01N23/2206

CPC classification number: H01J37/244 ,  G01N23/2206 ,  G01N2223/507 ,  G01N2223/6116 ,  H01J2237/2441 ,  H01J2237/24495 ,  H01J2237/24521 ,  H01J37/28

Abstract: A detector includes a set of sensing elements, first section circuitry communicatively coupling a first set of sensing elements to an input of first signal processing circuitry, second section circuitry communicatively coupling a second set of sensing elements to an input of second signal processing circuitry, and interconnection circuitry communicatively coupling an output of the first signal processing circuitry to an output of the second signal processing circuitry. The interconnection circuitry may include an interconnection layer having interconnection switching elements communicatively coupled to outputs of analog signal paths of the detector. Interconnection switching elements may communicatively couple the outputs of adjacent analog signal paths. The detector may also include signal processing circuitry that includes a plurality of converters. The interconnection circuitry may be configured to selectively couple outputs of the first and second signal processing circuitry to the converters.

公开(公告)号：US20230123152A1

公开(公告)日：2023-04-20

申请号：US17970469

申请日：2022-10-20

Applicant: ASML NETHERLANDS B.V.

Inventor： Yongxin WANG ,  Zhonghua DONG ,  Rui-Ling LAI ,  Kenichi KANAI

IPC: H01J37/244 ,  G01T1/24 ,  H01J37/28 ,  H01J37/285 ,  H01L31/08

Abstract: A detector may be provided with an array of sensing elements. The detector may include a semiconductor substrate including the array, and a circuit configured to count a number of charged particles incident on the detector. The circuit of the detector may be configured to process outputs from the plurality of sensing elements and increment a counter in response to a charged particle arrival event on a sensing element of the array. Various counting modes may be used. Counting may be based on energy ranges. Numbers of charged particles may be counted at a certain energy range and an overflow flag may be set when overflow is encountered in a sensing element. The circuit may be configured to determine a time stamp of respective charged particle arrival events occurring at each sensing element. Size of the sensing element may be determined based on criteria for enabling charged particle counting.

公开(公告)号：US20220393057A1

公开(公告)日：2022-12-08

申请号：US17774130

申请日：2020-10-30

Applicant: ASML NETHERLANDS B.V.

Inventor： Yongxin WANG

IPC: H01L31/115 ,  H01J37/244 ,  H01L31/0203 ,  H01L31/02 ,  H01L23/00

Abstract: A charged particle beam system may include a detector. A package for a detector may have a package body that includes two sets of pins, each of the sets of pins including two pins. Each pin of the sets of pins may be configured to be connected to one of two terminals of a sensing element. Pins of different sets may be configured to be connected to a different one of the two terminals of the diode. The sets of pins may be arranged with a symmetry such that magnetic fields generated when current passes through the sets of pins is reduced due to the symmetry.

公开(公告)号：US20200286708A1

公开(公告)日：2020-09-10

申请号：US16652398

申请日：2018-09-28

Applicant: ASML Netherlands B.V.

Inventor： Joe WANG ,  Yongxin WANG ,  Zhong-wei CHEN ,  Xuerang HU

IPC: H01J37/244 ,  H01J37/28

Abstract: A multi-cell detector may include a first layer having a region of a first conductivity type and a second layer including a plurality of regions of a second conductivity type. The second layer may also include one or more regions of the first conductivity type. The plurality of regions of the second conductivity type may be partitioned from one another by the one or more regions of the first conductivity type of the second layer. The plurality of regions of the second conductivity type may be spaced apart from one or more regions of the first conductivity type in the second layer. The detector may further include an intrinsic layer between the first and second layers.